Protective structure of motor and wafer processing device

Abstract

The utility model discloses a motor protection structure and a wafer processing device, the motor protection structure comprises a motor and a first protection cover, the fixed end of the motor is installed on a wafer processing cylinder, and the driving end of the motor extends into the wafer processing cylinder and is connected with a rotating member; the first protective cover is installed on the periphery of the motor in a sealed mode, an air supply port is formed in the first protective cover, air is supplied into the first protective cover through the air supply port, and therefore positive pressure for preventing external air from entering the first protective cover is formed in the first protective cover. According to the protection structure of the motor, the air supply port is formed in the first protection cover, the first protection cover is installed on the periphery of the motor in a sealed mode, air is supplied into the first protection cover through the air supply port, and positive pressure for preventing external air from entering the first protection cover is formed in the first protection cover; volatilized cleaning liquid medicine can be effectively prevented from staining the surface of the motor, and the service life of the motor is greatly prolonged.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer processing equipment, and in particular relates to a motor protection structure and a wafer processing device. Background Art

[0002] A wafer is a silicon chip used in the manufacture of silicon semiconductor integrated circuits. Due to its round shape, it is therefore called a wafer. During the manufacturing process, not only must external sources of contamination be eliminated, but the wafer must also be cleaned. Chemical solutions or gases are used to effectively remove impurities such as dust, metal ions, and organic matter remaining on the wafer without damaging its surface and electrical properties.

[0003] The wet cleaning process is a relatively common cleaning process for wafers. After the cleaning process is completed, the wafers need to be dried. The wafer processing device is used to dry the surface of the wet wafers by rotating and drying them. A vertical wafer spin dryer is a commonly used wafer processing device. The vertical wafer spin dryer includes an outer cylinder, a drive motor and a cassette rack. The shaft of the drive motor extends into the outer cylinder and is connected to the cassette rack. The drive motor drives the cassette rack located in the outer cylinder to rotate at high speed. At the same time, cleaning liquid is poured into the liquid inlet installed on the outer cylinder to clean the wafers on the cassette rack. After cleaning, the wafers on the cassette rack are spin-dried by relying on the high-speed rotation of the cassette rack. During the specific operation process, since the cleaning liquid is volatile, the volatilized cleaning liquid is easy to stick to the surface of the drive motor, thereby corroding the surface of the drive motor and affecting the service life of the motor. Utility Model Content

[0004] The purpose of the utility model is to provide a motor protection structure and a wafer processing device to solve the problem of a conventional vertical wafer spin dryer driving motor in the prior art having a short motor service life due to surface corrosion.

[0005] To achieve this purpose, the present invention adopts the following technical solutions:

[0006] In a first aspect, a protective structure for a motor is provided, comprising a motor and a first protective cover, wherein:

[0007] The fixed end of the motor is mounted on the wafer processing cylinder, and the driving end of the motor extends into the wafer processing cylinder and is connected to the rotating member;

[0008] The first protective cover is sealed and installed on the periphery of the motor. An air supply port is provided in the first protective cover, and gas is supplied into the first protective cover through the air supply port to form a positive pressure in the first protective cover to prevent external gas from entering the first protective cover.

[0009] Furthermore, the gas is nitrogen, and the nitrogen is configured to protect and cool the motor when the motor is working.

[0010] Furthermore, a positioning assembly is provided at the other end of the driving end of the motor, and the positioning assembly is configured to position the rotating part when the motor stops working. A second protective cover is installed on the outer sealing surface of the positioning assembly.

[0011] Furthermore, the positioning assembly includes a positioning drive member and a positioning member, the rotating member is provided with a positioning groove, the positioning groove is provided corresponding to the positioning member, the positioning drive member is provided on the motor so as to be liftable, the fixed end of the positioning drive member is mounted on the motor, the driving end of the positioning drive member is connected to the positioning member, and the positioning drive member is configured to drive the positioning member to a high position or a low position;

[0012] The positioning driving member drives the positioning member to rise to a high position, so that the positioning member is inserted into the positioning groove to position the rotating member.

[0013] Furthermore, the first protective cover includes a first mounting flange, a first protective cover and a second mounting flange, wherein;

[0014] The first mounting flange is mounted on the wafer processing barrel, the second mounting flange is fixedly mounted on the other end of the driving end of the motor, the first end of the first protective cover is sealedly connected to the outer edge of the first mounting flange, and the second end of the first protective cover is sealedly connected to the outer edge of the second mounting flange, so that the first protective cover is sealed on the periphery of the motor.

[0015] Furthermore, the second protective cover includes a third mounting flange and a second protective cover, the third mounting flange is arranged on the outside of the rotating member, the first end of the second protective cover is sealed connected to the outer edge of the second mounting flange, and the second end of the second protective cover is sealed connected to the outer edge of the third mounting flange, so that the second protective cover is sealed installed on the periphery of the positioning assembly.

[0016] In a second aspect, a wafer processing device is provided, comprising the protective structure of the above-mentioned motor.

[0017] Compared with the existing technology, the protective structure of the motor and the wafer processing device have the following beneficial effects: by opening an air supply port on the first protective cover, the first protective cover is sealed and installed on the periphery of the motor, and gas is fed into the first protective cover through the air supply port, so that a positive pressure is formed in the first protective cover to prevent external gas from entering the first protective cover, which can effectively prevent the volatilized cleaning liquid from getting on the surface of the motor, greatly improving the service life of the motor; by setting a second protective cover, the surface of the positioning component can be effectively prevented from being corroded. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate and understand the technical solutions in the embodiments of the present invention, a brief introduction is given below to the background technology of the present invention and the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without paying any creative work.

[0019] Figure 1 This is a schematic diagram of the three-dimensional structure of the protective structure of the motor provided by an embodiment of the present utility model;

[0020] Figure 2 This is another three-dimensional structural diagram of the motor protection structure provided by an embodiment of the present utility model. DETAILED DESCRIPTION

[0021] The technical solution of the present invention will be further described below with reference to the accompanying drawings and through specific implementation methods.

[0022] To facilitate understanding of the present invention, a more comprehensive description of the present invention will be provided below with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the accompanying drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. Rather, the purpose of providing these embodiments is to provide a more thorough and comprehensive understanding of the disclosure of the present invention. It should be noted that when a component is referred to as being "fixed to" another component, it can be directly attached to the other component or there can be a central component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there can be a central component. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which the present invention belongs. The terms used herein in the specification of the present invention are for the purpose of describing specific embodiments only and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more of the relevant listed items.

[0023] See also Figure 1 and Figure 2 As shown, in this embodiment, a protective structure of a motor includes a motor 1 and a first protective cover 2, wherein: the fixed end of the motor 1 is installed on the wafer processing barrel 3, and the driving end of the motor 1 extends into the wafer processing barrel 3 and is connected to the rotating part 4; the first protective cover 2 is sealed and installed on the periphery of the motor 1, and an air supply port 5 is provided in the first protective cover 2, and gas is supplied into the first protective cover 2 through the air supply port 5, so that a positive pressure is formed in the first protective cover 2 to prevent external gas from entering the first protective cover 2.

[0024] It can be seen that by opening an air supply port 5 on the first protective cover 2, the first protective cover 2 is sealed and installed on the periphery of the motor 1, and gas is supplied into the first protective cover 2 through the air supply port 5, so that a positive pressure is formed in the first protective cover 2 to prevent external gas from entering the first protective cover 2, which can effectively prevent the volatilized cleaning liquid from getting on the surface of the motor 1, thereby greatly improving the service life of the motor 1.

[0025] As an embodiment, the gas is nitrogen, and the nitrogen is configured to protect and cool the motor 1 when the motor 1 is working. Obviously, the gas introduced is nitrogen, which forms a positive pressure in the first protective cover 2 while cooling the motor 1.

[0026] As an embodiment, a positioning assembly 6 is provided at the other end of the driving end of the motor 1. The positioning assembly 6 is configured to position the rotating part 4 when the motor 1 stops working. A second protective cover 7 is installed on the outer seal of the positioning assembly 6.

[0027] It can be seen that by providing the second protective cover 7 , the surface of the positioning component 6 can be effectively prevented from being corroded.

[0028] As an embodiment, the positioning assembly 6 includes a positioning drive 60 and a positioning member 61. A positioning groove 40 is provided on the rotating member 4, and the positioning groove 40 is provided corresponding to the positioning member 61. The positioning drive 60 can be set on the motor 1 in a lifting manner. The fixed end of the positioning drive 60 is installed on the motor 1, and the driving end of the positioning drive 60 is connected to the positioning member 61. The positioning drive 60 is configured to drive the positioning member 61 to a high position or a low position; the positioning drive 60 drives the positioning member 61 to rise to a high position, so that the positioning member 61 is inserted into the positioning groove 40 to position the rotating member 4.

[0029] As an embodiment, the first protective cover 2 includes a first mounting flange 20, a first protective cover and a second mounting flange 21, wherein; the first mounting flange 20 is installed on the wafer processing barrel 3, the second mounting flange 21 is fixedly installed on the other end of the driving end of the motor 1, the first end of the first protective cover is sealed to the outer edge of the first mounting flange 20, and the second end of the first protective cover is sealed to the outer edge of the second mounting flange 21, so that the first protective cover 2 is sealed to the periphery of the motor 1.

[0030] As an embodiment, the second protective cover 7 includes a third mounting flange 70 and a second protective cover, the third mounting flange 70 is arranged on the outside of the rotating part 4, the first end of the second protective cover is sealed connected to the outer edge of the second mounting flange 21, and the second end of the second protective cover is sealed connected to the outer edge of the third mounting flange 70, so that the second protective cover 7 is sealed and installed on the periphery of the positioning assembly 6.

[0031] Based on the above-mentioned protective structure of the motor, a wafer processing device is provided, which includes the above-mentioned protective structure of the motor.

[0032] It should be noted that a wafer processing device can perform cleaning and drying processes on the wafers in the wafer processing cylinder 3 .

[0033] The protective structure of the above-mentioned motor is as follows: when the motor 1 is working: the motor 1 drives the connected rotating part 4 to rotate, and at the same time, nitrogen is delivered to the first protective cover 2 through the air supply port 5, so that a positive pressure is formed in the first protective cover 2 to prevent external gas from entering the first protective cover 2. While forming the positive pressure, the nitrogen cools the working motor 1. At this time, the second protective cover 7 seals the positioning assembly 6. When the motor 1 stops working, the positioning drive part 60 drives the positioning part 61 to rise to a high position, so that the positioning part 61 is inserted into the positioning groove 40 to position the rotating part 4.

[0034] The above embodiments merely illustrate the basic principles and features of the present invention. The present invention is not limited to the above embodiments. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and modifications are intended to fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. A protective structure for a motor, characterized in that: The protective structure of the motor includes a motor and a first protective cover, wherein: The fixed end of the motor is mounted on the wafer processing cylinder, and the driving end of the motor extends into the wafer processing cylinder and is connected to the rotating member; The first protective cover is sealed and installed on the periphery of the motor. An air supply port is provided in the first protective cover, and gas is supplied into the first protective cover through the air supply port to form a positive pressure in the first protective cover to prevent external gas from entering the first protective cover.

2. The protective structure of the motor according to claim 1, characterized in that: The gas is nitrogen, and the nitrogen is configured to protect and cool the motor when the motor is working.

3. The protective structure of the motor according to claim 1, characterized in that: A positioning assembly is provided at the other end of the driving end of the motor. The positioning assembly is configured to position the rotating member when the motor stops working. A second protective cover is installed on the outer sealing surface of the positioning assembly.

4. The protective structure of the motor according to claim 3, characterized in that: The positioning assembly includes a positioning drive member and a positioning member, the rotating member is provided with a positioning groove, the positioning groove is provided corresponding to the positioning member, the positioning drive member is provided on the motor so as to be liftable, the fixed end of the positioning drive member is mounted on the motor, the driving end of the positioning drive member is connected to the positioning member, and the positioning drive member is configured to drive the positioning member to a high position or a low position; The positioning driving member drives the positioning member to rise to a high position, so that the positioning member is inserted into the positioning groove to position the rotating member.

5. The protective structure of the motor according to claim 4, characterized in that: The first protective cover includes a first mounting flange, a first protective cover, and a second mounting flange, wherein; The first mounting flange is mounted on the wafer processing barrel, the second mounting flange is fixedly mounted on the other end of the driving end of the motor, the first end of the first protective cover is sealedly connected to the outer edge of the first mounting flange, and the second end of the first protective cover is sealedly connected to the outer edge of the second mounting flange, so that the first protective cover is sealed on the periphery of the motor.

6. The protective structure of the motor according to claim 5, characterized in that: The second protective cover includes a third mounting flange and a second protective cover, the third mounting flange is arranged on the outside of the rotating member, the first end of the second protective cover is sealed to the outer edge of the second mounting flange, and the second end of the second protective cover is sealed to the outer edge of the third mounting flange, so that the second protective cover is sealed to the periphery of the positioning assembly.

7. A wafer processing device, characterized in that: The wafer processing device includes the protective structure of the motor according to any one of claims 1 to 6.

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