Voice coil motor driving device

Abstract

The utility model provides a voice coil motor driving device, and relates to the field of semiconductor manufacturing equipment. The device comprises a base, a load plate and a voice coil motor, a magnetic steel part of the voice coil motor is fixedly arranged in an accommodating cavity of the base, and a coil part of the voice coil motor is fixedly connected with the load plate; one side of the base is provided with an accommodating space, and the accommodating space is formed by two mounting plates which are arranged at an interval along the movement direction of the load plate; the device further comprises a limiting seat, the limiting seat is located between the two mounting plates and connected with one side of the load plate, one of the first mounting plate and the limiting seat is provided with a first limiting piece, and one of the second mounting plate and the limiting seat is provided with a second limiting piece. According to the device, no transmission part exists between the coil part of the voice coil motor and the load plate, so that the occupied space is small, the connection rigidity is high, and the operation precision can be effectively ensured; the two limiting pieces are arranged in the containing space on one side of the base, and the occupied space of the whole device is controlled while it is guaranteed that the load plate operates in the set stroke through hardware.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to a voice coil motor driving device. Background Art

[0002] In existing technology, shaft structures, or linear motion drive devices, typically employ a servo motor driving a lead screw or a servo motor driving a belt. This requires the installation of guide rails or rods to support the driven load plate, which occupies a significant amount of space and impacts the equipment's assembly space. Furthermore, the use of a servo motor driving a lead screw or a servo motor driving a belt requires transmission components such as a lead screw nut or a belt between the servo motor and the load plate or load, resulting in relatively low operating precision. Utility Model Content

[0003] The purpose of the utility model is to provide a voice coil motor driving device to solve the technical problems existing in the prior art that linear motion driving devices occupy a large space and have low operating precision.

[0004] The voice coil motor driving device provided by the present invention includes a base, a load plate, and a voice coil motor. The magnetic steel portion of the voice coil motor is fixedly disposed in a receiving cavity of the base, and the coil portion of the voice coil motor is fixedly connected to the load plate. A receiving space is provided on one side of the base, and the receiving space is formed by a first mounting plate and a second mounting plate spaced apart along the movement direction of the load plate.

[0005] The voice coil motor driving device also includes a limit seat, which is located between the first mounting plate and the second mounting plate and connected to one side of the load plate. One of the first mounting plate and the limit seat is provided with a first limit member, and one of the second mounting plate and the limit seat is provided with a second limit member. The first limit member and the second limit member are used to limit the stroke of the limit seat.

[0006] Furthermore, the first limiting member is a first impact block, which is fixedly arranged on the side of the first mounting plate opposite to the limiting seat; the second limiting member is a second impact block, which is fixedly arranged on the side of the second mounting plate opposite to the limiting seat, and the second impact block is coaxially arranged with the first impact block.

[0007] Furthermore, a first impact groove is provided on the side of the limit seat opposite to the first mounting plate, and the first impact groove is provided corresponding to the first impact block; and / or a second impact groove is provided on the side of the limit seat opposite to the second mounting plate, and the second impact groove is provided corresponding to the second impact block.

[0008] Furthermore, the load plate moves along the Z axis; the second limit member is coaxially arranged with the first limit member; two balance springs are also arranged between the first mounting plate and the second mounting plate, and the two balance springs are both arranged along the Z axis and symmetrically arranged on both sides of the first limit member and the second limit member.

[0009] Furthermore, the limit seat is provided with a first mounting hole; the balance spring includes a mover ring and a guide rod that can move relative to each other along the Z axis, the mover ring is fixedly installed in the first mounting hole, the guide rod is inserted in the mover ring and its two ends are respectively fixedly connected to the first mounting plate and the second mounting plate.

[0010] Furthermore, an anti-fool-proof protrusion is provided at the end of the guide rod, and a second mounting hole is opened in the first mounting plate, and the anti-fool-proof protrusion protrudes from the second mounting hole; when installing the guide rod, the insertion end of the guide rod passes through the second mounting hole and the center hole of the mover ring in sequence and is fixed to the second mounting plate.

[0011] Furthermore, one end of the load plate along its movement direction is fixedly connected to the coil part through a connecting plate; the load plate is slidably connected to the base through two sets of sliding components, and the two sets of sliding components are extended along the movement direction of the load plate and are respectively located on both sides of the connecting plate.

[0012] Furthermore, the sliding assembly is a cross ball guide rail, and the cross ball guide rail includes a fixed rail and a movable rail that match each other, the fixed rail is fixedly arranged on the base, and the movable rail is fixedly arranged on the load plate.

[0013] Furthermore, the base is provided with two limiting steps, and the limiting steps include a mounting plane parallel to the load plate and a limiting plane perpendicular to the mounting plane;

[0014] The two side surfaces of the fixed rail are respectively fitted with the installation plane and the limiting plane of the same limiting step, or one side surface of the fixed rail is fitted with the installation plane, the limiting plane of the same limiting step is provided with multiple limiting top screws, and the other side surface of the fixed rail is fitted with the end faces of the multiple limiting top screws.

[0015] Furthermore, the width of the limiting plane is greater than the distance between the axis of the fixing rail and the installation plane.

[0016] Furthermore, the voice coil motor drive device also includes a displacement detection component, which includes a reading head and a grating scale. The grating scale is arranged on the side of the load plate away from the limit seat, and the reading head is fixedly installed on the base and arranged opposite to the grating scale.

[0017] Furthermore, two limiting magnets are provided on the side of the load plate away from the limiting seat, and each of the two limiting magnets is fixed to the load plate through a mounting seat so as to be adjustably positioned along the movement direction of the load plate; when the reading head senses the limiting magnets, the load plate stops moving in the original direction or moves in the reverse direction.

[0018] The voice coil motor driving device provided by the utility model can produce the following beneficial effects:

[0019] The voice coil motor driving device provided by the utility model adopts a voice coil motor drive. The coil part of the voice coil motor is fixedly connected to the load plate without any transmission parts between the two. Therefore, it occupies a small space and has a large connection rigidity, which can effectively ensure the operation accuracy.

[0020] The voice coil motor drive device provided by this utility model also features a first limiter and a second limiter. These limiters are located within the accommodation space on one side of the base. This hardware ensures that the load plate operates within a set travel range while effectively controlling the overall space occupied by the drive device. During operation, the two limiters restrict the travel of the limiter seat, which is fixedly connected to the load plate, thereby limiting the travel of the load plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0022] Figure 1 A schematic structural diagram of a voice coil motor driving device provided in an embodiment of the present utility model;

[0023] Figure 2 A schematic diagram of a partial structure of a voice coil motor driving device provided by an embodiment of the present utility model;

[0024] Figure 3 for Figure 2 Enlarged view of point A in the middle;

[0025] Figure 4 for Figure 2 Enlarged view of point B in the middle;

[0026] Figure 5 A schematic structural diagram of a balance spring of a voice coil motor driving device provided by an embodiment of the present utility model;

[0027] Figure 6 This is a bottom view of the partial structure of the voice coil motor driving device provided by an embodiment of the present utility model.

[0028] Description of reference numerals:

[0029] 100 - base; 110 - accommodating cavity; 120 - limiting step; 121 - mounting plane; 122 - limiting plane; 130 - first mounting plate; 131 - second mounting hole; 140 - second mounting plate; 150 - limiting top screw;

[0030] 200-load plate; 210-connection plate;

[0031] 300-Voice coil motor; 310-Magnetic steel part; 320-Coil part;

[0032] 410-first impact block; 420-second impact block;

[0033] 500-limiting seat; 510-first impact groove; 520-second impact groove; 530-first mounting hole;

[0034] 600-Balance spring; 610-Motor ring; 620-Guide rod; 621-Anti-fouling protrusion;

[0035] 700-cross ball guide rail; 710-fixed rail; 720-movable rail;

[0036] 810-reading head; 820-grating scale; 830-limit magnet; 840-mounting base. DETAILED DESCRIPTION

[0037] In order to make the above-mentioned objects, features and advantages of the present invention more clearly understood, the following describes in detail the specific embodiments of the present invention in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0038] This embodiment provides a voice coil motor driving device, such as Figure 1 and Figure 2As shown, the voice coil motor driving device includes a base 100, a load plate 200, and a voice coil motor 300. The magnetic steel portion 310 of the voice coil motor 300 is fixedly disposed in the accommodating cavity 110 of the base 100, and the coil portion 320 of the voice coil motor 300 is fixedly connected to the load plate 200. A accommodating space is provided on one side of the base 100. The accommodating space is formed by a first mounting plate 130 and a second mounting plate 140 spaced apart along the movement direction of the load plate 200. The voice coil motor driving device also includes a limit seat 500. The limit seat 500 is located between the first mounting plate 130 and the second mounting plate 140 and is connected to one side of the load plate 200. A first limit member is provided on one of the first mounting plate 130 and the limit seat 500, and a second limit member is provided on one of the second mounting plate 140 and the limit seat 500. The first limit member and the second limit member are used to limit the travel of the limit seat 500.

[0039] The voice coil motor driving device provided in this embodiment is driven by a voice coil motor 300. The coil portion 320 of the voice coil motor 300 is fixedly connected to the load plate 200 without any transmission parts therebetween. Therefore, the device occupies a small space and has a high connection rigidity, which can effectively ensure the operation accuracy.

[0040] The voice coil motor drive device provided in this embodiment also features a first limiter and a second limiter. These limiters are located within the accommodation space on one side of the base 100. This hardware ensures that the load plate 200 operates within a set travel range while effectively controlling the overall space occupied by the drive device. During operation, the two limiters restrict the travel of the load plate 200 by limiting the travel of the limiter base 500, which is fixedly connected to the load plate 200.

[0041] Specifically, in this embodiment, Figure 1 As shown, the first stopper is a first impact block 410, which is fixedly disposed on the side of the first mounting plate 130 opposite the stopper 500. The second stopper is a second impact block 420, which is fixedly disposed on the side of the second mounting plate 140 opposite the stopper 500 and is coaxial with the first impact block 410. In this arrangement, the first and second stoppers are fixedly disposed on the base 100, reducing the load borne by the load plate 200 or the voice coil motor 300, thereby helping to reduce power consumption. It should be noted that in other embodiments of the present application, the first stopper is not limited to being disposed on the first mounting plate 130, and the second stopper is not limited to being disposed on the second mounting plate 140. For example, the first stopper can also be disposed on the side of the stopper 500 opposite the first mounting plate 130, and the second stopper can also be disposed on the side of the stopper 500 opposite the second mounting plate 140.

[0042] Furthermore, in this embodiment, the stopper is in the form of a striker block. When the stopper seat 500 moves to the limit position defined by the stopper, the impact area between the striker block and the stopper seat 500 is relatively large, which can reduce stress and more stably prevent the stopper seat 500 from continuing to move in the original direction. However, in other embodiments of the present application, the first stopper and the second stopper are not limited to the striker block structure. For example, the first stopper and the second stopper can also be in the form of a limit pin, in which case the limit pin needs to have sufficient rigidity and strength.

[0043] Specifically, in this embodiment, Figure 1 As shown, a first impact groove 510 is provided on the side of the position limiting seat 500 opposite the first mounting plate 130, and the first impact groove 510 corresponds to the first impact block 410. A second impact groove 520 is provided on the side of the position limiting seat 500 opposite the second mounting plate 140, and the second impact groove 520 corresponds to the second impact block 420. In this arrangement, the corresponding impact grooves and impact blocks jointly define the unidirectional motion position limit of the load plate 200. Of course, in other embodiments of the present application, only the first impact groove 510 or the second impact groove 520, or even neither, may be provided, depending on the travel limit requirements of the load plate 200.

[0044] Specifically, in this embodiment, Figure 1 and Figure 2 As shown, the load plate 200 moves along the Z-axis; the second limiter is coaxially arranged with the first limiter; and two balancing springs 600 are also disposed between the first mounting plate 130 and the second mounting plate 140. Both balancing springs 600 are disposed along the Z-axis and symmetrically on either side of the first and second limiters. In this arrangement, the two symmetrically arranged balancing springs 600 provide more stable support for the limiter seat 500, thereby improving the stability of the load plate 200 and the load thereon, and thus, the stability of the entire drive device. Furthermore, the first and second limiters are disposed essentially between the two balancing springs 600, fully utilizing the space between them. This improves space utilization and a compact structure, reducing the overall size and space usage of the device.

[0045] Specifically, in this embodiment, Figure 2 As shown, the limit seat 500 defines a first mounting hole 530. The balance spring 600 includes a movable ring 610 and a guide rod 620, which are movable relative to each other along the Z-axis. The movable ring 610 is fixedly mounted within the first mounting hole 530. The guide rod 620 is inserted into the movable ring 610 and its ends are respectively fixedly connected to the first mounting plate 130 and the second mounting plate 140. Furthermore, in this embodiment, the movable ring 610 is fixedly mounted within the first mounting hole 530 through an interference fit.

[0046] Specifically, in this embodiment, Figure 5 As shown, the end of the guide rod 620 is provided with an anti-mock protrusion 621. The first mounting plate 130 defines a second mounting hole 131, and the anti-mock protrusion 621 protrudes from the second mounting hole 131. When installing the guide rod 620, the inserted end of the guide rod 620 passes through the second mounting hole 131 and the center hole of the movable ring 610 in sequence before being secured to the second mounting plate 140. More specifically, in this embodiment, the diameter of the end of the guide rod 620 is enlarged to be larger than the second mounting hole 131, thereby forming the anti-mock protrusion 621 to guide the installation direction of the guide rod 620. This prevents the inserted end and the end of the guide rod 620 from being inverted during assembly, thereby ensuring the effectiveness of the balancing spring 600.

[0047] More specifically, in this embodiment, the balance spring 600 is a magnetic constant-force spring, which has strong anti-fluctuation performance, a large constant-force range, and higher precision and faster feedback than ordinary springs.

[0048] Specifically, in this embodiment, Figure 1 As shown, one end of the load plate 200, along its direction of motion, is fixedly connected to the coil portion 320 via a connecting plate 210. The load plate 200 is slidably connected to the base 100 via two sets of sliding assemblies, both extending along the direction of motion of the load plate 200 and located on either side of the connecting plate 210. This arrangement provides effective positioning and support for both sides of the load plate 200, significantly enhancing the stability of the load plate 200 and the load thereon, thereby improving the smoothness and precision of the operation of the load plate 200 and its load.

[0049] Specifically, in this embodiment, Figure 2 、 Figure 3 and Figure 6 As shown, the sliding assembly is a cross-ball guide 700, which includes a fixed rail 710 and a movable rail 720 that match each other. The fixed rail 710 is fixed to the base 100, and the movable rail 720 is fixed to the load plate 200. Of course, balls (not shown) are also disposed between the fixed rail 710 and the movable rail 720 of each cross-ball guide 700. In this embodiment, a retaining cage (not shown) is also disposed between the fixed rail 710 and the movable rail 720 of each cross-ball guide 700. This effectively ensures that the load plate 200 maintains high-precision operation.

[0050] Specifically, in this embodiment, Figure 3 As shown, combined with Figure 2 and Figure 6As shown, the base 100 is provided with two limiting steps 120, and the limiting steps 120 include a mounting plane 121 parallel to the load plate 200 and a limiting plane 122 perpendicular to the mounting plane 121. In this embodiment, the two side surfaces of the fixed rail 710 of a cross ball guide 700 are respectively fitted with the mounting plane 121 and the limiting plane 122 of the same limiting step 120. With such an arrangement, the two planes of the limiting step 120 jointly form a good limit for the fixed rail 710. One side surface of the fixed rail 710 of another cross ball guide 700 is fitted with the mounting plane 121, and the limiting plane 122 of the same limiting step 120 is provided with a plurality of limiting top screws 150, and the other side surface of the fixed rail 710 is fitted with the end faces of the plurality of limiting top screws 150, as shown in FIG. Figure 3 As shown, with such an arrangement, the mounting plane 121 of the limiting step 120 and the end faces of the plurality of limiting top screws 150 jointly form a good limit for the fixed rail 710. Moreover, by reducing the protruding length of the limiting top screws 150 extending out of the limiting plane 122, the assembly of the load plate 200 equipped with the movable rail 720 can be facilitated, thereby improving the feasibility and convenience of assembly. After the load plate 200 is assembled in place, increasing the protruding length of the limiting top screws 150 can form a good limit for the corresponding fixed rail 710 and improve its rigidity, thereby ensuring the operating accuracy of the load plate 200.

[0051] Specifically, in this embodiment, Figure 6 As shown, the width of the limiting plane 122 is greater than the distance between the axis of the fixed rail 710 and the mounting plane 121. This configuration greatly increases the rigidity of the fixed rail 710, thereby enhancing the support, limiting, and guiding functions of the cross-ball guide 700 for the load plate 200 and the load thereon, thereby ensuring the smooth and precise operation of the load plate 200 and the load thereon.

[0052] Specifically, in this embodiment, Figure 1 、 Figure 2 as well as Figure 6 As shown, the voice coil motor drive device also includes a displacement detection assembly, which includes a readhead 810 and a grating scale 820. The grating scale 820 is disposed on the side of the load plate 200 away from the limit seat 500. The readhead 810 is fixedly mounted on the base 100 and is positioned opposite the grating scale 820. In this arrangement, the readhead 810 and the limit seat 500 are located on either side of the load plate 200, making the entire device more compact and more rationally arranged, thereby reducing the overall size and space occupied by the device.

[0053] Specifically, in this embodiment, Figure 4 and Figure 6As shown, two limiting magnets 830 are further disposed on the side of the load plate 200 away from the limiting seat 500. Each limiting magnet 830 is fixed to the load plate 200 via a mounting seat 840 and is adjustably positioned along the direction of motion of the load plate 200. When the reading head 810 senses the limiting magnets 830, the load plate 200 stops moving in its original direction or reverses its motion. For the entire drive device, the two limiting magnets 830 and the reading head 810 form a software limit, which cooperates with the hardware limit formed by the impact block to ensure the operational reliability of the entire drive device.

[0054] More specifically, in this embodiment, Figure 4 As shown, the mounting seat 840 is provided with a waist-shaped hole along the direction of movement of the load plate 200. Therefore, by adjusting its position along the direction of movement of the load plate 200, the travel of the load plate 200 can be changed as needed. Of course, when the positions of the two mounting seats 840 and the distance between them are changed, the travel defined by the two impact blocks needs to be adaptively adjusted. For example, the travel of the load plate 200 defined by the two impact blocks can be adjusted by replacing the impact blocks with different heights.

[0055] Finally, it should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "include," "comprise," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0056] The above description of the disclosed embodiments is intended to enable one skilled in the art to implement or use the present invention. Various modifications to the embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A voice coil motor driving device, characterized in that: The invention comprises a base (100), a load plate (200) and a voice coil motor (300), wherein the magnetic steel portion (310) of the voice coil motor (300) is fixedly arranged in the accommodating cavity (110) of the base (100), and the coil portion (320) of the voice coil motor (300) is fixedly connected to the load plate (200); a accommodating space is provided on one side of the base (100), and the accommodating space is formed by a first mounting plate (130) and a second mounting plate (140) arranged at intervals along the moving direction of the load plate (200); The voice coil motor driving device further includes a limit seat (500), the limit seat (500) being located between the first mounting plate (130) and the second mounting plate (140) and connected to one side of the load plate (200), one of the first mounting plate (130) and the limit seat (500) being provided with a first limit member, and one of the second mounting plate (140) and the limit seat (500) being provided with a second limit member, the first limit member and the second limit member being used to limit the travel of the limit seat (500).

2. The voice coil motor driving device according to claim 1, wherein: The first limiting member is a first impact block (410), and the first impact block (410) is fixedly arranged on a side of the first mounting plate (130) opposite to the limiting seat (500); The second limiting member is a second impact block (420), which is fixedly arranged on a side of the second mounting plate (140) opposite to the limiting seat (500), and the second impact block (420) is coaxially arranged with the first impact block (410).

3. The voice coil motor driving device according to claim 2, wherein: A first impact groove (510) is provided on a side of the limiting seat (500) opposite to the first mounting plate (130), and the first impact groove (510) is provided corresponding to the first impact block (410); And / or, a second impact groove (520) is provided on a side of the limiting seat (500) opposite to the second mounting plate (140), and the second impact groove (520) is provided corresponding to the second impact block (420).

4. The voice coil motor driving device according to any one of claims 1 to 3, characterized in that: The load plate (200) moves along the Z axis; the second limiting member is coaxially arranged with the first limiting member; two balancing springs (600) are further arranged between the first mounting plate (130) and the second mounting plate (140), and the two balancing springs (600) are both arranged along the Z axis and symmetrically arranged on both sides of the first limiting member and the second limiting member.

5. The voice coil motor driving device according to claim 4, characterized in that: The limiting seat (500) is provided with a first mounting hole (530); the balancing spring (600) includes a movable ring (610) and a guide rod (620) capable of moving relative to each other along the Z axis, the movable ring (610) is fixedly installed in the first mounting hole (530), and the guide rod (620) is inserted in the movable ring (610) and fixedly connected at both ends to the first mounting plate (130) and the second mounting plate (140).

6. The voice coil motor driving device according to any one of claims 1 to 3, characterized in that: One end of the load plate (200) along its movement direction is fixedly connected to the coil portion (320) via a connecting plate (210); the load plate (200) is slidably connected to the base (100) via two sets of sliding assemblies, both of which are extended along the movement direction of the load plate (200) and are respectively located on both sides of the connecting plate (210).

7. The voice coil motor driving device according to claim 6, wherein: The sliding assembly is a cross ball guide rail (700), and the cross ball guide rail (700) includes a fixed rail (710) and a movable rail (720) that match each other. The fixed rail (710) is fixedly arranged on the base (100), and the movable rail (720) is fixedly arranged on the load plate (200).

8. The voice coil motor driving device according to claim 7, characterized in that: The base (100) is provided with two limiting steps (120), and the limiting steps (120) include a mounting plane (121) parallel to the load plate (200) and a limiting plane (122) perpendicular to the mounting plane (121); The two side surfaces of the fixed rail (710) are respectively fitted with the installation plane (121) and the limiting plane (122) of the same limiting step (120); or, one side surface of the fixed rail (710) is fitted with the installation plane (121), the limiting plane (122) of the same limiting step (120) is provided with a plurality of limiting top screws (150), and the other side surface of the fixed rail (710) is fitted with the end faces of the plurality of limiting top screws (150).

9. The voice coil motor driving device according to claim 8, characterized in that: The width of the limiting plane (122) is greater than the distance between the axis of the fixing rail (710) and the installation plane (121).

10. The voice coil motor driving device according to any one of claims 1 to 3, characterized in that: The voice coil motor driving device further comprises a displacement detection component, the displacement detection component comprising a reading head (810) and a grating ruler (820), the grating ruler (820) being arranged on a side of the load plate (200) away from the limit seat (500), and the reading head (810) being fixedly mounted on the base (100) and arranged opposite to the grating ruler (820); Two limiting magnets (830) are further provided on a side of the load plate (200) away from the limiting seat (500), and the two limiting magnets (830) are each fixedly arranged on the load plate (200) via a mounting seat (840) in an adjustable manner along the movement direction of the load plate (200); when the reading head (810) senses the limiting magnets (830), the load plate (200) stops moving in the original direction or moves in the reverse direction.

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