Rotary corrosion cleaning machine

Abstract

The utility model discloses a rotary corrosion cleaning machine. The rotary corrosion cleaning machine comprises a cleaning tank and a supporting frame rotationally connected into the cleaning tank. The bearing frame comprises two end plates and a plurality of positioning rods arranged between the two end plates; the positioning rods comprise a fixed positioning rod and a movable positioning rod; a placement cavity with an insertion opening is defined by the fixed positioning rods; the movable positioning rod is positioned in the insertion opening; a cross groove is formed in one end, facing the movable positioning rod, of the end plate; and a T-shaped block is detachably connected in the cross groove. And the motor drives the bearing frame to automatically rotate in the washing tank, so that the surface corrosion of the optical glass is more uniform. And the positioning rods clamp the periphery of the optical glass in a point contact manner, so that the optical glass can be fully contacted with the washing liquid in the washing tank, and the optical glass can be conveniently replaced. The movable positioning rod can lock the position of the T-shaped block, and the movable positioning rod can be disassembled and assembled without the help of a screw or a tool.

Description

Technical Field

[0001] The utility model belongs to the technical field of cleaning equipment, in particular to a rotary corrosion cleaning machine. Background Art

[0002] In the field of optical glass processing, etching is required. After the product is irradiated with a laser, it is placed in a hydrofluoric acid tank for etching. The laser irradiation will etch away the parts that need to be processed. In addition, etching is also required to ensure that the total thickness variation (TTV) (the difference between the maximum and minimum thickness of the silicon wafer) and the uniformity of the material are maintained. Therefore, it is necessary to develop etching equipment that meets these requirements.

[0003] Chinese patent publication number CN216174762U discloses a wafer production cleaning device. The device comprises a support assembly, a cleaning assembly, an air-drying assembly, and a clamping assembly. The cleaning assembly comprises a cleaning box and a cleaning rack. The cleaning box is mounted on the support assembly. The cleaning box stores cleaning liquid. The cleaning rack can be immersed in the cleaning liquid. The cleaning rack is rotatably disposed within the cleaning box. The cleaning rack has a plurality of cleaning positions arranged at intervals, each configured to hold wafers to be cleaned. The clamping assembly comprises a clamping plate capable of clamping the cleaning rack. The clamping plate is rotatably disposed on the support assembly. The air-drying assembly comprises an air nozzle capable of blowing air toward the clamped cleaning rack.

[0004] In the above-mentioned patent solution, partitions are arranged at intervals on the cleaning rack to form cleaning positions for placing wafers / optical glass. Although liquid permeable holes are set on the partitions, the partitions still hinder the circulation of the washing liquid, resulting in low circulation efficiency of the washing liquid, which in turn causes a decrease in cleaning efficiency and effect. In addition, due to the dense arrangement of the partitions and the obstruction of the wafers / optical glass, it is inconvenient to clamp and place the wafers / optical glass when replacing them on the cleaning rack, which will also reduce the replacement rate and further reduce the cleaning efficiency. Utility Model Content

[0005] In order to overcome the technical problem in the prior art that the partitions set on the cleaning rack will hinder the circulation of cleaning liquid and the placement of optical glass, resulting in poor cleaning effect and low cleaning efficiency; one purpose of the utility model is to provide a rotary etching cleaning machine, which provides the optical glass with the largest possible exposed area by setting multiple positioning rods for clamping the edges of the optical glass between the two end plates, thereby facilitating cleaning and placement; at the same time, a detachable T-block is provided to facilitate the removal of the positioning rods to replace the optical glass therein, thereby improving the cleaning efficiency of the optical glass.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical solutions: a rotary etching cleaning machine, comprising a washing tank and a supporting bracket rotatably connected in the washing tank; the supporting bracket comprises two parallel end plates and a plurality of positioning rods arranged between the two end plates; each of the positioning rods is a fixed positioning rod fixedly connected and at least one movable positioning rod detachably connected; a placement cavity with an insertion port for optical glass is formed by each of the fixed positioning rods; the movable positioning rod is located in the insertion port to limit the optical glass; wherein, at least one cross groove is provided at one end of the end plate facing the movable positioning rod; the cross groove is connected to the outer periphery of the end plate; a T-block is detachably connected in the cross groove; the T-block fixes the movable positioning rod in the cross groove.

[0007] The movable positioning rod is removed to replace the optical glass in the placement cavity, and the movable positioning rod is installed to fix the optical glass in the placement cavity, and then corrosion cleaning can be performed in the washing tank.

[0008] Furthermore, the cross groove is two mutually perpendicular linear grooves arranged in a cross shape, and one of the linear grooves is connected to the outside; the two ends of the movable positioning rod are respectively provided with a small diameter shaft rotatably connected to the linear groove; the T-block can optionally be abutted against the outer periphery of the small diameter shaft.

[0009] The movable positioning rod is inserted into the cross slot due to the linear slot connected to the outside, and then the T-block is installed to limit the small-diameter shaft, that is, the movable positioning rod.

[0010] Specifically, the diameter of the small-diameter shaft is smaller than the diameter of the movable positioning rod; the two ends of the movable positioning rod are respectively abutted against the end plates; positioning planes are respectively provided at both ends of the outer wall of the movable positioning rod; the positioning planes are tangent to the small-diameter shaft; the axial length of the positioning plane along the movable positioning rod is greater than or equal to the thickness of the T-block.

[0011] When the movable positioning rod is rotated until the positioning plane faces the T-block, the T-block can be moved out of the cross slot and out of the positioning plane; when the positioning plane is not facing the T-block, the T-block is blocked by the end of the movable positioning rod and cannot be moved out; the installation of the movable positioning rod is simple and convenient.

[0012] Specifically, the small-diameter shaft is rotatably connected to the bottom of one of the linear slots and is tangent to the other linear slot; and the T-block extends outward from the cross slot.

[0013] Furthermore, the outer wall of the positioning rod is provided with a plurality of annular triangular grooves; each of the annular triangular grooves is evenly distributed along the axial direction of the positioning rod; and the outer periphery of the optical glass is placed in the annular triangular grooves.

[0014] Furthermore, a rotating shaft is provided at the central position of one end of the end plate away from the positioning rod; two support plates are symmetrically provided in the washing tank; a lower circular groove is provided on the upper end of the support plate and is rotatably connected to the corresponding rotating shaft; wherein, a pressure plate is detachably connected to at least one of the lower circular grooves; the pressure plate is used to limit the longitudinal movement of the rotating shaft.

[0015] The support bracket can be taken out from the washing tank to perform corresponding operations, such as operations on optical glass, cleaning of the washing tank and the support bracket before or after the processing process, and the like.

[0016] Specifically, a bracket gear is coaxially arranged on one of the rotating shafts; a docking gear is rotatably connected in the washing tank; the docking gear can be selectively connected to the bracket gear; a motor is provided at the upper end of the washing tank and is connected to the docking gear.

[0017] The rotating shaft is placed in the lower circular groove, the bracket gear is connected to the docking gear, and the motor can drive the support bracket to rotate, so that the optical glass is evenly corroded and cleaned, which improves the corrosion cleaning efficiency and the cleaning effect.

[0018] Furthermore, two lifting rods are symmetrically provided at one end of the end plate away from the positioning rod; the movable positioning rod is located between the two lifting rods; and the lifting rod is coaxially arranged with the adjacent fixed positioning rod.

[0019] The lifting rod is convenient for rotating the support bracket to remove the support bracket, or rotating the support bracket to face upward to inspect or operate the optical glass therein.

[0020] Furthermore, the washing tank is made of polyvinylidene fluoride; two circulation pipes are provided at the bottom of the washing tank, and the two circulation pipes circulate the washing liquid in the washing tank; a delivery pump is provided at the bottom of the washing tank, and the delivery pump is used to replenish the washing liquid to the washing tank.

[0021] Specifically, a shell is provided on the periphery of the washing tank; four corners of the lower end of the shell are provided with Forma wheels; and an electric control box is provided on one side of the shell.

[0022] Compared with the prior art, the beneficial effects of the present invention are:

[0023] 1. The motor drives the support frame to rotate automatically in the washing tank, and the optical glass performs shearing motion in the water, which is conducive to uniform contact between the liquid and the optical glass surface, making the optical glass surface corroded more evenly, with higher corrosion efficiency and higher corrosion accuracy.

[0024] 2. The positioning rod clamps the periphery of the optical glass in the form of point contact, which helps the optical glass to fully contact with the washing liquid in the washing tank and the circulation of the washing liquid, thereby improving the corrosion cleaning efficiency and effect, and also facilitating the replacement of the optical glass on the support frame.

[0025] 3. The rotating movable positioning rod can lock the position of the T-block, and the T-block limits the position of the movable positioning rod. The movable positioning rod can be disassembled and assembled without the help of screws or tools, which also improves the replacement rate of the optical glass on the support frame. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a structural diagram of the utility model;

[0027] Figure 2 This is a schematic diagram of the exploded parts of the present utility model;

[0028] Figure 3 This is a structural diagram of the support plate and the docking gear of the utility model;

[0029] Figure 4 This is a schematic structural diagram of the support frame of the present invention;

[0030] Figure 5 This is a structural schematic diagram of the disassembly and assembly process of the movable positioning rod of the utility model.

[0031] In the figure: 11, washing tank; 12, delivery pump; 13, circulation pipe; 21, support plate; 211, lower circular groove; 22, pressure plate; 221, upper circular groove; 31, motor; 311, motor gear; 32, transmission gear; 33, docking gear; 41, end plate; 411, cross groove; 412, positioning arc; 42, rotating shaft; 421, bracket gear; 43, positioning rod; 43a, fixed positioning rod; 43b, movable positioning rod; 431, positioning plane; 432, small diameter shaft; 433, annular triangular groove; 44, lifting rod; 45, T-block; 5, optical glass; 61, housing; 62, Forma wheel. DETAILED DESCRIPTION

[0032] Below, the present invention is further described in conjunction with the accompanying drawings and specific implementation methods. It should be noted that, under the premise of no conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments.

[0033] In the description of the present invention, it should be noted that, for directional words, such as the terms "center", "horizontal", "longitudinal", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and so on, indicating directions and positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and cannot be understood as limiting the specific scope of protection of the present invention.

[0034] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features. Therefore, the terms "first" and "second" may explicitly or implicitly refer to one or more of these features. In the description of this utility model, "several" means two or more, unless otherwise specifically defined.

[0035] In this utility model, unless otherwise specified or limited, terms such as "disposed" and "installed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integral connection; mechanical connection; direct connection, connection through an intermediate medium, or internal communication between two components. Those skilled in the art will understand the specific meanings of these terms in this utility model based on specific circumstances.

[0036] See also Figure 1-Figure 5 A rotary corrosion cleaning machine includes a shell 61, an electric control box arranged on one side of the shell 61, four Forma wheels 62 arranged at the four corners of the lower end of the shell 61, a washing tank 11 arranged in the shell 61, and a support frame detachably connected to the washing tank 11; the support frame includes two longitudinally parallel end plates 41 and seven positioning rods 43 arranged between the two end plates 41; that is, six fixed positioning rods 43a fixedly connected between the two end plates 41 and one movable positioning rod 43b detachably connected between the two end plates 41.

[0037] The optical glass 5 disposed between the two end plates 41 is rectangular; six fixed positioning rods 43a are evenly disposed at the lower end and left and right ends of the optical glass 5 to form a placement cavity with an insertion port; the movable positioning rod 43b is disposed in the insertion port.

[0038] A cross groove 411 is provided at one end of the end plate 41 facing the movable positioning rod 43b; the cross groove 411 is two mutually perpendicular straight grooves arranged in a cross shape; one of the straight grooves is perpendicular to the adjacent outer wall of the end plate 41, and the other straight groove is parallel to the adjacent outer wall of the end plate 41; one end of the straight groove perpendicular to the outer wall of the end plate 41 is connected to the outer wall of the end plate 41, and the other end is provided with a positioning arc 412.

[0039] A small-diameter shaft 432 is respectively provided at both ends of the movable positioning rod 43b; the diameter of the small-diameter shaft 432 is smaller than the diameter of the movable positioning rod 43b; the small-diameter shaft 432 is rotatably connected in the positioning arc 412 and is tangent to the other linear groove; a T-block 45 is detachably connected in the cross groove 411; the T-block 45 located in the cross groove 411 is against the outer periphery of the small-diameter shaft 432.

[0040] The two ends of the movable positioning rod 43b are respectively abutted against the end plate 41; positioning planes 431 are respectively provided at both ends of the outer wall of the movable positioning rod 43b; the positioning planes 431 are tangent to the small-diameter shaft 432; the axial length of the positioning plane 431 along the movable positioning rod 43b is greater than or equal to the thickness of the T-block 45; the T-block 45 extends outward from the cross slot 411.

[0041] The outer wall of the positioning rod 43 is provided with a plurality of annular triangular grooves 433 ; each of the annular triangular grooves 433 is evenly distributed along the axial direction of the positioning rod 43 ; the outer periphery of the optical glass 5 is placed in the annular triangular grooves 433 .

[0042] A rotating shaft 42 is provided at the central position of one end of the end plate 41 away from the positioning rod 43; two support plates 21 are symmetrically provided at the bottom of the washing tank 11; a lower circular groove 211 is provided on the upper end of the support plate 21 and is rotatably connected to the corresponding rotating shaft 42; a transmission box is provided on the side wall of the washing tank 11; a docking gear 33 is rotatably connected to the transmission box; a bracket gear 421 is coaxially provided on one of the rotating shafts 42; the rotating shaft 42 located in the lower circular groove 211, the bracket gear 421 is transmission-connected to the docking gear 33.

[0043] The upper end of the lower circular groove 211 near the docking gear 33 is detachably connected to a pressure plate 22 ; the lower end of the pressure plate 22 is provided with an upper circular groove 221 ; the outer periphery of the rotating shaft 42 abuts against the lower circular groove 211 and the upper circular groove 221 respectively.

[0044] A motor 31 is provided on the transmission box at the upper end of the washing tank 11; a motor gear 311 is provided on the output shaft of the motor 31; three transmission gears 32 are rotatably connected in the transmission box; the transmission gears 32 are evenly arranged longitudinally and are sequentially connected in transmission; the motor gear 311 is connected in transmission with the transmission gear 32 located at the top; the docking gear 33 is coaxially arranged on the transmission gear 32 located at the bottom.

[0045] Two lifting rods 44 are symmetrically provided at one end of the end plate 41 away from the positioning rod 43; the movable positioning rod 43b is located between the two lifting rods 44; the lifting rod 44 is coaxially arranged with the adjacent fixed positioning rod 43a.

[0046] The washing tank 11 is made of PVDF material (polyvinylidene fluoride); two circulation pipes 13 are provided at the bottom of the washing tank 11, and the two circulation pipes 13 circulate the washing liquid in the washing tank 11; a delivery pump 12 is provided at the bottom of the washing tank 11, and the delivery pump 12 is used to replenish the washing liquid (hydrofluoric acid) to the washing tank 11.

[0047] Rotate the movable positioning rod 43b so that the positioning plane 431 faces the T-block 45 (eg Figure 5 As shown in the figure, remove the T-shaped block 45 from the cross slot 411, then remove the movable positioning rod 43b and insert the optical glass 5 into the annular triangular groove 433. Finally, return the movable positioning rod 43b to its original position, keeping the positioning plane 431 facing outward. After reinstalling the T-shaped block 45 into the cross slot 411, rotate the movable positioning rod 43b. The end of the movable positioning rod 43b will prevent the T-shaped block 45 from being dislodged from the cross slot 411.

[0048] Optical glass corrosion cleaning process: The motor 31 rotates to drive the support frame to rotate, that is, to drive the optical glass 5 to rotate in the washing tank 11, and the part of the optical glass 5 irradiated by the laser is corroded to complete the processing process.

[0049] The above description is only a specific embodiment of the present invention, but the technical features of the present invention are not limited thereto. Any changes or modifications made by any technician in this field within the scope of the present invention are included in the patent scope of the present invention.

Claims

1. A rotary corrosion cleaning machine, characterized in that: The invention comprises a washing tank and a supporting frame rotatably connected in the washing tank; the supporting frame comprises two parallel end plates and a plurality of positioning rods arranged between the two end plates; each of the positioning rods is a fixed positioning rod fixedly connected and at least one movable positioning rod detachably connected; a placement cavity with an insertion port for optical glass is formed by each of the fixed positioning rods; the movable positioning rod is located in the insertion port to limit the optical glass; wherein, at least one cross groove is provided at one end of the end plate facing the movable positioning rod; the cross groove is connected to the outer periphery of the end plate; a T-block is detachably connected to the cross groove; the T-block fixes the movable positioning rod in the cross groove.

2. The cleaning machine according to claim 1, characterized in that: The cross slot is two mutually perpendicular linear slots arranged in a cross shape, and one of the linear slots is connected to the outside; the two ends of the movable positioning rod are respectively provided with a small diameter shaft rotatably connected to the linear slot; the T-block can optionally be abutted against the outer periphery of the small diameter shaft.

3. The cleaning machine according to claim 2, characterized in that: The diameter of the small-diameter shaft is smaller than the diameter of the movable positioning rod; the two ends of the movable positioning rod are respectively abutted against the end plates; positioning planes are respectively provided at both ends of the outer wall of the movable positioning rod; the positioning planes are tangent to the small-diameter shaft; the axial length of the positioning plane along the movable positioning rod is greater than or equal to the thickness of the T-block.

4. The cleaning machine according to claim 2, wherein: The small diameter shaft is rotatably connected to the bottom of one of the linear grooves and is tangent to the other linear groove; the T-shaped block extends outward from the cross groove.

5. The cleaning machine according to any one of claims 1 to 4, characterized in that: The outer wall of the positioning rod is provided with a plurality of annular triangular grooves; each of the annular triangular grooves is evenly distributed along the axial direction of the positioning rod; the outer periphery of the optical glass is placed in the annular triangular grooves.

6. The cleaning machine according to any one of claims 1 to 4, characterized in that: A rotating shaft is set at the central position of one end of the end plate away from the positioning rod; two support plates are symmetrically arranged in the washing tank; a lower circular groove is set at the upper end of the support plate, which is rotatably connected to the corresponding rotating shaft; wherein, a pressure plate is detachably connected to at least one of the lower circular grooves; the pressure plate is used to limit the longitudinal movement of the rotating shaft.

7. The cleaning machine according to claim 6, characterized in that: A bracket gear is coaxially arranged on one of the rotating shafts; a docking gear is rotatably connected in the washing tank; the docking gear can be selectively connected to the bracket gear; a motor is provided at the upper end of the washing tank and is connected to the docking gear.

8. The cleaning machine according to any one of claims 1 to 4, characterized in that: Two lifting rods are symmetrically arranged at one end of the end plate away from the positioning rod; the movable positioning rod is located between the two lifting rods; and the lifting rod is coaxially arranged with the adjacent fixed positioning rod.

9. The cleaning machine according to any one of claims 1 to 4, characterized in that: The washing tank is made of polyvinylidene fluoride; two circulation pipes are provided at the bottom of the washing tank, and the two circulation pipes circulate the washing liquid in the washing tank; a delivery pump is provided at the bottom of the washing tank, and the delivery pump is used to replenish the washing liquid to the washing tank.

10. The cleaning machine according to any one of claims 1 to 4, characterized in that: The outer periphery of the washing tank is provided with a shell; the four corners of the lower end of the shell are provided with Fuma wheels; and one side of the shell is provided with an electric control box.

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