Ultrasonic blade assembly and ultrasonic cutter

Abstract

The utility model discloses an ultrasonic blade assembly and an ultrasonic cutter. The ultrasonic blade assembly comprises an annular blade, a sheet-shaped base body and an ultrasonic vibrator. The annular blade is arranged on the periphery of the sheet-shaped base body, and the ultrasonic vibrator is arranged on the surface of the sheet-shaped base body. The vibration direction of the ultrasonic vibrators is the axial direction of the sheet-shaped base body, and the vibration direction of the annular blades is the radial direction of the sheet-shaped base body. According to the ultrasonic blade assembly, radial vibration of the annular blade is achieved through the ultrasonic vibrators, and the annular blade with the radial vibration can achieve the better cutting machining effect.

Description

Technical Field

[0001] The present application relates to the field of machining tools, and in particular to an ultrasonic blade assembly and an ultrasonic tool. Background Art

[0002] In the field of material cutting, such as cutting semiconductor wafers, sheet-shaped annular blades are currently widely used for cutting. The annular blade rotates so that the outer edge of the blade contacts the object being cut, thereby achieving the desired effect. However, for hard and brittle materials, the cutting quality of the currently used cutting tools is low, the surface quality of the workpiece is not high, the processing efficiency is low, the tool wear is rapid, and the tool life is short. Utility Model Content

[0003] The present application provides an ultrasonic blade assembly and an ultrasonic tool to solve the current technical problems of low cutting quality, low efficiency and short tool life.

[0004] In order to solve the above technical problems, the present application provides an ultrasonic blade assembly, comprising: an annular blade, a sheet-like substrate and an ultrasonic vibrator; the annular blade is arranged on the outer periphery of the sheet-like substrate, and the ultrasonic vibrator is arranged on the surface of the sheet-like substrate; the vibration direction of the ultrasonic vibrator is the axial direction of the sheet-like substrate, and the vibration direction of the annular blade includes the radial direction of the sheet-like substrate.

[0005] In one embodiment, the sheet-like base includes a carrying plate and a fixing plate; the carrying plate is formed with a carrying table, the annular blade is placed on the carrying table, and the fixing plate is arranged on the carrying table to clamp the annular blade.

[0006] In one embodiment, a slot is formed on the supporting table, and the fixing plate is engaged with the slot to clamp the annular blade.

[0007] In one embodiment, glue is provided between the fixing plate, the annular blade and the carrying plate.

[0008] In one embodiment, a mounting groove is formed on the surface of the sheet-like base, the ultrasonic vibrator is embedded in the mounting groove, and the mounting groove is filled with adhesive.

[0009] In one embodiment, a space-avoiding groove is formed on the inner surface of the installation groove.

[0010] In one embodiment, the sheet-like base body is formed with a central axis mounting hole, the ultrasonic vibrator is arranged around the central axis mounting hole, and the sheet-like base body is formed with a vibration-damping hole between the central axis mounting hole and the ultrasonic vibrator.

[0011] In one embodiment, two circles of vibration-damping hole groups are formed around the central axis mounting hole, the inner circle vibration-damping hole group is arc-shaped holes arranged at intervals, and the outer circle vibration-damping hole group is arc-shaped holes and circular holes arranged alternately at intervals; in the radial direction, the intervals between the arc-shaped holes in the inner circle vibration-damping hole group are covered by the arc-shaped holes in the outer circle vibration-damping hole group.

[0012] In one embodiment, the outer ring vibration-damping hole group comprises an arc-shaped hole and three circular holes that are alternately arranged at intervals.

[0013] In one embodiment, the ratio of the thickness of the ultrasonic transducer to the thickness of the sheet substrate is 1:10 to 1:15.

[0014] In one embodiment, the thickness of the sheet substrate is 3 mm to 10 mm, the thickness of the ultrasonic vibrator is 0.2 mm to 2 mm, the thickness of the annular blade is 0.015 mm to 0.055 mm, and the length of the annular blade extending from the sheet substrate is 0.2 mm to 1.2 mm.

[0015] In one embodiment, the thickness of the outer periphery of the sheet-like base gradually decreases to form an inclined surface, and the inclined surface has an inclination angle of 55° to 80° relative to the surface of the sheet-like base.

[0016] In order to solve the above technical problems, the present application also provides an ultrasonic tool, including the above-mentioned ultrasonic blade assembly, a connecting frame, and an ultrasonic tool locking ring. The connecting frame is formed with a main shaft mounting hole, the ultrasonic blade assembly is sleeved on the lower end of the connecting frame, and the ultrasonic tool locking ring is sleeved on the lower end of the connecting frame and is located on the lower side of the ultrasonic blade assembly to lock the ultrasonic blade assembly on the connecting frame.

[0017] In one embodiment, a groove is formed on the surface of the ultrasonic tool locking ring facing the ultrasonic blade assembly, and a protrusion is formed on the sheet-like base facing the ultrasonic tool locking ring. When the ultrasonic tool locking ring locks the ultrasonic blade assembly to the connecting frame, the protrusion is located in the groove.

[0018] In one embodiment, the ultrasonic cutter further includes a wireless transmission module, which is disposed at the upper end of the connecting frame and is connected to the ultrasonic vibrator via a spring pin.

[0019] In one embodiment, the ultrasonic tool further includes a spindle locking ring, which is arranged at the lower end of the connecting frame and located on the lower side of the ultrasonic tool locking ring to lock the spindle in the spindle mounting hole.

[0020] The ultrasonic blade assembly of the present application includes an annular blade, a sheet-like substrate, and an ultrasonic vibrator. The annular blade is arranged on the periphery of the sheet-like substrate. When the ultrasonic blade assembly rotates, the annular blade on the periphery can achieve cutting. Ultrasonic vibration is added to the ultrasonic blade assembly of the present application to achieve high-efficiency and high-quality processing. Specifically, an ultrasonic vibrator is set on the surface of the sheet-like substrate, and the vibration direction of the ultrasonic vibrator is axial to the sheet-like substrate. The vibration of the ultrasonic vibrator is transmitted to the annular blade through the sheet-like substrate, causing the annular blade to generate radial vibration, thereby achieving better processing effect during cutting. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present application. Those skilled in the art can also derive other drawings based on these drawings without inventive work, among which:

[0022] Figure 1 This is a schematic diagram of the three-dimensional structure of an embodiment of the ultrasonic tool of the present application;

[0023] Figure 2 yes Figure 1 An exploded view of an embodiment of an ultrasonic tool of the present application is shown;

[0024] Figure 3 This is a schematic diagram of the three-dimensional structure of an embodiment of the ultrasonic blade assembly of the present application;

[0025] Figure 4 yes Figure 3 A cross-sectional view of an embodiment of an ultrasonic blade assembly of the present application is shown;

[0026] Figure 5 yes Figure 4 An enlarged view of portion A of an embodiment of an ultrasonic blade assembly of the present application is shown;

[0027] Figure 6 This is a schematic diagram of the three-dimensional structure of another embodiment of the ultrasonic blade assembly of the present application;

[0028] Figure 7 This is a three-dimensional structural diagram of an embodiment of the connecting frame assembly of the present application;

[0029] Figure 8 yes Figure 7 A cross-sectional view of an embodiment of a connecting frame assembly of the present application is shown. DETAILED DESCRIPTION

[0030] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. It will be understood that the specific embodiments described herein are only used to explain the present application, rather than to limit the present application. It should also be noted that, for ease of description, only some, rather than all, structures related to the present application are shown in the drawings. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0031] References herein to "embodiments" mean that a particular feature, structure, or characteristic described in connection with the embodiments may be included in at least one embodiment of the present application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute an independent or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0032] like Figure 1-Figure 2 The ultrasonic tool 100 of the present application is an industrial ultrasonic tool for cutting. It includes a spindle 11, an ultrasonic blade assembly 12, and a connecting frame assembly 13. The ultrasonic blade assembly 12 is fixedly connected to the spindle 11 via the connecting frame assembly 13. The spindle 11 can rotate at high speeds, which drives the ultrasonic blade assembly 12 to rotate and cut the workpiece. In this embodiment, the ultrasonic blade assembly 12 can be set to a fixed size, and the size of the connecting frame assembly 13 can be changed to adapt to spindles of different sizes.

[0033] Specifically for the ultrasonic blade assembly in this application, such as Figure 3-Figure 6 In this embodiment, the ultrasonic blade assembly 12 includes an annular blade 121, a sheet-like base 122, and an ultrasonic vibrator 123; the annular blade 121 is arranged on the outer periphery of the sheet-like base 122, and the ultrasonic vibrator 123 is arranged on the surface of the sheet-like base 122; the vibration direction of the ultrasonic vibrator 123 is the axial direction of the sheet-like base 122, and the vibration direction of the annular blade 121 is the radial direction of the sheet-like base 122.

[0034] The annular blade 121 can be a diamond-made dicing blade for semiconductor wafer cutting. The ultrasonic tool 100 is used in the field of wafer cutting to achieve precise and high-quality cutting. The sheet-like substrate 122 is used to support the annular blade 121 and the ultrasonic vibrator 123, and is also used to transmit the vibration of the ultrasonic vibrator 123 to the annular blade 121. It is mainly made of aluminum. The ultrasonic vibrator 123 is used to achieve ultrasonic vibration. Specifically, it can be a piezoelectric ceramic that can convert electrical energy into mechanical energy by applying high-frequency alternating current to the upper and lower surfaces of the piezoelectric ceramic to excite the piezoelectric ceramic to high-frequency vibration.

[0035] The ultrasonic vibrator 123 is disposed on the surface of the sheet substrate 122, and its vibration direction is axial to the sheet substrate 122, i.e., the axial direction of the sheet substrate 122, i.e., the perpendicular direction or thickness direction of the surface of the sheet substrate 122. If a piezoelectric ceramic is used as the ultrasonic vibrator 123, the piezoelectric ceramic can be subjected to a corresponding polarization treatment to cause it to vibrate in the axial direction. The vibration of the ultrasonic vibrator 123 is transmitted through the sheet substrate 122 to the annular blade 121 on its periphery, causing the annular blade 121 to primarily vibrate in the radial direction. The axial vibration of the annular blade 121 is relatively small and has little effect on the processing.

[0036] The annular blade 121 in this embodiment is arranged on the periphery of the sheet-like base 122. A slot can be formed on the periphery of the sheet-like base 122, and the annular blade 121 is embedded in the slot; the sheet-like base 122 can also be set as a clamping structure to clamp the annular blade 121 on the periphery.

[0037] In one embodiment, the sheet-like base 122 includes a carrier plate 1221 and a fixed plate 1222; the carrier plate 1221 is formed with a carrier surface 1223, the annular blade 121 is placed on the carrier surface 1223, and the fixed plate 1222 is disposed on the carrier surface 1223 to clamp the annular blade 121. The annular blade 121 can be fixed to the carrier plate 1221 by heat pressing, snap-fitting the fixed plate 1222, or adhesive. For example, a slot 1224 can be formed on the carrier surface 1223, and the fixed plate 1222 can be engaged with the slot 1224 to clamp the annular blade 121. Adhesive can also be provided between the fixed plate 1222, the annular blade 121, and the carrier plate 1221 to secure the annular blade 121.

[0038] In one embodiment, the peripheral thickness of the sheet substrate 122 gradually decreases to form an inclined surface. The inclined design of the periphery can more effectively transfer axial vibration to radial vibration. Furthermore, the inclination angle of the inclined surface relative to the surface of the sheet substrate is 55° to 80°. If the inclination angle is too large, the stiffness of the sheet substrate 122 will be reduced, causing the ultrasonic tool to swing. If the inclination angle is too small, the radial amplitude will be low.

[0039] In this embodiment, the ultrasonic vibrator 123 is disposed on the surface of the sheet-like substrate 122, specifically, either on one or both sides. Compared to a double-sided arrangement, a single-sided arrangement can achieve a more compact and lightweight structure for the overall ultrasonic blade assembly 12, while meeting processing requirements, making it more suitable for industrial implementation. In this embodiment, a mounting groove 1225 is formed on the surface of the sheet-like substrate 122. For a structure including a support plate 1221 and a fixing plate 1222, the mounting groove 1225 is formed on the surface of the support plate 1221. The ultrasonic vibrator 123 is embedded in the mounting groove 1225.

[0040] In one embodiment, the mounting groove 1225 is filled with glue to fix the ultrasonic vibrator 123. Furthermore, an air-avoiding groove 1226 is formed on the inner surface of the mounting groove 1225 to increase the bonding area, enhance the bonding force, and prevent glue from overflowing. Specifically, two or three air-avoiding grooves 1226 can be formed on the bottom surface of the mounting groove 1225.

[0041] The ultrasonic blade assembly 12 in this embodiment needs to be sleeved on the main shaft, and the axial vibration of the ultrasonic vibrator 123 on the ultrasonic blade assembly 12 will not only be transmitted to the outer annular blade 121, but also to the main shaft, affecting the life of the main shaft. Therefore, in this embodiment, a vibration-damping hole 1227 is further provided between the ultrasonic vibrator 123 of the ultrasonic blade assembly 12 and the main shaft. Specifically, a central axis mounting hole 1228 is formed on the sheet-like base 122. The ultrasonic vibrator 123 of this embodiment is arranged around the central axis mounting hole 1228, and the vibration-damping hole 1227 is specifically provided between the central axis mounting hole 1228 and the ultrasonic vibrator 123.

[0042] To achieve a relatively good vibration reduction effect, one embodiment includes two circles of vibration-damping holes surrounding the central axis mounting hole 1228. In the radial direction, the vibration waves transmitted from the ultrasonic transducer 123 to the central axis mounting hole 1228 pass through at least one circle of vibration-damping holes. These holes 1227 reduce the vibration waves transmitted to the main shaft, thereby reducing the impact on the main shaft. Based on the principle of vibration reduction, a larger number of vibration-damping holes is better. However, too many circles can affect the structural stability of the entire ultrasonic blade assembly 12. Therefore, two circles of vibration-damping holes are used in this embodiment.

[0043] Furthermore, in one embodiment, the inner ring vibration damping hole group comprises arcuate holes arranged at intervals, while the outer ring vibration damping hole group comprises arcuate holes and circular holes arranged alternately at intervals. In the radial direction, the intervals between the arcuate holes in the inner ring vibration damping hole group are overlapped by the arcuate holes in the outer ring vibration damping hole group. Combining vibration damping holes 1227 of different shapes can achieve better vibration damping effects. Specifically, in this embodiment, the outer ring vibration damping hole group comprises one arcuate hole and three circular holes arranged alternately at intervals.

[0044] Ultrasonic machining typically requires meticulous control. In addition to the structural design described above, dimensional design is also necessary. In one embodiment, the thickness ratio of the ultrasonic vibrator 123 to the thickness of the sheet substrate 122 is 1:10 to 1:15. Considering vibration transmission, a too large ratio will result in excessive axial vibration, while a too small ratio will result in insufficient transmission power. Specifically, the thickness of the sheet substrate can be 3 mm to 10 mm, and the thickness of the ultrasonic vibrator can be 0.2 mm to 2 mm.

[0045] As for the size of the annular blade, the thickness of the annular blade is 0.015mm to 0.055mm, and the size of the annular blade extending out of the sheet base is 0.2mm to 1.2mm, which ensures the chip cutting effect while avoiding the breakage problem.

[0046] The ultrasonic blade assembly 12 is arranged on the main shaft 11 through the connecting frame assembly 13. Figure 7-Figure 8 The connecting frame assembly 13 specifically includes a connecting frame 131 and an ultrasonic tool locking ring 132 .

[0047] The connecting frame 131 is formed with a spindle mounting hole 1311 for connecting to the spindle 11. The ultrasonic blade assembly 12 is sleeved on the lower end of the connecting frame 131. An ultrasonic cutter locking ring 132 is also sleeved on the lower end of the connecting frame 131 and is located under the ultrasonic blade assembly 12 to lock the ultrasonic blade assembly 12 to the connecting frame 131.

[0048] The connecting frame assembly 13 has a simple structure and can assist in the adaptation and installation of ultrasonic blade assemblies 12 of different sizes and spindles of different sizes. It is not only applicable to the above-mentioned ultrasonic blade assemblies with ultrasonic vibration, but also to the current ultrasonic blade assemblies without ultrasonic vibration.

[0049] Threads are formed on the inner ring surface of the ultrasonic tool locking ring 132 and the lower end of the connecting frame 131. The ultrasonic tool locking ring 132 and the lower end of the connecting frame 131 are threadedly connected and locked by the threads.

[0050] In order to firmly lock the ultrasonic blade assembly 12, a groove 1321 is formed on the surface of the ultrasonic cutter locking ring 132 facing the ultrasonic blade assembly 12, and a protrusion 124 is formed on the ultrasonic blade assembly 12 facing the ultrasonic cutter locking ring 132. When the ultrasonic cutter locking ring 132 locks the ultrasonic blade assembly 12 on the connecting frame 131, the protrusion 124 is located in the groove 1321.

[0051] Furthermore, the connecting frame assembly 13 also includes a spindle locking ring 133, which is disposed at the lower end of the connecting frame 131 and below the ultrasonic tool locking ring 132. The spindle locking ring 133 is used to cooperate with the spindle mounting hole 1311 to fix the connecting frame 131 and the spindle 11, thereby achieving the connection between the connecting frame 131 and the spindle 11. Specifically, a thread is formed on the inner annular surface of the spindle locking ring 133, and the spindle locking ring 133 is threadedly connected to the spindle 11.

[0052] The ultrasonic blade assembly 12 is locked to the connecting frame 131 via an ultrasonic tool locking ring 132. The connecting frame 131 is locked to the spindle 11 via a spindle locking ring 133. Rotation of the spindle 11 then drives the ultrasonic blade assembly 12 to rotate and cut. Furthermore, in this embodiment, ultrasonic vibrations of the ultrasonic blade assembly 12 are achieved through an ultrasonic vibrator 123, resulting in a more effective cutting effect. The ultrasonic vibrator 123 converts electrical energy into mechanical energy. Therefore, the ultrasonic tool also includes an energy transmission module, specifically a wireless transmission module 14, which is disposed at the upper end of the connecting frame 131 and electrically connected to the ultrasonic blade assembly 12.

[0053] Specifically, a receiving groove 1312 is formed at the upper end of the connecting frame 131 for accommodating the wireless transmission module 14. To simplify the electrical connection structure, a through-hole is formed at the bottom of the receiving groove 1312. The spring pins 141 of the wireless transmission module 14 pass through the through-hole to electrically connect to the ultrasonic blade assembly 12. Specifically, there are two spring pins 141, one positive and one negative, which are electrically connected to the ultrasonic vibrator 123 and the sheet-like substrate 122, respectively.

[0054] In summary, the ultrasonic tool of the present application uses an ultrasonic vibrator to increase the ultrasonic vibration of the ultrasonic blade assembly during cutting, thereby improving the cutting quality, and is particularly suitable for cutting hard and brittle materials; and uses a connecting frame assembly with a simple structure and high adaptability to fix the ultrasonic blade assembly to the ultrasonic tool spindle, thereby achieving stable cutting processing.

[0055] The terms "first," "second," and "third" in this application are used only for descriptive purposes and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first," "second," or "third" may explicitly or implicitly include at least one of such features. In the description of this application, "multiple" means at least two, for example, two, three, etc., unless otherwise specifically defined. All directional indications in the embodiments of this application (such as up, down, left, right, front, back...) are only used to explain the relative positional relationship, movement, etc. between the components under a specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indications also change accordingly. In addition, the terms "including" and "having," as well as any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units that are not listed, or may optionally include other steps or units that are inherent to these processes, methods, products, or devices.

[0056] The above description is only an implementation method of the present application and does not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the description and drawings of this application, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. An ultrasonic blade assembly, characterized in that: The ultrasonic blade assembly includes: an annular blade, a sheet-like base and an ultrasonic vibrator; the annular blade is arranged on the outer periphery of the sheet-like base, and the ultrasonic vibrator is arranged on the surface of the sheet-like base; the vibration direction of the ultrasonic vibrator is the axial direction of the sheet-like base, and the vibration direction of the annular blade includes the radial direction of the sheet-like base.

2. The ultrasonic blade assembly according to claim 1, wherein: The sheet-like base includes a carrying plate and a fixing plate; the carrying plate is formed with a carrying table, the annular blade is placed on the carrying table, and the fixing plate is arranged on the carrying table to clamp the annular blade.

3. The ultrasonic blade assembly according to claim 2, wherein: The bearing table is formed with a slot, and the fixing plate is engaged with the slot to clamp the annular blade.

4. The ultrasonic blade assembly according to claim 2 or 3, characterized in that: Glue is provided between the fixing plate, the annular blade and the carrying plate.

5. The ultrasonic blade assembly according to claim 1, wherein: A mounting groove is formed on the surface of the sheet-like base, the ultrasonic vibrator is embedded in the mounting groove, and the mounting groove is filled with adhesive.

6. The ultrasonic blade assembly according to claim 5, wherein: An air-avoiding groove is formed on the inner surface of the installation groove.

7. The ultrasonic blade assembly according to claim 1, wherein: The sheet-like base is formed with a central axis mounting hole, the ultrasonic vibrator is arranged around the central axis mounting hole, and the sheet-like base is formed with a vibration-damping hole between the central axis mounting hole and the ultrasonic vibrator.

8. The ultrasonic blade assembly according to claim 7, wherein: Two circles of vibration-damping hole groups are formed around the central axis mounting hole, the inner circle vibration-damping hole group is arc-shaped holes arranged at intervals, and the outer circle vibration-damping hole group is arc-shaped holes and circular holes arranged alternately at intervals; in the radial direction, the intervals between the arc-shaped holes in the inner circle vibration-damping hole group are covered by the arc-shaped holes in the outer circle vibration-damping hole group.

9. The ultrasonic blade assembly according to claim 8, wherein: The outer ring vibration-damping hole group comprises an arc-shaped hole and three circular holes that are alternately arranged at intervals.

10. The ultrasonic blade assembly according to claim 1, wherein: The ratio of the thickness of the ultrasonic vibrator to the thickness of the sheet-like substrate is 1:10 to 1:

15.

11. The ultrasonic blade assembly according to claim 1, wherein: The thickness of the sheet substrate is 3mm to 10mm, the thickness of the ultrasonic vibrator is 0.2mm to 2mm, the thickness of the annular blade is 0.015mm to 0.055mm, and the dimension of the annular blade extending out of the sheet substrate is 0.2mm to 1.2mm.

12. The ultrasonic blade assembly according to claim 1, wherein: The outer peripheral thickness of the sheet-like base gradually decreases to form an inclined surface, and the inclined surface has an inclination angle of 55° to 80° relative to the surface of the sheet-like base.

13. An ultrasonic tool, characterized in that: The ultrasonic cutter includes an ultrasonic blade assembly, a connecting frame, and an ultrasonic cutter locking ring according to any one of claims 1 to 12, wherein the connecting frame is formed with a main shaft mounting hole, the ultrasonic blade assembly is sleeved on the lower end of the connecting frame, and the ultrasonic cutter locking ring is sleeved on the lower end of the connecting frame and is located on the lower side of the ultrasonic blade assembly for locking the ultrasonic blade assembly on the connecting frame.

14. The ultrasonic cutter according to claim 13, characterized in that: A groove is formed on the surface of the ultrasonic tool locking ring facing the ultrasonic blade assembly, and a protrusion is formed on the sheet-like base facing the ultrasonic tool locking ring. When the ultrasonic tool locking ring locks the ultrasonic blade assembly to the connecting frame, the protrusion is located in the groove.

15. The ultrasonic cutter according to claim 13, characterized in that: The ultrasonic cutter further includes a wireless transmission module, which is disposed at the upper end of the connecting frame and is connected to the ultrasonic vibrator via a spring pin.

16. The ultrasonic cutter according to claim 13, characterized in that The ultrasonic cutter further includes a spindle locking ring, which is arranged at the lower end of the connecting frame and located at the lower side of the ultrasonic cutter locking ring, and is used to lock the spindle in the spindle mounting hole.

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