Basket sorting device and wafer packaging equipment

Abstract

The utility model discloses a basket sorting device and wafer packaging equipment. The basket sorting device comprises a movable support, a fixed support and a carrying support. A plurality of fixing mechanisms are arranged on the fixing support and used for fixing the basket bearing mechanism. The movable support is provided with a moving mechanism and a carrying mechanism, the carrying mechanism is arranged on the moving mechanism, and the moving mechanism is used for moving the carrying mechanism in at least two degrees of freedom and driving the carrying mechanism to grab the basket bearing mechanism from the fixing mechanism and convey the basket bearing mechanism to the carrying support. And the carrying mechanism is driven to grab the basket bearing mechanism from the carrying support and convey the basket bearing mechanism to any vacant fixing mechanism. According to the technical scheme provided by the utility model, the carrying basket bearing mechanism can be controlled in at least two degrees of freedom, except for loading and unloading of the basket, other procedures are automatically and intelligently operated, manual intervention is not needed, the wafer packaging efficiency is greatly improved, and the cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer equipment, in particular to a basket sorting device and wafer packaging equipment. Background Art

[0002] A wafer is a crystalline material used to manufacture semiconductor transistors or integrated circuits. It's round in shape, hence the name. The wafer storage baskets used in automated wafer processing equipment in the semiconductor industry are multi-layered, slotted structures. During wafer packaging, the wafer-laden baskets, or the basket-carrying mechanisms that support them, must be continuously transported to the packaging line.

[0003] In existing wafer packaging equipment, before wafer processing, the loading and transportation of wafers are still not intelligent and automated enough, and many links require manual intervention, which affects the efficiency of wafer packaging and also has high labor costs. Utility Model Content

[0004] One of the purposes of the present invention is to overcome the deficiencies in the prior art and to provide a basket sorting device and a wafer packaging device to address the problems in the prior art.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions:

[0006] In the first aspect, the utility model provides a basket sorting device, comprising a movable bracket, a fixed bracket and a loading bracket; the fixed bracket is provided with a plurality of fixing mechanisms, and the fixing mechanisms are used to fix the basket carrying mechanism; the movable bracket has a moving mechanism and a conveying mechanism, and the conveying mechanism is arranged on the moving mechanism, and the moving mechanism is used to move the conveying mechanism in at least two degrees of freedom, drive the conveying mechanism to grab the basket carrying mechanism from the fixed mechanism and transport it to the loading bracket, and drive the conveying mechanism to grab the basket carrying mechanism from the loading bracket and transport it to any vacant fixed mechanism.

[0007] In a preferred embodiment of the present application, the moving mechanism includes a horizontal moving component and a vertical moving component, and the horizontal moving component and the vertical moving component are arranged perpendicular to each other. The horizontal moving component is used to drive the conveying mechanism to move horizontally between the fixed bracket and the object carrier in the horizontal degree of freedom, and the vertical moving component is used to drive the conveying mechanism to move vertically between the multiple fixed mechanisms in the vertical degree of freedom, and the horizontal degree of freedom and the vertical degree of freedom are perpendicular to each other.

[0008] In a preferred embodiment of the present application, the horizontal movement assembly includes a first connecting plate, a first guide, a first driving member and a first slider, the first connecting plate is fixed, the first guide is fixed on the first connecting plate, the first driving member is fixed on the first connecting plate or the first guide, the first slider is movably arranged on the first guide, and the first driving member is used to drive the first slider to move horizontally along the first guide in the horizontal degree of freedom.

[0009] In a preferred embodiment of the present application, the first guide member has a first guide rail extending horizontally, and the first sliding block is embedded in the first guide rail and can slide along the first guide rail under the drive of the first driving member.

[0010] In a preferred embodiment of the present application, the vertical movement component includes a second connecting plate, a second guide, a second driving member and a second slider, the second connecting plate is fixed, the second guide is fixed on the first connecting plate, the second driving member is fixed on the second connecting plate or the second guide, the second slider is movably arranged on the second guide, and the second driving member is used to drive the second slider to move vertically along the second guide on the vertical degree of freedom.

[0011] In a preferred embodiment of the present application, the second guide member has a second guide rail extending vertically, and the second sliding block is embedded in the second guide rail and can slide along the second guide rail under the drive of the second driving member.

[0012] In a preferred embodiment of the present application, the moving mechanism also includes a telescopic moving component, the conveying mechanism is arranged on the telescopic moving component, and the telescopic moving component is used to drive the conveying mechanism to move forward and backward between the movable bracket and the fixed bracket in the forward and backward freedom, and the forward and backward freedom is perpendicular to the horizontal degree of freedom and the vertical degree of freedom.

[0013] In a preferred embodiment of the present application, the telescopic moving assembly includes a third connecting plate, a third guide, a third driving member and a third slider. The third connecting plate is fixed, the third guide is fixed on the third connecting plate, the third driving member is fixed on the third connecting plate or the third guide, the third slider is movably arranged on the third guide, and the third driving member is used to drive the third slider to move forward and backward along the third guide in the forward and backward degrees of freedom.

[0014] In a preferred embodiment of the present application, the third guide member has a third guide rail extending forward and backward, and the third sliding block is embedded in the third guide rail and can slide along the third guide rail under the drive of the third driving member.

[0015] In a preferred embodiment of the present application, the horizontal moving assembly is located between the vertical moving assembly and the fixed bracket, and the telescopic moving assembly is provided on the horizontal moving assembly.

[0016] In a preferred embodiment of the present application, the vertical moving assembly is located between the horizontal moving assembly and the fixed bracket, and the telescopic moving assembly is provided on the vertical moving assembly.

[0017] In a preferred embodiment of the present application, the fixing mechanism includes a fixing component and a first connecting component, the fixing component is fixed on the fixing bracket, the first connecting component is connected and fixed to the fixing component, and the first connecting component is used to be connected and fixed to the basket carrying mechanism when the basket carrying mechanism is placed on the fixing mechanism.

[0018] In a preferred embodiment of the present application, the first connecting component includes a first connecting portion and a first placing portion, the first connecting portion is fixedly connected to the fixing component, and the first placing portion extends from the first connecting portion in a direction away from the fixing component and has a gap between it and the fixing bracket.

[0019] In a preferred embodiment of the present application, the first placement portion has a first elastic contact piece and a first sensor, and the first sensor is used to detect whether the first elastic contact piece is elastically deformed; when the basket carrying mechanism is fixed on the fixing mechanism, the first elastic contact piece is pressed to deform, and after the first sensor detects the elastic deformation of the first elastic contact piece, it sends a signal indicating that the basket carrying mechanism has been placed on the fixing mechanism.

[0020] In a preferred embodiment of the present application, the upper end of the first placement portion has two first grooves arranged at intervals, and a first locking tongue is formed between the two first grooves. A buckle and a hook are provided on the basket carrying mechanism, and the hook extends downward from the outside of the buckle. When the basket carrying mechanism is fixed to the fixing mechanism, the buckle is inserted into the two first grooves and sleeved on the first locking tongue, and the hook is pressed against the first placement portion.

[0021] In a preferred embodiment of the present application, the loading bracket includes a loading column, a loading platform and a second connecting component, the loading column is fixed and extends vertically, the loading platform and the second connecting component are fixed on the loading column, the second connecting component is located above the loading platform, the loading platform is used to support the basket carrying mechanism, and the second connecting component is used to fix the basket carrying mechanism.

[0022] In a preferred embodiment of the present application, the second connecting component includes a second connecting portion and a second placing portion, the second connecting portion is fixedly connected to the loading pillar, and the second placing portion extends from the second connecting portion in a direction away from the loading pillar and has a gap between it and the loading pillar.

[0023] In a preferred embodiment of the present application, the second placement portion has a second elastic contact piece and a second sensor, and the second sensor is used to detect whether the second elastic contact piece undergoes elastic deformation; when the basket carrying mechanism is fixed on the loading platform, the second elastic contact piece is pressed to deform, and after the second sensor detects the elastic deformation of the second elastic contact piece, it sends a signal indicating that the basket carrying mechanism has been placed on the loading platform.

[0024] In a preferred embodiment of the present application, the upper end of the second placement portion has two second grooves arranged at intervals, and a second locking tongue is formed between the two second grooves. A buckle and a hook are provided on the basket carrying mechanism, and the hook extends downward from the outside of the buckle. When the basket carrying mechanism is fixed to the fixing mechanism, the buckle is inserted into the two second grooves and sleeved on the second locking tongue, and the hook is pressed against the second placement portion.

[0025] In a preferred embodiment of the present application, the loading and unloading support further comprises a loading and unloading moving assembly, which is connected to the loading platform and is used to move the loading platform in the horizontal degree of freedom, driving the loading platform to send out or retrieve the basket loaded with wafers through the basket carrying mechanism.

[0026] In a preferred embodiment of the present application, the loading and unloading cargo moving assembly includes a fourth connecting plate, a fourth guide, a fourth driving member and a fourth slider. The fourth connecting plate is fixedly arranged, the fourth guide is fixed on the fourth connecting plate, the fourth driving member is fixed on the fourth connecting plate or the fourth guide, the fourth slider is movably arranged on the fourth guide, the loading platform is fixedly connected to the fourth slider through a connecting beam, and the fourth driving member is used to drive the fourth slider to move horizontally along the fourth guide in the horizontal degree of freedom.

[0027] In a preferred embodiment of the present application, the fourth guide member has a horizontally extending fourth guide rail, and the fourth sliding block is embedded in the fourth guide rail and can slide along the fourth guide rail under the drive of the fourth driving member.

[0028] In a preferred embodiment of the present application, the conveying mechanism includes a fifth connecting plate, a fifth guide, a fifth driving member, a fifth slider and a fifth clamp, the fifth connecting plate is fixed on the moving mechanism, the fifth guide and the fifth driving member are fixed on the fifth connecting plate, the fifth guide extends along the direction of one degree of freedom, the fifth slider is movably arranged on the fifth guide, the fifth clamp is fixedly connected to the fifth slider, and the fifth driving member is used to drive the fifth slider to slide along the fifth guide to drive the fifth clamp to approach or move away from the fixing mechanism.

[0029] In a preferred embodiment of the present application, the fifth clamp has a fixed plate, a connecting column, a support beam and two clamping plates, the fixed plate is fixedly connected to the fifth slider, the connecting column is fixed on the fixed plate and extends vertically from the fixed plate, the support beam is mounted and fixed on the upper end of the connecting column, and the two clamping plates are respectively fixed at intervals on both sides of the support beam relative to the fixed plate.

[0030] In a preferred embodiment of the present application, a third sensor is provided at one end of the two clamping plates away from the fixing bracket, and the third sensor is used to detect whether the handle portion of the basket carrying mechanism is clamped between the two clamping plates.

[0031] In a preferred embodiment of the present application, a plurality of bosses are provided on two opposite surfaces of the two clamping plates, and support columns are provided at the lower ends of the bosses.

[0032] In the second aspect, the utility model provides a wafer packaging device, including a shell, the shell having a first area and a second area arranged adjacent to each other, the first area being provided with a basket sorting device as described in the first aspect, and the second area being provided with a wafer processing device, the first area being used to load a basket loaded with wafers through the basket sorting device, transport it to the second area, receive the basket from the second area and unload it, the second area being used to receive the basket from the first area and process the wafers in the basket before sending the basket back to the first area.

[0033] In a preferred embodiment of the present application, one of the first areas is provided on both sides of the second area, wherein one of the first areas is used for loading goods into the basket, and the other first area is used for unloading goods from the basket.

[0034] The basket sorting device and wafer packaging equipment disclosed in the present invention can control the transport basket carrying mechanism in at least two degrees of freedom. Except for loading and unloading the basket, other processes are automated and intelligent, without the need for human intervention, which greatly improves the efficiency of wafer packaging and reduces costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] The present invention is described with the help of the following drawings:

[0036] Figure 1 It is a structural schematic diagram of a wafer packaging device in an embodiment of the present utility model;

[0037] Figure 2 This is a structural diagram of a basket sorting device in an embodiment of the present invention;

[0038] Figure 3 This is a schematic diagram of a basket carrying mechanism of a basket sorting device according to an embodiment of the present invention;

[0039] Figure 4 This is a structural diagram of the horizontal moving component in the basket sorting device of the embodiment of the present utility model;

[0040] Figure 5 This is a structural diagram of the vertical moving component in the basket sorting device of the embodiment of the present invention;

[0041] Figure 6 This is a structural diagram of the telescopic moving component in the basket sorting device in the embodiment of the present utility model;

[0042] Figure 7 This is a structural diagram of the fixing mechanism in the basket sorting device of an embodiment of the present utility model;

[0043] Figure 8 This is a schematic diagram of a basket carrying mechanism hung on a fixing mechanism in a basket sorting device according to an embodiment of the present invention;

[0044] Figure 9 This is a structural diagram of the object carrier in the basket sorting device of an embodiment of the present invention;

[0045] Figure 10 This is a side view of the object carrier in the basket sorting device according to an embodiment of the present invention;

[0046] Figure 11 This is a structural diagram of the loading and unloading moving component in the second connecting component in the basket sorting device of the embodiment of the present utility model;

[0047] Figure 12 This is a structural diagram of the transport mechanism in the basket sorting device of an embodiment of the present invention;

[0048] Figure 13 This is a structural diagram of the fifth clamp in the basket sorting device of an embodiment of the present invention;

[0049] Reference numerals:

[0050] 1-basket sorting device; 10-fixed frame; 2-wafer processing device; 3-wafer; 4-basket; 5-housing; 51-first area; 52-second area; 53-partition; 6-basket carrying mechanism; 61-ring buckle; 62-hook;

[0051] 1000 - movable bracket; 1100 - moving mechanism; 1110 - horizontal moving assembly; 1111 - first connecting plate; 1112 - first guide member; 1113 - first driving member; 1114 - first slider; 1115 - first guide rail; 1120 - vertical moving assembly; 1121 - second connecting plate; 1122 - second guide member; 1123 - second driving member; 1124 - second slider; 1125 - second guide rail; 1130 - telescopic moving assembly; 1131 - third connecting plate Plate; 1132 - third guide member; 1133 - third driving member; 1134 - third slider; 1135 - third guide rail; 1200 - transport mechanism; 1210 - fifth connecting plate; 1220 - fifth guide member; 1230 - fifth driving member; 1240 - fifth slider; 1250 - fifth clamp; 1251 - fixing plate; 1252 - connecting column; 1253 - support beam; 1254 - clamping plate; 1255 - third sensor; 1256 - boss; 1257 - support column;

[0052] 2000 - fixing bracket; 2100 - fixing mechanism; 2110 - fixing assembly; 2120 - first connecting assembly; 2121 - first connecting portion; 2122 - first placement portion; 2123 - first elastic contact member; 2124 - first sensor; 2125 - first groove; 2126 - first locking tongue;

[0053] 3000 - Carrying bracket; 3100 - Carrying support; 3200 - Carrying platform; 3300 - Second connecting assembly; 3310 - Second connecting portion; 3320 - Second placement portion; 3321 - Second elastic contact member; 3322 - Second sensor; 3323 - Second groove; 3324 - Second locking tongue; 3400 - Loading and unloading moving assembly; 3410 - Fourth connecting plate; 3420 - Fourth guide member; 3430 - Fourth driving member; 3440 - Fourth slider; 3450 - Fourth guide rail;

[0054] A-horizontal degree of freedom; B-vertical degree of freedom; C-forward and backward degree of freedom. DETAILED DESCRIPTION

[0055] In order to better understand the technical solution of the present application, the embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0056] It should be clear that the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0057] like Figure 1 As shown, an embodiment of the present invention provides a wafer 3 packaging device, including a housing 5 having a first area 51 and a second area 52 adjacently disposed, the first area 51 and the second area 52 being separated by a partition 53. A basket sorting device 1 is disposed in the first area 51, and a wafer processing device 2 is disposed in the second area 52. The first area 51 is used to load baskets 4 loaded with wafers 3 via the basket sorting device 1, transport them to the second area 52, receive the baskets 4 from the second area 52, and unload them. The second area 52 is used to receive the baskets 4 from the first area 51, process the wafers 3 in the baskets 4, and then return the baskets 4 to the first area 51.

[0058] In the wafer 3 packaging equipment of this embodiment, the number of first areas 51 can be set to multiple, arranged around the second area 52, with one or more first areas 51 used for loading baskets 4, and another or more first areas 51 used for unloading baskets 4. Considering the size and cost of the wafer 3 packaging equipment, the optimal number of first areas 51 is set to two, one on either side of the second area 52, with one first area 51 used for loading baskets 4 and the other for unloading baskets 4.

[0059] like Figure 2 and Figure 3 As shown, in the wafer 3 packaging equipment of this embodiment, the basket sorting device 1 located in the first area 51 includes a fixed frame 10. The fixed frame 10 can be made of metal, such as an iron frame, an aluminum frame, a stainless steel frame, or a hard plastic or carbon fiber material. A movable bracket 1000, a fixed bracket 2000 and a carrier bracket 3000 are provided in the fixed frame 10. The fixed bracket 2000 is fixedly arranged in the fixed frame 10, and the movable bracket 1000 and the carrier bracket 3000 can both move relative to the fixed bracket 2000. A plurality of fixing mechanisms 2100 are provided on the fixed bracket 2000, and the fixing mechanisms 2100 are used to fix the basket carrying mechanism 6; the movable bracket 1000 has a moving mechanism 1100 and a transporting mechanism 1200, and the transporting mechanism 1200 is arranged on the moving mechanism 1100, and the moving mechanism 1100 is used to move the transporting mechanism 1200 in at least two degrees of freedom, drive the transporting mechanism 1200 to grab the basket carrying mechanism 6 from the fixed mechanism 2100 and transport it to the cargo bracket 3000, and drive the transporting mechanism 1200 to grab the basket carrying mechanism 6 from the cargo bracket 3000 and transport it to any vacant fixed mechanism 2100.

[0060] In the basket sorting device 1 of this embodiment, the moving mechanism 1100 includes a horizontal moving component 1110 and a vertical moving component 1120. The horizontal moving component 1110 and the vertical moving component 1120 are arranged perpendicular to each other. The horizontal moving component 1110 is used to drive the transport mechanism 1200 to move horizontally between the fixed bracket 2000 and the object bracket 3000 in the horizontal degree of freedom A, and the vertical moving component 1120 is used to drive the transport mechanism 1200 to move vertically between multiple fixed mechanisms 2100 in the vertical degree of freedom B. The horizontal degree of freedom A and the vertical degree of freedom B are perpendicular to each other.

[0061] In the basket sorting device 1 of this embodiment, the positional relationship between the horizontal moving assembly 1110 and the vertical moving assembly 1120 can be set in the following two ways: First, the horizontal moving assembly 1110 is located between the vertical moving assembly 1120 and the fixed support 2000, and the telescopic moving assembly 1130 is disposed on the horizontal moving assembly 1110. Second, the vertical moving assembly 1120 is located between the horizontal moving assembly 1110 and the fixed support 2000, and the telescopic moving assembly 1130 is disposed on the vertical moving assembly 1120. Both the first and second options can achieve the function of moving the transport mechanism 1200 in the horizontal degree of freedom A and the vertical degree of freedom B of this embodiment. For the sake of convenience, this application uses the second option as an example.

[0062] like Figure 4 As shown, in the basket sorting device 1 of this embodiment, the horizontal movement assembly 1110 includes a first connecting plate 1111, a first guide member 1112, a first driving member 1113, and a first slider 1114. The first connecting plate 1111 is fixed to the fixed frame 10, the first guide member 1112 is fixed to the first connecting plate 1111, the first driving member 1113 is fixed to the first connecting plate 1111 or the first guide member 1112, and the first slider 1114 is movably disposed on the first guide member 1112. The first driving member 1113 is used to drive the first slider 1114 to move horizontally along the first guide member 1112 in a horizontal degree of freedom A. The first guide member 1112 has a horizontally extending first guide rail 1115. The first slider 1114 is embedded in the first guide rail 1115 and can slide along the first guide rail 1115 under the drive of the first driving member 1113.

[0063] like Figure 5As shown, in the basket sorting device 1 of this embodiment, the vertical movement assembly 1120 includes a second connecting plate 1121, a second guide member 1122, a second driving member 1123, and a second slider 1124. The second connecting plate 1121 is fixedly mounted on the first slider 1114, the second guide member 1122 is fixed to the first connecting plate 1111, the second driving member 1123 is fixed to the second connecting plate 1121 or the second guide member 1122, and the second slider 1124 is movably mounted on the second guide member 1122. The second driving member 1123 is used to drive the second slider 1124 to move vertically along the second guide member 1122 in a vertical degree of freedom B. The second guide member 1122 has a vertically extending second guide rail 1125. The second slider 1124 is embedded in the second guide rail 1125 and can slide along the second guide rail 1125 under the drive of the second driving member 1123.

[0064] When the basket sorting device 1 of this embodiment transports the basket carrying mechanism 6, the first driving member 1113 of the horizontal moving component 1110 drives the first slider 1114 to slide along the first guide rail 1115 on the horizontal degree of freedom A, driving the vertical moving component 1120 to move horizontally as a whole, and the second driving member 1123 of the vertical moving component 1120 drives the second slider 1124 to slide along the second guide rail 1125 on the vertical degree of freedom B, driving the conveying mechanism 1200 to move vertically as a whole, wherein the horizontal movement and the vertical movement can be carried out in steps or simultaneously, so that by controlling the first driving member 1113 and the second driving member 1123, the conveying mechanism 1200 can be moved arbitrarily in the vertical plane formed between the fixed bracket 2000 and the loading bracket 3000, without the need for human intervention to perform manual handling, loading and unloading operations, thereby improving the efficiency of wafer 3 processing and reducing labor costs.

[0065] like Figure 6 As shown, in another embodiment of the basket sorting device 1, the moving mechanism 1100 also includes a telescopic moving component 1130, which is arranged on the second slider 1124 of the vertical moving component 1120, and the transport mechanism 1200 is arranged on the telescopic moving component 1130. The telescopic moving component 1130 is used to drive the transport mechanism 1200 to move forward and backward between the movable bracket 1000 and the fixed bracket 2000 in the forward and backward degree of freedom C, and the forward and backward degree of freedom C is perpendicular to the horizontal degree of freedom A and the vertical degree of freedom B.

[0066] The telescopic movement assembly 1130 includes a third connecting plate 1131, a third guide member 1132, a third driving member 1133, and a third slider 1134. The third connecting plate 1131 is fixed to the second slider 1124, the third guide member 1132 is fixed to the third connecting plate 1131, the third driving member 1133 is fixed to the third connecting plate 1131 or the third guide member 1132, and the third slider 1134 is movably mounted on the third guide member 1132. The transport mechanism 1200 is mounted on the third slider 1134. The third driving member 1133 is used to drive the third slider 1134 to move forward and backward along the third guide member 1132 in the forward and backward degree of freedom C. The third guide member 1132 has a third guide rail 1135 extending forward and backward. The third slider 1134 is embedded in the third guide rail 1135 and can slide along the third guide rail 1135 under the drive of the third driving member 1133.

[0067] When the relative position between the loading bracket 3000 and the fixed bracket 2000 is not parallel to the extension direction of the first guide rail 1115 and there is an offset, a telescopic moving component 1130 needs to be set. When the transport mechanism 1200 is moved to the same height as the first fixed mechanism 2100 through the horizontal moving component 1110 and the vertical moving component 1120, the position of the transport mechanism 1200 can be fine-tuned by extending and retracting the telescopic moving component 1130 in the front and rear degrees of freedom C, thereby aligning with the fixed mechanism 2100 to achieve precise grasping or precise placement of the basket carrying mechanism 6.

[0068] like Figure 7 and Figure 8 As shown, in the basket sorting device 1 of this embodiment, the fixing mechanism 2100 includes a fixing component 2110 and a first connecting component 2120. The fixing component 2110 is fixed on the fixing bracket 2000. The first connecting component 2120 is connected and fixed to the fixing component 2110. The first connecting component 2120 is used to connect and fix to the basket supporting mechanism 6 when the basket supporting mechanism 6 is placed on the fixing mechanism 2100.

[0069] In the basket sorting device 1 of this embodiment, the first connecting assembly 2120 includes a first connecting portion 2121 and a first placement portion 2121. The first connecting portion 2121 is fixedly connected to the fixing assembly 2110. The first placement portion 2121 extends from the first connecting portion 2121 away from the fixing assembly 2110 and is spaced apart from the fixing bracket 2000. The first placement portion 2121 includes a first elastic contact member 2123 and a first sensor 2124. The first sensor 2124 is configured to detect whether the first elastic contact member 2123 is elastically deformed. When the basket carrier 6 is secured to the fixing mechanism 2100, the first elastic contact member 2123 is pressed, causing deformation. Upon detecting the elastic deformation of the first elastic contact member 2123, the first sensor 2124 generates a signal indicating that the basket carrier 6 has been placed on the fixing mechanism 2100. The upper end of the first placement portion 2121 has two first grooves 2125 spaced apart from each other, and a first locking tongue 2126 is formed between the two first grooves 2125. A buckle 61 and a hook 62 are provided on the basket carrying mechanism 6. The hook 62 extends downward from the outer side of the buckle 61. When the basket carrying mechanism 6 is fixed to the fixing mechanism 2100, the buckle 61 is inserted into the two first grooves 2125 and sleeved on the first locking tongue 2126, and the hook 62 presses against the first placement portion 2121.

[0070] like Figure 9 and Figure 10 As shown, in the basket sorting device 1 of this embodiment, the loading support 3000 includes a loading pillar 3100, a loading platform 3200 and a second connecting component 3300. The loading pillar 3100 is fixed and extends vertically. The loading platform 3200 and the second connecting component 3300 are fixed on the loading pillar 3100. The second connecting component 3300 is located above the loading platform 3200. The loading platform 3200 is used to support the basket carrying mechanism 6. The second connecting component 3300 is used to fix the basket carrying mechanism 6.

[0071] In the basket sorting device 1 of this embodiment, the second connecting assembly 3300 includes a second connecting portion 3310 and a second placement portion 3320. The second connecting portion 3310 is fixedly connected to the loading support 3100. The second placement portion 3320 extends from the second connecting portion 3310 away from the loading support 3100 and is spaced apart from the loading support 3100. The second placement portion 3320 includes a second elastic contact member 3321 and a second sensor 3322. The second sensor 3322 is configured to detect whether the second elastic contact member 3321 is elastically deformed. When the basket support mechanism 6 is secured to the loading platform 3200, the second elastic contact member 3321 is pressed against the loading platform 3200, causing deformation. Upon detecting this deformation, the second sensor 3322 generates a signal indicating that the basket support mechanism 6 has been placed on the loading platform 3200. The upper end of the second placement portion 3320 has two second grooves 3323 arranged at an interval, and a second locking tongue 3324 is formed between the two second grooves 3323. A buckle 61 and a hook 62 are provided on the basket carrying mechanism 6. The hook 62 extends downward from the outer side of the buckle 61. When the basket carrying mechanism 6 is fixed to the fixing mechanism 2100, the buckle 61 is inserted into the two second grooves 3323 and is sleeved on the second locking tongue 3324, and the hook 62 is pressed against the second placement portion 3320.

[0072] like Figure 11 As shown, in the basket sorting device 1 of this embodiment, the loading and unloading moving component 3400 is further included in the loading and unloading moving component 3400, which is connected to the loading platform 3200 and is used to move the loading platform 3200 in the horizontal degree of freedom A, and drive the loading platform 3200 to send out or retrieve the basket 4 loaded with wafers 3 through the basket carrying mechanism 6.

[0073] In the basket sorting device 1 of this embodiment, the loading and unloading cargo moving assembly 3400 includes a fourth connecting plate 3410, a fourth guide member 3420, a fourth driving member 3430 and a fourth slider 3440. The fourth connecting plate 3410 is fixed, the fourth guide member 3420 is fixed on the fourth connecting plate 3410, the fourth driving member 3430 is fixed on the fourth connecting plate 3410 or the fourth guide member 3420, the fourth slider 3440 is movably arranged on the fourth guide member 3420, the loading platform 3200 is fixedly connected to the fourth slider 3440 through a connecting beam, and the fourth driving member 3430 is used to drive the fourth slider 3440 to move horizontally along the fourth guide member 3420 in the horizontal degree of freedom A.

[0074] In the basket sorting device 1 of this embodiment, the fourth guide member 3420 has a horizontally extending fourth guide rail 3450 , and the fourth slider 3440 is embedded in the fourth guide rail 3450 and can slide along the fourth guide rail 3450 under the drive of the fourth driving member 3430 .

[0075] like Figure 12 As shown, in the basket sorting device 1 of this embodiment, the transport mechanism 1200 includes a fifth connecting plate 1210, a fifth guide member 1220, a fifth driving member 1230, a fifth slider 1240 and a fifth clamp 1250. The fifth connecting plate 1210 is fixed on the moving mechanism 1100, the fifth guide member 1220 and the fifth driving member 1230 are fixed on the fifth connecting plate 1210, the fifth guide member 1220 extends along the direction of one degree of freedom, the fifth slider 1240 is movably arranged on the fifth guide member 1220, the fifth clamp 1250 is fixedly connected to the fifth slider 1240, and the fifth driving member 1230 is used to drive the fifth slider 1240 to slide along the fifth guide member 1220 to drive the fifth clamp 1250 to approach or move away from the fixing mechanism 2100.

[0076] like Figure 13 As shown, in the basket sorting device 1 of this embodiment, the fifth clamp 1250 has a fixed plate 1251, a connecting column 1252, a support beam 1253 and two clamping plates 1254, the fixed plate 1251 is fixedly connected to the fifth slider 1240, the connecting column 1252 is fixed on the fixed plate 1251 and extends vertically from the fixed plate 1251, the support beam 1253 is mounted and fixed on the upper end of the connecting column 1252, and the two clamping plates 1254 are respectively fixed at intervals on both sides of the support beam 1253 relative to the fixed plate 1251.

[0077] In the basket sorting device 1 of this embodiment, a third sensor 1255 is provided at one end of the two clamping plates 1254 away from the fixed bracket 2000 . The third sensor 1255 is used to detect whether the handle of the basket supporting mechanism 6 is clamped between the two clamping plates 1254 .

[0078] In the basket sorting device 1 of this embodiment, a plurality of bosses 1256 are provided on two opposite surfaces of the two clamping plates 1254 , and a support column 1257 is provided at the lower end of the boss 1256 .

[0079] In the basket sorting device 1 of this embodiment, the first connecting plate 1111, the second connecting plate 1121, the third connecting plate 1131, the fourth connecting plate 3410 and the fifth connecting plate 1210 are all metal plates. The first guide 1112 and the first guide rail 1115 extend horizontally, the second guide 1122 and the second guide rail 1125 extend vertically, the third guide 1132 and the third guide rail 1135 extend front to back, the first guide 1112, the second guide 1122 and the third guide 1132 are perpendicular to each other, the first guide rail 1115, the second guide rail 1125 and the third guide rail 1135 are perpendicular to each other, the fourth guide 3420 and the fourth guide rail 3450 extend horizontally, and the fifth guide 12 20 and the fifth guide rail extend horizontally. When the first guide member 1112 and the fourth guide member 3420, and the first guide rail 1115 and the fourth guide rail 3450 are parallel to each other, the telescopic movement assembly 1130 is not required. When the first guide member 1112 and the fourth guide member 3420, and the first guide rail 1115 and the fourth guide rail 3450 are not parallel to each other, the telescopic movement assembly 1130 is required, and the first guide member 1112 and the fifth guide member 1220, and the first guide rail 1115 and the fifth guide rail are parallel to each other. The first driving member 1113, the second driving member 1123, the third driving member 1133, the fourth driving member 3430, and the fifth driving member 1230 can be motors or cylinders. There is gap contact between the first slider 1114 and the first guide rail 1115, the second slider 1124 and the second guide rail 1125, the third slider 1134 and the third guide rail 1135, the fourth slider 3440 and the fourth guide rail 3450, and the fifth slider 1240 and the fifth guide rail, which reduces the sliding friction between them and makes the sliding smoother. The first elastic contact member 2123 and the second elastic contact member 3321 are contact arms arranged on a rotating shaft with a torsion spring and inclined in the vertical direction. When the basket carrying mechanism 6 is hung on the first placement portion 2121 or the second placement portion 3320, the contact arm is pressed to rotate in the vertical direction. At this time, the first sensor 2124 or the second sensor 3322 detects that the torsion spring has elastically deformed, indicating that there is a basket carrying mechanism 6 on the fixing mechanism 2100 or the loading platform 3200. The first sensor 2124 or the second sensor 3322 generates a signal to control the horizontal moving component 1110 and the vertical moving component 1120 to drive the conveying mechanism 1200 to move to the fixing mechanism 2100 to grab the basket carrying mechanism 6 or transport the basket carrying mechanism 6 to the wafer processing device 2.The second sensor 3322 can also detect weight changes on the loading platform 3200. After the horizontal and vertical moving assemblies 1110 and 1120 drive the transport mechanism 1200 to transport the basket support mechanism 6 to the loading platform 3200, if the weight increases, it indicates that the basket 4 has been loaded. The horizontal and vertical moving assemblies 1110 and 1120 drive the transport mechanism 1200 to immediately transport the basket support mechanism 6 to the wafer processing device 2. If the weight decreases, it indicates that the basket 4 has been unloaded. The horizontal and vertical moving assemblies 1110 and 1120 drive the transport mechanism 1200 to immediately transport the basket support mechanism 6 to any vacant fixed mechanism 2100. The first groove 2125 and the second groove 3323 can be any shape, such as V-shaped, square, or semicircular. The first locking tongue 2126 and the second locking tongue 3324 are shaped like a rectangular parallelepiped in the lower half and a triangular prism in the upper half. The buckle 61 can be square, circular, or oval, with a square being the most preferred shape. The lower surface of the buckle 61 is an arcuate or triangular surface, facilitating better insertion of the buckle 61 into the first groove 2125 and the second groove 3323. The hook 62 is a right prism, the side of which forms the lower surface of the buckle 61. The bottom surface of the right prism is any triangle, preferably a right triangle. This design ensures that the basket support mechanism 6 is securely attached to the first placement portion 2121 or the second placement portion 3320 and also facilitates the buckle 61's entry or exit from the first groove 2125 or the second groove 3323 when the transport mechanism 1200 grasps or places the basket support mechanism 6. The fifth clamp 1250 is provided with two clamping plates 1254 which can clamp the handle of the basket carrying mechanism 6 from both sides, and the design of the boss 1256 and the support column 1257 enhances the stability of the transport mechanism 1200 during the transportation of the basket carrying mechanism 6, thereby preventing the risk of the wafer 3 falling and being damaged due to shaking or bumping during transportation.

[0080] The basket sorting device and wafer packaging equipment disclosed in the present invention can control the transport basket carrying mechanism in at least two degrees of freedom. Except for loading and unloading the basket, other processes are automated and intelligent, without the need for human intervention, which greatly improves the efficiency of wafer packaging and reduces costs.

[0081] It should be understood that the above description of the specific embodiments of the present invention is merely for the purpose of illustrating the technical approach and features of the present invention. Its purpose is to enable those skilled in the art to understand the contents of the present invention and implement them accordingly. However, the present invention is not limited to the above-described specific embodiments. Any changes or modifications made within the scope of the claims of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A basket sorting device, characterized in that: It includes a movable bracket, a fixed bracket and a loading bracket; the fixed bracket is provided with multiple fixing mechanisms, and the fixing mechanisms are used to fix the basket carrying mechanism; the movable bracket has a moving mechanism and a conveying mechanism, and the conveying mechanism is arranged on the moving mechanism. The moving mechanism is used to move the conveying mechanism in at least two degrees of freedom, drive the conveying mechanism to grab the basket carrying mechanism from the fixed mechanism and transport it to the loading bracket, and drive the conveying mechanism to grab the basket carrying mechanism from the loading bracket and transport it to any vacant fixed mechanism.

2. The basket sorting device according to claim 1, characterized in that: The moving mechanism includes a horizontal moving component and a vertical moving component, and the horizontal moving component and the vertical moving component are arranged perpendicular to each other. The horizontal moving component is used to drive the conveying mechanism to move horizontally between the fixed bracket and the object carrier in the horizontal degree of freedom, and the vertical moving component is used to drive the conveying mechanism to move vertically between the multiple fixed mechanisms in the vertical degree of freedom. The horizontal degree of freedom and the vertical degree of freedom are perpendicular to each other.

3. The basket sorting device according to claim 2, characterized in that: The horizontal movement assembly includes a first connecting plate, a first guide, a first driving member and a first slider. The first connecting plate is fixed, the first guide is fixed on the first connecting plate, the first driving member is fixed on the first connecting plate or the first guide, the first slider is movably arranged on the first guide, and the first driving member is used to drive the first slider to move horizontally along the first guide in the horizontal degree of freedom.

4. The basket sorting device according to claim 3, characterized in that: The first guide member has a first guide rail extending horizontally, and the first sliding block is embedded in the first guide rail and can slide along the first guide rail under the drive of the first driving member.

5. The basket sorting device according to claim 3, characterized in that: The vertical movement component includes a second connecting plate, a second guide, a second driving member and a second slider. The second connecting plate is fixed, the second guide is fixed on the first connecting plate, the second driving member is fixed on the second connecting plate or the second guide, the second slider is movably arranged on the second guide, and the second driving member is used to drive the second slider to move vertically along the second guide in the vertical degree of freedom.

6. The basket sorting device according to claim 5, characterized in that: The second guide member has a second guide rail extending vertically, and the second sliding block is embedded in the second guide rail and can slide along the second guide rail under the drive of the second driving member.

7. The basket sorting device according to claim 2, characterized in that: The moving mechanism also includes a telescopic moving component, and the transport mechanism is arranged on the telescopic moving component. The telescopic moving component is used to drive the transport mechanism to move forward and backward between the movable bracket and the fixed bracket in the front and rear freedom, and the front and rear freedom is perpendicular to the horizontal freedom and the vertical freedom.

8. The basket sorting device according to claim 7, characterized in that: The telescopic moving assembly includes a third connecting plate, a third guide, a third driving member and a third slider. The third connecting plate is fixed, the third guide is fixed to the third connecting plate, the third driving member is fixed to the third connecting plate or the third guide, the third slider is movably arranged on the third guide, and the third driving member is used to drive the third slider to move forward and backward along the third guide in the forward and backward degrees of freedom.

9. The basket sorting device according to claim 8, characterized in that: The third guide member has a third guide rail extending forward and backward, and the third sliding block is embedded in the third guide rail and can slide along the third guide rail under the drive of the third driving member.

10. The basket sorting device according to claim 7, characterized in that: The horizontal moving component is located between the vertical moving component and the fixed bracket, and the telescopic moving component is arranged on the horizontal moving component.

11. The basket sorting device according to claim 7, characterized in that: The vertical moving assembly is located between the horizontal moving assembly and the fixed bracket, and the telescopic moving assembly is arranged on the vertical moving assembly.

12. The basket sorting device according to claim 1, characterized in that: The fixing mechanism includes a fixing component and a first connecting component. The fixing component is fixed on the fixing bracket. The first connecting component is connected and fixed to the fixing component. The first connecting component is used to be connected and fixed to the basket carrying mechanism when the basket carrying mechanism is placed on the fixing mechanism.

13. The basket sorting device according to claim 12, characterized in that: The first connecting component includes a first connecting portion and a first placing portion. The first connecting portion is fixedly connected to the fixing component. The first placing portion extends from the first connecting portion in a direction away from the fixing component and is spaced apart from the fixing bracket.

14. The basket sorting device according to claim 13, characterized in that: The first placement portion has a first elastic contact piece and a first sensor, and the first sensor is used to detect whether the first elastic contact piece is elastically deformed; when the basket carrying mechanism is fixed on the fixing mechanism, the first elastic contact piece is pressed to deform, and after the first sensor detects the elastic deformation of the first elastic contact piece, it sends a signal indicating that the basket carrying mechanism has been placed on the fixing mechanism.

15. The basket sorting device according to claim 13, characterized in that: The upper end of the first placement portion has two first grooves arranged at intervals, and a first locking tongue is formed between the two first grooves. A buckle and a hook are provided on the basket carrying mechanism, and the hook extends downward from the outer side of the buckle. When the basket carrying mechanism is fixed to the fixing mechanism, the buckle is inserted into the two first grooves and sleeved on the first locking tongue, and the hook is pressed against the first placement portion.

16. The basket sorting device according to claim 1, characterized in that: The loading bracket includes a loading column, a loading platform and a second connecting component. The loading column is fixed and extends vertically. The loading platform and the second connecting component are fixed on the loading column. The second connecting component is located above the loading platform. The loading platform is used to support the basket carrying mechanism. The second connecting component is used to fix the basket carrying mechanism.

17. The basket sorting device according to claim 16, characterized in that: The second connecting component includes a second connecting portion and a second placing portion. The second connecting portion is fixedly connected to the carrying pillar. The second placing portion extends from the second connecting portion in a direction away from the carrying pillar and is spaced apart from the carrying pillar.

18. The basket sorting device according to claim 17, characterized in that: The second placement portion has a second elastic contact piece and a second sensor, and the second sensor is used to detect whether the second elastic contact piece undergoes elastic deformation; when the basket carrying mechanism is fixed on the loading platform, the second elastic contact piece is pressed to deform, and after the second sensor detects the elastic deformation of the second elastic contact piece, it sends a signal indicating that the basket carrying mechanism has been placed on the loading platform.

19. The basket sorting device according to claim 17, characterized in that: The upper end of the second placement portion has two second grooves arranged at an interval, and a second locking tongue is formed between the two second grooves. A buckle and a hook are provided on the basket carrying mechanism, and the hook extends downward from the outer side of the buckle. When the basket carrying mechanism is fixed to the fixing mechanism, the buckle is inserted into the two second grooves and sleeved on the second locking tongue, and the hook is pressed against the second placement portion.

20. The basket sorting device according to claim 16, characterized in that: The carrier bracket also includes a loading and unloading moving component, which is connected to the carrier platform and is used to move the carrier platform in the horizontal degree of freedom, driving the carrier platform to send out or retrieve the basket loaded with wafers through the basket carrying mechanism.

21. The basket sorting device according to claim 20, characterized in that: The loading and unloading cargo moving assembly includes a fourth connecting plate, a fourth guide, a fourth driving member and a fourth slider. The fourth connecting plate is fixedly arranged, the fourth guide is fixed on the fourth connecting plate, the fourth driving member is fixed on the fourth connecting plate or the fourth guide, the fourth slider is movably arranged on the fourth guide, and the loading platform is fixedly connected to the fourth slider through a connecting beam. The fourth driving member is used to drive the fourth slider to move horizontally along the fourth guide in the horizontal degree of freedom.

22. The basket sorting device according to claim 21, characterized in that: The fourth guide member has a fourth guide rail extending horizontally, and the fourth sliding block is embedded in the fourth guide rail and can slide along the fourth guide rail under the drive of the fourth driving member.

23. The basket sorting device according to claim 1, characterized in that: The conveying mechanism includes a fifth connecting plate, a fifth guide, a fifth driving member, a fifth slider and a fifth clamp, the fifth connecting plate is fixed on the moving mechanism, the fifth guide and the fifth driving member are fixed on the fifth connecting plate, the fifth guide extends along the direction of one degree of freedom, the fifth slider is movably arranged on the fifth guide, the fifth clamp is fixedly connected to the fifth slider, and the fifth driving member is used to drive the fifth slider to slide along the fifth guide to drive the fifth clamp to approach or move away from the fixing mechanism.

24. The basket sorting device according to claim 23, characterized in that: The fifth fixture has a fixed plate, a connecting column, a support beam and two clamping plates. The fixed plate is fixedly connected to the fifth slider. The connecting column is fixed on the fixed plate and extends vertically from the fixed plate. The support beam is mounted and fixed on the upper end of the connecting column. The two clamping plates are respectively fixed at intervals on both sides of the support beam relative to the fixed plate.

25. The basket sorting device according to claim 24, characterized in that: A third sensor is provided at one end of the two clamping plates away from the fixing bracket, and the third sensor is used to detect whether the handle portion of the basket carrying mechanism is clamped between the two clamping plates.

26. The basket sorting device according to claim 24, characterized in that: A plurality of bosses are provided on two opposite surfaces of the two clamping plates, and a support column is provided at the lower end of the bosses.

27. A wafer packaging device, characterized in that: The invention comprises a shell having a first area and a second area arranged adjacent to each other, wherein the basket sorting device according to any one of claims 1 to 26 is arranged in the first area, and a wafer processing device is arranged in the second area, and the first area is used to load a basket loaded with wafers through the basket sorting device, transport it to the second area, receive the basket from the second area and unload it, and the second area is used to receive the basket from the first area and process the wafers in the basket before sending the basket back to the first area.

28. The wafer packaging equipment according to claim 27, characterized in that: A first area is respectively provided on both sides of the second area, wherein one of the first areas is used for loading goods into the basket, and the other first area is used for unloading goods from the basket.

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