Filling equipment for special liquid

Abstract

The utility model relates to the technical field of special liquid filling, in particular to special liquid filling equipment which comprises a cabinet body, an electric control box body, a PLC (Programmable Logic Controller) control system, three liquid storage steel cylinders, a liquid filling unit, an analysis unit, a waste liquid recovery unit, a purging unit, a touch screen, an alarm unit and an emergency stop button, the PLC control system is matched with the liquid filling unit, the analysis unit, the waste liquid recovery unit and the purging unit, raw material liquid input, liquid supply, pipeline cleaning and pipeline purging are completed, equipment damage and personal harm caused by manual misoperation are avoided, by arranging a touch screen bottle, an operator does not need to directly operate valves of all the units, and the working efficiency is improved. And through the arrangement of the alarm unit, when the equipment has unpredictable leakage and a fire disaster occurs, the pneumatic valve can be closed and the gas source can be cut off through the PLC control system, so that the harm is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of special liquid filling, in particular to a device for special liquid filling. Background Art

[0002] Many special liquids are required in the common manufacturing processes of semiconductor and photovoltaic industries, and the requirements for special liquid filling equipment are relatively high.

[0003] However, the structure of existing special liquid filling equipment is relatively simple. When filling some toxic, corrosive, and flammable gases with high hazards, there is a great risk of liquid leakage once the valve components of the liquid supply system are damaged. Utility Model Content

[0004] The purpose of the utility model is to provide a special liquid filling device to solve the problem that the special liquid filling device in the prior art has a relatively simple structure and when filling some toxic, corrosive and flammable gases with high hazards, once the valve components of the liquid supply system are damaged and liquid leakage occurs, there is a great risk.

[0005] To achieve the above-mentioned purpose, the utility model provides a special liquid filling device, which includes a cabinet, an electric control box, a PLC control system, three liquid storage cylinders, a liquid filling unit, an analysis unit, a waste liquid recovery unit, a purge unit, a touch screen, an alarm unit and an emergency stop button. The cabinet is provided with a filling area and an electric control area, and the end face of the filling area is provided with a cabinet door. The three liquid storage cylinders are installed in the filling area, and a conveying main pipe is provided inside the filling area. The three liquid storage cylinders are all connected to the conveying main pipe. The liquid filling unit, the analysis unit, the waste liquid recovery unit and the purge unit are also provided inside the filling area. The liquid filling unit, the analysis unit, the waste liquid recovery unit and the purge unit are all connected to the conveying main pipe.

[0006] The electric control box is provided in the electric control area, the PLC control system is provided inside the electric control box, the end face of the electric control box is provided with an electric control box door, the electric control box door is provided with the touch screen and the emergency stop button, and the cabinet is also provided with the alarm unit, the alarm unit, the touch screen, the emergency stop button, the liquid filling unit, the analysis unit, the waste liquid recovery unit and the purge unit are all connected to the PLC control system.

[0007] Among them, the liquid filling unit includes a filling inlet isolation valve MV1, a filling inlet filter F1, a filling inlet pressure sensor PT1A, a filling inlet pneumatic isolation valve AV1, a filling pipeline manual valve MV3, a filling pipeline pressure sensor PT1, a filling pipeline pressure indicator PG1, a cylinder inlet pneumatic valve AV1A, a cylinder inlet pneumatic valve AV1B, a cylinder inlet pneumatic valve AV1C, a cylinder inlet manual valve MV1A, a cylinder inlet manual valve MV1B and a cylinder inlet manual valve MV1C. The front end of the liquid inlet isolation valve MV1 is the filling liquid inlet, and the rear end of the liquid inlet isolation valve is connected to the filling inlet filter F1. The filling pressure sensor PT1A and the liquid pneumatic isolation valve AV1 are provided in the connecting pipeline between the filling inlet filter F1 and the delivery main pipe. The rear end of the liquid pneumatic isolation valve AV1 is connected to the liquid inlet pneumatic valve A through the delivery main pipe. V1A, the liquid inlet pneumatic valve AV1B and the liquid inlet pneumatic valve AV1C, the rear ends of the liquid inlet pneumatic valve AV1A, the liquid inlet pneumatic valve AV1B and the liquid inlet pneumatic valve AV1C are respectively connected to the corresponding liquid storage cylinder through the corresponding cylinder inlet manual valve MV1A, the cylinder inlet manual valve MV1B and the cylinder inlet manual valve MV1C, the filling pipeline manual valve MV3 is arranged in the delivery main pipe, the rear end of the filling pipeline manual valve MV3 is connected to the filling pipeline pressure sensor PT1 and the filling pipeline pressure indicator PG1, the filling inlet pressure sensor PT1A, the filling inlet pneumatic isolation valve AV1, the filling pipeline pressure sensor PT1, the cylinder inlet pneumatic valve AV1A, the cylinder inlet pneumatic valve AV1B and the cylinder inlet pneumatic valve AV1C are all electrically connected to the PLC control system.

[0008] Among them, the analysis unit includes an analysis pneumatic valve AV4, an analysis filter F3 and an analysis manual valve MV2. The front end of the analysis pneumatic valve AV4 is connected to the delivery main pipe, the rear end of the analysis pneumatic valve AV4 is connected to the analysis filter F3, the front end of the analysis manual valve MV2 is connected to the analysis filter F3, the rear end of the analysis manual valve MV2 is connected to the outlet pipeline, and the analysis pneumatic valve AV4 is electrically connected to the PLC control system.

[0009] Wherein, the waste liquid recovery unit includes a helium inlet filter F2A, a helium one-way valve CV1A, a helium pneumatic valve AV2A, a recovery pneumatic valve AV5A, a recovery pneumatic valve AV5B, a recovery one-way valve CV3A and a recovery one-way valve CV3B, the front end of the helium inlet filter F2A is connected to the helium pipeline, the rear end of the helium inlet filter F2A is connected to the helium one-way valve CV1A, the front end of the helium pneumatic valve AV2A is connected to the helium one-way valve CV1A, and the rear end of the helium pneumatic valve AV2A is connected to The front ends of the delivery main pipe, the recovery pneumatic valve AV5A and the recovery pneumatic valve AV5B are all connected to the delivery main pipe, the rear ends of the recovery pneumatic valve AV5A and the recovery pneumatic valve AV5B are respectively connected to the recovery check valve CV3A and the recovery check valve CV3B, the rear ends of the recovery check valve CV3A and the recovery check valve CV3B are connected to the recovery pipeline, and the helium pneumatic valve AV2A, the recovery pneumatic valve AV5A and the recovery pneumatic valve AV5B are all electrically connected to the PLC control system.

[0010] Wherein, the purge unit includes a nitrogen inlet filter F2, a nitrogen one-way valve CV2, a nitrogen inlet pneumatic valve AV2, a nitrogen inlet pneumatic valve AV3, an exhaust pneumatic valve AV7, an exhaust one-way valve CV3, a vacuum generator VG and a vacuum pneumatic valve AV6, the front end of the nitrogen inlet filter F2 is connected to the nitrogen pipeline, the rear end of the nitrogen inlet filter F2 is connected to the nitrogen one-way valve CV2, the front ends of the nitrogen inlet pneumatic valve AV2 and the nitrogen inlet pneumatic valve AV3 are both connected to the nitrogen one-way valve CV2, and the rear ends of the nitrogen inlet pneumatic valve AV2 and the nitrogen inlet pneumatic valve AV3 are respectively connected to the delivery The front end of the discharge pneumatic valve AV7 is connected to the delivery main pipe, the rear end of the discharge pneumatic valve AV7 is connected to the discharge one-way valve CV3, the front end of the vacuum generator VG is connected to the discharge one-way valve CV3, and the rear end of the vacuum generator VG is respectively connected to the Venturi nitrogen and discharge pipelines. The front end of the vacuum pneumatic valve AV6 is connected to the delivery main pipe, and the rear end of the vacuum pneumatic valve AV6 is connected to the vacuum pipeline. The nitrogen inlet pneumatic valve AV2, the nitrogen inlet pneumatic valve AV3, the vacuum pneumatic valve AV6 and the discharge pneumatic valve AV7 are all electrically connected to the PLC control system.

[0011] Wherein, the alarm unit includes a differential pressure switch, a temperature and smoke detector and a gas detector, and the differential pressure switch, the temperature and smoke detector and the gas detector are all electrically connected to the PLC control system.

[0012] Wherein, the cabinet body is also provided with a pressure differential gauge, and the cabinet door is provided with an observation window.

[0013] The utility model is a special liquid filling equipment, comprising a cabinet, an electric control box, a PLC control system, three liquid storage cylinders, a liquid filling unit, an analysis unit, a waste liquid recovery unit, a purge unit, a touch screen, an alarm unit and an emergency stop button. The PLC control system and the human-machine interface technology of the touch screen are adopted to automatically control the flow direction of the process gas. The PLC control system is coordinated with the liquid filling unit, the analysis unit, the waste liquid recovery unit and the purge unit to complete the raw liquid input, liquid supply, pipeline cleaning and pipeline purge, thereby avoiding equipment damage and personal harm caused by human error. Through the setting of the touch screen bottle, the operator does not need to directly operate the valves of each unit, thereby minimizing the harm of toxic and harmful gases to personnel. Through the setting of the alarm unit, when there is an unforeseen leakage or fire in the equipment, the pneumatic valve can be closed and the gas source can be cut off through the PLC control system, thereby reducing the harm. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0015] Figure 1 It is a schematic diagram of the external structure of the special liquid filling equipment provided by the utility model.

[0016] Figure 2 It is a front view of the special liquid filling equipment provided by the utility model.

[0017] Figure 3 It is a schematic diagram of the internal disk surface of the special liquid filling equipment provided by the utility model.

[0018] Figure 4 This is a control logic diagram for special liquid filling equipment provided by the utility model.

[0019] 101-cabinet, 102-electrical control box, 103-PLC control system, 104-liquid storage cylinder, 105-touch screen, 106-emergency stop button, 107-filling area, 108-electrical control area, 109-cabinet door, 110-transmission main pipe, 111-electrical control box door, 112-differential pressure switch, 113-temperature and smoke detector, 114-gas detector, 115-differential pressure gauge, 116-observation window. DETAILED DESCRIPTION

[0020] The following describes in detail embodiments of the present invention, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to explain the present invention, and should not be construed as limiting the present invention.

[0021] See also Figures 1 to 3 The present invention provides a special liquid filling device, which includes a cabinet 101, an electric control box 102, a PLC control system 103, three liquid storage cylinders 104, a liquid filling unit, an analysis unit, a waste liquid recovery unit, a purge unit, a touch screen 105, an alarm unit and an emergency stop button 106. The cabinet 101 is provided with a filling area 107 and an electric control area 108. The end surface of the filling area 107 is provided with a cabinet door 109. The three liquid storage cylinders 104 are installed in the filling area 107. A conveying main pipe 110 is provided inside the filling area 107. The three liquid storage cylinders 104 are all connected to the conveying main pipe 110. The liquid filling unit, the analysis unit, the waste liquid recovery unit and the purge unit are also provided inside the filling area 107. The liquid filling unit, the analysis unit, the waste liquid recovery unit and the purge unit are all connected to the conveying main pipe 110.

[0022] The electric control box 102 is provided in the electric control area 108, and the PLC control system 103 is provided inside the electric control box 102. The end face of the electric control box 102 is provided with an electric control box door, and the electric control box door is provided with the touch screen 105 and the emergency stop button 106. The cabinet 101 is also provided with the alarm unit, and the alarm unit, the touch screen 105, the emergency stop button 106, the liquid filling unit, the analysis unit, the waste liquid recovery unit and the purge unit are all connected to the PLC control system 103.

[0023] In this embodiment, the human-machine interface technology of the PLC control system 103 and the touch screen 105 is adopted to automatically control the flow direction of the process gas. The PLC control system 103 is used to cooperate with the liquid filling unit, the analysis unit, the waste liquid recovery unit and the purging unit to complete the raw material liquid input, liquid supply, pipeline cleaning, and pipeline purging, thereby avoiding equipment damage and personal harm caused by human error. Through the setting of the touch screen bottle, the operator does not need to directly operate the valves of each unit, thereby minimizing the harm of toxic and harmful gases to personnel. Through the setting of the alarm unit, when there is an unforeseen leakage or fire in the equipment, the pneumatic valve can be closed and the gas source can be cut off through the PLC control system 103, thereby reducing the harm.

[0024] Among them, the liquid filling unit includes a filling inlet isolation valve MV1, a filling inlet filter F1, a filling inlet pressure sensor PT1A, a filling inlet pneumatic isolation valve AV1, a filling pipeline manual valve MV3, a filling pipeline pressure sensor PT1, a filling pipeline pressure indicator PG1, a cylinder inlet pneumatic valve AV1A, a cylinder inlet pneumatic valve AV1B, a cylinder inlet pneumatic valve AV1C, a cylinder inlet manual valve MV1A, a cylinder inlet manual valve MV1B and a cylinder inlet manual valve MV1C. The front end of the liquid inlet isolation valve MV1 is the filling liquid inlet, and the rear end of the liquid inlet isolation valve is connected to the filling inlet filter F1. The filling inlet filter F1 is provided in the connecting pipeline with the delivery main 110. The filling pressure sensor PT1A and the liquid pneumatic isolation valve AV1 are provided. The rear end of the liquid pneumatic isolation valve AV1 is respectively connected to the liquid inlet pneumatic valve AV1A, the liquid inlet pneumatic valve AV1B and the liquid inlet pneumatic valve AV1C through the delivery main pipe 110. The rear ends of the liquid inlet pneumatic valve AV1A, the liquid inlet pneumatic valve AV1B and the liquid inlet pneumatic valve AV1C are respectively connected to the corresponding liquid storage cylinder 104 through the corresponding cylinder inlet manual valve MV1A, the cylinder inlet manual valve MV1B and the cylinder inlet manual valve MV1C. The filling pipeline manual valve MV3 is provided in the delivery main pipe 110. The rear end is connected to the filling pipeline pressure sensor PT1 and the filling pipeline pressure indicator PG1, the filling inlet pressure sensor PT1A, the filling inlet pneumatic isolation valve AV1, the filling pipeline pressure sensor PT1, the cylinder inlet pneumatic valve AV1A, the cylinder inlet pneumatic valve AV1B and the cylinder inlet pneumatic valve AV1C are all electrically connected to the PLC control system 103, the analysis unit includes an analysis pneumatic valve AV4, an analysis filter F3 and an analysis manual valve MV2, the front end of the analysis pneumatic valve AV4 is connected to the delivery main pipe 110, the rear end of the analysis pneumatic valve AV4 is connected to the analysis filter F3, the front end of the analysis manual valve MV2 is connected to the analysis filter F3, and the front end of the analysis manual valve MV2 is connected to the analysis filter F3. The analysis filter F3, the rear end of the analysis manual valve MV2 is connected to the outlet pipeline, the analysis pneumatic valve AV4 is electrically connected to the PLC control system 103, the waste liquid recovery unit includes a helium inlet filter F2A, a helium one-way valve CV1A, a helium pneumatic valve AV2A, a recovery pneumatic valve AV5A, a recovery pneumatic valve AV5B, a recovery one-way valve CV3A and a recovery one-way valve CV3B, the front end of the helium inlet filter F2A is connected to the helium pipeline, the rear end of the helium inlet filter F2A is connected to the helium one-way valve CV1A, the front end of the helium pneumatic valve AV2A is connected to the helium one-way valve CV1A, and the rear end of the helium pneumatic valve AV2A is connected to the delivery main 110.The front ends of the recovery pneumatic valve AV5A and the recovery pneumatic valve AV5B are both connected to the delivery main pipe 110, and the rear ends of the recovery pneumatic valve AV5A and the recovery pneumatic valve AV5B are respectively connected to the recovery check valve CV3A and the recovery check valve CV3B, and the rear ends of the recovery check valve CV3A and the recovery check valve CV3B are connected to the recovery pipeline. The helium pneumatic valve AV2A, the recovery pneumatic valve AV5A and the recovery pneumatic valve AV5B are all electrically connected to the PLC control system 103. The purge unit includes a nitrogen inlet filter F2, a nitrogen check valve CV2, a nitrogen inlet pneumatic valve AV2, a nitrogen inlet pneumatic valve AV3, an exhaust pneumatic valve AV7, an exhaust check valve CV3, a vacuum generator VG and a vacuum pneumatic valve AV6. The front end of the nitrogen inlet filter F2 is connected to the nitrogen pipeline, and the rear end of the nitrogen inlet filter F2 is connected to the nitrogen check valve CV2, the front ends of the nitrogen inlet pneumatic valve AV2 and the nitrogen inlet pneumatic valve AV3 are both connected to the nitrogen check valve CV2, and the rear ends of the nitrogen inlet pneumatic valve AV2 and the nitrogen inlet pneumatic valve AV3 are respectively connected to the delivery main pipe 110. The front end of the exhaust pneumatic valve AV7 is connected to the delivery main pipe 110, and the rear end of the exhaust pneumatic valve AV7 is connected to the exhaust check valve CV3. The front end of the vacuum generator VG is connected to the exhaust check valve CV3, and the rear end of the vacuum generator VG is respectively connected to the Venturi nitrogen and exhaust pipelines. The front end of the vacuum pneumatic valve AV6 is connected to the delivery main pipe 110, and the rear end of the vacuum pneumatic valve AV6 is connected to the vacuum pipeline. The nitrogen inlet pneumatic valve AV2, the nitrogen inlet pneumatic valve AV3, the vacuum pneumatic valve AV6, and the exhaust pneumatic valve AV7 are all electrically connected to the PLC control system 103.

[0025] Furthermore, the alarm unit includes a differential pressure switch 112 , a heat and smoke detector 113 , and a gas detector 114 . The differential pressure switch 112 , the heat and smoke detector 113 , and the gas detector 114 are all electrically connected to the PLC control system 103 .

[0026] In this embodiment, the differential pressure switch 112 , the heat and smoke detector 113 and the gas detector 114 cooperate to send out an alarm signal when an unforeseen leakage or fire occurs in the equipment.

[0027] Furthermore, a differential pressure gauge 115 is provided on the cabinet body 101 , and an observation window 116 is provided on the cabinet door 109 .

[0028] In this embodiment, the operating status of the device can be observed through the setting of the observation window 116.

[0029] See also Figure 4 , the utility model also provides a schematic diagram of the control logic for special liquid filling equipment.

[0030] Among them, the external power supply 1 is used to power the control power supply 1 and the control power supply 2, and the touch screen 105 and the PLC control system 103 are powered by the control power supply 1. The touch screen 105 and the PLC control system 103 are electrically connected. The PLC control system 103 is connected to the instrument gas, the pressure differential switch, the temperature and smoke detector 113, the gas detector 114, the relay, the sound and light alarm, the pneumatic solenoid valve group, the PT pressure sensor and the temperature sensor. The control power supply 2 powers the scale display, and the cylinder scale is connected to the scale display. The external power supply 2 is used to power the heating control power supply, and the solid-state relay is powered by the heating control power supply. Heating and the PLC control system 103 are both connected to fixed relays.

[0031] In this embodiment, the control power supply 1 is used to power the touch screen 105 and the PLC control system 103, the PLC control system 103 is used to control the instrument gas, the pressure differential switch, the temperature and smoke detector 113, the gas detector 114, the relay, the sound and light alarm, the pneumatic solenoid valve group, the PT pressure sensor and the temperature sensor, and the control power supply 2 is used to power the scale display, and the weight weighed by the cylinder scale is displayed vertically on the scale display.

[0032] The above disclosure is only a preferred embodiment of the present invention, and certainly cannot be used to limit the scope of rights of the present invention. Ordinary technicians in this field can understand that all or part of the processes of the above embodiment and equivalent changes made in accordance with the claims of the present invention are still within the scope of the utility model.

Claims

1. A special liquid filling device, characterized in that: It includes a cabinet, an electric control box, a PLC control system, three liquid storage cylinders, a liquid filling unit, an analysis unit, a waste liquid recovery unit, a purge unit, a touch screen, an alarm unit and an emergency stop button. The cabinet is provided with a filling area and an electric control area. The end face of the filling area is provided with a cabinet door. The three liquid storage cylinders are installed in the filling area. A conveying main pipe is provided inside the filling area. The three liquid storage cylinders are connected to the conveying main pipe. The liquid filling unit, the analysis unit, the waste liquid recovery unit and the purge unit are also provided inside the filling area. The liquid filling unit, the analysis unit, the waste liquid recovery unit and the purge unit are all connected to the conveying main pipe. The electric control box is provided in the electric control area, the PLC control system is provided inside the electric control box, the end face of the electric control box is provided with an electric control box door, the electric control box door is provided with the touch screen and the emergency stop button, and the cabinet is also provided with the alarm unit, the alarm unit, the touch screen, the emergency stop button, the liquid filling unit, the analysis unit, the waste liquid recovery unit and the purge unit are all connected to the PLC control system.

2. The special liquid filling device according to claim 1, characterized in that: The liquid filling unit includes a filling inlet isolation valve MV1, a filling inlet filter F1, a filling inlet pressure sensor PT1A, a filling inlet pneumatic isolation valve AV1, a filling pipeline manual valve MV3, a filling pipeline pressure sensor PT1, a filling pipeline pressure indicator PG1, a cylinder inlet pneumatic valve AV1A, a cylinder inlet pneumatic valve AV1B, a cylinder inlet pneumatic valve AV1C, a cylinder inlet manual valve MV1A, a cylinder inlet manual valve MV1B and a cylinder inlet manual valve MV1C. The front end of the liquid inlet isolation valve MV1 is the filling liquid inlet, and the rear end of the liquid inlet isolation valve is connected to the filling inlet filter F1. The filling pressure sensor PT1A and the liquid pneumatic isolation valve AV1 are provided in the connecting pipeline between the filling inlet filter F1 and the delivery main pipe. The rear end of the liquid pneumatic isolation valve AV1 is respectively connected to the liquid inlet pneumatic valve AV1B and the delivery main pipe. 1A, the liquid inlet pneumatic valve AV1B and the liquid inlet pneumatic valve AV1C, the rear ends of the liquid inlet pneumatic valve AV1A, the liquid inlet pneumatic valve AV1B and the liquid inlet pneumatic valve AV1C are connected to the corresponding liquid storage cylinder through the corresponding cylinder inlet manual valve MV1A, the cylinder inlet manual valve MV1B and the cylinder inlet manual valve MV1C respectively, the filling pipeline manual valve MV3 is arranged in the delivery main pipe, the rear end of the filling pipeline manual valve MV3 is connected to the filling pipeline pressure sensor PT1 and the filling pipeline pressure indicator PG1, the filling inlet pressure sensor PT1A, the filling inlet pneumatic isolation valve AV1, the filling pipeline pressure sensor PT1, the cylinder inlet pneumatic valve AV1A, the cylinder inlet pneumatic valve AV1B and the cylinder inlet pneumatic valve AV1C are all electrically connected to the PLC control system.

3. The special liquid filling device according to claim 2, characterized in that: The analysis unit includes an analysis pneumatic valve AV4, an analysis filter F3 and an analysis manual valve MV2. The front end of the analysis pneumatic valve AV4 is connected to the delivery main pipe, the rear end of the analysis pneumatic valve AV4 is connected to the analysis filter F3, the front end of the analysis manual valve MV2 is connected to the analysis filter F3, the rear end of the analysis manual valve MV2 is connected to the outlet pipeline, and the analysis pneumatic valve AV4 is electrically connected to the PLC control system.

4. The special liquid filling device according to claim 3, characterized in that: The waste liquid recovery unit includes a helium inlet filter F2A, a helium one-way valve CV1A, a helium pneumatic valve AV2A, a recovery pneumatic valve AV5A, a recovery pneumatic valve AV5B, a recovery one-way valve CV3A and a recovery one-way valve CV3B. The front end of the helium inlet filter F2A is connected to the helium pipeline, the rear end of the helium inlet filter F2A is connected to the helium one-way valve CV1A, the front end of the helium pneumatic valve AV2A is connected to the helium one-way valve CV1A, and the rear end of the helium pneumatic valve AV2A is connected to the The front ends of the recovery pneumatic valve AV5A and the recovery pneumatic valve AV5B are connected to the delivery main pipe, the rear ends of the recovery pneumatic valve AV5A and the recovery pneumatic valve AV5B are respectively connected to the recovery check valve CV3A and the recovery check valve CV3B, the rear ends of the recovery check valve CV3A and the recovery check valve CV3B are connected to the recovery pipeline, and the helium pneumatic valve AV2A, the recovery pneumatic valve AV5A and the recovery pneumatic valve AV5B are all electrically connected to the PLC control system.

5. The special liquid filling device according to claim 4, characterized in that: The purge unit includes a nitrogen inlet filter F2, a nitrogen one-way valve CV2, a nitrogen inlet pneumatic valve AV2, a nitrogen inlet pneumatic valve AV3, an exhaust pneumatic valve AV7, an exhaust one-way valve CV3, a vacuum generator VG and a vacuum pneumatic valve AV6. The front end of the nitrogen inlet filter F2 is connected to the nitrogen pipeline, the rear end of the nitrogen inlet filter F2 is connected to the nitrogen one-way valve CV2, the front ends of the nitrogen inlet pneumatic valve AV2 and the nitrogen inlet pneumatic valve AV3 are both connected to the nitrogen one-way valve CV2, and the rear ends of the nitrogen inlet pneumatic valve AV2 and the nitrogen inlet pneumatic valve AV3 are respectively connected to the delivery main pipe, the front end of the discharge pneumatic valve AV7 is connected to the delivery main pipe, the rear end of the discharge pneumatic valve AV7 is connected to the discharge one-way valve CV3, the front end of the vacuum generator VG is connected to the discharge one-way valve CV3, the rear end of the vacuum generator VG is respectively connected to the Venturi nitrogen and discharge pipelines, the front end of the vacuum pneumatic valve AV6 is connected to the delivery main pipe, the rear end of the vacuum pneumatic valve AV6 is connected to the vacuum pipeline, the nitrogen inlet pneumatic valve AV2, the nitrogen inlet pneumatic valve AV3, the vacuum pneumatic valve AV6 and the discharge pneumatic valve AV7 are all electrically connected to the PLC control system.

6. The special liquid filling device according to claim 5, characterized in that: The alarm unit includes a differential pressure switch, a temperature and smoke detector, and a gas detector. The differential pressure switch, the temperature and smoke detector, and the gas detector are all electrically connected to the PLC control system.

7. The special liquid filling device according to claim 6, characterized in that: The cabinet body is also provided with a pressure differential gauge, and the cabinet door is provided with an observation window.

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