Base plate hanging mechanism in evaporation cavity

Abstract

The utility model discloses a hanging mechanism for a substrate in an evaporation cavity, which relates to the field of vacuum evaporation equipment and comprises an evaporation machine shell and a sealing cover which is hinged and assembled on the side surface of the evaporation machine shell and plays a role in sealing, a hanging disc is concentrically assembled in the evaporation machine shell, the hanging disc is positioned at the upper part in the evaporation machine shell, and the sealing cover is arranged on the side surface of the evaporation machine shell. According to the utility model, through the cooperation of the first adsorption suspension part, the second adsorption suspension part and the switching unit, the substrate can be fixed below the first adsorption suspension part for single-side evaporation treatment, and then the substrate is transferred below the second adsorption suspension part under the control of the switching unit; and the base plate can be turned over in the transferring process, that is, double-face evaporation treatment can be carried out under the condition that the evaporation machine does not stop, all structures on the suspension disc can be disassembled at the same time under the action of the quick disassembling and assembling unit, and the first adsorption suspension part and the second adsorption suspension part can be overhauled conveniently.

Description

Technical Field

[0001] The utility model relates to the field of vacuum evaporation equipment, in particular to a substrate hanging mechanism in an evaporation cavity. Background Art

[0002] The top of the vacuum evaporation chamber is equipped with a substrate retaining structure, which allows the substrate to be suspended on the top of the evaporation chamber. Substrates that need to be evaporated generally include lenses, wafers, metal plates, plastic plates, etc.

[0003] It is recorded in the Chinese public document CN117230412B (a dual-source co-evaporation vacuum evaporation machine) that two wafers are pressed against the upper and lower surfaces of the support block respectively, so that the surfaces of the wafers and the support block fit each other, and the sides of the wafers are pressed between the side support blocks on the left and right sides. The wafers squeeze the limiting block, and at this time the return springs on the sides of the limiting block are compressed. The elastic deformation of the return springs can limit and fix the wafers to ensure the stability of the wafers; when the wafer coating on the lower surface of the support block is completed, the connecting screw in the middle of the fixed column is rotated, and the rotation of the connecting screw can make the pressing block in the storage The internal movement of the air cavity, through the movement of the pressure block, squeezes the air flow inside its air storage cavity through the connecting pipe and the corresponding branch pipe to the driving cavity inside the corresponding accommodating column, and the inflation inside the driving cavity can push the block and the transmission rod to rotate inside the accommodating column. The rotation of the transmission rod can drive the wafers on the upper and lower surfaces to flip, so that the wafer on the upper surface of the support block rotates to the bottom, and the wafer after coating on the lower surface of the support block rotates to the top. Therefore, after one of the wafers is coated, it can be flipped to coat the other wafer, thereby improving the overall evaporation processing efficiency.

[0004] The substrate limiting structure described in the above-mentioned public document realizes the assembly of two substrates in a back-to-back manner on the same support block. Then, when the end face of one of the substrates is evaporated, the positions of the two substrates are directly swapped through the support block, and the other substrate can be evaporated. However, this substrate limiting structure is only suitable for single-sided evaporation. If the substrate needs to be evaporated on both sides, the above-mentioned limiting structure is not convenient to use, and the two substrates distributed in a back-to-back manner need to be disassembled at the same time and then flipped over and installed. Utility Model Content

[0005] The purpose of the present utility model is to provide a substrate hanging mechanism in an evaporation chamber to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned object, the present invention provides the following technical solutions: a substrate hanging mechanism in an evaporation chamber, comprising: an evaporation machine casing and a cover hingedly assembled on the side of the evaporation machine casing to play a sealing role, a suspension plate concentrically assembled inside the evaporation machine casing, the suspension plate is located above the interior of the evaporation machine casing, a plurality of dumbbell-shaped grooves are opened inside the evaporation machine casing, the dumbbell-shaped grooves include a first accommodating portion, a second accommodating portion and a connecting portion, the first accommodating portion is located on a side of the second accommodating portion away from the center of the suspension plate, and the connecting portion is located between the first accommodating portion and the second accommodating portion, a first adsorption suspension component is arranged inside the first accommodating portion, and a second adsorption suspension component is arranged inside the second accommodating portion;

[0007] The invention also includes: a switching unit for performing a flip-over and switching evaporation treatment on the evaporated substrate, wherein the switching unit is arranged between the dumbbell-shaped groove and the suspension plate;

[0008] The quick-disassembly assembly unit is convenient for separating the suspension plate from the evaporation machine casing and for inspecting and maintaining the switching unit, the first adsorption suspension component and the second adsorption suspension component. The quick-disassembly assembly unit is arranged between the evaporation machine casing and the suspension plate.

[0009] Preferably, the first adsorption suspension component includes an air cylinder that is concentrically slidably inserted into the inside of the first accommodating portion, and the end of the air cylinder away from the top of the vapor deposition machine casing is fixedly equipped with a first suspension plate, and a first spring is fixedly equipped between the upper end surface of the first suspension plate and the first accommodating portion, a special-shaped column is fixedly provided at the top center of the suspension plate, and the outer surface of the special-shaped column is fixedly covered with a first air disk, the first air disk is hollow, and a first hose is fixedly connected and equipped between the end of each air cylinder close to the top of the vapor deposition machine casing and the first air disk, wherein an air hole is opened in the center of the first suspension plate, which is connected with the air cylinder through the air hole.

[0010] Preferably, the second adsorption suspension component includes a second suspension plate concentrically placed inside the second accommodating portion, and the outer surface of the special-shaped column is also fixedly covered with a second air disk, the second air disk is also hollow, and each second suspension plate is fixedly connected to the second air disk at one end close to the top of the evaporation machine casing with a second hose, the first suspension plate and the second suspension plate are fixedly provided with a silicone rubber suction cup on one end face close to the bottom of the evaporation machine casing, and the silicone rubber suction cup is respectively connected to the air cylinder and the second hose, the interior of the special-shaped column is fixedly equipped with two ventilation pipes, the two ventilation pipes are fixedly connected to the first air disk and the second air disk respectively, and a negative pressure suction component is also provided on the top of the two special-shaped columns, and the second suspension plate can swing toward the direction of the first suspension plate.

[0011] Preferably, the negative pressure suction component includes a rotating sealing column concentrically mounted on the top of the evaporator casing, and the special-shaped column slides through the rotating sealing column, the top fixing frame of the rotating sealing column is equipped with two hard tubes equidistantly distributed around the circumference, the hard tube is in the shape of a right-angle elbow, and the bent end of the hard tube faces the special-shaped column, and the two ventilation pipes are slidably inserted into the bent end of the hard tube, and the upper end of the ventilation pipe is fixedly provided with a second sealing plug gasket, and the second sealing plug gasket is against the inside of the hard tube, and two negative pressure suction pumps equidistantly distributed around the circumference are also fixedly provided on the top of the evaporator casing, and one end of each hard tube away from the rotating sealing column is respectively connected to the suction end of the two negative pressure suction pumps, and the outside of each hard tube is also equipped with an electromagnetic control valve, which controls the air pressure in the two ventilation pipes respectively through the action of the two negative pressure suction pumps and the electromagnetic control valve.

[0012] Preferably, the lower end surfaces of the first suspension plate and the second suspension plate are in the same horizontal plane, and the lower end surfaces of both are lower than the lower end surface of the suspension plate, that is, to ensure that the outer edge of the adsorbed and suspended substrate is not blocked.

[0013] Preferably, the switching unit includes a rotating shaft rotatably mounted on the top of the evaporator casing, and a transmission gear is fixedly mounted on the outer surface of the rotating shaft, a plurality of teeth equidistantly distributed around the circumference are fixedly mounted on the outer surface of the upper end of the rotating sealing column, and a transmission belt is installed for transmission between the plurality of teeth and the transmission gear, and a positioning pin is also fixedly mounted on the inner top of the evaporator casing, the upper end fixing frame of the suspension plate is equipped with a plurality of limit frames equidistantly distributed around the circumference, and a helical gear ring is slidably mounted inside the plurality of limit frames, the upper end surface of the helical gear ring is fixedly provided with a positioning recess, and the bottom of the positioning pin is slidably embedded in the groove of the positioning recess, and a flip component is provided between the helical gear ring and a plurality of second suspension plates, and the positioning recess is restricted by the positioning pin, so that the state of the helical gear ring remains unchanged when the suspension plate is rotated, wherein the rotating shaft can be driven by a stepper motor and can also be twisted by a wrench.

[0014] The worm gear of the second gear is fixedly mounted on the outer surface of the gear train of the second gear train, and the worm gear is fixedly mounted on the outer surface of the gear train of the second gear train.

[0015] Preferably, the quick-disassembly assembly unit includes a straight groove opened inside the special-shaped column, and the special-shaped column and the straight groove are distributed vertically, the interior of the rotating sealing column is radially slidably equipped with a sliding disk, and the end of the sliding disk close to the ventilation pipe is fixedly provided with a triangular block that slides through the rotating sealing column, and the triangular block is movably embedded in the interior of the straight groove, and a second spring is provided between the end of the sliding disk away from the triangular block and the rotating sealing column, and the end of the sliding disk away from the triangular block is also fixedly provided with a traction rope, and the other end of the traction rope slides through the rotating Sealing column, the trajectory of the traction rope is ninety degrees, and the end of the traction rope away from the sliding disk is located at the upper end of the rotating sealing column, the exposed end of the traction rope is fixedly provided with a ball block, and the lower port of the rotating sealing column is provided with a beveled edge portion. The outer surface of the special-shaped column is fixedly covered with a tray, and the upper end surface of the tray is fixedly provided with a first sealing plug gasket, the first sealing plug gasket is against the beveled edge portion, wherein the inclined surface of the triangular block is located at the bottom, that is, when the special-shaped column moves upward toward the inside of the rotating sealing column, the special-shaped column can be pushed toward the inside of the rotating sealing column through the inclined surface of the triangular block.

[0016] Compared with the prior art, the beneficial effects of the present invention are:

[0017] The utility model can fix the substrate under the first adsorption suspension component for single-sided vapor deposition through the cooperation of the first adsorption suspension component, the second adsorption suspension component and the switching unit, and then transfer the substrate to the bottom of the second adsorption suspension component under the control of the switching unit, and the substrate can be turned over during the transfer process, that is, double-sided vapor deposition can be performed without stopping the vapor deposition machine, and all structures on the suspension plate can be removed at the same time under the action of the quick-disassembly assembly unit, which is convenient for inspection and maintenance of the first adsorption suspension component and the second adsorption suspension component. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the overall structure of the utility model;

[0019] Figure 2 This is a schematic diagram of the dumbbell-shaped groove position distribution structure of the utility model;

[0020] Figure 3 This is a schematic diagram of the upper structure of the suspension plate of the utility model;

[0021] Figure 4 This is a schematic diagram of the position distribution structure of the rotary sealing column of the utility model;

[0022] Figure 5 For this utility model Figure 4 Enlarged view of point A in the middle;

[0023] Figure 6 This is a schematic diagram of the electromagnetic control method and hard tube structure of the utility model;

[0024] Figure 7 For this utility model Figure 6 Enlarged view of point B in the middle.

[0025] Figure: 1. Vapor deposition machine housing; 2. Cover; 3. Suspension plate; 4. Dumbbell-shaped groove; 5. First suspension plate; 6. Second suspension plate; 7. Silicone rubber suction cup; 8. Air cylinder; 9. Special-shaped column; 10. Ventilation pipe; 11. Second air disc; 12. First air disc; 13. First hose; 14. Second hose; 15. Bevel gear ring; 16. Limiting frame; 17. Positioning recess; 18. Positioning pin; 19. Rotating sealing column; 20. Transmission gear; 21. Transmission belt; 22. Hard pipe; 23. Solenoid control valve; 24. Negative pressure suction pump; 25. Worm gear; 26. Worm; 27. Retaining frame; 28. First bevel gear; 29. ​​Second bevel gear; 30. First spring; 31. Straight groove; 32. Triangular clamping block; 33. Sliding plate; 34. Second spring; 35. Traction rope; 36. Ball block; 37. Tray; 38. First sealing gasket; 39. Bevel edge; 40. Second sealing gasket. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0027] Example 1: Please refer to Figure 1-Figure 5 The illustrated embodiment shows a substrate hanging mechanism in an evaporation chamber, comprising: an evaporation machine casing 1 and a cover 2 hingedly assembled on the side of the evaporation machine casing 1 for sealing, a suspension plate 3 concentrically assembled inside the evaporation machine casing 1, the suspension plate 3 being located above the interior of the evaporation machine casing 1, a plurality of dumbbell-shaped grooves 4 being provided inside the evaporation machine casing 1, the dumbbell-shaped grooves 4 comprising a first accommodating portion, a second accommodating portion and a connecting portion, the first accommodating portion being located on a side of the second accommodating portion away from the center of the suspension plate 3, and the connecting portion being located between the first accommodating portion and the second accommodating portion, a first adsorption suspension component being provided inside the first accommodating portion, and a second adsorption suspension component being provided inside the second accommodating portion;

[0028] It also includes: a switching unit for flipping the evaporated substrate to switch the evaporation process, and the switching unit is arranged between the dumbbell-shaped groove 4 and the suspension plate 3;

[0029] The quick-disassembly assembly unit facilitates separation of the suspension plate 3 from the evaporation machine casing 1 and inspection and maintenance of the switching unit, the first adsorption suspension component and the second adsorption suspension component. The quick-disassembly assembly unit is arranged between the evaporation machine casing 1 and the suspension plate 3.

[0030] The first adsorption suspension component includes an air cylinder 8 that is concentrically slidably inserted into the inside of the first accommodating portion, and the end of the air cylinder 8 away from the top of the vapor deposition machine casing 1 is fixedly equipped with a first suspension plate 5, and a first spring 30 is fixedly equipped between the upper end surface of the first suspension plate 5 and the first accommodating portion, a special-shaped column 9 is fixedly provided at the top center of the suspension plate 3, and the outer surface of the special-shaped column 9 is fixedly covered with a first air disk 12, the first air disk 12 is hollow, and each air cylinder 8 is fixedly connected to the first air disk 12 at one end close to the top of the vapor deposition machine casing 1 and is equipped with a first hose 13, wherein an air hole is opened in the center of the first suspension plate 5, which is connected to the air cylinder 8 through the air hole.

[0031] The second adsorption suspension component includes a second suspension plate 6 concentrically placed inside the second accommodating portion. The outer surface of the special-shaped column 9 is also fixedly covered with a second air disk 11, and the second air disk 11 is also hollow. A second hose 14 is fixedly connected between the end of each second suspension plate 6 close to the top of the evaporation machine casing 1 and the second air disk 11. The first suspension plate 5 and the second suspension plate 6 are fixedly provided with a silicone rubber suction cup 7 on one end surface close to the bottom of the evaporation machine casing 1, and the silicone rubber suction cup 7 is respectively connected to the air cylinder 8 and the second hose 14. Two ventilation pipes 10 are fixedly installed inside the special-shaped column 9. The two ventilation pipes 10 are respectively fixedly connected to the first air disk 12 and the second air disk 11, and a negative pressure suction component is also provided on the top of the two special-shaped columns 9. The second suspension plate 6 can swing toward the direction of the first suspension plate 5.

[0032] The negative pressure suction component includes a rotary sealing column 19 that is concentrically mounted on the top of the vapor deposition machine housing 1, and the special-shaped column 9 slides through the rotary sealing column 19. The top fixing frame of the rotary sealing column 19 is equipped with two hard tubes 22 that are equidistantly distributed around the circumference. The hard tubes 22 are in the shape of right-angle elbows, and the bending ends of the hard tubes 22 face the special-shaped column 9. The two ventilation pipes 10 are both slidably inserted into the bending ends of the hard tubes 22. The upper ends of the ventilation pipes 10 are fixed with a second sealing plug. 40, and the second sealing plug gasket 40 is against the inside of the hard tube 22. Two negative pressure suction pumps 24 equidistantly distributed in a circle are fixedly provided on the top of the vapor deposition machine casing 1. One end of each hard tube 22 away from the rotating sealing column 19 is respectively connected to the suction end of the two negative pressure suction pumps 24. The outside of each hard tube 22 is also equipped with an electromagnetic control valve 23. The air pressure state in the two ventilation pipes 10 is controlled respectively through the action of the two negative pressure suction pumps 24 and the electromagnetic control valve 23.

[0033] The lower end surfaces of the first suspension plate 5 and the second suspension plate 6 are in the same horizontal plane, and the lower end surfaces of the two are lower than the lower end surface of the suspension plate 3, which ensures that the outer edge of the adsorbed and suspended substrate is not blocked.

[0034] The switching unit includes a rotating shaft rotatably assembled on the top of the evaporator casing 1, and a transmission gear 20 is fixedly mounted on the outer surface of the rotating shaft. A plurality of teeth equidistantly distributed around the circumference are fixedly mounted on the outer surface of the upper end of the rotating sealing column 19, and a transmission belt 21 is installed between the plurality of teeth and the transmission gear 20. A positioning pin 18 is also fixedly mounted on the inner top of the evaporator casing 1. The upper end fixing frame of the suspension plate 3 is equipped with a plurality of limiting frames 16 equidistantly distributed around the circumference, and a helical gear ring 15 is slidably mounted inside the plurality of limiting frames 16. A positioning recess 17 is fixedly mounted on the upper end surface of the helical gear ring 15, and the bottom of the positioning pin 18 is slidably embedded in the groove of the positioning recess 17. A flip component is provided between the helical gear ring 15 and the plurality of second suspension plates 6. By restricting the positioning recess 17 through the positioning pin 18, the state of the helical gear ring 15 remains unchanged when the suspension plate 3 is rotated. The rotating shaft can be driven by a stepper motor and can also be twisted by a wrench.

[0035] The flipping component includes a positioning shaft rotatably arranged in the connecting portion, and the two ends of the positioning shaft are respectively facing the first accommodating portion and the second accommodating portion. The outer surface of the positioning shaft is fixedly provided with a worm 26, and a worm gear 25 is fixedly mounted at one end of the second suspension plate 6 close to the first accommodating portion, and the worm gear 25 is transmission-assembled with the worm 26. The upper end surface of the suspension plate 3 is fixedly provided with a retaining frame 27, and the number of retaining frames 27 is consistent with the number of dumbbell-shaped grooves 4. The first transmission shaft and the second transmission shaft are rotationally arranged inside each retaining frame 27. The outer surfaces of the first transmission shaft and the second transmission shaft are respectively fixedly provided with a second bevel gear 29 and a first bevel gear 28, and the first bevel gear 28 is transmission-engaged between the second bevel gear 29 and the bevel gear ring 15. A synchronous toothed belt is assembled between the second transmission shaft and the positioning shaft through a synchronous gear transmission. An optical axis is fixedly provided at the axis of the worm gear 25, and the optical axis is rotationally embedded in the interior of the suspension plate 3, wherein the size of the first bevel gear 28 is larger than that of the second bevel gear 29 to avoid the two gears contacting the bevel gear ring 15 at the same time, thereby causing jamming.

[0036] How this solution works:

[0037] Before the evaporation machine is operated, the two electromagnetic control valves 23 are in a closed state, that is, the air inside the air cylinder 8 and the silicone rubber suction cup 7 cannot circulate. At this time, the substrate to be evaporated is assembled under the first suspension plate 5. During the assembly process, the staff only needs to press the substrate against the bottom of the silicone rubber suction cup 7 under the first suspension plate 5. During the pressing process, the substrate can seal the lower end of the silicone rubber suction cup 7 and squeeze out part of the air inside the silicone rubber suction cup 7. At this time, a negative pressure is formed between the silicone rubber suction cup 7, the air cylinder 8 and the first hose 13, and the substrate can be adsorbed and suspended under the first suspension plate 5. After the substrates are assembled, the staff can start the negative pressure suction pump 24 connected to the first hose 13 in advance, and control the air pressure in the space between the negative pressure suction pump 24 and the electromagnetic control valve 23 to be lower than the air pressure inside the silicone rubber suction cup 7. Then, the electromagnetic control valve 23 is opened to allow the negative pressure suction pump 24 to be directly connected to the first hose 13. At this time, the substrate under the first suspension plate 5 can be adsorbed more firmly.

[0038] At this time, the evaporation operation can be carried out. After the evaporation at the lower end of the substrate is completed, the staff can use the rotating shaft and the transmission gear 20 to drive the rotating sealing column 19 to deflect the moving angle. Since the positioning pin 18 restricts the positioning concave block 17, when the rotating sealing column 19 deflects with the suspension plate 3 through the special-shaped column 9, it can drive the first bevel gear 28 and the second bevel gear 29 to rotate, causing the worm 26 to deflect with the worm wheel 25, and its second suspension plate 6 can swing toward the first suspension plate 5 to cover the second suspension plate 6 and the first suspension plate 5 to clamp the substrate. Due to the silicone rubber suction under the second suspension plate 6 The disk 7 fits tightly with the surface of the substrate where the evaporation is completed. At this time, another negative pressure suction pump 24 and the electromagnetic control valve 23 are controlled to work, so that the silicone rubber suction cup 7 under the second suspension plate 6 can limit the negative pressure adsorption of the substrate, and then the air pressure inside the air cylinder 8 is gradually restored to be consistent with the air pressure inside the evaporation machine casing 1, that is, the silicone rubber suction cup 7 under the first suspension plate 5 no longer limits the adsorption of the substrate. At this time, the rotating shaft can be triggered to perform the reset operation, and the second suspension plate 6 that has adsorbed the substrate can be reset at the same time. After the reset is completed, the end face of the substrate that has not been evaporated can also be turned downward, thereby achieving the effect of surface-changing evaporation.

[0039] It is worth noting that the method of suspending the substrate in this scheme is not the clamping limitation commonly used in the prior art. Since the clamping devices are mostly made of metal materials, in order to ensure the stability of the substrate clamping, the clamping devices will usually exceed the evaporation surface of the substrate, which is easy to block the steam particles and cause uneven coating of the substrate. Moreover, during the preheating process of the substrate, the metal clamping device is in direct contact with the substrate, which can easily cause the contact point between the substrate and the metal clamping device to be too cold or too hot. The overall uneven heating of the substrate can also easily affect the uniformity of the coating.

[0040] Example 2: Please refer to Figure 6 and Figure 7 , this embodiment is a further explanation of embodiment 1, the quick-disassembly assembly unit includes a straight groove 31 opened in the interior of the special-shaped column 9, and the special-shaped column 9 and the straight groove 31 are distributed vertically, the interior of the rotary sealing column 19 is radially slidably equipped with a sliding disc 33, and the end of the sliding disc 33 close to the vent pipe 10 is fixedly provided with a triangular block 32 that slides through the rotary sealing column 19, the triangular block 32 is movably embedded in the interior of the straight groove 31, and a second spring 34 is provided between the end of the sliding disc 33 away from the triangular block 32 and the rotary sealing column 19, and the end of the sliding disc 33 away from the triangular block 32 is also fixedly provided with a traction rope 35, and the other end of the traction rope 35 slides through the rotary sealing column 19. The sealing column 19 and the trajectory of the traction rope 35 are ninety degrees, and the end of the traction rope 35 away from the sliding plate 33 is located at the upper end of the rotating sealing column 19, and the exposed end of the traction rope 35 is fixedly provided with a ball block 36. The lower port of the rotating sealing column 19 is provided with a bevel portion 39. The outer surface of the special-shaped column 9 is fixedly covered with a tray 37, and the upper end surface of the tray 37 is fixedly provided with a first sealing plug gasket 38. The first sealing plug gasket 38 is abutted against the bevel portion 39, and the inclined surface of the triangular block 32 is located at the bottom, that is, when the special-shaped column 9 moves upward toward the inside of the rotating sealing column 19, the special-shaped column 9 can be pushed toward the inside of the rotating sealing column 19 through the inclined surface of the triangular block 32.

[0041] In this embodiment: In this solution, taking into account the narrow space inside the vapor deposition machine casing 1, if the structure on the suspension plate 3 needs to be inspected, maintained or replaced, the operation is extremely inconvenient. For this reason, in this solution, the suspension plate 3 can be quickly disassembled, that is, the traction rope 35 can be directly pulled by the ball block 36, so that the triangular block 32 can be retracted from the inside of the straight groove 31 to the inside of the rotating sealing column 19, and no longer restrict the special-shaped column 9. At this time, the staff can separate the special-shaped column 9 from the inside of the rotating sealing column 19, and can take out the entire structure on the suspension plate 3 from the vapor deposition machine casing 1 for inspection, maintenance or replacement of accessories.

[0042] When reassembling the suspension plate 3 to the interior of the vapor deposition machine casing 1, the staff only needs to insert the special-shaped column 9 into the interior of the rotating sealing column 19, let the triangular block 32 be re-engaged in the interior of the straight groove 31, and restrict the special-shaped column 9 again. During the reassembly process, the first sealing plug gasket 38 will be squeezed against the bevel portion 39, and the second sealing plug gasket 40 will be squeezed against the internal structure of the hard tube 22 to ensure the sealing between the hard tube 22 and the ventilation pipe 10, the special-shaped column 9 and the rotating sealing column 19.

[0043] Example 3: Please refer to Figure 1-Figure 4 This embodiment is a further explanation of embodiment 1. A substrate hanging mechanism in a vapor deposition chamber further includes a negative pressure control method, which includes the following steps:

[0044] S1, determining preset values ​​of internal temperature parameters of the first hose 13 and the second hose 14;

[0045] S2. Establishing a correspondence between the operation of the negative pressure suction pump 24 and the preset value of the internal temperature parameter;

[0046] S3, measuring the real-time temperature data values ​​of the internal parameters of the first hose 13 and the second hose 14 by a temperature sensor;

[0047] S4. When the real-time temperature data value reaches the preset value of the internal temperature parameter, the negative pressure suction pump 24 performs the corresponding operation;

[0048] The internal temperature parameter preset value in step S1 includes: setting a pressure threshold corresponding to each operation action, each pressure threshold value is less than the pressure inside the vapor deposition machine housing 1, establishing a fitting relationship between pressure and temperature, and calculating the temperature value corresponding to each pressure threshold value according to the fitting relationship as the preset value for the corresponding operation action;

[0049] The operation steps in step S2 include: inflating the negative pressure suction pump 24, deflating the negative pressure suction pump 24, and shutting down the negative pressure suction pump 24.

[0050] Among them, the fitting relationship is an exponential function, and the fitting relationship is:

[0051] P is air pressure, T is temperature, and a and b are fitting parameters.

[0052] In this embodiment: the fitting relationship is:

[0053] In this solution, it is taken into consideration that the internal temperature of the evaporator housing 1 will rise when it is working, which will affect the negative pressure adsorption strength of the first hose 13 and the second hose 14 on the substrate. That is, in this solution, the two negative pressure suction pumps 24 can give the silicone rubber suction cup 7 at the bottom of the first hose 13 or the second hose 14 to adhere to the substrate, ensuring that the air pressure inside the first hose 13 or the second hose 14 is continuously lower than the internal extrusion of the evaporator housing 1, that is, ensuring effective negative pressure absorption and suspension of the substrate, and in the process of switching the substrate between the two silicone rubber suction cups 7, three operating steps are used in conjunction.

[0054] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0055] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A substrate hanging mechanism in a vapor deposition chamber, characterized in that: include: A vapor deposition machine casing (1) and a cover (2) hingedly assembled on the side of the vapor deposition machine casing (1) for sealing, a suspension plate (3) is concentrically assembled inside the vapor deposition machine casing (1), the suspension plate (3) is located above the interior of the vapor deposition machine casing (1), a plurality of dumbbell-shaped grooves (4) are provided inside the vapor deposition machine casing (1), the dumbbell-shaped grooves (4) include a first accommodating portion, a second accommodating portion and a connecting portion, the first accommodating portion is located on a side of the second accommodating portion away from the center of the suspension plate (3), and the connecting portion is located between the first accommodating portion and the second accommodating portion, a first adsorption suspension component is provided inside the first accommodating portion, and a second adsorption suspension component is provided inside the second accommodating portion; Also includes: A switching unit, used for performing a flip-over and switching evaporation treatment on the evaporated substrate, the switching unit being arranged between the dumbbell-shaped groove (4) and the suspension plate (3); A quick-disassembly assembly unit facilitates separation of the suspension plate (3) from the vapor deposition machine housing (1) and inspection and maintenance of the switching unit, the first adsorption suspension component, and the second adsorption suspension component. The quick-disassembly assembly unit is arranged between the vapor deposition machine housing (1) and the suspension plate (3).

2. The substrate hanging mechanism in a vapor deposition chamber according to claim 1, characterized in that: The first adsorption suspension component includes an air cylinder (8) that is concentrically slidably inserted into the interior of the first accommodating portion, and the end of the air cylinder (8) away from the top of the vapor deposition machine casing (1) is fixedly equipped with a first suspension plate (5), and a first spring (30) is fixedly equipped between the upper end surface of the first suspension plate (5) and the first accommodating portion, a special-shaped column (9) is fixedly provided at the top center of the suspension plate (3), and the outer surface of the special-shaped column (9) is fixedly fitted with a first air disc (12), the first air disc (12) is hollow, and each of the air cylinders (8) is fixedly connected and equipped with a first hose (13) between the end close to the top of the vapor deposition machine casing (1) and the first air disc (12).

3. The substrate hanging mechanism in a vapor deposition chamber according to claim 2, characterized in that: The second adsorption suspension component includes a second suspension plate (6) concentrically placed inside the second accommodating portion, and the outer surface of the special-shaped column (9) is also fixedly covered with a second gas disk (11), and the second gas disk (11) is also hollow, and each second suspension plate (6) is fixedly connected to the second gas disk (11) at one end close to the top of the vapor deposition machine casing (1) with a second hose (14), and the first suspension plate (5) and the second suspension plate (6) are fixedly provided with a silicone rubber suction cup (7) at one end close to the bottom of the vapor deposition machine casing (1), and the silicone rubber suction cup (7) is respectively connected to the gas cylinder (8) and the second hose (14), and the interior of the special-shaped column (9) is fixedly equipped with two ventilation pipes (10), and the two ventilation pipes (10) are fixedly connected to the first gas disk (12) and the second gas disk (11), and the tops of the two special-shaped columns (9) are also provided with a negative pressure suction component.

4. The substrate hanging mechanism in a vapor deposition chamber according to claim 3, characterized in that: The negative pressure suction component includes a rotating sealing column (19) that is coaxially mounted on the top of the vapor deposition machine housing (1), and the special-shaped column (9) slides through the rotating sealing column (19). The top fixing frame of the rotating sealing column (19) is equipped with two hard tubes (22) that are equidistantly distributed around the circumference. The hard tubes (22) are in the shape of right-angle elbows, and the bending ends of the hard tubes (22) face the special-shaped column (9). The two ventilation tubes (10) are both slidably inserted into the bending ends of the hard tubes (22). The upper end of the vent pipe (10) is fixedly provided with a second sealing plug gasket (40), and the second sealing plug gasket (40) is against the inside of the hard pipe (22). The top of the evaporation machine housing (1) is also fixedly provided with two negative pressure suction pumps (24) distributed equidistantly in a circle. The end of each hard pipe (22) away from the rotating sealing column (19) is respectively connected to the suction ends of the two negative pressure suction pumps (24). The outside of each hard pipe (22) is also equipped with an electromagnetic control valve (23).

5. The substrate hanging mechanism in a vapor deposition chamber according to claim 3, characterized in that: The lower end surfaces of the first suspension plate (5) and the second suspension plate (6) are located at the same horizontal plane, and the lower end surfaces of both are lower than the lower end surface of the suspension plate (3).

6. The substrate hanging mechanism in a vapor deposition chamber according to claim 4, characterized in that: The switching unit includes a rotating shaft rotatably mounted on the top of the vapor deposition machine casing (1), and a transmission gear (20) is fixedly mounted on the outer surface of the rotating shaft, a plurality of teeth equidistantly distributed around the circumference are fixedly mounted on the outer surface of the upper end of the rotating sealing column (19), and a transmission belt (21) is mounted between the plurality of teeth and the transmission gear (20), a positioning pin (18) is also fixedly mounted on the inner top of the vapor deposition machine casing (1), a plurality of limiting frames (16) equidistantly distributed around the circumference are fixed on the upper end fixing frame of the suspension plate (3), and a bevel gear ring (15) is slidably mounted inside the plurality of limiting frames (16), a positioning recess (17) is fixedly mounted on the upper end surface of the bevel gear ring (15), and the bottom of the positioning pin (18) is slidably embedded in the groove of the positioning recess (17), and a flip component is arranged between the bevel gear ring (15) and the plurality of second suspension plates (6).

7. The substrate hanging mechanism in a vapor deposition chamber according to claim 6, characterized in that: The flip component includes a positioning shaft rotatably arranged in the connecting portion, and the two ends of the positioning shaft are respectively facing the first accommodating portion and the second accommodating portion. The outer surface of the positioning shaft is fixedly sleeved with a worm (26). The second suspension plate (6) is fixedly provided with a worm wheel (25) at one end close to the first accommodating portion, and the worm wheel (25) is assembled with the worm wheel (26). The upper end surface of the suspension plate (3) is fixedly provided with a retaining frame (27), and the number of the retaining frames (27) is consistent with the number of the dumbbell-shaped grooves (4). The retaining frame (27) is internally rotatably provided with a first transmission shaft and a second transmission shaft, and the outer surfaces of the first transmission shaft and the second transmission shaft are respectively fixedly provided with a second bevel gear (29) and a first bevel gear (28), and the first bevel gear (28) is transmission-engaged between the second bevel gear (29) and the bevel gear ring (15), and a synchronous toothed belt is assembled between the second transmission shaft and the positioning shaft through a synchronous gear transmission, and an optical axis is fixedly provided at the axis of the worm gear (25), and the optical axis is rotationally embedded in the interior of the suspension plate (3).

8. The substrate hanging mechanism in a vapor deposition chamber according to claim 4, characterized in that: The quick-disassembly assembly unit includes a straight groove (31) provided inside the special-shaped column (9), and the special-shaped column (9) and the straight groove (31) are vertically distributed. A sliding disc (33) is radially slidably assembled inside the rotating sealing column (19), and a triangular block (32) slidingly penetrating the rotating sealing column (19) is fixedly provided at one end of the sliding disc (33) close to the vent pipe (10). The triangular block (32) is movably embedded in the straight groove (31). A second spring (34) is provided between the end of the sliding disc (33) away from the triangular block (32) and the rotating sealing column (19). The sliding disc (33) is away from the triangular block (32). A traction rope (35) is fixedly provided at one end thereof, and the other end of the traction rope (35) slides through the rotating sealing column (19), the trajectory of the traction rope (35) is ninety degrees, and the end of the traction rope (35) away from the sliding plate (33) is located at the upper end of the rotating sealing column (19), the exposed end of the traction rope (35) is fixedly provided with a ball block (36), the lower end of the rotating sealing column (19) is provided with a bevel portion (39), the outer surface of the special-shaped column (9) is fixedly provided with a tray (37), and the upper end surface of the tray (37) is fixedly provided with a first sealing plug gasket (38), and the first sealing plug gasket (38) is abutted against the bevel portion (39).

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