Piston bushing

Abstract

The utility model provides a piston bush which is used for guiding a piston to move in a pneumatic actuator and comprises a piston bush body and a sealing ring arranged on the piston bush body. A hollow hole is formed in the piston bush body; the piston is arranged in the hollow hole in a sleeved mode from one end of the piston bush body. The other end of the piston bush body is in contact with the pneumatic actuator, and a contact surface exists; a first groove is formed in the contact surface, and a contact surface sealing ring is arranged in the first groove. Soft contact of contact surfaces between the piston bush and the pneumatic actuator is achieved, and abrasion of contact parts of the bush and the pneumatic actuator is reduced while contact force is guaranteed; and the soft contact mode is closer to the direct contact part of the piston bush and the pneumatic actuator, so that in the mounting process, the mounting difficulty is reduced, and the tolerance is larger.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a piston bushing. Background Art

[0002] Piston bushings are crucial components in semiconductor manufacturing, serving as a crucial link in production. However, due to the higher precision requirements of semiconductor manufacturing, piston bushings in traditional machinery cannot meet these demands.

[0003] For example, piston bushings, components of pneumatic actuators in pneumatic flow control devices for semiconductor production, primarily guide piston movement and achieve valve sealing. However, conventional piston bushings are typically designed and installed using a hard-contact method, which causes significant wear on the contact surface and places high demands on installation. Tilt during installation also creates significant resistance to piston movement. Furthermore, this tilt reduces the contact area between the pneumatic actuator and the piston, reducing valve sealing.

[0004] Therefore, a new solution for piston bushing is needed. Utility Model Content

[0005] In view of this, an embodiment of this specification provides a piston bushing.

[0006] The embodiments of this specification provide the following technical solutions:

[0007] The embodiments of this specification provide a piston bushing for guiding the movement of a piston in a pneumatic actuator, comprising:

[0008] A piston bushing body and a sealing ring provided on the piston bushing body;

[0009] The piston bushing body is provided with a hollow hole;

[0010] The piston is sleeved into the hollow hole from one end of the piston bushing body;

[0011] The other end of the piston bushing body is in contact with the pneumatic actuator, and a contact surface is formed;

[0012] A first groove is provided on the contact surface, and a contact surface sealing ring is provided in the first groove.

[0013] Optionally, the first groove is provided at an edge of the contact surface.

[0014] Optionally, the first groove is configured to be annular.

[0015] Optionally, the contact surface sealing ring includes one of the following: an O-shaped sealing ring, a Y-shaped sealing ring, and a V-shaped sealing ring.

[0016] Optionally, it is characterized in that the cross-sectional shape of the first groove includes one of the following: rectangular, V-shaped, semicircular and dovetail shape.

[0017] Optionally, the piston bushing body is further provided with a second groove and a bushing sealing ring;

[0018] The second groove is arranged on the outer wall of the four sides of the piston bushing, and a bushing sealing ring is arranged in the second groove.

[0019] Optionally, the piston bushing body is further provided with a third groove and a piston sealing ring;

[0020] The third groove is arranged on the inner wall of the hollow hole in the piston bushing, and a piston sealing ring is arranged in the third groove.

[0021] Optionally, the bushing sealing ring and the piston sealing ring are correspondingly arranged along the piston bushing from the outside to the inside.

[0022] Compared with the prior art, the at least one technical solution adopted in the embodiments of this specification can achieve the following beneficial effects:

[0023] Compared with the prior art method of using hard contact for piston bushings, the embodiment of this specification realizes soft contact of the contact surface between the piston bushing and the pneumatic actuator, which reduces the wear of the contact parts between the bushing and the pneumatic actuator while ensuring the contact force; and this soft contact method is closer to the direct contact part between the piston bushing and the pneumatic actuator, so during the installation process, a small amount of tilt is allowed. During the process of applying the force, due to the deformation of the set sealing ring, the bushing will slide into the corresponding installation position of the pneumatic actuator, reducing the difficulty of installation and increasing the tolerance. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0025] Figure 1 It is a schematic diagram of the overall structure of the piston bushing in this application;

[0026] Figure 2 It is a schematic diagram of each groove in the piston bushing in this application.

[0027] Among them, 1. piston bushing body, 2. contact surface sealing ring, 3. piston sealing ring, 4. bushing sealing ring, 12. first groove, 13. second groove, 14. third groove, 11. hollow hole, 15. contact surface. DETAILED DESCRIPTION

[0028] The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0029] The following describes the embodiments of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the features in the following embodiments and embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative work are within the scope of protection of this application.

[0030] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on this application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspect described herein can be used to implement an apparatus and / or practice a method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this apparatus and / or practice this method.

[0031] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The illustrations only show components related to the present application and are not drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component can be changed at will, and the component layout type may also be more complicated.

[0032] Additionally, in the following description, specific details are provided to provide a thorough understanding of the examples, however, one skilled in the art will appreciate that the examples can be practiced without these specific details.

[0033] Piston bushings are crucial components in semiconductor manufacturing, serving as a crucial link in production. However, due to the higher precision requirements of semiconductor manufacturing, piston bushings in traditional machinery cannot meet these demands.

[0034] For example, piston bushings, components of pneumatic actuators in pneumatic flow control devices used in semiconductor production, primarily guide piston movement and achieve valve sealing. However, conventional piston bushings are typically designed and installed using a hard-contact method, which causes significant wear on the contact surface and places high demands on installation. If the bushings are tilted during installation, they can significantly resist piston movement and reduce valve sealing.

[0035] The inventors have discovered that the contact surface between the piston bushing and the pneumatic actuator is more susceptible to wear.

[0036] Based on this, the embodiment of this specification proposes a new piston sleeve solution for semiconductors, which is used in pneumatic flow control devices for semiconductor production. The piston sleeve gets rid of the hard contact design scheme used in the existing technology, and adopts a soft contact method on the contact surface closer to the piston sleeve and the pneumatic actuator. Compared with the existing technology, the contact surface between the piston sleeve and the pneumatic actuator is increased, while ensuring the contact force, the wear of the contact parts between the piston sleeve and the pneumatic actuator is reduced; and convenient installation is achieved, that is, a small amount of tilt is allowed during the installation process. During the process of applying the force, due to the deformation of the set sealing ring, the sleeve will slide into the corresponding installation position of the pneumatic actuator, reducing the difficulty of installation and having a larger tolerance.

[0037] The following describes the technical solutions provided by various embodiments of the present application in conjunction with the accompanying drawings.

[0038] like Figure 1-Figure 2 As shown, the piston bushing includes:

[0039] The piston bushing body 1 and the sealing rings provided on the piston bushing body 1 (such as the contact surface sealing ring 2, the piston sealing ring 3, the bushing sealing ring 4, etc.);

[0040] The piston bushing body 1 is provided with a hollow hole 11 (i.e., a through hole);

[0041] The piston is sleeved into the hollow hole 11 from one end (such as the lower end) of the piston bushing body 1;

[0042] The other end (such as the upper end) of the piston bushing body 1 is in contact with the pneumatic actuator, and a contact surface 15 is formed;

[0043] A first groove 12 is provided on the contact surface 15, and a contact surface sealing ring 2 is provided in the first groove 12;

[0044] The contact surface sealing ring 2 is used for the piston sleeve body 1 to contact the pneumatic actuator along with the piston. Since it is a soft contact, it can better fit the fitting area of ​​the pneumatic actuator after being pressed. Compared with the hard contact in the existing technology, it is equivalent to increasing the contact area.

[0045] In some embodiments, the first groove is disposed at an edge of the contact surface.

[0046] like Figure 1 and Figure 2 As shown, the embodiment of this specification adopts a soft contact method at the contact surface closer to the piston sleeve and the pneumatic actuator, that is, the first groove 12 is arranged on the contact surface 15 at the other end (such as the upper end) of the piston sleeve body 1, and from the corresponding cross-section of the contact surface, the first groove is arranged at the edge of the cross-section, such as being arranged around the edge of the contact surface.

[0047] In some embodiments, the first groove is arranged in an annular shape at the other end of the piston bushing. For example, the first groove 12 is arranged in an annular shape on the contact surface 15. That is, the first groove is arranged in an annular shape as a whole when viewed from the cross section of the upper end of the piston bushing body.

[0048] In some embodiments, the contact surface sealing ring includes one of the following: an O-ring, a Y-ring, or a V-ring.

[0049] In some embodiments, a cross-sectional shape of the first groove includes one of the following: rectangular, V-shaped, semicircular, and dovetail.

[0050] like Figure 1 and Figure 2 As shown, the piston bushing body 1 is further provided with a second groove 13, a third groove 14, a bushing sealing ring 4 and a piston sealing ring 3;

[0051] Second grooves 13 are provided on the outer walls of the four sides of the piston bushing, and bushing sealing rings 4 are provided in the second grooves 13;

[0052] A third groove 14 is provided on the inner wall of the hollow hole 11 in the piston bushing, and a piston sealing ring 3 is provided in the second groove 14 .

[0053] In some embodiments, the bushing seal ring 4 and the piston seal ring 3 are correspondingly arranged along the piston bushing from the outside to the inside.

[0054] The embodiment of this specification provides a soft-contact piston bushing, which is composed of four parts: a piston bushing body 1, a contact surface sealing ring 2, a piston sealing ring 3, and a bushing sealing ring 4.

[0055] The first groove 12 , the second groove 13 , and the third groove 14 are all sealing ring grooves for receiving corresponding sealing rings.

[0056] The piston seal ring 3 and the bushing seal ring 4 are used to achieve sealing between the upper and lower parts of the pneumatic actuator.

[0057] During operation, the piston passes through the hollow hole 11 (i.e., the through hole), and the piston sleeve body 1 is sleeved on the piston. When the pneumatic actuator drives the piston to move up and down, the horizontal shaking of the piston can be limited. At the same time, there is a contact surface 15 between the piston sleeve and the pneumatic actuator, and a first groove 12 is provided on the contact surface 15. The contact surface sealing ring 2 provided in the first groove 12 can realize soft contact between the pneumatic actuator and the piston sleeve, solving the problems of hard contact between the piston sleeve and the pneumatic actuator in the prior art, which causes greater wear of the contact surface and difficulty in installation.

[0058] In this application, the contact surface seal ring 2 replaces the piston bushing contact surface in contact with the pneumatic actuator. After compression, it tightly fits the pneumatic actuator, forming an enlarged contact surface 15. The contact force is applied through the compression of the seal ring, which reduces wear on the contact surface. Moreover, during installation, a small amount of tilt is allowed. During the application of force, the seal ring deforms, causing the bushing to slide into the installed position.

[0059] Therefore, the piston bushing of the embodiment of this specification adopts a soft contact form, which reduces the wear of the bushing and the contact parts while ensuring the contact force, and also reduces the difficulty of installation and makes the tolerance larger.

[0060] In combination with the above embodiments, the embodiments of this specification further provide a valve used in semiconductor processes, which is provided with a piston sleeve according to any one of the above technical solutions, so that the valve used in semiconductor processes can be used in conjunction with a pneumatic actuator.

[0061] Compared with the prior art method of using hard contact for piston bushings, the embodiment of this specification realizes soft contact of the contact surface between the piston bushing and the pneumatic actuator, which reduces the wear of the contact parts between the bushing and the pneumatic actuator while ensuring the contact force; and this soft contact method is closer to the direct contact part between the piston bushing and the pneumatic actuator, so during the installation process, a small amount of tilt is allowed. During the process of applying the force, due to the deformation of the set sealing ring, the bushing will slide into the corresponding installation position of the pneumatic actuator, reducing the difficulty of installation and increasing the tolerance.

[0062] The same or similar parts between the various embodiments in this specification can be referred to in conjunction with each other. Each embodiment focuses on the differences from other embodiments. In particular, for the product embodiments described later, since they correspond to the methods, the description is relatively simple. For relevant parts, please refer to the partial description of the system embodiment.

[0063] The above description is merely a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present application should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A piston bushing for guiding the movement of a piston in a pneumatic actuator, characterized in that: include: A piston bushing body and a sealing ring provided on the piston bushing body; The piston bushing body is provided with a hollow hole; The piston is sleeved into the hollow hole from one end of the piston bushing body; The other end of the piston bushing body is in contact with the pneumatic actuator, and a contact surface is formed; A first groove is provided on the contact surface, and a contact surface sealing ring is provided in the first groove.

2. The piston bushing according to claim 1, characterized in that: The first groove is arranged at an edge of the contact surface.

3. The piston bushing according to claim 1, characterized in that The first groove is arranged in a ring shape.

4. The piston bushing according to claim 1, characterized in that: The contact surface sealing ring includes one of the following: an O-type sealing ring, a Y-type sealing ring, and a V-type sealing ring.

5. The piston bushing according to claim 1, characterized in that: The cross-sectional shape of the first groove includes one of the following: rectangular, V-shaped, semicircular and dovetail.

6. The piston bushing according to any one of claims 1 to 5, characterized in that: The piston bushing body is also provided with a second groove and a bushing sealing ring; The second groove is arranged on the outer wall of the four sides of the piston bushing, and the bushing sealing ring is arranged in the second groove.

7. The piston bushing according to any one of claims 1 to 5, characterized in that: The piston bushing body is also provided with a third groove and a piston sealing ring; The third groove is arranged on the inner wall of the hollow hole in the piston bushing, and the piston sealing ring is arranged in the third groove.

8. The piston bushing according to any one of claims 1 to 5, characterized in that: The bushing sealing ring and the piston sealing ring are correspondingly arranged along the piston bushing from the outside to the inside.

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