Light beam combining module, semiconductor laser pumping source and semiconductor laser

Abstract

The utility model relates to the technical field of semiconductor lasers, and provides a light beam combining module, a semiconductor laser pumping source and a semiconductor laser. The light beam combining module comprises a steering compression assembly and a beam combining device, two kinds of displacement light beams which are not at the same horizontal height are generated through the steering compression assembly, and when the light beam combining module is applied to a pumping source, the expansion difficulty of the number of collimation light path groups can be reduced, so that a semiconductor laser module can introduce more inclined pumping light beams, and the pumping efficiency is improved. Therefore, even if the number of the collimation light path groups is increased, the possibility of forming beam combination in space is ensured, and the power potential of the semiconductor laser pumping source is greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor lasers, in particular to a beam combining module, a semiconductor laser pump source and a semiconductor laser. Background Art

[0002] Currently, most single-electrode semiconductor lasers use a stepped structure, meaning the chips are placed in staggered configurations, with the centers of the chips not all at the same height. To achieve this, the housing features evenly spaced steps, with a laser diode chip mounted on each step. This structure requires strict control over step spacing and parallelism during chip assembly, resulting in high manufacturing costs.

[0003] Furthermore, the height difference between the steps can lead to uneven heat dissipation of the chip, which in turn affects the chip's light output. Furthermore, the inevitable machining tolerances of the steps can affect the assembly and adjustment of optical components. Furthermore, to meet the current demand for increased industrial semiconductor power, the number of single-tube chips in the seed source will also increase, which will reduce the spacing between the steps and further exacerbate the existing heat dissipation issues in the housing.

[0004] To address this problem, some existing technologies use methods such as using a deflected optical path to separate the light beams spatially and correcting the direction of the optical path after combining the beams to reduce the frequency of step application.

[0005] In most solutions, optical deflection elements such as wedge prisms or multiple mirrors are usually tilted to correct the direction of the light path after beam combining. This method has very high requirements on the tilt angle of the wedge prisms and mirrors during coupling debugging, requires high-precision processing, and is difficult to install and adjust. Usually, two or more optical deflection elements need to be tilted at the same time to achieve the purpose of adjusting the light path. Utility Model Content

[0006] The utility model provides a beam combining module, a semiconductor laser pump source and a semiconductor laser, which are used to solve the defects in the prior art.

[0007] A beam combining module includes a steering and compression component and a beam combining device. The steering and compression component is used to steer and compress tilted pump beams output by multiple collimated optical path groups, and the beam combining device is used to combine multiple steering and compressed pump beams.

[0008] In one embodiment, the steering compression assembly includes a rhombus prism and a plurality of reflective devices;

[0009] The rhombic prism is used to displace the inclined pump beam output by the standard straight optical path group in the vertical direction and make it parallel to the bottom plane where the beam combining module is located, thereby obtaining a first displaced beam;

[0010] Each reflector is disposed one-to-one in a transmission optical path of the tilted pump beam output by the non-standard straight optical path group, and is used to make the tilted pump beam output by the corresponding non-standard straight optical path group parallel to the bottom plate plane and deflect it to the output optical path plane of the rhombus prism to obtain a plurality of second shifted beams;

[0011] The beam combining device is arranged on the output light path of the rhombus prism and is used for combining the plurality of second shifted light beams with the first shifted light beam.

[0012] In one embodiment, the rhombus prism is a periscope rhombus prism, and the vertical cross-section is not asymmetric. The first reflecting surface in the periscope rhombus prism in the direction of light path transmission has a first angle with the light incident surface, and the second reflecting surface in the direction of light path transmission has a second angle with the light emitting surface, and the first angle is not equal to the second angle; the first reflecting surface and the second reflecting surface are arranged opposite to each other in the vertical direction, and the light incident surface is parallel to the light emitting surface.

[0013] In one embodiment, the relationship between the first angle and the second angle is determined based on the angle between the tilted pump beam output by the standard straight optical path group and the bottom plane of the beam combining module and the refractive index of the periscope rhombus prism.

[0014] In one embodiment, when the beam combining module is mounted on the bottom plate plane, the light incident surface of the rhombus prism and the light emitting surface of the rhombus prism are both perpendicular to the bottom plate plane.

[0015] In one embodiment, the reflective device includes a first reflector and a second reflector;

[0016] The highest point of the second reflector of a reflective device coincides with the lowest point of the first displaced light beam or the highest point is higher than the lowest point;

[0017] The lowest point of the second reflector of one reflective device coincides with the highest point of the second reflector of another adjacent reflective device, or the lowest point is lower than the highest point;

[0018] The first reflector is used to make the tilted pump beam output by the corresponding non-standard straight optical path group parallel to the bottom plate plane, and reflect the tilted pump beam output by the non-standard straight optical path group to the corresponding second reflector;

[0019] The second reflector is used to reflect the corresponding incident light beam to the incident surface of the beam combining device where the first shifted light beam is incident.

[0020] In one embodiment, the beam combining module includes a base for adjusting the installation height of the rhombus prism.

[0021] In one embodiment, the reflective device includes a third reflector, which is used to make the tilted pump beam output by the corresponding non-standard straight light path group parallel to the base plane, and reflect the tilted pump beam output by the non-standard straight light path group to the incident surface of the beam combining device adjacent to the incident surface of the first displaced beam.

[0022] According to another aspect of the present application, a semiconductor laser pump source is proposed, including the beam combining module of the above embodiment, the semiconductor laser pump source includes a plurality of collimated optical path groups, each collimated optical path group is used to output a collimated and inclined pump beam at a preset angle to the bottom plane of the beam combining module.

[0023] According to another aspect of the present application, a semiconductor laser is provided, comprising the beam combining module of the above embodiment.

[0024] Compared with the prior art, the present invention has the following beneficial effects:

[0025] The beam combining module provided by this utility model includes a steering and compression assembly and a beam combining device. The steering and compression assembly generates two types of displaced beams at different levels. When applied to a pump source, the beam combining module reduces the difficulty of expanding the number of collimated optical path groups, allowing the semiconductor laser module to introduce more tilted pump beams. This ensures the possibility of spatial beam combining even when the number of collimated optical path groups increases, significantly increasing the power potential of the semiconductor laser pump source. The semiconductor laser module features a simple structure and optical path, offering significant application advantages. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, for ordinary technicians in this field, other drawings can be obtained based on the drawings in the following description without any creative work.

[0027] Figure 1 This is the optical path diagram of the output beam obtained after the existing tilted stacked beam is incident on the right-angle wedge prism;

[0028] Figure 2 It is a structural schematic diagram of the semiconductor laser module provided by the present invention;

[0029] Figure 3 This is a schematic structural diagram of a periscope rhombic prism in a semiconductor laser module provided by the present invention;

[0030] Figure 4 Schematic diagram of the optical path of the periscope rhombic prism in the semiconductor laser module provided by the present invention;

[0031] Figure 5 Schematic diagram of the arrangement of the first reflector or the third reflector in the semiconductor laser module provided by the present invention;

[0032] Figure 6 This is a light path diagram of an off-axis reflector in a semiconductor laser module provided by the present invention;

[0033] Figure 7 This is one of the structural schematic diagrams of the semiconductor laser pump source provided by the present invention;

[0034] Figure 8 This is a side view optical path diagram of the semiconductor laser pump source provided by the present invention;

[0035] Figure 9 This is the second structural diagram of the semiconductor laser pump source provided by the present invention;

[0036] Figure 10 This is one of the schematic diagrams of the top view optical path of the semiconductor laser pump source provided by the present invention;

[0037] Figure 11 This is the third structural diagram of the semiconductor laser pump source provided by the present invention;

[0038] Figure 12 This is the second schematic diagram of the top view optical path of the semiconductor laser pump source provided by the present invention;

[0039] Figure 13 This is the fourth structural diagram of the semiconductor laser pump source provided by the present invention;

[0040] Figure 14 It is a schematic structural diagram of the laser provided by the present invention. DETAILED DESCRIPTION

[0041] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0042] Currently, most existing solutions use wedge prisms or tilt multiple reflectors to correct the direction of the light path after beam combination. Taking wedge prisms as an example, Figure 1 shown. Figure 1 The figure shows the optical path of the output beam after the tilted stacked beam is incident on the right-angle wedge prism.

[0043] As can be seen from the above, wedge-shaped prisms rely on the principle of refraction to control the direction of the combined light path, requiring high-precision processing of materials and angles. Furthermore, assembly and adjustment are complex. Furthermore, the electro-optical efficiency of the seed source with this structure is only 45%, which cannot meet current power requirements.

[0044] Based on this, an embodiment of the present invention provides a semiconductor laser module.

[0045] Figure 2 FIG. 1 is a schematic structural diagram of a semiconductor laser module provided in an embodiment of the present invention, as shown in FIG. Figure 2 As shown, the semiconductor laser module includes: a steering and compression component 1, a beam combining device 2 and a plurality of collimating optical path groups arranged on a bottom plate plane 0, and the steering and compression component 1 includes a rhombus prism 11 with an asymmetric vertical cross section and a plurality of reflective devices 12;

[0046] Each collimating optical path group 3 is used to output a collimated stacked pump beam having a preset angle with the bottom plate plane 0;

[0047] The rhombus prism 11 is disposed on the output optical path of the standard straight optical path group 31 and is used to displace the stacked pump beam output by the standard straight optical path group 31 in the vertical direction and parallel to the bottom plate plane, thereby obtaining a first displaced beam;

[0048] Each reflector 12 is disposed on a transmission optical path of the stacked pump beams output by the non-standard straight optical path group 32 except the standard straight optical path group 31, and is used to make the stacked pump beams output by the non-standard straight optical path group 32 parallel to the bottom plate plane and deflect them to the output optical path plane of the rhombus prism 11 to obtain a second displaced beam;

[0049] The beam combining device 2 is arranged on the output light path of the rhombus prism 11 and is used to combine the second shifted light beam with the first shifted light beam to obtain a beam combining result.

[0050] Specifically, the semiconductor laser module provided in an embodiment of the present invention can be a beam combining device for constructing a semiconductor laser pump source, which includes multiple collimating optical path groups, a steering compression component 1 and a beam combining device 2 arranged on the bottom plate plane 0 in sequence along the optical path direction.

[0051] The bottom plate plane O may be the upper surface of the bottom plate of the housing where the semiconductor laser assembly is located, and the bottom plate plane O may be a horizontal plane. The semiconductor laser module may be disposed in the housing, and the housing may be used to protect the semiconductor laser module.

[0052] The collimated optical path group may include a standard straight optical path group 31 and a non-standard straight optical path group 32, which are respectively deflected and compressed using different devices in the steering and compression assembly 1. The standard straight optical path group 31 and the non-standard straight optical path group 32 may each include one or more. The number of the standard straight optical path group 31 and the number of the rhombus prisms 11 in the steering and compression assembly 1 are equal, and the number of the non-standard straight optical path group 32 and the number of the reflective devices 12 in the steering and compression assembly 1 are equal. Figure 1 Only the case where the semiconductor laser module includes one standard straight optical path group 31 and one non-standard straight optical path group 32 is shown.

[0053] Each collimated optical path group can be used to output collimated stacked pump beams at a preset angle with the base plane. It can include multiple laser chips for generating initial pump beams, a collimating device for collimating each initial pump beam to produce a collimated pump beam, and a tilting element for adjusting the optical path direction of each collimated pump beam so that each collimated pump beam is stacked vertically and forms a preset angle with the base plane. Multiple laser chips can be placed side by side, and their corresponding collimating devices and tilting elements can also be placed side by side.

[0054] In order to reduce the size and volume of the semiconductor laser module, the tilting element may be a tilted reflective element, such as a tilted reflective mirror.

[0055] The rhombus prism 11 in the steering compression assembly 1 can be a tetrahedron, including a light incident surface, a light emitting surface and two reflecting surfaces opposite to each other in the vertical direction. The vertical cross-section formed by the light incident surface, the light emitting surface and the two reflecting surfaces has an asymmetric characteristic, that is, the angle between each reflecting surface and the adjacent light incident surface or light emitting surface is not equal. In this way, by setting the angle between each reflecting surface and the adjacent light incident surface or light emitting surface, the stacked pump light beams incident on different positions of the rhombus prism 11 can be emitted parallel to the bottom plate plane.

[0056] The rhombus prism 11 can be arranged on the output optical path of the standard straight optical path group 31 to cause the stacked pump light beam output by the standard straight optical path group 31 to be displaced in the vertical direction and parallel to the base plane, so as to eliminate the preset angle between the stacked pump light beam output by the standard straight optical path group 31 and the base plane, thereby obtaining a first displaced light beam.

[0057] To facilitate the adjustment of the height of the rhombus prism 11, the rhombus prism 11 can be set on a base, and the height of the base can be adaptively adjusted according to the stacking height of the stacked pump light beams output by the target standard straight light path group 31, thereby improving the flexibility of the rhombus prism 11 without increasing the difficulty of installation and debugging of the rhombus prism 11.

[0058] Since there is a preset angle between the stacked pump beam output by the standard straight optical path group 31 and the bottom plate plane, the stacked pump beam will be incident on different positions on the incident surface of the rhombus prism 11 when it is incident on the rhombus prism 11. Then, by reasonably setting the angle between the two reflecting surfaces in the rhombus prism 11 and the adjacent light incident surface or light output surface, the output first displaced beam can be controlled to be displaced in the vertical direction compared to the stacked pump beam and parallel to the bottom plate plane.

[0059] Here, the stacked pump beams are displaced in the vertical direction, and the first displaced beam may be displaced upward relative to the stacked pump beams.

[0060] Each reflector 12 is arranged on the transmission optical path of the stacked pump light beam output by the non-standard straight light path group 32 except the standard straight light path group 31, and is used to make the stacked pump light beam output by the non-standard straight light path group 32 parallel to the base plane, so as to eliminate the preset angle between the stacked pump light beam output by the non-standard straight light path group 32 and the base plane, and deflect it in the horizontal direction to the output optical path plane of the standard straight light path group 32, so as to obtain a second displaced light beam.

[0061] Here, the number of the second shifted light beams is equal to the number of the reflective elements 12 and the number of the collimating optical path groups. The output optical path plane of the collimating optical path group 32 is the vertical plane where the output optical path of the collimating optical path group 32 is located.

[0062] The first displaced light beam and the second displaced light beam are both parallel to the base plane. The second displaced light beam and the first displaced light beam can be both in the same vertical plane, that is, both in the output light path plane of the standard straight light path group 32, or in two vertical planes perpendicular to each other, that is, respectively in the output light path plane of the standard straight light path group 32 and in a vertical plane perpendicular to the output light path plane. No specific limitation is made here.

[0063] The reflector 12 can be either a single reflector or a reflector assembly consisting of two reflectors with opposing reflective surfaces, and this is not specifically limited here. It should be noted that since the reflector 12 is used to make the stacked pump beams output by the non-standard straight optical path assembly 32 parallel to the base plate plane O, when the reflector 12 is a single reflector, the plane on which the reflector resides has a certain angle with the base plate plane O. Similarly, when the reflector 12 is a reflector assembly consisting of two reflectors with opposing reflective surfaces, the plane on which one of the reflectors in the reflector assembly resides has a certain angle with the base plate plane O.

[0064] The beam combining device 2 can be a beam combining prism, which can be set on the output light path of the rhombus prism 11, so that the first displaced light beam can be directly incident on the incident surface of the beam combining device 2. Since the second displaced light beam has been deflected to the output light path plane of the rhombus prism 11, the second displaced light beam can be combined with the first displaced light beam through the beam combining device 2 to obtain a beam combining result.

[0065] Here, the first shifted light beam and the second shifted light beam may be incident on the same incident surface or different incident surfaces of the beam combiner 2. When the rhombus prism 11 includes multiple components, different first shifted light beams may be incident on the same incident surface or different incident surfaces of the beam combiner 2. When the reflector 12 includes multiple components, different second shifted light beams may also be incident on the same incident surface or different incident surfaces of the beam combiner 2.

[0066] Thereafter, the beam combination result can be focused as a semiconductor laser pump source, and the semiconductor laser pump source can be used to excite the working material in the resonant cavity to generate laser light.

[0067] The semiconductor laser module provided in an embodiment of the present invention includes: a steering compression assembly, a beam combining device, and multiple collimating optical path groups arranged on a base plane, wherein the steering compression assembly includes a rhombus prism with an asymmetric vertical cross-section and a plurality of reflective devices. The semiconductor laser module introduces a rhombus prism with an asymmetric vertical cross-section into the steering compression assembly, and through the principle of reflection, causes the stacked pump beams to be displaced in the vertical direction, thereby obtaining a first displaced beam parallel to the base plane. During subsequent coupling testing, the inclination angle requirement for the rhombus prism is relatively low, which can reduce the difficulty of subsequent coupling and debugging. Moreover, through the combination of the rhombus prism and the reflective device, two types of displaced beams are generated at different horizontal heights, thereby reducing the difficulty of expanding the number of collimating optical path groups, allowing the semiconductor laser module to introduce more stacked pump beams, ensuring the possibility of spatial beam combining even if the number of collimating optical path groups increases, and greatly improving the power potential of the semiconductor laser pump source. The semiconductor laser module has the characteristics of simple structure and simple optical path, and has great application advantages.

[0068] On the basis of the above embodiments, in the semiconductor laser module provided in the embodiments of the present invention, the rhombus prism is a periscope rhombus prism, a first angle is formed between a first reflection surface in the optical path transmission direction of the periscope rhombus prism and a light incident surface, a second angle is formed between a second reflection surface in the optical path transmission direction of the periscope rhombus prism and a light emitting surface, and the first angle is not equal to the second angle; the first reflection surface and the second reflection surface are arranged opposite to each other in the vertical direction, and the light incident surface is parallel to the light emitting surface.

[0069] Specifically, if Figure 3, which is a schematic structural diagram of a periscope rhombus prism, the periscope rhombus prism may include a light incident surface 111, a first reflection surface 112, a second reflection surface 113, and a light exiting surface 114, which are sequentially arranged along the light transmission direction. Figure 3 The middle light incident surface 111 is the left side, the first reflective surface 112 is the second surface from the top to the bottom, the second reflective surface 113 is the upper side, and the light emitting surface 114 is the right side.

[0070] The first reflecting surface 112 and the second reflecting surface 113 are disposed opposite to each other in the vertical direction.

[0071] The light incident surface 111 is parallel to the light emitting surface 114 , and both can be perpendicular to the bottom plate plane 0 or form a certain angle with the bottom plane, which is not specifically limited here.

[0072] A first angle is formed between the first reflecting surface 112 and the adjacent light incident surface 111, and a second angle is formed between the second reflecting surface 113 and the adjacent light emitting surface 114. The first angle and the second angle are not equal, and both can be acute angles or obtuse angles, which is determined according to actual conditions.

[0073] like Figure 4 Figure 1 shows the optical path of a periscope rhombus prism. The first angle α between the first reflective surface 112 and the light-incident surface 111 is α, and the second angle β between the second reflective surface 113 and the light-emitting surface 114 is β, with α≠β. This achieves asymmetry. By adjusting the first angle α and the second angle β, the stacked pump beams output by the standard straight optical path group can be made parallel to the base plane.

[0074] In this embodiment of the present invention, the first and second reflective surfaces of the periscope rhombus prism are arranged vertically opposite each other, which can cause the stacked pump beams output by the objective straight optical path group to be vertically displaced. By setting the first and second angles to be unequal, the vertical cross-section of the periscope rhombus prism is ensured to be asymmetric. Furthermore, by setting appropriate values ​​for the first and second angles, the stacked pump beams output by the objective straight optical path group can be made parallel to the base plane, ultimately outputting a first displaced beam.

[0075] On the basis of the above embodiments, the semiconductor laser module provided in the embodiments of the present invention can set the light incident surface 111 and the light emitting surface 114 in the periscope rhombus prism to be perpendicular to the bottom plate plane 0, which can facilitate the processing of the periscope rhombus prism and reduce the processing difficulty and cost.

[0076] Based on the above embodiments, in the semiconductor laser module provided in the embodiments of the present invention, the relationship between the first angle and the second angle is determined based on the angle between the stacked pump light beam output by the objective standard straight light path group and the base plane, and the refractive index of the periscope rhombus prism.

[0077] Specifically, the angle between the stacked pump beams output by the target standard straight optical path group and the bottom plate plane 0 can be recorded as θ1, and the refractive index of the periscope rhombus prism can be recorded as n1. After the stacked pump beams output by the target standard straight optical path group are incident on the rhombus prism, it can be determined that, while satisfying the laws of refraction and reflection, the stacked pump beams output by the target standard straight optical path group are displaced in the vertical direction and parallel to the bottom plate plane.

[0078] During this process, the relationship between the first and second angles is determined by the angle between the stacked pump beams output by the target standard straight optical path group and the base plane, as well as the refractive index of the periscope rhombus prism. It will be appreciated that since the position of the periscope rhombus prism is fixed, the angle between the stacked pump beams output by the target standard straight optical path group and the base plane is fixed, and thus the incident angle of the stacked pump beams output by the target standard straight optical path group on the light-entry surface of the periscope rhombus prism is also fixed.

[0079] In the embodiment of the present invention, the relationship between the first angle and the second angle can be determined by the angle between the stacked pump beams output by the standard straight optical path group and the bottom plate plane and the refractive index of the periscope rhombus prism. The principle is simple and easy to calculate.

[0080] Among them, α is the first angle, β is the second angle, n0 is the refractive index of air, n1 is the refractive index of the periscope rhombus prism, and θ1 is the angle between the stacked pump beam output by the standard straight optical path group and the bottom plate plane.

[0081] Specifically, if Figure 4 As shown, when the light incident surface 111 and the light emitting surface 114 of the periscope rhombus prism are both perpendicular to the bottom plate plane, the incident angle of the stacked pump beam output by the standard straight optical path group on the light incident surface 111 and the angle between the stacked pump beam output by the standard straight optical path group and the bottom plate plane are equal, both being θ1.

[0082] In the embodiment of the present invention, a specific quantitative relationship between the first angle and the second angle is given, which can facilitate the rapid design of a periscope rhombus prism that meets the requirements.

[0083] On the basis of the above embodiment, in the semiconductor laser module provided in the embodiment of the present invention, the multiple collimated optical path groups include the target standard straight optical path group and the first non-target standard straight optical path group; the reflective device corresponding to the first non-target standard straight optical path group includes a first reflector and a second reflector;

[0084] The first reflector is used to make the stacked pump beam output by the first non-standard straight optical path group parallel to the bottom plate plane, and reflect the stacked pump beam output by the first non-standard straight optical path group to the second reflector;

[0085] The highest point of the second reflector coincides with the lowest point of the first displaced light beam or the highest point is lower than the lowest point;

[0086] The second reflector is used to reflect the incident light beam to the beam combining device.

[0087] Specifically, the semiconductor laser module may include two types of collimated optical path groups, distinguished by different structures in the corresponding steering and compression components. These two types of collimated optical path groups can be a target standard collimated optical path group and a first non-target standard collimated optical path group, and the number of the first non-target standard collimated optical path groups can be one or more.

[0088] The eye standard straight optical path group corresponds to the rhombus prism in the steering compression assembly, and the first non-eye standard straight optical path group corresponds to the reflective device in the steering compression assembly, and the reflective device can include a first reflector and a second reflector. The first reflector and the second reflector can constitute a reflector group.

[0089] The first reflector can be arranged on the output light path of the first non-eye standard straight light path group, and the second reflector can be arranged just below the output light path of the rhombus prism. The first reflector can have a certain angle with the output light path direction of the first non-eye standard straight light path group and the bottom plate plane, such as Figure 5 As shown, the stacked pump beams output by the first non-standard straight optical path group are aligned parallel to the bottom plate plane by the first reflector, and are reflected directly below the output optical path of the rhombus prism. The second reflector then reflects the stacked pump beams to obtain a second shifted beam. This second shifted beam is transmitted along the reflected optical path of the second reflector to the beam combining device.

[0090] The first displaced light beam is directly transmitted to the beam combining device along the output optical path of the rhombus prism. The beam combining device can receive the first displaced light beam and the second displaced light beam at the same incident surface, combine the first displaced light beam and the second displaced light beam, and output the combined result.

[0091] To prevent the second reflector from affecting the transmission of the first shifted beam output by the rhombus prism, the second reflector's highest point can be set to coincide with the first shifted beam's lowest point, or slightly lower than the first shifted beam's lowest point, allowing the first and second shifted beams to be spliced ​​vertically. In this case, the first shifted beam's lowest point and the second shifted beam's highest point coincide or are only slightly separated, allowing the first and second shifted beams to be considered a single collimated, parallel beam.

[0092] Optionally, in other embodiments, the highest point of the second reflector of a reflective device of the present application coincides with the lowest point of the first displaced light beam or the highest point is higher than the lowest point; the lowest point of the second reflector of a reflective device coincides with the highest point of the second reflector of another adjacent reflective device or the lowest point is lower than the highest point; the first reflector is used to make the tilted pump light beam output by the corresponding non-standard straight light path group parallel to the base plane, and reflect the tilted pump light beam output by the non-standard straight light path group to the corresponding second reflector.

[0093] On the basis of the above embodiment, in the semiconductor laser module provided in the embodiment of the present invention, the plurality of collimated optical path groups further include a second non-standard collimated optical path group;

[0094] The reflective device corresponding to the second non-objective standard straight optical path group includes a third reflector;

[0095] The third reflector is used to make the stacked pump light beam output by the second non-standard straight light path group parallel to the base plate plane, and reflect the stacked pump light beam output by the second non-standard straight light path group to the beam combining device.

[0096] Specifically, in an embodiment of the present invention, the semiconductor laser module may further include a third type of collimated optical path group, namely, a second non-standard straight optical path group, and the number of the second non-standard straight optical path group may be one or more.

[0097] The second non-standard straight optical path group can correspond to the reflective device in the steering compression assembly, and the reflective device can include a third reflector. The third reflector can have a certain angle with the output optical path direction of the second non-standard straight optical path group and the bottom plate plane. The placement angle of the third reflector can also be as follows: Figure 5 As shown. Furthermore, a third reflector can be used to make the stacked pump beams output by the second non-standard straight optical path group parallel to the base plate plane, generating a second shifted beam. This second shifted beam is transmitted along the reflected optical path of the third reflector to the beam combiner, where it is combined with the first shifted beam to obtain a combined beam result.

[0098] It is understood that, because the beam combiner is disposed on the output optical path of the rhombus prism, the first displaced light beam can enter the beam combiner through a first vertical plane of the beam combiner, and the second displaced light beam can enter the beam combiner through a second vertical plane of the beam combiner. The first vertical plane can be perpendicular to the second vertical plane.

[0099] In the embodiment of the present invention, the semiconductor laser module can be provided with a second non-standard straight optical path group through a second reflector, thereby increasing the output power of the semiconductor laser module.

[0100] On the basis of the above embodiments, in the semiconductor laser module provided in the embodiments of the present invention, each collimating optical path group includes a plurality of laser chips whose light-emitting surfaces are at the same horizontal height in the same vertical plane, and a fast-axis collimating device and a slow-axis collimating device arranged in sequence along the optical transmission direction of each laser chip;

[0101] Each laser chip is used to output a pump beam;

[0102] Each fast axis collimator is used to perform fast axis collimation on an incident light beam;

[0103] Each slow-axis collimating device is used to perform slow-axis collimation on the incident light beam, and to make a preset angle between the light beam after slow-axis collimation and the plane of the base plate.

[0104] Specifically, in an embodiment of the present invention, each collimation optical path group may include multiple laser chips and fast-axis collimation devices and slow-axis collimation devices arranged in sequence along the optical path transmission direction of each laser chip. The light-emitting surface of each laser chip can be arranged at the same horizontal height in the same vertical plane. Each laser chip can constitute a laser chip group, and then the fast-axis collimation device corresponding to each laser chip can constitute a fast-axis collimation device group, and the slow-axis collimation device corresponding to each laser chip can constitute a slow-axis collimation device group.

[0105] Since the light-emitting surfaces of each laser chip are at the same horizontal height in the same vertical plane, compared with a semiconductor laser module in which each laser chip is arranged at a different step height, the volume can be reduced, thereby having a wider applicability.

[0106] The pump laser output by a laser chip is typically elliptical, with a relatively large vertical divergence angle and good beam quality, known as the fast axis. The horizontal divergence angle is relatively small, with poor beam quality, known as the slow axis. To achieve a good coupling effect, the beams in both directions need to be collimated separately. The element that performs fast-axis collimation on the pump laser is called a fast-axis collimator, while the element that performs slow-axis collimation on the pump laser is called a slow-axis collimator. Thus, the use of each fast-axis collimator and each slow-axis collimator can improve the coupling effect of the subsequent beam combining results, facilitating the transmission quality of the combined beam.

[0107] The light-emitting surfaces of the laser chips in each collimating optical path group are oriented in the same direction. When there are an even number of collimating optical path groups, the light-emitting surfaces of the laser chips in every two collimating optical path groups can be arranged relative to each other. When there are an odd number of collimating optical path groups, there is one collimating optical path group in which the light-emitting surfaces of the laser chips are arranged in the same direction as the light-emitting surfaces of the laser chips in the adjacent collimating optical path groups.

[0108] Each fast axis collimator device may include a fast axis collimator (FAC), and each fast axis collimator device is disposed on a light emitting surface of a corresponding laser chip.

[0109] Each slow-axis collimator can include a slow-axis collimator (SAC) and a reflector that is angled relative to both the base plane and the propagation direction of the incident light beam. The slow-axis collimator can be a cylindrical mirror, and the reflectors in the slow-axis collimator corresponding to each laser chip are parallel.

[0110] Each laser chip can be used to output a pump beam. This pump beam passes through the fast-axis collimator and slow-axis collimator corresponding to the laser chip to obtain a collimated pump beam at a preset angle with the base plane. The collimated pump beams corresponding to all laser chips can form a stacked pump beam at a preset angle with the base plane.

[0111] It can be understood that the incident light beam here is specific to a specific device.

[0112] In an embodiment of the present invention, by combining a fast-axis collimation device and a slow-axis collimation device, the pump beam output by the laser chip is collimated, thereby improving the collimation effect and allowing a preset angle to exist between the collimated beam and the base plane, thereby achieving stacking of collimated pump beams.

[0113] On the basis of the above embodiment, in the semiconductor laser module provided in the embodiment of the present invention, each slow-axis collimation device includes a slow-axis collimation mirror and a fourth reflector sequentially arranged along the optical transmission direction of the corresponding laser chip;

[0114] The slow axis collimator is used to perform slow axis collimation on the incident light beam;

[0115] The fourth reflecting mirror is used to make the light beam after slow axis collimation by the corresponding slow axis collimating mirror have the preset angle with the bottom plate plane.

[0116] Specifically, each slow-axis collimator in the semiconductor laser module may further include a slow-axis collimator and a fourth reflector, sequentially arranged along the optical transmission direction of the corresponding laser chip. The slow-axis collimator may be a conventional slow-axis collimator, an integrated cylindrical lens array, a new blue-light meniscus slow-axis collimator, or the like, and is used to perform slow-axis collimation on the incident light beam, which is the pump laser output by the corresponding laser chip.

[0117] The fourth reflector can be a conventional reflector, and can form a certain angle with the output light path of the slow axis collimator and a preset angle with the base plane, so as to make the light beam after slow axis collimation by the corresponding slow axis collimator have a preset angle with the base plane.

[0118] It is understandable that the reflection surfaces of the fourth reflectors may be parallel, so that the reflection light paths of the fourth reflectors are all in a vertical plane, thereby ensuring that stacked pump beams are obtained.

[0119] In the embodiment of the present invention, each stacked pump beam can be obtained through the structure of the slow axis collimating mirror and the fourth reflecting mirror.

[0120] In existing technology, after fast-axis collimation, the laser passes through a slow-axis cylindrical lens and a reflector before reaching the focusing lens, where it is finally focused into a light spot before entering the optical fiber for transmission. During this process, the reflector's highly reflective coating is angle-sensitive, and its reflection efficiency varies with angle. This can lead to significant deviations between the laser's incident angle on the reflector and the reflector's setting angle, resulting in low reflection efficiency. Furthermore, whether the reflector is manually or automatically adjusted, high precision is required.

[0121] In order to solve the above technical problems, on the basis of the above embodiments, in the semiconductor laser module provided in the embodiments of the present invention, each slow-axis collimation device is an off-axis reflector, and the output light beam of each fast-axis collimation device is incident on the corresponding off-axis reflector at the focus of the corresponding off-axis reflector.

[0122] Specifically, each slow axis collimator can be an off-axis reflector, and the optical path diagram of the off-axis reflector can be as follows: Figure 6 shown.

[0123] An off-axis reflector is a surface reflector, specifically a concave reflector. Its structural characteristic is that the incident and exit surfaces are the same surface, i.e., the reflective surface, which is coated with a highly reflective coating. This reflective surface is a curved surface and can be spherical, aspherical, or parabolic.

[0124] Unlike conventional flat-plate mirrors, off-axis mirrors possess two unique characteristics. First, their reflecting surface is a parabola, meaning that any point on the surface is equidistant from its directrix. Second, compared to conventional parabolic or spherical mirrors, off-axis mirrors possess an off-axis angle. The off-axis angle is the angle between the focused and collimated beams, and different values ​​of the off-axis angle can be obtained by intercepting different positions on the parent parabola.

[0125] Therefore, when parallel light is incident on the reflective surface perpendicular to the base of the off-axis reflector, the off-axis reflector can focus the parallel light beam without dispersion, reflecting and converging the light to the off-axis focal point. Similarly, according to the principle of optical path reversibility, if the laser starts at the focal point of the off-axis reflector, it will be collimated after passing through the reflective surface of the off-axis collimator.

[0126] In an embodiment of the present invention, the output light beam of each fast-axis collimator is incident on the corresponding off-axis reflector at the focus of the corresponding off-axis reflector. In this way, the output light beam of the fast-axis collimator can be slow-axis collimated by the off-axis reflection principle of the off-axis reflector, so that the output light beam of the fast-axis collimator has a preset angle with the bottom plate plane.

[0127] In an embodiment of the present invention, an off-axis reflector based on the off-axis reflection principle is introduced as a slow-axis collimator, the transmission and refraction principles used by the original slow-axis collimator are abandoned, and the slow-axis collimator and reflector in the original structure are combined in structure and function.

[0128] Using an off-axis reflector as a slow-axis collimator has the following five advantages over a slow-axis collimator combined with a reflector:

[0129] 1) Reduced optical path

[0130] Obviously, the off-axis reflector that combines the reflector and the conventional slow-axis collimator occupies less physical space, so compared with the original structure, the existing structure will have a shorter working length and the housing structure is expected to be designed to be more compact.

[0131] 2) Reduced coating costs

[0132] In an optical structure based on a conventional slow-axis collimator and a reflector, the conventional slow-axis collimator is a spherical or aspherical cylindrical mirror. The laser first passes through the plane of the cylindrical mirror into the glass medium, then passes through the convex surface of the cylindrical mirror to form parallel light, and finally is reflected to the focusing lens by the reflector placed after the slow-axis collimator. For conventional solutions, the laser needs to be coated on at least three surfaces in the process of passing through the slow-axis collimator and reflector to reduce the loss of laser power. However, for an off-axis reflector, it only uses the concave surface as the reflective surface. Based on the reflection principle, it can achieve the purpose of reflecting and collimating the light spot. The reflective film coating on this surface can meet the working requirements and reduce the coating cost.

[0133] 3) The material requirements for the lens are not high

[0134] Based on the principle mentioned in point 2), it can be seen that this off-axis reflector uses the reflection principle. Therefore, there is no need to consider the refraction of the lens material. Some low-cost ordinary glass materials (such as K9) can achieve the reflection and collimation functions.

[0135] 4) Reduced the difficulty of installation and adjustment

[0136] The off-axis reflector is an integrated structure. Since its reflection angle is pre-designed, the angle adjustment accuracy is not required to be high. Once the working distance of the corresponding off-axis reflector is determined, the reflection and collimation functions can be completed.

[0137] 5) Eliminate phase delay and absorption loss of transmission elements

[0138] Off-axis mirrors operate on the principle of reflection, thus avoiding the phase delay and absorption losses inherent in transmissive optical elements such as spherical and cylindrical mirrors, thereby reducing energy loss during laser transmission. Furthermore, off-axis mirrors are largely unaffected by wavelength and thus do not produce chromatic aberration, even when operating over a wide wavelength range.

[0139] 6) A more compact optical path system structure can be achieved.

[0140] like Figure 7 As shown, based on the above embodiments, a semiconductor laser pump source is further provided in an embodiment of the present invention, including: a fast and slow axis focusing device group 71, an output optical fiber 72 and a semiconductor laser module 73 provided in the above embodiments.

[0141] The beam combination result output by the semiconductor laser module 73 is coupled into the output optical fiber 72 through the fast-slow axis focusing device group 71 .

[0142] Specifically, the semiconductor laser pump source may include a semiconductor laser module 73, a fast-axis focusing device group 71, and an output optical fiber 72 sequentially arranged along the optical path. The fast-axis focusing device group 71 may include a fast-axis focusing lens group and a slow-axis focusing lens sequentially arranged along the optical path.

[0143] like Figure 8As shown, the semiconductor laser module 73 of the semiconductor laser pump source includes a standard straight light path group 731, an rhombus 732, a reflector 733 and a beam combining device 734. The stacked pump light beam output by the standard straight light path group 731 passes through the rhombus 732 to obtain a first displaced light beam, and the first displaced light beam is incident on the beam combining device 734. The stacked pump light beam output by the non-standard straight light path group passes through the first reflector and the second reflector in the reflector 733 to obtain a second displaced light beam, and the second displaced light beam is incident on the beam combining device 734. The first displaced light beam and the second displaced light beam are combined by the beam combining device 734. Figure 8 In the embodiment, the semiconductor laser pump source further includes a fast axis focusing lens group 711 and a slow axis focusing lens 712 .

[0144] The semiconductor laser pump source provided in the embodiments of the present invention, because it includes a semiconductor laser module, has lower requirements for the tilt angle of the rhombus prism during subsequent coupling testing, which can reduce the difficulty of subsequent coupling adjustment operations. Moreover, the combination of the rhombus prism and the reflector generates two types of displaced beams at different levels. This reduces the difficulty of expanding the number of collimated optical path groups, allowing the semiconductor laser module to introduce more stacked pump beams. This ensures that even if the number of collimated optical path groups increases, the possibility of spatial beam combination can be achieved, greatly improving the power potential of the semiconductor laser pump source. This semiconductor laser pump source has the advantages of simple structure and simple optical path, and has great application advantages.

[0145] like Figure 8 As shown, on the basis of the above embodiment, the semiconductor laser pump source provided in the embodiment of the present invention further includes: a filter 74 arranged between the semiconductor laser module 73 and the fast-axis focusing device group 71, and the filter 74 is specifically arranged between the beam combining device 734 and the fast-axis focusing lens group 711, and is used to protect the semiconductor laser module 73 and prevent stray light from entering the semiconductor laser module 73 and causing damage to it.

[0146] like Figure 9 The figure shows the structure of a semiconductor laser pump source comprising two collimating optical path groups in a semiconductor laser module 73. The semiconductor laser pump source may include a base plate 70. The semiconductor laser module 73, the fast-axis focusing device group 71, and the output optical fiber 72 are all arranged on the base plate plane O of the base plate 70. Each collimating optical path group in the semiconductor laser module 73 includes a laser chip group 735, a fast-axis collimating lens group, and an off-axis reflector group 736 serving as a slow-axis collimating device group. Because the light-emitting surfaces of each laser chip in the laser chip group are all at the same horizontal height in the same vertical plane, the volume can be reduced compared to a semiconductor laser pump source in which each laser chip is arranged at different step heights, thereby increasing its applicability.

[0147] The reflective device 733 includes a first reflective mirror 7331 and a second reflective mirror 7332 . Figure 9 FIG. 7 shows only the case where each laser chip group 735 includes 15 laser chips. Accordingly, the fast-axis collimator group includes 15 fast-axis collimators, and the off-axis reflector group 736 includes 15 off-axis reflectors.

[0148] The stacked pump beams output by the standard straight optical path group 731 pass through the rhombus prism 732 to obtain a first shifted beam, which is incident on the beam combiner 734. The stacked pump beams output by the first non-standard straight optical path group pass through the reflector 733 to obtain a second shifted beam, which is incident on the beam combiner 734 directly below the first shifted beam.

[0149] Figure 10 for Figure 9 Schematic diagram of the optical path from a top view of the structure.

[0150] like Figure 11 As shown, the structure of the semiconductor laser module 73 of the semiconductor laser pump source includes two collimating light path groups, which is the same as Figure 9 The difference is, Figure 11 The slow axis collimation device group includes a slow axis collimation mirror group 737 and a reflector group 738. The slow axis collimation mirror in the slow axis collimation mirror group 737, the fast axis collimation mirror in the fast axis collimation mirror group and the reflector in the reflector group 738 correspond to each other one by one.

[0151] Figure 12 for Figure 11 Schematic diagram of the optical path from a top view of the structure.

[0152] like Figure 13 As shown, the structure of the semiconductor laser module 73 of the semiconductor laser pump source includes three collimating light path groups. Figure 11 , a collimating optical path group and its corresponding third reflecting mirror 739 are added.

[0153] like Figure 14 As shown, based on the above embodiments, a laser is further provided in an embodiment of the present invention, comprising: a resonant cavity 142 provided with a working medium 141 and a semiconductor laser pump source 143 provided in the above embodiments;

[0154] The target pump light beam outputted from the output optical fiber of the semiconductor laser pump source 143 acts on the working medium 141 to generate laser light.

[0155] Specifically, the laser provided in the embodiment of the present invention may have different types depending on the material of the working medium 141 used. For example, if the material of the working medium is a bulk doped crystal or glass, the laser is a solid laser; if the material of the working medium is an optical fiber, the laser is a fiber laser; if the material of the working medium is a semiconductor material such as gallium arsenide, indium gallium arsenide, etc., the laser may be a semiconductor laser.

[0156] The laser provided in the embodiments of the present invention utilizes a semiconductor laser pump source acting on a working medium 141, causing the working medium 141 to be excited and generate laser light. Because this laser utilizes a rhombus prism as a semiconductor laser pump source, the difficulty of optical path alignment after correcting the rhombus prism parameters can be reduced. This laser features a simple structure and optical path.

[0157] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate, and the components shown as units may or may not be physical units, i.e., they may be located in one location or distributed across multiple network units. Some or all of the modules may be selected based on actual needs to achieve the objectives of the present embodiment. Persons of ordinary skill in the art will be able to understand and implement the present invention without inventive effort.

[0158] Through the description of the above embodiments, those skilled in the art can clearly understand that each embodiment can be implemented by means of software plus a necessary general hardware platform, or of course, by hardware. Based on this understanding, the essence of the above technical solution or the part that contributes to the existing technology can be embodied in the form of a software product. The computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, a magnetic disk, an optical disk, etc., and includes a number of instructions for enabling a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the methods described in each embodiment or certain parts of the embodiments.

[0159] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A beam combining module, characterized in that: The beam combining module includes: a steering and compression component and a beam combining device. The steering and compression component includes a rhombus prism and several reflective devices, which are used to steer and compress the inclined pump beams output by multiple collimated optical path groups. The rhombus prism is used to displace the inclined pump beam output by the standard straight optical path group in the vertical direction and make it parallel to the bottom plane where the beam combining module is located, thereby obtaining a first displaced beam; Each reflector is disposed in a one-to-one correspondence on the transmission optical path of the tilted pump light beam output by the non-standard straight optical path group, and is used to make the corresponding tilted pump light beam output by the non-standard straight optical path group parallel to the plane of the base plate, and deflect it to the output optical path plane of the rhombus prism, thereby obtaining a plurality of second displaced light beams; The beam combining device is arranged on the output light path of the rhombus prism, and is used to combine the plurality of second displaced light beams with the first displaced light beam.

2. The beam combining module according to claim 1, characterized in that: The rhombus prism is a periscope rhombus prism, and the vertical cross-section is not asymmetric. The first reflection surface in the periscope rhombus prism in the direction of light path transmission has a first angle with the light incident surface, and the second reflection surface in the direction of light path transmission has a second angle with the light exit surface, and the first angle is not equal to the second angle; the first reflection surface and the second reflection surface are arranged opposite to each other in the vertical direction, and the light incident surface is parallel to the light exit surface.

3. The beam combining module according to claim 2, characterized in that: The relationship between the first angle and the second angle is determined based on the angle between the inclined pump beam output by the objective standard straight optical path group and the bottom plane of the beam combining module and the refractive index of the periscope rhombus prism.

4. The beam combining module according to claim 1, wherein: When the beam combining module is mounted on the bottom plate plane, the light incident surface and the light emitting surface of the rhombus prism are both perpendicular to the bottom plate plane.

5. The beam combining module according to claim 1, wherein: The reflecting device includes a first reflecting mirror and a second reflecting mirror; The highest point of the second reflector of the reflective device coincides with the lowest point of the first displaced light beam, or the highest point is higher than the lowest point; The lowest point of the second reflector of one reflective device coincides with the highest point of the second reflector of another adjacent reflective device, or the lowest point is lower than the highest point; The first reflector is used to make the tilted pump light beam output by the corresponding non-standard straight light path group parallel to the bottom plate plane, and reflect the tilted pump light beam output by the non-standard straight light path group to the corresponding second reflector; The second reflector is used to reflect the corresponding incident light beam to the incident surface of the beam combining device where the first displaced light beam is incident.

6. The beam combining module according to claim 1, wherein: The beam combining module includes a base for adjusting the installation height of the rhombus prism.

7. The beam combining module according to claim 1, wherein: The reflecting device includes a third reflecting mirror, which is used to make the inclined pump light beam output by the corresponding non-standard straight light path group parallel to the base plate plane, and reflect the inclined pump light beam output by the non-standard straight light path group to the incident surface of the beam combining device adjacent to the incident surface of the first displaced light beam.

8. A semiconductor laser pump source, characterized in that: The invention comprises the beam combining module according to any one of claims 1 to 7, wherein the semiconductor laser pump source comprises a plurality of collimated optical path groups, each of which is used to output a collimated inclined pump beam having a preset angle with the bottom plane of the beam combining module.

9. A semiconductor laser, characterized in that: include: The beam combining module according to any one of claims 1 to 7.

Images