Discharging system for circulation warehousing of silicon wafer boxes

Abstract

The utility model provides a blanking system for circulation warehousing of silicon wafer boxes, which relates to the technical field of semiconductor silicon wafer production equipment, and comprises an automatic unloading mechanism, a material receiving frame, a plurality of forks, a lifting assembly, a moving assembly and a visual positioning device, the lifting assembly is arranged on the material receiving frame, the moving assembly is arranged on the lifting assembly, and the visual positioning device is arranged on the lifting assembly. The pallet fork is arranged on the moving assembly, and the visual positioning device is arranged at the feeding end of the material receiving frame. The conveying mechanism comprises a conveying line; the butt joint mechanism is arranged between the automatic discharging mechanism and the conveying mechanism and comprises a plurality of sets of synchronous conveying assemblies, and the number of the conveying assemblies is not smaller than that of the forks; the automatic feeding device has the advantages that the pallet forks stretch into the bottoms of the silicon wafer boxes to support the silicon wafer boxes, the stability is higher during use, automatic circulation feeding of the silicon wafer boxes can be achieved, and the feeding efficiency is high.

Description

Technical Field

[0001] The utility model relates to the technical field of equipment for producing semiconductor silicon wafers, in particular to a material unloading system for transferring silicon wafer boxes into storage. Background Art

[0002] In order to improve production efficiency and reduce operational risks, the current single crystal silicon wafer production workshop uses automatic wafer box handling instead of manual operation.

[0003] Existing automatic unloading of silicon wafers generally uses a rotatable robotic arm with a suction cup installed on the robotic arm. The suction cup sucks the wafer box and then the robotic arm automatically handles and unloads the wafer.

[0004] The applicant has discovered that the prior art has at least the following technical problems:

[0005] In the process of connecting the production line and the warehouse line, the existing robotic arm has a certain risk of falling off when sucking the film box through the suction cup. Utility Model Content

[0006] The present invention aims to provide a material unloading system for transferring silicon wafer cassettes into storage, thereby resolving the technical problem in the prior art where conventional robotic arms, when connecting production lines with storage lines, use suction cups to hold wafer cassettes, which presents a certain risk of cassettes falling off. The various technical effects of the preferred technical solution among the various technical solutions provided by the present invention are detailed below.

[0007] To achieve the above objectives, the present invention provides the following technical solutions:

[0008] The utility model provides a material unloading system for transferring and storing silicon wafer boxes, comprising:

[0009] The automatic unloading mechanism includes a material receiving rack, a plurality of forks, a lifting assembly, a moving assembly, and a visual positioning device. The lifting assembly is arranged on the material receiving rack, the moving assembly is arranged on the lifting assembly, the forks are arranged on the moving assembly, and the visual positioning device is arranged at the loading end of the material receiving rack;

[0010] Transmission mechanisms, including conveyor lines;

[0011] A docking mechanism, provided between the automatic unloading mechanism and the transmission mechanism, comprising a plurality of synchronous transmission components, the number of the transmission components being no less than the number of the forks;

[0012] The control device, the visual positioning device, the lifting component, the moving component, and the synchronous transmission component are all electrically connected to the control device.

[0013] Preferably, the conveying line comprises a docking section and a conveying section which are arranged in sequence, and the docking section is arranged close to the docking mechanism.

[0014] Preferably, the transmission mechanism further comprises a slideway, wherein:

[0015] The slide is obliquely arranged inside the docking section, the first end of the slide is higher than the second end of the slide, the first end is arranged close to the docking mechanism, and the height of the second end is lower than the height of the conveying section.

[0016] Preferably, the transmission mechanism further includes a lifting structure, the lifting structure is arranged at the bottom of the slide, and the lifting structure is electrically connected to the control device.

[0017] Preferably, the synchronous transmission assembly includes a first power device, and a first conveyor belt and a second conveyor belt transmission-connected to the first power device, and the first power device is electrically connected to the control device.

[0018] Preferably, a gap is provided between the first conveyor belt and the second conveyor belt, and a width of the gap is not less than a width of the fork.

[0019] Preferably, the plurality of forks are connected by a connecting rod.

[0020] Preferably, the lifting assembly comprises:

[0021] A track is arranged in a vertical direction;

[0022] a sliding member connected to the track and capable of moving up and down along the track, wherein the fork is provided on the sliding member;

[0023] The second power device is electrically connected to the track and the control device.

[0024] Preferably, the moving component comprises:

[0025] A slide rail, wherein the bottom of the fork is provided with a slide groove that cooperates with the slide rail;

[0026] The third power device is electrically connected to the slide rail and the control device.

[0027] The utility model provides a material unloading system for the circulation and storage of silicon wafer boxes. By setting an automatic unloading mechanism including a receiving rack, multiple forks, a visual positioning device, a lifting assembly and a moving assembly, when unloading, the forks, the visual positioning device, the lifting assembly and the moving assembly cooperate to make the forks extend into the bottom of the silicon wafer box to support the silicon wafer box, which can avoid the risk of the silicon wafer box falling caused by the use of a manipulator in conjunction with a suction cup in the prior art, and has greater stability when in use; a docking mechanism is set between the automatic unloading mechanism and the transmission mechanism, and the docking mechanism includes multiple groups of synchronous transmission assemblies, which can ensure that multiple forks operate at the same time to improve production efficiency; the visual positioning device, the lifting assembly, the moving assembly and the synchronous transmission assembly are all electrically connected to the control device, which can realize automatic circulation and unloading of silicon wafer boxes, with high unloading efficiency and good circulation stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0029] Figure 1 This is a structural diagram of an embodiment of the present invention's unloading system for transferring and warehousing silicon wafer boxes;

[0030] Figure 2 This is a structural diagram of the automatic unloading mechanism in the unloading system for the transfer and storage of silicon wafer boxes of the utility model;

[0031] Figure 3 This is a structural diagram of the transmission mechanism and docking mechanism in the unloading system for the transfer and storage of silicon wafer boxes of the utility model;

[0032] Figure 4 This is a control principle diagram of the unloading system used for the transfer and storage of silicon wafer boxes in the utility model;

[0033] Figure 5 yes Figure 1 Schematic diagram of the main structure;

[0034] Figure 6 yes Figure 1 Schematic diagram of the top view structure;

[0035] Figure 7 The utility model is a structural schematic diagram of a blanking system for transferring silicon wafer boxes into storage when the system is in operation.

[0036] In the figure: 1. Automatic unloading mechanism; 11. Material receiving rack; 12. Fork; 13. Visual positioning device; 14. Lifting assembly; 141. Track; 142. Sliding member; 143. Second power unit; 15. Moving assembly; 151. Slide rail; 152. Third power unit; 16. Connecting rod;

[0037] 2. Transmission mechanism; 21. Conveyor line; 211. Docking section; 212. Conveyor section; 22. Slideway; 221. First end; 222. Second end; 23. Lifting structure;

[0038] 3. Docking mechanism; 30. Synchronous transmission assembly; 300. First power unit; 301. First conveyor belt; 302. Second conveyor belt; 303. Gap;

[0039] 4. Control device;

[0040] 5. Silicon wafer box. DETAILED DESCRIPTION

[0041] To make the purpose, technical solution, and advantages of the present invention more clear, the technical solution of the present invention will be described in detail below. Obviously, the embodiments described are only some of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other implementation methods obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0042] Figure 1 Schematic diagram of the structure of this embodiment, as shown in FIG. Figure 1 As shown, this embodiment provides a material unloading system for transferring silicon wafer boxes into storage, including an automatic unloading mechanism 1, a transmission mechanism 2, a docking mechanism 3 and a control device 4.

[0043] in, Figure 2 Schematic diagram of the structure of the automatic unloading mechanism in this embodiment. Figure 2 As shown, the automatic unloading mechanism 1 includes a material receiving rack 11, multiple forks 12, a lifting assembly 14, a moving assembly 15 and a visual positioning device 13. The lifting assembly 14 is arranged on the material receiving rack 11, the moving assembly 15 is arranged on the lifting assembly 14, and the fork 12 is arranged on the moving assembly 15. By arranging the lifting assembly 14 and the moving assembly 15, the fork 12 can perform multi-axis operation to ensure the accurate acquisition and circulation of the silicon wafer box 5.

[0044] In this embodiment, the visual positioning device 13 is arranged at the loading end of the material receiving rack 11. When working, the visual positioning device 13 scans the silicon wafer box 5 on the shelf. Through the cooperation of the visual positioning device 13, the lifting component 14 and the moving component 15, the fork 12 can accurately obtain the silicon wafer box 5.

[0045] Figure 3 Schematic diagram of the structure of the transmission mechanism and the docking mechanism in this embodiment. Figure 3 As shown, the transport mechanism 2 includes a conveyor line 21 for transporting wafer cassettes 5. A docking mechanism 3 is disposed between the automatic unloading mechanism 1 and the transport mechanism 2. The docking mechanism 3 includes multiple sets of synchronous transport assemblies 30. The number of synchronous transport assemblies 30 is no less than the number of forks 12, ensuring that multiple forks 12 can operate simultaneously to improve production efficiency. The transport mechanism 2 and the docking mechanism 3 cooperate to transport the wafer cassettes 5 on the forks 12, ensuring smooth transfer and storage.

[0046] Figure 4 This is the control principle diagram of this embodiment, as shown in Figure 4 As shown, this embodiment further provides a control device 4 , and the visual positioning device 13 , the lifting component 14 , the moving component 15 , and the synchronous transmission component 30 are all electrically connected to the control device 4 .

[0047] By setting up the control device 4, when in use, the visual positioning device 13 scans the silicon wafer box 5 on the shelf. After the scanning information is transmitted to the control device 4, the control device 4 can intelligently control the moving component 15, the lifting component 14, and the synchronous transmission component 30, thereby realizing the automatic flow and unloading of the silicon wafer box.

[0048] This unloading system for the circulation and storage of silicon wafer boxes is provided with an automatic unloading mechanism 1 including a receiving rack 11, multiple forks 12, a visual positioning device 13, a lifting component 14 and a moving component 15. When unloading, the fork 12, the visual positioning device 13, the lifting component 14 and the moving component 15 cooperate to make the fork 12 extend into the bottom of the silicon wafer box 5 to support the silicon wafer box 5, which can avoid the risk of the silicon wafer box 5 falling caused by the use of a manipulator in conjunction with a suction cup in the prior art, and has greater stability when used; the docking mechanism 3 is provided between the automatic unloading mechanism 1 and the transmission mechanism 2, and the docking mechanism 3 includes multiple groups of synchronous transmission components 30, which can ensure that multiple forks 12 operate at the same time to improve production efficiency; the visual positioning device 13, the lifting component 14, the moving component 15, and the synchronous transmission component 30 are all electrically connected to the control device 4, which can realize automatic circulation and unloading of silicon wafer boxes, with high unloading efficiency and good circulation stability.

[0049] As an optional embodiment, the lifting assembly 14 includes a rail 141 , a sliding member 142 and a second power device 143 .

[0050] The track 141 is arranged in the vertical direction, the sliding member 142 is connected to the track 141 and can move up and down along the track 141 , and the fork 12 is arranged on the sliding member 142 ; the second power device 143 is electrically connected to the track 141 and the control device 4 .

[0051] In this embodiment, the second power device 143 adopts a servo motor, and the track 141 can adopt an existing mobile module on the market. By setting the second power device 143 to be electrically connected to the track 141 and the control device 4, it is convenient to control the servo motor through the control device 4, and intelligently control the lifting and lowering of the moving component 15 and the fork 12.

[0052] As an optional embodiment, the moving assembly 15 includes a slide rail 151 and a third power device 152. The bottom of the fork 12 is provided with a slide groove that cooperates with the slide rail 151 to ensure that the moving assembly 15 can be used smoothly while preventing the fork 12 from slipping during use.

[0053] In this embodiment, the third power unit 152 is a servo motor, and the slide rail 151 can be a commercially available mobile module. By arranging that the servo motor is electrically connected to the slide rail 151 and the control device 4, the control device 4 can control the servo motor and intelligently control the movement of the fork 12.

[0054] As an optional implementation, Figure 5 yes Figure 1 The main structure diagram of Figure 6 yes Figure 1 The top view structural diagram of Figure 5 and Figure 6 As shown, the conveying line 21 includes a docking section 211 and a conveying section 212 which are arranged in sequence, and the docking section 211 is arranged close to the docking mechanism 3.

[0055] Specifically, the transmission mechanism 2 further includes a slide 22. The slide 22 is obliquely disposed inside the docking section 211, with a first end 221 of the slide 22 being higher than a second end 222 of the slide 22. The first end 221 is disposed close to the docking mechanism 3, and the second end 222 is lower than the height of the transmission section 212.

[0056] By arranging the slideway 22 downwardly along one side proximate to the docking mechanism 3 toward the other side, a non-powered slideway is formed within the conveyor line 21 of the transmission mechanism 2, ensuring smooth transfer of the wafer cassettes 5. Setting the height of the second end 222 lower than that of the conveying section 212 prevents the wafer cassettes from bouncing after falling onto the slideway 22 during transfer, thereby ensuring stability during the docking process between the transmission mechanism 2 and the docking mechanism 3.

[0057] Preferably, the transmission mechanism 2 in this embodiment further includes a lifting structure 23, which is disposed at the bottom of the slideway 22 and is electrically connected to the control device 4. The lifting structure 23 in this embodiment can adopt the same structure as the lifting assembly 14 described above, and will not be described in detail here.

[0058] By providing the lifting structure 23, when there is no incoming material or the transmission mechanism 2 does not need to dock with the docking mechanism 3, the slide 22 can be hidden under the running conveyor line. When there are wafer boxes to be transported, the lift structure 23 lifts the slide 22, which can well ensure the stable operation of the transmission.

[0059] Figure 7 It is a schematic diagram of the structure of this embodiment when it is working. Figure 7 As shown, the specific flow process is:

[0060] S1, the shelf containing the wafer box 5 is transported to the designated position by the AGV; S2, the information of the wafer box 5 on the shelf is obtained through the visual positioning device 13 located at the front end of the fork 12, and the information is fed back to the control device 4; S3, the control device 4 controls the lifting component 14 and the moving component 15 to adjust the docking position, specifically including the fork 12 extending forward to the bottom of the wafer box 5 through the moving component 15 and lifting it through the lifting component 14; S4, after the fork 12 receives the wafer box 5, the lifting component 14 falls and the moving component 15 retracts; S5, the fork 12 is extended backward and falls through the lifting component 14 and the moving component 15, and the wafer box 5 is placed on the synchronous transmission component 30 of the docking mechanism 3; S6, the docking mechanism 3 is transported forward, the slide 22 is lifted by the lifting structure 23, the wafer box 5 falls onto the slide 22, and is sent to the conveying section 212 of the conveyor line 21 through the slide 22 for forward transportation; S7, the slide 22 falls due to the action of the lifting structure 23.

[0061] As an optional embodiment, the synchronous transmission assembly 30 includes a first power device 300, and a first conveyor belt 301 and a second conveyor belt 302 transmission-connected to the first power device 300, and the first power device 300 is electrically connected to the control device 4.

[0062] In this embodiment, the first power device 300 adopts a servo motor, and the first conveyor belt 301 and the second conveyor belt 302 are synchronously conveyed.

[0063] Specifically, a gap 303 is provided between the first conveyor belt 301 and the second conveyor belt 302, and the width of the gap 303 is not less than the width of the fork 12. When in use, the fork 12 can extend into the gap 303 to improve the stability of the unloading operation and ensure the smooth flow of the wafer box 5.

[0064] As an optional embodiment, the multiple forks 12 in this embodiment are connected by a connecting rod 16. In this embodiment, three forks 12 are provided, and the three forks 12 are provided in parallel. The connecting rod 16 is connected to the middle of two adjacent forks 12. The three forks 12 are connected by the connecting rod 16, and the three forks can be effectively controlled by one motor, which not only reduces the control logic but also saves costs. At the same time, the operation synchronization of the three forks can be ensured.

[0065] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any modifications or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A material unloading system for transferring and storing silicon wafer boxes, characterized in that: include: The automatic unloading mechanism includes a material receiving rack, a plurality of forks, a lifting assembly, a moving assembly, and a visual positioning device. The lifting assembly is arranged on the material receiving rack, the moving assembly is arranged on the lifting assembly, the forks are arranged on the moving assembly, and the visual positioning device is arranged at the loading end of the material receiving rack; Transmission mechanisms, including conveyor lines; A docking mechanism, provided between the automatic unloading mechanism and the transmission mechanism, comprising a plurality of synchronous transmission components, the number of the transmission components being no less than the number of the forks; The control device, the visual positioning device, the lifting component, the moving component, and the synchronous transmission component are all electrically connected to the control device.

2. The unloading system for transferring and warehousing silicon wafer boxes according to claim 1 is characterized in that: The conveying line includes a docking section and a conveying section which are arranged in sequence, and the docking section is arranged close to the docking mechanism.

3. The unloading system for transferring and warehousing silicon wafer boxes according to claim 2 is characterized in that: The transmission mechanism further comprises a slideway, wherein: The slide is obliquely arranged inside the docking section, the first end of the slide is higher than the second end of the slide, the first end is arranged close to the docking mechanism, and the height of the second end is lower than the height of the conveying section.

4. The unloading system for transferring and warehousing silicon wafer boxes according to claim 3 is characterized in that: The transmission mechanism further includes a lifting structure, which is arranged at the bottom of the slideway and is electrically connected to the control device.

5. The unloading system for transferring and warehousing silicon wafer boxes according to any one of claims 1 to 4, characterized in that: The synchronous transmission assembly includes a first power device, and a first conveyor belt and a second conveyor belt transmission-connected to the first power device, and the first power device is electrically connected to the control device.

6. The unloading system for transferring and warehousing silicon wafer boxes according to claim 5 is characterized in that: A gap is set between the first conveyor belt and the second conveyor belt, and the width of the gap is not less than the width of the fork.

7. The unloading system for transferring and warehousing silicon wafer boxes according to any one of claims 1 to 4, characterized in that: The plurality of forks are connected by a connecting rod.

8. The unloading system for silicon wafer box transfer and storage according to any one of claims 1 to 4, characterized in that: The lifting assembly comprises: A track is arranged in a vertical direction; a sliding member connected to the track and capable of moving up and down along the track, wherein the fork is provided on the sliding member; The second power device is electrically connected to the track and the control device.

9. The unloading system for silicon wafer box circulation and storage according to any one of claims 1 to 4, characterized in that: The mobile component includes: A slide rail, wherein the bottom of the fork is provided with a slide groove that cooperates with the slide rail; The third power device is electrically connected to the slide rail and the control device.

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