Vacuum platform deck device

Abstract

The utility model relates to the technical field of automatic positioning of glass substrates, in particular to a vacuum carrying table device which comprises a fixed support, a first direction positioning module, a second direction positioning module, a vacuum lifting module and a vacuum carrying table. The vacuum platform deck is arranged on the fixed support, and a plurality of vacuum adsorption holes are formed in the vacuum platform deck; the first direction positioning module and the second direction positioning module are used for positioning a product on the vacuum carrying table; the vacuum lifting module comprises a lifting driving element, a lifting connecting plate and a plurality of adsorption ejector rods, suction cups are arranged at the ends of the adsorption ejector rods, and one ends of the adsorption ejector rods penetrate through the vacuum carrying table so that products can be adsorbed and placed on the vacuum carrying table or jacked up from the vacuum carrying table. According to the positioning device, the glass substrate can be positioned in the X direction and the Y direction, early-stage preparation is made for follow-up visual positioning, and then efficiency is improved. In addition, the product is jacked up from the vacuum carrying table, so that the robot can take and place the glass substrate from top to bottom.

Description

Technical Field

[0001] The utility model relates to the technical field of automatic positioning of glass substrates, in particular to a vacuum stage device. Background Art

[0002] Automated positioning of glass substrates is a crucial technology in the field of advanced manufacturing. It mainly involves the precise, fast and stable positioning of glass substrates on the production line to ensure the accuracy and efficiency of subsequent processing steps.

[0003] During automated positioning, glass substrates are typically placed on a work platform equipped with a vacuum suction function. By controlling the air holes to create vacuum suction on the glass, the position of the glass substrate on the work platform can be precisely controlled. Subsequently, suction cups or other vacuum suction devices are used to stably hold the glass substrate in place, preventing it from shifting during processing. However, the accuracy of existing glass substrate positioning is difficult to control, affecting positioning accuracy. Therefore, improvements to the existing glass substrate carrier structure are needed. Utility Model Content

[0004] To solve the above problems, the utility model can realize the positioning of the glass substrate in the X and Y directions, making preliminary preparations for subsequent visual positioning, thereby improving efficiency; ensuring that the glass substrate can be accurately aligned with the predetermined position during processing or testing, thereby avoiding position deviation. In addition, the product is lifted from the vacuum stage so that the robot can pick up and place the glass substrate from the top down.

[0005] The technical solution adopted by the present invention is: a vacuum carrier device, including a fixed bracket, a first direction positioning module, a second direction positioning module, a vacuum lifting module and a vacuum carrier; the vacuum carrier is arranged on the fixed bracket, and a plurality of vacuum adsorption holes are provided on the vacuum carrier; the first direction positioning module and the second direction positioning module are used for positioning the product on the vacuum carrier; the vacuum lifting module includes a lifting drive element, a lifting connecting plate and a plurality of adsorption push rods, and a suction cup is provided at the end of the adsorption push rod, and one end of the adsorption push rod passes through the vacuum carrier to adsorb and place the product on the vacuum carrier or lift the product from the vacuum carrier.

[0006] A further improvement to the above scheme is that the fixed bracket includes a base plate and side plates arranged on both sides of the base plate, and the vacuum carrier is arranged at the top of the side plate; a placement cavity is formed between the vacuum carrier and the base plate, and the lifting drive element is arranged on the placement cavity.

[0007] A further improvement to the above scheme is that the first direction positioning module includes an end face positioning component and an end face clamping component, the end face positioning component is arranged on one side of the vacuum carrier, and the end face positioning component is opposite to the end face clamping component; the end face clamping component includes an end face clamping drive element, an end face clamping bracket and an end face clamping shaft, the vacuum carrier is provided with an end face clamping groove, the end face clamping drive element is arranged on the fixed bracket, and is used to drive the end face clamping bracket to drive the end face clamping shaft to slide along the end face clamping groove.

[0008] A further improvement to the above scheme is that the end face positioning assembly includes an end face positioning bracket, an end face positioning driving element, an end face positioning movable frame and an end face positioning shaft, the end face positioning bracket is arranged on a fixed bracket, the end face positioning driving element is arranged on the end face positioning bracket, the end face positioning movable frame is arranged at the driving end of the end face driving element, the end face positioning shaft is arranged on the end face positioning movable frame, and the end face positioning shaft is opposite to the end face clamping shaft for positioning both end faces of the product.

[0009] A further improvement to the above scheme is that the end face clamping drive element includes an end face drive base, an end face drive motor, an end face drive screw and an end face drive guide rail, the end face drive base is arranged on a fixed bracket, the end face drive motor is arranged on the end face drive base, the end face drive screw is connected to the drive end of the end face drive motor, and the end face drive guide rail is arranged on both sides of the end face drive base; the end face clamping bracket is slidably arranged on the end face drive guide rail and is connected to the end face drive screw; the end face drive motor is used to drive the end face drive screw to drive the end face clamping bracket to slide along the end face drive guide rail.

[0010] A further improvement to the above solution is that two groups of second direction positioning modules are provided, and the two groups of second direction positioning modules are relatively arranged on both sides of the vacuum carrier.

[0011] A further improvement to the above scheme is that the second direction positioning module includes a side clamping drive element, a side clamping bracket and a side clamping shaft, and side clamping grooves are provided on both sides of the vacuum carrier. The side clamping drive element is provided on the fixed bracket and is used to drive the side clamping bracket to drive the side clamping shaft to slide along the side clamping groove to clamp and position the product on the side.

[0012] A further improvement to the above scheme is that the side clamping drive element includes a side drive base, a side drive motor, a side drive screw and a side drive guide rail, the side drive base is arranged on a fixed bracket, the side drive motor is arranged on the side drive base, the side drive screw is connected to the driving end of the side drive motor, and the side drive guide rail is arranged on both sides of the side drive base; the side clamping bracket is slidably arranged on the side drive guide rail and is connected to the side drive screw; the side drive motor is used to drive the side drive screw to drive the side clamping bracket to slide along the side drive guide rail.

[0013] A further improvement to the above solution is that a plurality of through holes are provided on the vacuum carrier, and one end of the adsorption ejector rod passes through the through hole.

[0014] A further improvement to the above solution is that a buffer element is provided between the lifting connecting plate and the vacuum stage.

[0015] The beneficial effects of the utility model are:

[0016] Compared to existing vacuum stages, the present invention, used for positioning glass substrates, utilizes a first-direction positioning module and a second-direction positioning module to achieve precise positioning of glass substrates in both the X and Y directions. These two positioning modules may utilize precision guide rails, sliders, and drive motors, achieving high-precision position feedback and adjustment through a closed-loop control system. This high-precision positioning capability ensures that glass substrates are accurately aligned to their intended positions during processing or testing, facilitating subsequent visual positioning and improving efficiency, thereby avoiding processing errors or test failures caused by positional deviations. Furthermore, the device excels in improving work efficiency. The design of the vacuum lifting module automates operations such as suction, placement, and lifting of glass substrates. This not only significantly reduces operator workload but also significantly improves work efficiency. Furthermore, the coordinated use of the suction lift pin and suction cup enables rapid and stable suction of glass substrates, preventing damage or displacement of the glass substrates due to improper operation. The fixed bracket, serving as the support structure for the entire device, is rationally designed and robust, capable of withstanding heavy loads and maintaining stable operation. At the same time, the multiple vacuum adsorption holes on the vacuum carrier can achieve multi-point adsorption of the glass substrate, thereby further improving the stability of the system. This stability is of great significance for ensuring that the position of the glass substrate remains unchanged during processing or testing, and avoiding problems such as vibration and shaking. The utility model demonstrates technical effects such as high precision, high efficiency, high stability and wide applicability in the positioning of glass substrates. These technical effects not only improve the processing accuracy and test accuracy of glass substrates, but also reduce production costs and labor intensity, providing strong technical support for the production and testing of glass substrates. In addition, the product is lifted from the vacuum carrier so that the robot can pick up and place the glass substrate from top to bottom. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a three-dimensional schematic diagram of the vacuum stage device of the utility model;

[0018] Figure 2 for Figure 1 A three-dimensional schematic diagram of the medium vacuum stage assembly from another perspective;

[0019] Figure 3 for Figure 1 A schematic side view of the medium vacuum stage assembly;

[0020] Figure 4 for Figure 1 Schematic diagram of part of the structure of the medium vacuum stage device.

[0021] Description of reference numerals: fixed bracket 1, bottom plate 11, side plate 12;

[0022] First direction positioning module 2, end surface positioning assembly 21, end surface positioning bracket 211, end surface positioning driving element 212, end surface positioning movable frame 213, end surface positioning shaft 214, end surface clamping assembly 22, end surface clamping driving element 221, end surface driving base 2211, end surface driving motor 2212, end surface driving screw 2213, end surface driving guide rail 2214, end surface clamping bracket 222, end surface clamping shaft 223;

[0023] Second direction positioning module 3, side clamping drive element 31, side drive base 311, side drive motor 312, side drive screw 313, side drive guide rail 314, side clamping bracket 32, side clamping shaft 33;

[0024] Vacuum lifting module 4, lifting drive element 41, lifting connecting plate 42, buffer element 421, adsorption ejector 43;

[0025] Vacuum stage 5 , vacuum adsorption hole 51 , end surface clamping groove 52 , side surface clamping groove 53 , through hole 54 . DETAILED DESCRIPTION

[0026] To facilitate understanding of the present invention, a more comprehensive description of the present invention will be provided below with reference to the accompanying drawings. The drawings illustrate preferred embodiments of the present invention. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to facilitate a more thorough and comprehensive understanding of the disclosure of the present invention.

[0027] It should be noted that when an element is referred to as being “fixed to” another element, it may be directly on the other element or there may be an intermediate element. When an element is referred to as being “connected to” another element, it may be directly connected to the other element or there may be an intermediate element.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0029] like Figures 1 to 4As shown, one embodiment of the present invention relates to a vacuum stage device, comprising a fixed support 1, a first-direction positioning module 2, a second-direction positioning module 3, a vacuum lifting module 4, and a vacuum stage 5. The vacuum stage 5 is mounted on the fixed support 1 and is provided with multiple vacuum suction holes 51. The first-direction positioning module 2 and the second-direction positioning module 3 are used to position products on the vacuum stage 5. The vacuum lifting module 4 includes a lifting drive element 41, a lifting connecting plate 42, and multiple suction pins 43. Each of the suction pins 43 is provided with a suction cup 44 at its end. One end of each suction pin 43 passes through the vacuum stage 5 to suction and place the product onto the vacuum stage 5 or lift the product from the vacuum stage 5. This embodiment is used for positioning glass substrates. The first-direction positioning module 2 and the second-direction positioning module 3 enable precise positioning of the glass substrate in both the X and Y directions. These two positioning modules may utilize components such as precision guide rails, sliders, and drive motors, achieving high-precision position feedback and adjustment through a closed-loop control system. This high-precision positioning capability is crucial for glass substrates, a material that requires extremely high positioning accuracy. It ensures that the glass substrate can be accurately aligned to the predetermined position during processing or testing, thereby avoiding processing errors or test failures caused by position deviation. Secondly, the device also performs well in improving work efficiency. The design of the vacuum lifting module 4 enables operations such as adsorption, placement, and lifting of the glass substrate to be completed in an automated manner. This not only greatly reduces the labor intensity of the operator, but also significantly improves work efficiency. At the same time, the coordinated use of the adsorption ejector 43 and the suction cup 44 can achieve rapid and stable adsorption of the glass substrate, avoiding problems such as damage or displacement of the glass substrate caused by improper operation. The fixed bracket 1, as the supporting structure of the entire device, has a rational design and a sturdy structure, capable of withstanding large loads and maintaining stable operation. At the same time, the multiple vacuum adsorption holes 51 on the vacuum carrier 5 enable multi-point adsorption of the glass substrate, further improving the stability of the system. This stability is important for ensuring that the position of the glass substrate remains unchanged during processing or testing, and avoiding problems such as vibration and shaking. This embodiment demonstrates the technical benefits of high precision, high efficiency, high stability, and wide applicability in glass substrate positioning. These benefits not only improve the processing precision and testing accuracy of glass substrates, but also reduce production costs and labor intensity, providing strong technical support for the production and testing of glass substrates.

[0030] The fixed bracket 1 includes a bottom plate 11 and side plates 12 arranged on both sides of the bottom plate 11. The vacuum stage 5 is arranged on the top of the side plates 12; a placement cavity is formed between the vacuum stage 5 and the bottom plate 11, and the lifting drive element 41 is arranged in the placement cavity. In this embodiment, by placing the vacuum stage 5 on the top of the side plates 12 and cleverly constructing a placement cavity between the vacuum stage 5 and the bottom plate 11, this design not only optimizes the spatial layout but also ensures the stability of the structure.

[0031] The first direction positioning module 2 includes an end face positioning component 21 and an end face clamping component 22. The end face positioning component 21 is arranged on one side of the vacuum carrier 5, and the end face positioning component 21 is opposite to the end face clamping component 22; the end face clamping component 22 includes an end face clamping driving element 221, an end face clamping bracket 222 and an end face clamping shaft 223. The vacuum carrier 5 is provided with an end face clamping groove 52. The end face clamping driving element 221 is arranged on the fixed bracket 1, and is used to drive the end face clamping bracket 222 to drive the end face clamping shaft 223 to slide along the end face clamping groove 52. Specifically, the end face positioning assembly 21 includes an end face positioning bracket 211, an end face positioning drive element 212, an end face positioning movable frame 213, and an end face positioning shaft 214. The end face positioning bracket 211 is arranged on the fixed bracket 1, the end face positioning drive element 212 is arranged on the end face positioning bracket 211, the end face positioning movable frame 213 is arranged at the driving end of the end face driving element, and the end face positioning shaft 214 is arranged on the end face positioning movable frame 213. The end face positioning shaft 214 is opposite to the end face clamping shaft 223 to position the two end faces of the product. In this embodiment, the coordinated work of the end face positioning assembly 21 and the end face clamping assembly 22 achieves precise positioning and firm clamping of the two end faces of the glass substrate. The end face positioning assembly 21 is firmly mounted on the fixed bracket 1 through the end face positioning bracket 211, and its drive element can accurately control the movement of the end face positioning movable frame 213 and the positioning shaft, thereby achieving precise alignment of one end face of the glass substrate. At the same time, the oppositely arranged end face clamping assembly 22 drives the clamping bracket and clamping shaft to slide along the slide groove through its driving element, firmly clamping the other end face of the glass substrate and ensuring the stability of the glass substrate during processing. Secondly, the module design fully considers the characteristics of glass substrates, such as fragility and scratchability. Therefore, a non-contact or low-contact pressure method is adopted during the clamping and positioning process, effectively avoiding damage caused by mechanical stress. At the same time, the relative arrangement of the end face positioning shaft 214 and the end face clamping shaft 223 not only ensures the accuracy of positioning, but also makes the entire clamping process more stable and reliable. In addition, the module is also highly flexible and adaptable. By adjusting the control parameters of the driving element, glass substrates of different sizes and thicknesses can be quickly and accurately positioned and clamped, greatly improving the flexibility and production efficiency of the production line.

[0032] The end face clamping drive element 221 includes an end face drive base 2211, an end face drive motor 2212, an end face drive screw 2213, and an end face drive guide rail 2214. The end face drive base 2211 is mounted on the fixed bracket 1, the end face drive motor 2212 is mounted on the end face drive base 2211, the end face drive screw 2213 is connected to the driving end of the end face drive motor 2212, and the end face drive guide rail 2214 is mounted on both sides of the end face drive base 2211. The end face clamping bracket 222 is slidably mounted on the end face drive guide rail 2214 and connected to the end face drive screw 2213. The end face drive motor 2212 is used to drive the end face drive screw 2213, thereby driving the end face clamping bracket 222 to slide along the end face drive guide rail 2214. In this embodiment, the end face drive base 2211 is securely mounted on the vacuum stage 5, ensuring the stability and accuracy of the entire drive system. The efficient operation of the end drive motor 2212 precisely controls the rotation of the end drive screw 2213, thereby driving the end clamping bracket 222 to slide smoothly along the precision-machined end drive guide rail 2214. This design not only achieves high-precision positioning of the glass substrate, but also significantly improves the response speed and stability of positioning. In addition, the direct connection between the end clamping bracket 222 and the end drive screw 2213 reduces energy loss and error accumulation during the transmission process, further improving positioning accuracy.

[0033] There are two groups of second-direction positioning modules 3, and the two groups of second-direction positioning modules 3 are relatively arranged on both sides of the vacuum stage 5. Specifically, the second-direction positioning modules 3 include a side clamping drive element 31, a side clamping bracket 32 ​​and a side clamping shaft 33. Side clamping grooves 53 are provided on both sides of the vacuum stage 5. The side clamping drive element 31 is provided on the fixed bracket 1 and is used to drive the side clamping bracket 32 ​​to drive the side clamping shaft 33 to slide along the side clamping groove 53 to clamp and position the product on the side. In this embodiment, by providing two groups of second-direction positioning modules 3 relatively distributed on both sides of the vacuum stage 5, this structure ensures the precise positioning and stable clamping of the glass substrate in the horizontal plane. Each group of second-direction positioning modules 3 integrates the side clamping drive element 31, the side clamping bracket 32 ​​and the side clamping shaft 33. This combined design makes the clamping process highly controllable and flexible. The side clamping drive element 31 is fixed on a stable bracket and can accurately drive the side clamping bracket 32, thereby driving the side clamping shaft 33 to slide smoothly along the preset side clamping groove 53. This process not only achieves effective clamping of the side of the glass substrate, but also ensures the uniform distribution of clamping force, avoiding damage to the substrate due to stress concentration. In addition, the introduction of the side clamping groove 53 further improves the accuracy and stability of positioning. The design of the groove allows the side clamping shaft 33 to move smoothly within a defined path, which not only ensures the accuracy of the clamping position, but also facilitates fine-tuning according to actual needs, thereby meeting the demand for high-precision positioning of the glass substrate.

[0034] The side clamping drive element 31 includes a side drive base 311, a side drive motor 312, a side drive screw 313, and a side drive guide rail 314. The side drive base 311 is mounted on the fixed bracket 1, the side drive motor 312 is mounted on the side drive base 311, the side drive screw 313 is connected to the drive end of the side drive motor 312, and the side drive guide rails 314 are mounted on both sides of the side drive base 311. The side clamping bracket 32 ​​is slidably mounted on the side drive guide rail 314 and connected to the side drive screw 313. The side drive motor 312 is used to drive the side drive screw 313, thereby driving the side clamping bracket 32 ​​to slide along the side drive guide rail 314. In this embodiment, the side drive base 311 is securely mounted on the vacuum stage 5, ensuring the stability and accuracy of the entire drive system. The efficient operation of the side drive motor 312 can precisely control the rotation of the side drive screw 313, thereby driving the side clamping bracket 32 ​​to slide smoothly along the precision-machined side drive guide rail 314. This design not only achieves high-precision positioning of the glass substrate, but also significantly improves the response speed and stability of positioning. In addition, the direct connection between the side clamping bracket 32 ​​and the side drive screw 313 reduces energy loss and error accumulation during the transmission process, further improving positioning accuracy.

[0035] The vacuum stage 5 is provided with a plurality of through-holes 54, through which one end of the adsorption pin 43 passes. In this embodiment, these through-holes 54 allow one end of the adsorption pin 43 to pass precisely through, thereby achieving effective adsorption and fixation of the glass substrate. In a vacuum environment, by adjusting the operating state of the adsorption pin 43, its adsorption force on the glass substrate can be flexibly controlled, thereby achieving precise adjustment and stable maintenance of the position of the glass substrate. In addition, the distribution design of the multiple through-holes 54 and the adsorption pin 43 facilitates multi-point adsorption of the glass substrate, improving the accuracy and stability of positioning.

[0036] A buffer element 421 is provided between the lifting connecting plate 42 and the vacuum stage 5. In this embodiment, the buffer element 421 can effectively absorb the impact and vibration generated by the movement between the lifting connecting plate 42 and the vacuum stage 5, ensuring the stability and accuracy of the glass substrate during positioning. This helps to reduce positioning errors caused by vibration and improve the precision and consistency of glass substrate processing. Secondly, the introduction of the buffer element 421 also enhances the stability and durability of the system. During the frequent lifting and positioning of the glass substrate by the vacuum stage 5, the buffer element 421 can reduce wear on mechanical components and extend the service life of the equipment.

[0037] The above embodiments merely illustrate several implementations of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the concept of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. A vacuum stage device, characterized in that: It includes a fixed bracket, a first direction positioning module, a second direction positioning module, a vacuum lifting module and a vacuum carrier; the vacuum carrier is arranged on the fixed bracket, and a plurality of vacuum adsorption holes are arranged on the vacuum carrier; the first direction positioning module and the second direction positioning module are used to position the product on the vacuum carrier; the vacuum lifting module includes a lifting drive element, a lifting connecting plate and a plurality of adsorption push rods, and a suction cup is arranged at the end of the adsorption push rod, and one end of the adsorption push rod passes through the vacuum carrier to adsorb and place the product on the vacuum carrier or lift the product from the vacuum carrier.

2. The vacuum stage device according to claim 1, wherein: The fixed bracket includes a bottom plate and side plates arranged on both sides of the bottom plate, and the vacuum carrier is arranged on the top of the side plates; a placement cavity is formed between the vacuum carrier and the bottom plate, and the lifting drive element is arranged on the placement cavity.

3. The vacuum stage device according to claim 1, wherein: The first direction positioning module includes an end face positioning component and an end face clamping component. The end face positioning component is arranged on one side of the vacuum carrier, and the end face positioning component is opposite to the end face clamping component; the end face clamping component includes an end face clamping driving element, an end face clamping bracket and an end face clamping shaft. An end face clamping groove is provided on the vacuum carrier, and the end face clamping driving element is provided on the fixed bracket, and is used to drive the end face clamping bracket to drive the end face clamping shaft to slide along the end face clamping groove.

4. The vacuum stage device according to claim 3, wherein: The end face positioning assembly includes an end face positioning bracket, an end face positioning driving element, an end face positioning movable frame and an end face positioning shaft. The end face positioning bracket is arranged on a fixed bracket, the end face positioning driving element is arranged on the end face positioning bracket, the end face positioning movable frame is arranged at the driving end of the end face driving element, and the end face positioning shaft is arranged on the end face positioning movable frame. The end face positioning shaft is opposite to the end face clamping shaft for positioning the two end faces of the product.

5. The vacuum stage device according to claim 4, wherein: The end face clamping drive element includes an end face driving base, an end face driving motor, an end face driving screw and an end face driving guide rail. The end face driving base is arranged on a fixed bracket, the end face driving motor is arranged on the end face driving base, the end face driving screw is connected to the driving end of the end face driving motor, and the end face driving guide rail is arranged on both sides of the end face driving base; the end face clamping bracket is slidably arranged on the end face driving guide rail and is connected to the end face driving screw; the end face driving motor is used to drive the end face driving screw to drive the end face clamping bracket to slide along the end face driving guide rail.

6. The vacuum stage device according to claim 1, wherein: There are two groups of the second direction positioning modules, and the two groups of the second direction positioning modules are relatively arranged on both sides of the vacuum stage.

7. The vacuum stage device according to claim 6, wherein: The second direction positioning module includes a side clamping drive element, a side clamping bracket and a side clamping shaft. Side clamping grooves are provided on both sides of the vacuum carrier. The side clamping drive element is provided on the fixed bracket and is used to drive the side clamping bracket to drive the side clamping shaft to slide along the side clamping groove to clamp and position the product on the side.

8. The vacuum stage device according to claim 7, wherein: The side clamping drive element includes a side drive base, a side drive motor, a side drive screw and a side drive guide rail. The side drive base is arranged on a fixed bracket, the side drive motor is arranged on the side drive base, the side drive screw is connected to the driving end of the side drive motor, and the side drive guide rail is arranged on both sides of the side drive base; the side clamping bracket is slidably arranged on the side drive guide rail and is connected to the side drive screw; the side drive motor is used to drive the side drive screw to drive the side clamping bracket to slide along the side drive guide rail.

9. The vacuum stage device according to claim 1, wherein: The vacuum carrier is provided with a plurality of through holes, and one end of the adsorption ejector rod passes through the through hole.

10. The vacuum stage device according to claim 1, wherein: A buffer element is provided between the lifting connecting plate and the vacuum stage.

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