Clamp for cutting single crystal diamond sheet

Abstract

The utility model belongs to the field of devices for clamping workpieces, and particularly relates to a clamp for cutting a single crystal diamond sheet. In order to improve the quality of a substrate, the utility model provides the clamp for cutting the single crystal diamond wafer, the clamp comprises a fixed seat, a positioning groove is arranged on the fixed seat, a substrate air passage is also arranged on the fixed seat, one end of the substrate air passage is communicated with the positioning groove to form a suction port for adsorbing one end of the single crystal diamond wafer, and the other end of the substrate air passage is communicated with the positioning groove. The fixing base is further connected with a separation piece fixing device, the separation piece fixing device is provided with a separation piece air channel and a suction nozzle used for adsorbing the other end of the single crystal diamond piece, one end of the separation piece air channel is communicated with the suction nozzle, and the other end of the separation piece air channel is used for being connected with the negative pressure generating device. The suction port and the suction nozzle are used for fixing the single crystal diamond piece from the two ends of the single crystal diamond piece in the thickness direction, so that the joint of the separation piece and the negative piece is prevented from being blown off by wind at the last cutting stage, and the quality of the negative piece is improved.

Description

Technical Field

[0001] The utility model belongs to the field of devices for clamping workpieces, in particular to a clamp for cutting single crystal diamond slices. Background Art

[0002] After the single-crystal diamond grows from a thin initial sheet to a thicker single-crystal diamond sheet, it needs to be clamped in a fixture. Next, a laser is used to cut away the polycrystalline impurity surface on the single-crystal diamond sheet. Specifically, the single-crystal diamond sheet is cut into two thin slices: one is a base sheet without polycrystalline impurities, and the other is a separation sheet containing polycrystalline impurities. The base sheet is then used as the initial sheet to grow the thicker single-crystal diamond sheet. During laser cutting, air is blown toward the object being cut to remove waste generated during cutting and ensure cutting efficiency.

[0003] The Chinese utility model patent application number 202420332615.3 provides a single crystal diamond slice cutting fixture, the specific structure is as follows Figure 1 As shown, the fixture includes a fine-tuning platform 1, a support 2 located on the fine-tuning platform 1 and a fixed base 3 located on the support 2, the fixed base 3 is provided with a positioning groove 31 for positioning the single crystal diamond sheet 4, and the fixed base 3 is also provided with an air channel, one end of the air channel is connected to the positioning groove 31 to form a suction port for adsorbing the single crystal diamond sheet 4, and the other end has a connecting structure for connecting a negative pressure generating device, and the thickness of the positioning groove 31 meets the requirement of being less than the thickness of the single crystal diamond sheet 4 installed in the positioning groove 31.

[0004] When using the above-mentioned fixture, an air pipe 5 is connected to the connection structure, and a valve seat 7 and a control valve 6 are provided between the negative pressure generating device and the air pipe 5. A single negative pressure generating device and multiple control valves 6 can be used to simultaneously secure different numbers of single-crystal diamond sheets 4 in different positioning slots 31. At the end of the cutting process, the connection between the base sheet and the separator sheet is very small, but not yet completely severed. At this point, because only one end of the single-crystal diamond sheet 4 is secured by the fixing seat 3, and air must be continuously blown toward the object being cut (i.e., the single-crystal diamond sheet 4) during the laser cutting process, the connection between the separator sheet and the base sheet can break directly. The broken portion cannot form a smooth surface and is of poor quality, requiring secondary processing of the base sheet, which affects production efficiency. Utility Model Content

[0005] The purpose of the utility model is to provide a clamp for cutting single crystal diamond sheets, so as to solve the technical problem that the connection between the separator and the base sheet will be broken by wind, resulting in poor quality of the base sheet.

[0006] To achieve the above-mentioned purpose, the technical solution of the single crystal diamond slice cutting fixture provided by the present invention is as follows:

[0007] A clamp for cutting single-crystal diamond slices comprises a fixing seat, at least a portion of a side surface of the fixing seat constituting a mounting portion, the mounting portion having a positioning groove for mounting and positioning the single-crystal diamond slice, the thickness of the positioning groove satisfying the requirement of being less than the thickness of the single-crystal diamond slice mounted in the positioning groove; a negative film air duct is also provided on the fixing seat, one end of the negative film air duct is connected to the positioning groove to form a suction port for adsorbing one end of the single-crystal diamond slice, and the other end has a connecting structure for connecting to a negative pressure generating device; a separator fixing device is also connected to the fixing seat, the separator fixing device is provided with a separator air duct and a suction nozzle for adsorbing the other end of the single-crystal diamond slice, one end of the separator air duct is connected to the suction nozzle, and the other end has a connecting structure for connecting to a negative pressure generating device.

[0008] Furthermore, the thickness direction of the positioning groove is defined as the left-right direction, the separator fixing device and the fixing seat are movably matched along the left-right direction, and the separator fixing device is provided with a locking mechanism for locking the position of the separator fixing device after the separator fixing device moves, so as to change the left-right distance between the suction port and the suction nozzle to adapt to single crystal diamond sheets of different thicknesses.

[0009] Furthermore, the fixing seat is provided with a guide hole extending in the left-right direction and a threaded hole connected to the guide hole. The separator fixing device is guided and moved in cooperation with the guide hole, and the locking mechanism is a top screw installed in the threaded hole.

[0010] Furthermore, the top screw is perpendicular to the axis of the guide hole.

[0011] Furthermore, a hand wheel is provided at one end of the top screw away from the guide hole.

[0012] Furthermore, the suction nozzle is made of flexible material.

[0013] Furthermore, the suction nozzle is made of rubber or silicone.

[0014] Furthermore, the suction nozzle is detachably mounted on the separator fixing device.

[0015] Furthermore, there are multiple positioning grooves and suction nozzles in one-to-one correspondence, and the corresponding single positioning grooves and single suction nozzles are used to absorb the same single crystal diamond piece.

[0016] Furthermore, the side surface of the fixing seat is a plane, and at least a portion of the plane constitutes the mounting portion.

[0017] The beneficial effects of the clamp for cutting single-crystal diamond sheets of the present invention are as follows: the present invention is an improved invention. The suction port and the nozzle can simultaneously fix both ends of the single-crystal diamond sheet. During the process of cutting the single-crystal diamond sheet, the separator is fixed by the suction nozzle, thereby preventing the connection between the separator and the base sheet from being blown off by the wind, ensuring that the connection between the separator and the base sheet is laser cut, thereby improving the quality of the base sheet, eliminating the need for secondary processing of the base sheet, and improving production efficiency. The single-crystal diamond sheet is fixed by a negative pressure generating device, a base sheet airway, a separator airway, a suction port, and a nozzle, eliminating the need for glue, which can prevent the base sheet and the separator from being contaminated by glue. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a diagram showing the use of a fixture for cutting single crystal diamond slices in the prior art;

[0019] Figure 2 This is a diagram showing the use of the clamp for cutting single crystal diamond slices from one perspective;

[0020] Figure 3 This is a diagram showing the use of the clamp for cutting single crystal diamond slices from another perspective.

[0021] Description of reference numerals:

[0022] Figure 1 Middle: 1. Fine-tuning platform; 2. Support; 3. Fixed seat; 31. Positioning groove; 4. Single crystal diamond plate; 5. Fixed seat air pipe; 6. Control valve; 7. Valve seat;

[0023] Figure 2-3 Middle: 1. Fine-tuning platform; 2. Fixing seat; 3. Separator air pipe; 4. Separator fixing device; 5. Top screw; 6. Suction nozzle; 7. Single crystal diamond plate; 8. Plate air pipe; 9. Control valve; 10. Valve seat; 11. Transition connecting plate; 12. Base; 13. Valve seat air pipe. DETAILED DESCRIPTION

[0024] To solve the problems in the background technology, the core inventive concept of the present invention is to fix the single crystal diamond sheet from both ends in the thickness direction of the single crystal diamond sheet, thereby preventing the connection between the separator and the base sheet from being broken by wind at the end of cutting.

[0025] The present invention is further described in detail below with reference to the embodiments.

[0026] Specific embodiments of the single crystal diamond slice cutting fixture provided by the present utility model:

[0027] like Figure 2-3As shown, as a specific embodiment, the clamp for cutting single crystal diamond sheets includes a fixed seat 2, at least a portion of the side surface of the fixed seat 2 is a plane to constitute a mounting portion, and the mounting portion has a positioning groove for mounting and positioning the single crystal diamond sheet 7, that is, the fixed seat 2 is provided with a positioning groove for mounting and positioning the single crystal diamond sheet 7, and the thickness of the positioning groove satisfies: being less than the thickness of the single crystal diamond sheet 7 installed in the positioning groove; the fixed seat 2 is also provided with a film air duct, one end of the film air duct is connected to the positioning groove to form a suction port for adsorbing one end of the single crystal diamond sheet 7, and the other end has a connecting structure for connecting a negative pressure generating device; the fixed seat 2 is also connected to a separator fixing device 4, the separator fixing device 4 is provided with a separator air duct and a suction nozzle 6 for adsorbing the other end of the single crystal diamond sheet 7, one end of the separator air duct is connected to the suction nozzle 6, and the other end has a connecting structure for connecting a negative pressure generating device.

[0028] Among them, the specific structures of the positioning groove, the film air duct, the suction port, and the fixing seat 2 can be referred to the Chinese utility model patent application number 202420332615.3, which will not be repeated here.

[0029] It should be noted that, in other specific embodiments, the side surface of the fixing seat 2 can also be an inclined surface with a smaller inclination angle, a part of the inclined surface constitutes the mounting portion, and the inclination angle of the inclined surface satisfies that the laser will not cut the fixing seat 2 when cutting the single crystal diamond sheet.

[0030] During use, the suction port and nozzle 6 can simultaneously secure both ends of the single-crystal diamond sheet 7. During the cutting process of the single-crystal diamond sheet 7, the separator is secured by the suction nozzle 6, thereby preventing the connection between the separator and the base sheet from being blown off by wind, ensuring that the connection between the separator and the base sheet is laser-cut, thereby improving the quality of the base sheet, eliminating the need for secondary processing of the base sheet, and improving production efficiency. The use of a negative pressure generating device, base sheet airway, separator airway, suction port, and nozzle 6 to secure the single-crystal diamond sheet 7 eliminates the need for glue, thereby preventing the base sheet and separator from becoming contaminated with glue.

[0031] like Figure 2-3 As shown, in order to use the same single crystal diamond sheet cutting fixture to cut single crystal diamond sheets 7 of different thicknesses, as a specific implementation method, the thickness direction of the positioning groove is defined as the left-right direction, the separator fixing device 4 is movably matched with the fixing seat 2 along the left-right direction, and the separator fixing device 4 is provided with a locking mechanism for locking the position of the separator fixing device 4 after the separator fixing device 4 moves, so as to change the left-right distance between the suction port and the suction nozzle 6 to adapt to single crystal diamond sheets 7 of different thicknesses.

[0032] like Figure 2-3As shown, in order to improve the cutting efficiency, as a specific embodiment, there are multiple positioning grooves and suction nozzles 6 and they correspond one to one. The corresponding single positioning grooves and single suction nozzles 6 are used to absorb the same single crystal diamond piece 7. Figure 2-3 Specifically, it is seven, but it can also be three, four or other numbers. Figure 2-3 Only one separator air pipe 3 is shown in the figure, but in actual products, each separator fixing device 4 is equipped with a separator air pipe 3.

[0033] When there are multiple positioning grooves and suction nozzles 6, there are also multiple groups of corresponding control valves 9. Each group of control valves 9 includes a control valve 9 for controlling the pressure at the suction port in the positioning groove and a control valve 9 for controlling the pressure at the suction nozzle 6. All control valves 9 are installed on the same valve seat 10, and the valve seat 10 is provided with a valve seat air pipe 13 connected to a negative pressure generating device, so that a negative pressure generating device can be used to simultaneously provide negative pressure to all suction nozzles 6 and suction ports. The negative pressure generating device can be an existing negative pressure generating device such as a vacuum pump or a vacuum generator. The control valve 9 is connected to the negative film airway through the negative film air pipe 8, and the control valve 9 is connected to the separator airway through the separator air pipe 3.

[0034] In other specific embodiments, the number of positioning grooves and suction nozzles 6 can be one, and the separator fixing device 4 can also be fixed on the fixing base 2. In this case, the single crystal diamond sheet cutting fixture can only adapt to single crystal diamond sheets 7 of a specific thickness, and other single crystal diamond sheet cutting fixtures need to be used when cutting single crystal diamond sheets 7 of other thicknesses; or, the number of positioning grooves and suction nozzles 6 can be at least two, the separator fixing device 4 is fixed on the fixing base 2, but the distance between each suction nozzle 6 and the corresponding positioning groove is different to adapt to single crystal diamond sheets 7 of different thicknesses.

[0035] like Figure 2-3 As shown, in order to conveniently and continuously adjust the distance between the suction nozzle 6 and the suction port to adapt to single crystal diamond sheets 7 of different thicknesses, as a specific embodiment, a guide hole extending in the left and right directions and a threaded hole connected to the guide hole are provided on the fixing seat 2, the separator fixing device 4 is guided and moved in cooperation with the guide hole, and the locking mechanism is a top screw 5 installed in the threaded hole.

[0036] To facilitate the adjustment of the top screw 5, as a specific embodiment, a handwheel is provided at the end of the top screw 5 away from the guide hole, and the top screw 5 can be conveniently screwed by the handwheel; but in other specific embodiments, the top screw 5 can also be a bolt, and the end of the top screw 5 away from the guide hole is the bolt head.

[0037] To prevent the push screw 5 from exerting an axial force on the separator fixture 4, in one embodiment, the push screw 5 is perpendicular to the axis of the guide hole, thereby preventing the separator fixture 4 from axially moving when the push screw 5 is tightened. However, in other embodiments, the roughness of the guide hole surface and the separator fixture surface can be increased. In this case, the friction coefficient between the separator fixture 4 and the guide hole is relatively large. Even if the push screw 5 is not perpendicular to the axis of the guide hole, the axial force exerted by the push screw 5 on the separator fixture 4 will be offset by the friction between the separator fixture 4 and the guide hole.

[0038] When adjusting the distance between the suction nozzle 6 and the suction port, the top screw 5 can be loosened first; then, the separator fixing device 4 can be moved; finally, the top screw 5 can be tightened in the opposite direction. By locking the separator fixing device 4 with the top screw 5, the distance between the suction nozzle 6 and the suction port can be adjusted steplessly.

[0039] However, in other embodiments, the housing of the separator fixture 4 may be provided with multiple blind holes arranged in a left-right direction, and corresponding pin holes may be provided on the fixing base 2. A fixing pin may be inserted simultaneously into the pin hole and one of the blind holes to lock the position of the separator fixture 4. To adjust the distance between the suction nozzle 6 and the suction port, the fixing pin must first be removed, and then the separator fixture 4 must be moved to align another blind hole with the pin hole, and then the fixing pin can be reinserted.

[0040] Because the single-crystal diamond sheet 7 grown from the substrate is not a perfect cuboid, the end attracted by the nozzle 6 is not flat. When the flatness of this end is good, the nozzle 6 can attract this end. However, when the flatness of this end is poor, in order to ensure that the nozzle 6 can attract this end, as a specific embodiment, the nozzle 6 is made of a flexible material, preferably rubber and silicone. This allows the nozzle 6 to adapt to the shape of the end of the single-crystal diamond sheet 7 attracted by the nozzle 6, ensuring that the nozzle 6 firmly attracts this end. At the same time, the nozzle 6 is detachably mounted on the separator fixture 4, making it convenient to replace the nozzle 6 if it is damaged. For example, when the single-crystal diamond sheet 7 is a quadrangular prism formed by the translation of a trapezoid, the end adsorbed by the suction nozzle 6 is an inclined surface, and the flexible suction nozzle can deform and adapt to the shape of the inclined surface, thereby sucking the end tightly; for another example, when the suction nozzle 6 is made of a flexible material, the rear end of the suction nozzle 6 has a socket, and the front end of the separator fixing device 4 has a plug rod with an outer diameter larger than the inner diameter of the socket, and the plug rod is inserted into the socket. Under the action of the self-resetting elastic force of the suction nozzle 6, the suction nozzle 6 is installed on the separator fixing device 4; for another example, the suction nozzle 6 is made of a hard material such as stainless steel, and the suction nozzle 6 is threadedly connected to the separator fixing device 4.

[0041] It should be noted that in Chinese Utility Model Patent Application No. 202420332615.3, when cutting a single-crystal diamond sheet 7, the end of the separator away from the connecting portion moves outward (i.e., toward the side away from the base plate) under the action of wind, causing the separator to deform significantly, thereby causing the connecting portion to break. In the present application, when cutting a single-crystal diamond sheet 7, even if the reset force of the flexible suction nozzle is much greater than the force exerted by the wind on the separator, the end of the separator away from the connecting portion moves inward (i.e., toward the side closer to the base plate). At this time, the separator comes into contact with the base plate after moving a very small distance, resulting in a smaller deformation of the separator, thereby preventing the connecting portion from breaking under the action of wind and the flexible suction nozzle.

[0042] However, in other specific embodiments, the suction nozzle 6 can also be made of a hard material such as stainless steel. In this case, if the flatness of the end of the single-crystal diamond sheet 7 sucked by the suction nozzle 6 is poor, it is necessary to first polish the single-crystal diamond sheet 7 to improve the flatness of that end; alternatively, the suction nozzle 6 is non-detachably fixed to the separator fixture 4. If the suction nozzle 6 is damaged, the entire separator fixture 4 is replaced. If the suction nozzle 6 and the separator fixture 4 are made of the same material, the suction nozzle 6 can be integrally formed with the separator fixture 4.

[0043] Specifically, if Figure 2-3 As shown, the separator fixture 4 includes an air guide cylinder that slides in conjunction with the mounting base 2 and a solenoid valve mounted at one end of the air guide cylinder. The internal passages of the air guide cylinder and the solenoid valve together form the separator airway, and the suction nozzle 6 is mounted at the other end of the air guide cylinder. However, in other embodiments, the separator fixture 4 may also include a pulley, with the mounting base 2 provided with a corresponding slideway for the pulley; alternatively, the separator fixture 4 may consist of an air guide cylinder with one end closed, and the internal passage of the air guide cylinder forming the separator airway.

[0044] like Figure 2-3 As shown, in the entire clamping system, the valve seat 10 is fixed to the base 12 via a transition connecting plate 11, and the fine-tuning platform 1 for adjusting the inclination angle of the fixed seat 2 is directly fixed to the base 12. The fixed seat 2 can be a single integrally formed seat body, or it can be composed of at least two seat bodies fixedly connected.

[0045] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments without inventive effort, or replace some of the technical features therein with equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included in the scope of protection of the present invention.

Claims

1. A fixture for cutting a single crystal diamond sheet, comprising a fixed seat, at least a portion of a side surface of the fixed seat constituting a mounting portion, the mounting portion having a positioning groove for mounting and positioning the single crystal diamond sheet, the thickness of the positioning groove being less than the thickness of the single crystal diamond sheet mounted in the positioning groove; the fixed seat also having a film air passage, one end of the film air passage being connected to the positioning groove to form a suction port for adsorbing one end of the single crystal diamond sheet, and the other end having a connection structure for connecting to a negative pressure generating device, characterized in that: The fixing seat is also connected to a separator fixing device, which is provided with a separator air duct and a suction nozzle for adsorbing the other end of the single crystal diamond sheet. One end of the separator air duct is connected to the suction nozzle, and the other end has a connecting structure for connecting to a negative pressure generating device.

2. The jig for cutting a single crystal diamond sheet according to claim 1, wherein: The thickness direction of the positioning groove is defined as the left-right direction, and the separator fixing device is movably matched with the fixing seat along the left-right direction, and the separator fixing device is provided with a locking mechanism for locking the position of the separator fixing device after the separator fixing device moves, so as to change the left-right distance between the suction port and the suction nozzle to adapt to single crystal diamond sheets of different thicknesses.

3. The jig for cutting a single crystal diamond sheet according to claim 2, wherein: The fixing seat is provided with a guide hole extending in the left and right directions and a threaded hole connected to the guide hole. The separating piece fixing device is matched with the guide hole for guiding movement. The locking mechanism is a top screw installed in the threaded hole.

4. The jig for cutting a single crystal diamond sheet according to claim 3, wherein: The top screw is perpendicular to the axis of the guide hole.

5. The jig for cutting a single crystal diamond sheet according to claim 3, wherein: A hand wheel is provided at one end of the top screw away from the guide hole.

6. The jig for cutting a single crystal diamond sheet according to any one of claims 1 to 5, wherein: The suction nozzle is made of flexible material.

7. The jig for cutting a single crystal diamond sheet according to claim 6, wherein: The suction nozzle is made of rubber or silicone.

8. The jig for cutting a single crystal diamond sheet according to any one of claims 1 to 5, wherein: The suction nozzle is detachably mounted on the separator fixing device.

9. The jig for cutting a single crystal diamond sheet according to any one of claims 1 to 5, wherein: There are multiple positioning grooves and suction nozzles in one-to-one correspondence, and the corresponding single positioning grooves and single suction nozzles are used to absorb the same single crystal diamond piece.

10. The jig for cutting a single crystal diamond sheet according to any one of claims 1 to 5, wherein: The side surface of the fixing seat is a plane, and at least a portion of the plane constitutes the mounting portion.

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