Pipeline unit, pipeline system and vacuum furnace

Abstract

The utility model relates to a pipeline unit, a pipeline system and a vacuum furnace, and the pipeline unit comprises an exhaust pipe, a switch valve, a first pressure relief branch pipe and a first pressure relief valve. The exhaust pipe is provided with a pump body connecting end and a bin body connecting end, the switching valve is installed on the exhaust pipe and located between the pump body connecting end and the bin body connecting end, and the switching valve is used for opening and closing the exhaust pipe. One end of the first pressure relief branch pipe communicates with the exhaust pipe, the other end of the first pressure relief branch pipe communicates with external atmosphere, and the first pressure relief branch pipe is located between the switch valve and the bin body connecting end; the first pressure relief valve is installed on the first pressure relief branch pipe, and the first pressure relief valve can close the first pressure relief branch pipe when the air pressure in the working bin is smaller than a first preset value and can open the first pressure relief branch pipe when the air pressure in the working bin is larger than the first preset value. According to the pipeline unit, the technical problem that the vacuum degree is difficult to control due to the fact that a working bin of an existing vacuum furnace needs to be provided with multiple holes can be solved.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum welding equipment, and in particular to a piping unit, a piping system and a vacuum furnace. Background Art

[0002] In the field of chip welding, in order to improve the welding quality of the chip, the existing technology is to weld the chip through a vacuum welding furnace. During welding, the vacuum welding furnace uses a vacuum pump to extract the oxygen-containing gas in the working chamber and fill the working chamber with inert gas to create an oxygen-free and dust-free environment, thereby improving the welding quality.

[0003] In related technologies, in order to avoid excessive air pressure in the working chamber, a pressure relief hole is opened on the side wall of the working chamber, and a pressure relief valve is set in the pressure relief hole. When the air pressure in the working chamber is too high, the pressure relief valve automatically opens to achieve pressure relief in the working chamber.

[0004] That is to say, in addition to opening holes for the extraction pipe and the inflation pipe respectively, the existing working chamber also needs to open additional holes for the pressure relief device. However, the more holes opened on the working chamber, the higher the risk of leakage and the more difficult it is to control the vacuum degree. Utility Model Content

[0005] The embodiment of the present application provides a piping unit to solve the technical problem that a large number of holes need to be set in the working chamber of an existing vacuum furnace, resulting in poor control of the vacuum degree.

[0006] In order to achieve the above-mentioned objectives, according to a first aspect of the present application, a piping unit is provided, comprising an exhaust pipe, a switch valve, a first pressure relief branch pipe, and a first pressure relief valve. The exhaust pipe has a pump body connection end and a silo connection end, the pump body connection end being used to communicate with the vacuum pump of the vacuum furnace, and the silo connection end being used to communicate with the working chamber of the vacuum furnace. The switch valve is mounted on the exhaust pipe and is located between the pump body connection end and the silo connection end, and the switch valve is used to open and close the exhaust pipe. One end of the first pressure relief branch pipe is connected to the exhaust pipe, and the other end is connected to the external atmosphere, and the first pressure relief branch pipe is located between the switch valve and the silo connection end; the first pressure relief valve is mounted on the first pressure relief branch pipe, and the first pressure relief valve can close the first pressure relief branch pipe when the air pressure in the working chamber is less than a first preset value, and can open the first pressure relief branch pipe when the air pressure in the working chamber is greater than the first preset value.

[0007] Optionally, in one embodiment, the pipeline unit also includes a gas processing device for processing gas, and the exhaust pipe includes a first exhaust pipe and a second exhaust pipe; one end of the first exhaust pipe forms the warehouse connection end, and the other end is connected to the gas processing device; one end of the second exhaust pipe forms the pump body connection end, and the other end is connected to the gas processing device; the switch valve is arranged between the gas processing device and the pump body connection end.

[0008] Optionally, in one embodiment, the gas processing device includes a cooling tank, which has a cooling cavity and a cooling air inlet and a cooling air outlet respectively connected to the cooling cavity, the cooling air inlet is connected to the first exhaust pipe, and the cooling air outlet is connected to the second exhaust pipe. A liquid cooling pipe is provided in the cooling cavity, and the liquid cooling pipe is at least partially located between the cooling air inlet and the cooling air outlet.

[0009] Optionally, in one embodiment, the cooling air inlet and the cooling air outlet are spaced apart along the height direction of the cooling tank;

[0010] The liquid cooling pipe includes a water inlet pipe section, a water outlet pipe section and a cooling pipe section, wherein the water inlet pipe section and the water outlet pipe section are both located on a side of the cooling pipe section close to the cooling air inlet, and the cooling pipe section includes an inner ring and an outer ring surrounding the inner ring;

[0011] One end of the inner ring is arranged close to the cooling air inlet and connected to the water inlet pipe section, and the other end is arranged close to the cooling air outlet and connected to one end of the outer ring. The other end of the outer ring is arranged close to the cooling air inlet and connected to the water outlet pipe section.

[0012] Optionally, in one embodiment, the pipeline unit further includes a water inlet pipe and a water outlet pipe; the cooling tank includes a cooling tank body and a cooling tank cover, the cooling tank body is provided with the cooling cavity, and the side wall of the cooling tank body is provided with the cooling air inlet and the cooling air outlet;

[0013] The cooling tank cover is covered on the top of the cooling tank body, and a water inlet pipe and a water outlet pipe are also passed through the cooling tank cover, and one end of the water inlet pipe and the water outlet pipe are both located in the cooling cavity and the other end is located outside the cooling tank; and one end of the water inlet pipe is connected to the water inlet pipe section, and the other end is connected to the water inlet pipe; one end of the water outlet pipe is connected to the water outlet pipe section, and the other end is connected to the water outlet pipe.

[0014] Optionally, in one embodiment, a drain pipe is connected to the bottom of the cooling tank, and a drain valve is provided on the drain pipe.

[0015] Optionally, in one embodiment, the gas processing device further includes a filter tank having a filter cavity and a filter air inlet and a filter air outlet respectively connected to the filter cavity; the filter air inlet is connected to the cooling air outlet, the filter air outlet is connected to the second exhaust pipe, and a filter element is provided in the filter cavity.

[0016] Optionally, in one embodiment, the filter element is honeycomb-shaped; and / or, the filter element is made of metal; and / or, the filter tank includes a filter tank body and a filter tank cover, and the filter element is connected to the filter tank cover; and / or, a fixing frame is provided in the filter tank, and the filter element is fixed on the fixing frame.

[0017] Optionally, in one embodiment, the filtered air inlet and the cooling air outlet are connected by a connecting pipe, and a second pressure relief branch is connected to the side wall of the connecting pipe, one end of the second pressure relief branch is connected to the connecting pipe, and the other end is connected to the external atmosphere; the pipeline unit also includes a second pressure relief valve, which is installed on the second pressure relief branch, and the second pressure relief valve can close the second pressure relief branch when the air pressure in the connecting pipe is less than a second preset value, and can open the second pressure relief branch when the air pressure in the connecting pipe is greater than the second preset value.

[0018] Optionally, in one embodiment, the first pressure relief branch pipe and the first air extraction pipe are integrally formed, and / or the second pressure relief branch pipe and the connecting pipe are integrally formed.

[0019] Optionally, in one embodiment, an opening valve is further installed on the exhaust pipe, and the opening valve can adjust the gas flow in the exhaust pipe by adjusting the opening thereof.

[0020] Optionally, in one embodiment, an air pressure sensor is further installed on the air extraction pipe, and the air pressure sensor is used to sense the air pressure in the air extraction pipe and / or the working chamber.

[0021] According to a second aspect of the present application, a pipeline system is provided, comprising a plurality of pipeline units, wherein at least one pipeline unit is the pipeline unit described in any one of the above embodiments.

[0022] Optionally, in one embodiment, the piping system further includes a pressure relief pipe, one end of which is used to be set at a preset exhaust position, the first pressure relief branch pipe is connected to the external atmosphere through the pressure relief pipe, and the first pressure relief valve is arranged between the first pressure relief branch pipe and the pressure relief pipe.

[0023] According to a third aspect of the present application, another piping system is provided, which includes a plurality of piping units, wherein at least one piping unit is a piping unit described in any one of the above embodiments, and the piping system also includes a pressure relief pipe, one end of the pressure relief pipe is used to be set at a preset exhaust position, the first pressure relief branch pipe and the second pressure relief branch pipe are both connected to the external atmosphere through the pressure relief pipe, the first pressure relief valve is arranged between the first pressure relief branch pipe and the pressure relief pipe, and the second pressure relief valve is located between the second pressure relief branch pipe and the pressure relief pipe.

[0024] According to a fourth aspect of the present application, another pipeline system is provided, which includes the pipeline unit described in any one of the above embodiments, and a plurality of second air extraction pipes are arranged at intervals along the direction of gravity.

[0025] Optionally, in one embodiment, an end of the second exhaust pipe away from the gas processing device is further connected to a hose, and the hose is used to be connected to the vacuum pump.

[0026] According to the fifth aspect of the present application, a vacuum furnace is provided, which includes multiple working chambers, multiple vacuum pumps and the pipeline system described in any one of the above embodiments, the multiple working chambers and the multiple vacuum pumps correspond one to one, and the working chambers and the corresponding vacuum pumps are connected through a pipeline unit.

[0027] Optionally, in one embodiment, a plurality of the vacuum pumps are arranged at intervals along the direction of gravity.

[0028] In the pipeline unit of the embodiment of the present application, a first pressure relief branch pipe is provided, one end of which is connected to the exhaust pipe and the other end is connected to the external atmosphere, and a first pressure relief valve is then provided on the first pressure relief branch pipe. When the working chamber is inflated, the on-off valve closes the exhaust pipe to prevent inert gas in the working chamber from leaking through the exhaust pipe. Because the first pressure relief branch pipe is located between the on-off valve and the chamber body connecting pipe of the exhaust pipe, the first pressure relief branch pipe can communicate with the working chamber. Therefore, when the air pressure in the working chamber is too high, gas can flow into the first pressure relief branch pipe through the exhaust pipe, causing the first pressure relief valve to open and relieve the pressure in the working chamber.

[0029] That is, in the present application, the pressure relief valve for relieving pressure in the working chamber is provided on the exhaust pipe, so that there is no need to set an additional pressure relief hole on the side wall of the working chamber, thereby reducing the number of openings in the working chamber and better controlling the vacuum degree of the working chamber.

[0030] Other features and advantages of the present application will be described in detail in the subsequent detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] To more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present application. Those skilled in the art can also derive other drawings based on these drawings without inventive effort.

[0032] In order to more completely understand the present application and its beneficial effects, the following description will be given in conjunction with the accompanying drawings, wherein the same drawing numbers represent the same parts in the following description.

[0033] Figure 1 It is a plan view of an embodiment of a vacuum furnace of the present application;

[0034] Figure 2 It is a three-dimensional schematic diagram of an embodiment of the pipeline system of the present application;

[0035] Figure 3 It is a plan view of an embodiment of the pipeline unit of the present application;

[0036] Figure 4 yes Figure 3 A three-dimensional schematic diagram of the piping unit in FIG.

[0037] Figure 5 It is a plan view of another embodiment of the pipeline unit of the present application;

[0038] Figure 6 yes Figure 5 A three-dimensional schematic diagram of the piping unit in FIG.

[0039] Figure 7 yes Figure 6 Structural cross-sectional view of the piping unit in .

[0040] Description of reference numerals:

[0041] 100. Piping unit;

[0042] 10. Air extraction pipe; 11. First air extraction pipe; 111. Bin connection end; 12. Second air extraction pipe; 121. Pump connection end;

[0043] 20. On-off valve; 30. First pressure relief branch pipe; 40. First pressure relief valve;

[0044] 50. Gas processing device; 51. Cooling tank; 511. Cooling cavity; 512. Cooling air inlet; 513. Cooling air outlet; 514. Cooling tank body; 515. Cooling tank cover; 516. Drain pipe; 52. Liquid cooling pipe; 521. Water inlet pipe section; 522. Water outlet pipe section; 523. Cooling pipe section; 5231. Inner ring; 5232. Outer ring; 53. Water inlet pipe; 54. Water outlet pipe; 55. Water inlet pipe; 56. Water outlet pipe; 57. Filter tank; 571. Filter cavity; 572. Filter air inlet; 573. Filter air outlet; 574. Filter tank body; 575. Filter tank cover; 576. Fixing bracket; 58. Filter element; 59. Connecting pipe;

[0045] 60. Second pressure relief branch pipe; 70. Second pressure relief valve; 80. Opening valve; 90. Air pressure sensor;

[0046] 200, piping system; 210, pressure relief pipe; 220, hose;

[0047] 500, vacuum furnace; 300, working chamber; 310, preheating chamber; 320, welding chamber; 330, cooling chamber; 400, vacuum pump. DETAILED DESCRIPTION

[0048] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the embodiments described are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0049] In order to solve the technical problem that the working chamber of the existing vacuum furnace needs to be provided with many holes, resulting in poor control of the vacuum degree, according to the first aspect of the present application, a pipeline unit 100 is provided, such as Figure 3 or Figure 4 As shown, the pipeline unit 100 mainly includes an air extraction pipe 10 , a switch valve 20 , a first pressure relief branch pipe 30 and a first pressure relief valve 40 .

[0050] The air extraction pipe 10 has a pump body connection end 121 and a bin body connection end 111. Figure 1, the pump body connection end 121 is used to communicate with the vacuum pump 400 in the vacuum furnace 500, and the bin body connection end 111 is used to communicate with the working bin 300 in the vacuum furnace 500. Specifically, the exhaust pipe 10 can be a hard pipe or a soft pipe, and the two ends of the exhaust pipe 10 form the pump body connection end 121 and the bin body connection end 111 respectively; or, the exhaust pipe 10 can also be composed of multiple pipe bodies, and the multiple pipe bodies can all be hard pipes, or all be soft pipes, or part of the pipe bodies can be hard pipes and the other part of the pipe bodies can be soft pipes. In this case, one end of one pipe body forms the pump body connection end 121, and one end of another pipe body forms the bin body connection end 111. And when the exhaust pipe 10 is composed of multiple pipe bodies, other components can be connected between the pipe bodies, such as the gas treatment device 50, the opening valve 80, etc.

[0051] In short, the number of components, connection mode, etc. of the exhaust pipe 10 can be flexibly set according to needs, as long as the exhaust pipe 10 is formed with a pump body connection end 121 for communicating with the vacuum pump 400 and a chamber body connection end 111 for communicating with the working chamber 300. Figure 1 As shown, when the piping unit 100 is applied to the vacuum furnace 500, the exhaust pipe 10 is connected between the vacuum pump 400 and the working chamber 300. The vacuum pump 400 can extract gas after starting, and the chip welding is carried out in the working chamber 300. When the vacuum pump 400 is started and extracts gas, the gas in the working chamber 300 can be sucked out, thereby improving the vacuum degree of the working chamber 300 and providing an oxygen-free and dust-free environment for the welding process.

[0052] It should be noted that when the pump body connection end 121 and the bin body connection end 111 are respectively connected to the vacuum pump 400 and the working bin 300, the assembly gap needs to be sealed to prevent air leakage during the suction process. For example, a connection hole is provided on the working bin 300. When the bin body connection end 111 is connected to the working bin 300 through the connection hole, a sealing ring can be set between the outer wall of the bin body connection end 111 and the inner wall of the connection hole, so that the assembly gap can be sealed.

[0053] like Figure 3 or Figure 4As shown, the switch valve 20 is installed on the exhaust pipe 10 and is located between the pump body connection end 121 and the chamber body connection end 111. The switch valve 20 is used to open and close the exhaust pipe 10. Specifically, when the switch valve 20 is open, the interior of the exhaust pipe 10 is connected, and the vacuum pump 400 can draw gas from the working chamber 300 through the exhaust pipe 10. When the switch valve 20 is closed, the internal passage of the exhaust pipe 10 is cut off, and the vacuum pump 400 cannot draw gas from the working chamber 300 through the exhaust pipe 10. Therefore, when it is necessary to draw gas from the working chamber 300, the switch valve 20 can be opened and the vacuum pump 400 can be started. When the working chamber 300 is filled with inert gas, the switch valve 20 can be closed to prevent the inert gas from leaking through the exhaust pipe 10.

[0054] It should be noted that the type of the switch valve 20 is not limited here. Figure 4 In the illustrated embodiment, the on-off valve 20 is an angle valve and is disposed at a corner of the exhaust pipe 10. Of course, in other embodiments, the on-off valve 20 may also be a ball valve, a butterfly valve, a solenoid valve, or the like. The specific type of on-off valve 20 can be flexibly selected as needed, as long as it can effectively open and close the exhaust pipe 10. Different types of on-off valves 20 have different structures. The specific structure of the on-off valve 20 can be referenced to the relevant prior art regarding the selected type of valve body and will not be described in detail here.

[0055] like Figure 3 or Figure 4 As shown, in this embodiment, the piping unit 100 further includes a first pressure relief branch pipe 30, one end of which is in communication with the air extraction pipe 10 and the other end of which is in communication with the external atmosphere. The first pressure relief branch pipe 30 is located between the on-off valve 20 and the tank body connection end 111. Specifically, in this embodiment, the first pressure relief branch pipe 30 and the air extraction pipe 10 are integrally formed, thereby preventing air leakage at the connection between the first pressure relief branch pipe 30 and the air extraction pipe 10. Of course, in other embodiments, the first pressure relief branch pipe 30 may also be detachably connected to the air extraction pipe 10, as long as a sealed connection between the first pressure relief branch pipe 30 and the air extraction pipe 10 is ensured.

[0056] One end of the first pressure relief branch pipe 30 is connected to the exhaust pipe 10, and the other end is connected to the external atmosphere. Because the first pressure relief branch pipe 30 is between the switch valve 20 and the pump body connection end 121 of the exhaust pipe 10, even if the switch valve 20 closes the exhaust pipe 10, the first pressure relief branch pipe 30 and the working chamber 300 are still connected, and the gas in the working chamber 300 can flow into the first pressure relief branch pipe 30.

[0057] It should be noted that when the pressure is released, the gas flowing out of the working chamber 300 may be hotter gas or gas containing smoke and dust. Therefore, the end of the first pressure relief branch pipe 30 that is connected to the external atmosphere can be extended to a position specifically for exhausting exhaust gas, or connected to a pipe specifically for exhausting exhaust gas.

[0058] like Figure 3 or Figure 4 As shown, the first pressure relief valve 40 is installed on the first pressure relief branch pipe 30. The first pressure relief valve 40 can close the first pressure relief branch pipe 30 when the air pressure in the working chamber 300 is less than the first preset value, and can open the first pressure relief branch pipe 30 when the air pressure in the working chamber 300 is greater than the first preset value.

[0059] Specifically, in this embodiment, the first pressure relief valve 40 is a mechanical pressure relief valve, which can be a lever-type pressure relief valve, a spring-type pressure relief valve, etc. The specific type of the first pressure relief valve 40 can be flexibly selected according to needs, as long as it can be pushed open when the air pressure is greater than the first preset value.

[0060] As described above, even if the on-off valve 20 closes the exhaust pipe 10, the first pressure relief branch 30 and the working chamber 300 remain connected, allowing the gas in the working chamber 300 to flow into the first pressure relief branch 30. Therefore, when the air pressure in the working chamber 300 is low and below a first preset value, the airflow cannot push open the first pressure relief valve 40 and leak, and the first pressure relief valve 40 is in a state of closing the first pressure relief branch 30. However, when the air pressure in the working chamber 300 is high and above the first preset value, the airflow can push open the first pressure relief valve 40 and leak, thereby preventing excessive air pressure in the working chamber 300.

[0061] That is to say, in the present application, the pressure relief valve for relieving pressure in the working chamber 300 is arranged on the exhaust pipe 10, so that there is no need to set an additional pressure relief hole on the side wall of the working chamber 300, thereby reducing the number of openings in the working chamber 300, and thus better controlling the vacuum degree of the working chamber 300, effectively solving the technical problem that the working chamber 300 of the existing vacuum furnace 500 needs to be provided with more holes, resulting in poor control of the vacuum degree.

[0062] It should be noted here that the "first preset value" mentioned in this embodiment can be set according to actual conditions. For example, the first preset value can be slightly smaller than the maximum pressure-bearing pressure of the working chamber 300, so as to avoid the air pressure in the working chamber 300 being greater than the maximum pressure-bearing pressure of the working chamber 300.

[0063] Optionally, in one embodiment, as Figure 5 or Figure 6As shown, the piping unit 100 also includes a gas processing device 50 for processing gas, and the exhaust pipe 10 includes a first exhaust pipe 11 and a second exhaust pipe 12; one end of the first exhaust pipe 11 forms a bin body connection end 111, and the other end is connected to the gas processing device 50; one end of the second exhaust pipe 12 forms a pump body connection end 121, and the other end is connected to the gas processing device 50; the switch valve 20 is arranged between the gas processing device 50 and the pump body connection end 121.

[0064] That is, in this embodiment, the exhaust pipe 10 is composed of multiple tubes, mainly including a first exhaust pipe 11 and a second exhaust pipe 12. One end of the first exhaust pipe 11 forms a chamber connection end 111 and is used to communicate with the working chamber 300. One end of the second exhaust pipe 12 forms a pump connection end 121 and is used to connect to the vacuum pump 400. A gas treatment device 50 is connected between the first exhaust pipe 11 and the second exhaust pipe 12. The gas treatment device 50 can be used to cool, remove dust, and remove odors from the gas to prevent the extracted gas from polluting the environment or damaging the vacuum pump 400, thereby better complying with environmental requirements and extending the service life of the vacuum pump 400.

[0065] For example, optionally, in one embodiment, Figure 7 As shown, the gas processing device 50 includes a cooling tank 51, which has a cooling cavity 511 and a cooling air inlet 512 and a cooling air outlet 513 respectively connected to the cooling cavity 511, the cooling air inlet 512 is connected to the first exhaust pipe 11, and the cooling air outlet 513 is directly or indirectly connected to the second exhaust pipe 12. A liquid cooling pipe 52 is provided in the cooling cavity 511, and the liquid cooling pipe 52 is at least partially located between the cooling air inlet 512 and the cooling air outlet 513.

[0066] Specifically, in this embodiment, when the vacuum pump 400 is started and suction is carried out, the gas in the working chamber 300 flows into the cooling chamber 511 through the first exhaust pipe 11 and the cooling air inlet 512. When the gas contacts the liquid cooling pipe 52 in the cooling chamber 511, the water vapor carried in the gas will condense into water droplets and remain in the cooling chamber 511. The heat in the gas will also be absorbed by the liquid cooling pipe 52, so that the gas is cooled. The dehumidified and cooled gas then flows to the vacuum pump 400 through the cooling outlet 513 and the second exhaust pipe 12. This can prevent high-temperature gas from damaging seals, valves and other components in the pipeline unit 100, and also prevent the discharged gas from causing the surrounding environment temperature to be higher.

[0067] Optionally, in one embodiment, as Figure 7As shown, the cooling air inlet 512 and the cooling air outlet 513 are spaced apart along the height direction of the cooling tank 51, and the cooling air inlet 512 is located above the cooling air outlet 513, so when the gas flows into the cooling cavity 511 from the cooling air inlet 512, the gas needs to flow downward to flow to the cooling air outlet 513 and flow out from the cooling air outlet 513.

[0068] On this basis, if Figure 7 As shown, the liquid cooling pipe 52 includes an inlet pipe section 521, an outlet pipe section 522, and a cooling pipe section 523. The inlet pipe section 521 and the outlet pipe section 522 are both located above the cooling pipe section 523. The cooling pipe section 523 includes an inner ring 5231 and an outer ring 5232 surrounding the inner ring 5231. One end of the inner ring 5231 is located near the cooling air inlet 512 and communicates with the inlet pipe section 521. The other end of the inner ring 5231 is located near the cooling air outlet 513 and communicates with one end of the outer ring 5232. The other end of the outer ring 5232 is located near the cooling air inlet 512 and communicates with the outlet pipe section 522. In other words, the coolant in the liquid cooling pipe 52 first flows downward from the outlet pipe section 522 through the inner ring 5231, then flows upward through the outer ring 5232, and finally flows out through the outlet pipe section 522.

[0069] It can be seen that the gas flows downward after flowing into the cooling cavity 511 from the cooling air inlet 512, and the coolant in the outer ring 5232 flows from bottom to top. The flow directions between the gas and part of the coolant are opposite, which can form convection, and the coolant in the liquid cooling tube 52 can better absorb the heat in the gas, so that the cooling effect of the gas is better.

[0070] Optionally, in one embodiment, as Figure 7 As shown, the piping unit 100 also includes a water inlet pipe 53 and a water outlet pipe 54; the cooling tank 51 includes a cooling tank body 514 and a cooling tank cover 515, a cooling cavity 511 is provided in the cooling tank body 514, and a cooling air inlet 512 and a cooling air outlet 513 are provided on the side wall of the cooling tank body 514, and an opening is provided on the top of the cooling tank body 514 to facilitate the installation of the liquid cooling pipe 52 into the cooling cavity 511. The cooling tank cover 515 is covered on the top of the cooling tank body 514 to close the opening on the top of the cooling tank body 514, and the cooling tank cover 515 is also provided with a water inlet pipe 55 and a water outlet pipe 56. The water inlet pipe 55 and the water outlet pipe 56 both have one end located in the cooling chamber 511 and the other end located outside the cooling tank 51; and one end of the water inlet pipe 55 is connected to the water inlet pipe section 521, and the other end is connected to the water inlet pipe 53; one end of the water outlet pipe 56 is connected to the water outlet pipe section 522, and the other end is connected to the water outlet pipe 54.

[0071] It can be understood that in this embodiment, a water inlet pipe 55 and a water outlet pipe 56 are provided on the cooling tank cover 515, and the liquid cooling pipe 52 and the inlet and outlet water pipes are respectively connected to the two ends of the inlet and outlet water pipes. This facilitates the disassembly, assembly and maintenance of the liquid cooling pipeline. For example, when it is necessary to remove the liquid cooling pipe 52 separately, it is only necessary to open the cooling tank cover 515 and remove the liquid cooling pipe 52 from the cooling tank cover 515, without the need to remove the entire liquid cooling pipeline.

[0072] Optionally, in one embodiment, as Figure 7 As shown, a drain pipe 516 is connected to the bottom of the cooling tank 51. A drain valve (not shown) is provided on the drain pipe 516. When a large amount of condensed water is present in the cooling tank 51, the drain valve can be opened to allow the condensed water to be discharged from the drain pipe 516. After all the condensed water has been discharged, the drain valve can be closed to prevent air leakage.

[0073] Optionally, in one embodiment, as Figure 7 As shown, the gas processing device 50 further includes a filter tank 57, which has a filter cavity 571 and a filter air inlet 572 and a filter air outlet 573 respectively connected to the filter cavity 571, wherein the filter air inlet 572 is connected to the cooling air outlet 513. Figure 1 The filter outlet 573 is connected to the second exhaust pipe 12, and a filter element 58 is provided in the filter cavity 571. The filter element 58 is used to filter smoke, particles, etc. in the gas.

[0074] Specifically, in this embodiment, when the gas is cooled in the cooling tank 51 and flows out from the cooling outlet 513, the gas continues to flow into the filter cavity 571 through the filter inlet 572, and after flowing through the filter element 58, flows out of the filter cavity 571 through the filter outlet 573, and finally flows to the vacuum pump 400 through the second exhaust pipe 12. In the process of the gas flowing through the filter element 58, the filter element 58 can filter out the smoke, particles, etc. in the gas, thereby preventing the smoke particles from flowing with the gas to the vacuum pump 400, preventing the smoke particles from entering the vacuum pump 400 and causing damage to the vacuum pump 400, thereby extending the service life of the vacuum pump 400.

[0075] Optionally, in one embodiment, the filter element 58 is honeycomb-shaped, which can better filter smoke particles in the gas.

[0076] And / or, in one embodiment, the filter element 58 is made of metal, which can prevent the filter element 58 from falling off and ensure the cleanliness of the filter tank 57.

[0077] And / or, in one embodiment, as Figure 7As shown, the filter tank 57 includes a filter tank body 574 and a filter tank cover 575. The filter tank body 574 defines a filter cavity 571. The filter tank body 574 also has a filter air inlet 572 and a filter air outlet 573 on its sidewalls. The top of the filter tank body 574 also has an opening to facilitate installation of the filter element 58 into the filter cavity 571. The filter tank cover 575 covers the top of the filter tank body 574 to seal the top opening. Crucially, in this embodiment, the filter element 58 is connected to the filter tank cover 575. Therefore, when the filter tank cover 575 is lifted, the filter element 58 can be simultaneously lifted out of the filter cavity 571. Similarly, when the filter tank cover 575 is closed on the filter tank body 574, the filter element 58 can also be installed into the filter cavity 571, facilitating installation and removal of the filter element 58.

[0078] And / or, in one embodiment, as Figure 7 As shown, a fixing frame 576 is provided in the filter tank 57, and the filter element 58 is fixed on the fixing frame 576. Specifically, in this embodiment, the filter element 58 is columnar, and a fixing hole is provided on the fixing frame 576. The filter element 58 is inserted and fixed in the fixing hole of the fixing frame 576. In this way, the filter element 58 can be fixed, and the filter element 58 can be prevented from shaking or displacing in the filter cavity 571.

[0079] Optionally, in one embodiment, as Figure 6 or Figure 7 As shown, the filtered air inlet 572 and the cooling air outlet 513 are connected by a connecting pipe 59, and a second pressure relief branch pipe 60 is connected to the side wall of the connecting pipe 59. One end of the second pressure relief branch pipe 60 is connected to the connecting pipe 59, and the other end is connected to the external atmosphere; the pipeline unit 100 also includes a second pressure relief valve 70, which is installed on the second pressure relief branch pipe 60, and the second pressure relief valve 70 can close the second pressure relief branch pipe 60 when the air pressure in the connecting pipe 59 is less than the second preset value, and can open the second pressure relief branch pipe 60 when the air pressure in the connecting pipe 59 is greater than the second preset value.

[0080] Specifically, in this embodiment, when the vacuum pump 400 is started and suction is performed, a large amount of gas will quickly enter the cooling tank 51, the connecting pipe 59 and the filter tank 57, which may cause the air pressure in the cooling tank 51 and the filter tank 57 to be too high. Therefore, in this embodiment, a second pressure relief branch pipe 60 is also connected to the connecting pipe 59, and in order to prevent the surface gas from leaking from the second pressure relief branch pipe 60, a second pressure relief valve 70 is also provided on the second pressure relief branch pipe 60.

[0081] When the air pressure in the connecting pipe 59 is less than the second preset value, the gas cannot push open the second pressure relief valve 70. At this point, the second pressure relief valve 70 closes the second pressure relief branch 60, preventing gas from leaking from the second pressure relief branch 60. However, when the air pressure in the connecting pipe 59 exceeds the second preset value, the gas can push open the second pressure relief valve 70. At this point, the second pressure relief valve 70 opens the second pressure relief branch 60, allowing gas to leak from the second pressure relief branch 60, thus preventing excessive pressure in the connecting pipe 59, the cooling tank 51, or the filter tank 57.

[0082] It should be noted here that the “second preset value” mentioned in this embodiment can be set according to actual conditions. For example, the second preset value can be slightly smaller than the maximum pressure-bearing pressure of the connecting pipe 59 , the cooling tank 51 or the filter tank 57 .

[0083] Optionally, in one embodiment, as Figure 6 As shown, the first pressure relief branch pipe 30 and the first air extraction pipe 11 are integrally formed, which not only ensures a stable connection between the first pressure relief branch pipe 30 and the first air extraction pipe 11 , but also ensures the sealing between the first pressure relief pipe and the first air extraction pipe 11 .

[0084] And / or, in one embodiment, as Figure 6 As shown, the second pressure relief branch pipe 60 and the connecting pipe 59 are integrally formed, which not only ensures a stable connection between the second pressure relief branch pipe 60 and the connecting pipe 59 , but also ensures the sealing between the second pressure relief pipe and the connecting pipe 59 .

[0085] Optionally, in one embodiment, as Figure 1 or Figure 2 As shown, an opening valve 80 is also installed on the exhaust pipe 10. The opening valve 80 can adjust the gas flow in the exhaust pipe 10 by adjusting its opening, so that the flow and flow rate can be adjusted more accurately, thereby matching welding processes with different requirements and improving welding quality.

[0086] The type of the opening valve 80 is not specifically limited here. For example, the opening valve 80 can be a proportional ball valve, a butterfly valve, a solenoid valve, etc., as long as the gas flow rate can be controlled by controlling the opening.

[0087] In addition, the installation position of the opening valve 80 is not limited and can be flexibly selected according to needs, for example, Figure 1 or Figure 2 In the structural solution shown, the opening valve 80 is provided on the second air extraction pipe 12 .

[0088] Optionally, in one embodiment, as Figure 3 or Figure 4As shown, an air pressure sensor 90 is also installed on the exhaust pipe 10. The air pressure sensor 90 is used to sense the air pressure in the exhaust pipe 10 and / or the working chamber 300. This makes it convenient for the staff to control the vacuum pump 400 and the opening and closing of each valve body according to the measured air pressure, thereby better controlling the vacuum degree in the working chamber 300 and improving the chip welding quality.

[0089] like Figure 3 As shown, the air pressure sensor 90 is arranged on the first air exhaust pipe 11, and the air pressure sensor 90 is located between the first pressure relief valve 40 and the pump body connection end 121 of the first air exhaust pipe 11, so that the air pressure sensor 90 can detect both the air pressure in the working chamber 300 and the air pressure in the air exhaust pipe 10.

[0090] like Figure 2 As shown, according to the second aspect of the present application, a pipeline system 200 is provided, and the pipeline system 200 includes a plurality of pipeline units 100, wherein at least one pipeline unit 100 is a pipeline unit 100 of any one of the above embodiments. Therefore, the pipeline system 200 has all the beneficial effects of the above-mentioned pipeline units 100, and the present disclosure will not repeat them here.

[0091] Specifically, in this embodiment, the multiple pipeline units 100 in the pipeline system 200 may all be the pipeline units 100 in any of the embodiments described above, or only some of the pipeline units 100 may be the pipeline units 100 in any of the embodiments described above.

[0092] For example, in Figure 2 In the illustrated structural scheme, the piping system 200 includes three piping units 100, all of which are the piping units 100 described above. Two of the piping units 100 have the same configuration, including a first air extraction pipe 11, a first pressure relief branch pipe 30, a first pressure relief valve 40, an on-off valve 20, a cooling tank 51, a connecting pipe 59, a second pressure relief branch pipe 60, a second pressure relief valve 70, a filter tank 57, a second air extraction pipe 12, and an opening valve 80. The other piping unit 100 includes only the first air extraction pipe 11, the first pressure relief branch pipe 30, the first pressure relief valve 40, the on-off valve 20, and the second air extraction pipe 12, without the cooling tank 51, the connecting pipe 59, the second pressure relief branch pipe 60, the second pressure relief valve 70, the filter tank 57, and the opening valve 80.

[0093] Optionally, in one embodiment, as Figure 2As shown, the piping system 200 also includes a pressure relief pipe 210, one end of which is used to be set at a preset exhaust location, and the first pressure relief branch pipe 30 is connected to the external atmosphere through the pressure relief pipe 210. The first pressure relief valve 40 is arranged between the first pressure relief branch pipe 30 and the pressure relief pipe 210, so that the gas can be directed to the preset exhaust location. The preset exhaust location can be a place specifically used to discharge exhaust gas to avoid the discharged gas polluting the environment.

[0094] It should be noted that you can refer to Figure 1 When the multiple-pipeline unit 100 includes multiple first pressure relief branches 30 , the multiple first pressure relief branches 30 can be connected to the same pressure relief pipe 210 , which can reduce the number of components of the piping system 200 and simplify the structure of the piping system 200 .

[0095] Of course, if the pipeline unit 100 also includes a second pressure relief branch 60, the second pressure relief branch 60 can also be connected to the pressure relief pipe 210, that is, the first pressure relief branch 30 and the second pressure relief branch 60 are connected to the same pressure relief pipe 210, which can make the structure of the pipeline system 200 simpler.

[0096] For example, according to the third aspect of the present application, another piping system 200 is provided, wherein the piping system 200 includes a plurality of piping units 100, wherein at least one piping unit 100 includes both a first pressure relief branch 30 and a second pressure relief branch 60, and the piping system 200 also includes a pressure relief pipe 210, one end of the pressure relief pipe 210 is used to be set at a preset exhaust position, and the first pressure relief branch 30 and the second pressure relief branch 60 are both connected to the external atmosphere through the pressure relief pipe 210, and the first pressure relief valve 40 is arranged between the first pressure relief branch 30 and the pressure relief pipe 210, and the second pressure relief valve 70 is located between the second pressure relief branch 60 and the pressure relief pipe 210. In this way, there is no need to set a pressure relief pipe 210 for each pressure relief branch, thereby simplifying the structure of the piping system 200.

[0097] like Figure 2 As shown, according to the fourth aspect of the present application, another piping system 200 is provided, the piping system 200 includes a plurality of piping units 100 of any one of the above embodiments, and the exhaust pipe 10 in each piping unit 100 includes a first exhaust pipe 11 and a second exhaust pipe 12, the plurality of first exhaust pipes 11 are respectively used to be connected to the plurality of working chambers 300 in a one-to-one correspondence, and the plurality of second exhaust pipes 12 are respectively used to be connected to the plurality of vacuum pumps 400 in a one-to-one correspondence.

[0098] Crucially, in this embodiment, multiple second exhaust pipes 12 are arranged at intervals along the direction of gravity. It can be understood that compared with the situation where multiple second exhaust pipes 12 are arranged at intervals along the horizontal direction, when multiple second exhaust pipes 12 are arranged at intervals along the direction of gravity, the footprint of the pipeline system 200 can be reduced.

[0099] Optionally, in one embodiment, the end of the second exhaust pipe 12 away from the gas treatment device 50 is also connected to a hose 220. The hose 220 can specifically be a corrugated tube. The hose 220 is used to connect to the vacuum pump 400. In this way, when multiple vacuum pumps 400 are not directly opposite to multiple second exhaust pipes 12, it is convenient to connect the second exhaust pipe 12 to the corresponding vacuum pump 400, and the assembly is more flexible.

[0100] like Figure 1 As shown, according to the fifth aspect of the present application, a vacuum furnace 500 is provided, which includes a plurality of working chambers 300, a plurality of vacuum pumps 400 and a piping system 200 of any one of the above embodiments (the piping system 200 is composed of a plurality of piping units 100), the plurality of working chambers 300 and the plurality of vacuum pumps 400 correspond one to one, and the working chambers 300 and the corresponding vacuum pumps 400 are connected through a piping unit 100.

[0101] Specifically, in Figure 1 In the illustrated structural scheme, multiple working chambers 300 include a preheating chamber 310, a welding chamber 320, and a cooling chamber 330. The preheating chamber 310 is used to preheat the chips before actual welding, which improves welding efficiency and avoids thermal stress during welding. The welding chamber 320 is used for actual chip welding. The welding chamber 320 is the core area of ​​the welding furnace and has more stringent temperature and pressure requirements. The cooling chamber 330 is used to evenly cool the chips after welding to avoid product defects caused by excessive cooling or slow cooling.

[0102] Three vacuum pumps 400 are provided, and the three vacuum pumps 400 correspond to the three working chambers 300 one by one, so as to control the air pressure in the three working chambers 300 respectively to ensure the welding quality.

[0103] On the basis that there are three working chambers 300 and three vacuum pumps 400 respectively, the pipeline system 200 also includes three pipeline units 100 , and each vacuum pump 400 is connected to the corresponding working chamber 300 via a pipeline unit 100 .

[0104] exist Figure 1In the structural scheme shown, because the gas temperature in the preheating chamber 310 and the welding chamber 320 is relatively high and may contain smoke particles, the pipeline units 100 corresponding to the preheating chamber 310 and the welding chamber 320 are configured identically, including a first exhaust pipe 11, a first pressure relief branch pipe 30, a first pressure relief valve 40, an on-off valve 20, a cooling tank 51, a connecting pipe 59, a second pressure relief branch pipe 60, a second pressure relief valve 70, a filter tank 57, a second exhaust pipe 12, and an opening valve 80.

[0105] The gas temperature in the cooling chamber 330 is relatively low, and there are basically no smoke particles, so the pipeline unit 100 corresponding to the cooling chamber 330 only includes the first exhaust pipe 11, the first pressure relief branch pipe 30, the first pressure relief valve 40, the switch valve 20 and the second exhaust pipe 12, and the cooling tank 51, the connecting pipe 59, the second pressure relief branch pipe 60, the second pressure relief valve 70, the filter tank 57 and the opening valve 80 are not provided.

[0106] Optionally, in one embodiment, a plurality of vacuum pumps 400 are arranged at intervals along the direction of gravity, so that they can correspond to a plurality of second exhaust pipes 12 arranged at intervals along the direction of gravity, which is convenient for assembly and saves floor space.

[0107] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of this application, "plurality" means two or more, unless otherwise specifically defined.

[0108] In the above embodiments, the description of each embodiment has its own focus. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0109] The embodiments, implementation methods and related technical features of the present application can be combined and replaced with each other without conflict.

[0110] The above are merely preferred embodiments of the present application and do not constitute any form of limitation to the present application. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present application without departing from the content of the technical solution of the present application are still within the scope of the technical solution of the present application.

Claims

1. A piping unit for a vacuum furnace, comprising a vacuum pump and a working chamber, characterized in that: The pipeline unit includes: An exhaust pipe having a pump body connecting end and a chamber body connecting end, wherein the pump body connecting end is used to communicate with the vacuum pump, and the chamber body connecting end is used to communicate with the working chamber; a switch valve, mounted on the air extraction pipe and located between the pump body connection end and the bin body connection end, and the switch valve is used to open and close the air extraction pipe; a first pressure relief branch pipe, one end of which is connected to the air extraction pipe and the other end of which is connected to the external atmosphere, and the first pressure relief branch pipe is located between the switch valve and the connection end of the silo body; and A first pressure relief valve is installed on the first pressure relief branch pipe. The first pressure relief valve can close the first pressure relief branch pipe when the air pressure in the working chamber is less than a first preset value, and can open the first pressure relief branch pipe when the air pressure in the working chamber is greater than the first preset value.

2. The pipeline unit according to claim 1, characterized in that The pipeline unit further includes a gas processing device for processing gas, and the gas extraction pipe includes a first gas extraction pipe and a second gas extraction pipe; One end of the first exhaust pipe forms the tank body connection end, and the other end is connected to the gas processing device; one end of the second exhaust pipe forms the pump body connection end, and the other end is connected to the gas processing device; the switch valve is arranged between the gas processing device and the pump body connection end.

3. The pipeline unit according to claim 2, characterized in that: The gas processing device includes a cooling tank, which has a cooling cavity and a cooling air inlet and a cooling air outlet respectively connected to the cooling cavity, the cooling air inlet is connected to the first air extraction pipe, and the cooling air outlet is connected to the second air extraction pipe. A liquid cooling pipe is provided in the cooling cavity, and the liquid cooling pipe is at least partially located between the cooling air inlet and the cooling air outlet.

4. The pipeline unit according to claim 3, characterized in that The cooling air inlet and the cooling air outlet are spaced apart along the height direction of the cooling tank; The liquid cooling pipe includes a water inlet pipe section, a water outlet pipe section and a cooling pipe section, wherein the water inlet pipe section and the water outlet pipe section are both located on a side of the cooling pipe section close to the cooling air inlet, and the cooling pipe section includes an inner ring and an outer ring surrounding the inner ring; One end of the inner ring is arranged close to the cooling air inlet and connected to the water inlet pipe section, and the other end is arranged close to the cooling air outlet and connected to one end of the outer ring. The other end of the outer ring is arranged close to the cooling air inlet and connected to the water outlet pipe section.

5. The pipeline unit according to claim 4, characterized in that: The pipeline unit also includes a water inlet pipe and a water outlet pipe; The cooling tank comprises a cooling tank body and a cooling tank cover, the cooling tank body is provided with the cooling cavity, and the side wall of the cooling tank body is provided with the cooling air inlet and the cooling air outlet; The cooling tank cover is covered on the top of the cooling tank body, and a water inlet pipe and a water outlet pipe are also passed through the cooling tank cover, and one end of the water inlet pipe and the water outlet pipe are both located in the cooling cavity and the other end is located outside the cooling tank; and one end of the water inlet pipe is connected to the water inlet pipe section, and the other end is connected to the water inlet pipe; one end of the water outlet pipe is connected to the water outlet pipe section, and the other end is connected to the water outlet pipe.

6. The pipeline unit according to claim 3, characterized in that: The bottom of the cooling tank is connected with a drain pipe, and a drain valve is provided on the drain pipe.

7. The pipeline unit according to claim 3, characterized in that: The gas processing device further comprises a filter tank having a filter cavity and a filter air inlet and a filter air outlet respectively connected to the filter cavity; The filter air inlet is communicated with the cooling air outlet, the filter air outlet is communicated with the second air extraction pipe, and a filter element is provided in the filter cavity.

8. The pipeline unit according to claim 7, characterized in that: The filter element is honeycomb-shaped; And / or, the filter element is made of metal; And / or, the filter tank includes a filter tank body and a filter tank cover, and the filter element is connected to the filter tank cover; And / or, a fixing frame is provided in the filter tank, and the filter element is fixed on the fixing frame.

9. The pipeline unit according to claim 7, characterized in that: The filtered air inlet and the cooling air outlet are connected by a connecting pipe, a second pressure relief branch pipe is connected to the side wall of the connecting pipe, one end of the second pressure relief branch pipe is connected to the connecting pipe, and the other end is connected to the external atmosphere; The pipeline unit also includes a second pressure relief valve, which is installed on the second pressure relief branch pipe, and the second pressure relief valve can close the second pressure relief branch pipe when the air pressure in the connecting pipe is less than a second preset value, and can open the second pressure relief branch pipe when the air pressure in the connecting pipe is greater than the second preset value.

10. The pipeline unit according to claim 9, characterized in that: The first pressure relief branch pipe and the first air extraction pipe are integrally formed, and / or the second pressure relief branch pipe and the connecting pipe are integrally formed.

11. The pipeline unit according to any one of claims 1 to 10, characterized in that: The air extraction pipe is also provided with an opening valve, and the opening valve can adjust the gas flow in the air extraction pipe by adjusting the opening thereof.

12. The pipeline unit according to claim 11, characterized in that: An air pressure sensor is also installed on the air extraction pipe, and the air pressure sensor is used to sense the air pressure in the air extraction pipe and / or the working chamber.

13. A piping system, characterized in that: The system comprises a plurality of pipeline units, wherein at least one pipeline unit is the pipeline unit according to any one of claims 1 to 12.

14. The piping system according to claim 13, wherein: The piping system also includes a pressure relief pipe, one end of which is used to be set at a preset exhaust position, the first pressure relief branch pipe is connected to the external atmosphere through the pressure relief pipe, and the first pressure relief valve is set between the first pressure relief branch pipe and the pressure relief pipe.

15. A piping system, characterized in that: comprising a plurality of pipeline units, wherein at least one pipeline unit is a pipeline unit according to any one of claims 9 to 12; The piping system also includes a pressure relief pipe, one end of which is used to be set at a preset exhaust position, the first pressure relief branch pipe and the second pressure relief branch pipe are both connected to the external atmosphere through the pressure relief pipe, the first pressure relief valve is arranged between the first pressure relief branch pipe and the pressure relief pipe, and the second pressure relief valve is located between the second pressure relief branch pipe and the pressure relief pipe.

16. A piping system, characterized in that: It comprises a plurality of pipeline units according to any one of claims 2 to 12, wherein the plurality of second air extraction pipes are arranged at intervals along the direction of gravity.

17. The piping system according to claim 16, wherein: One end of the second exhaust pipe away from the gas processing device is further connected to a hose, and the hose is used to be connected to the vacuum pump.

18. A vacuum furnace, characterized in that: It comprises a plurality of working chambers, a plurality of vacuum pumps and a pipeline system as described in any one of claims 13 to 17, wherein the plurality of working chambers and the plurality of vacuum pumps correspond one to one, and the working chambers and the corresponding vacuum pumps are connected through a pipeline unit.

19. The vacuum furnace according to claim 18, characterized in that The plurality of vacuum pumps are arranged at intervals along the direction of gravity.

Images