Flower basket testing fixture

Abstract

The utility model belongs to the field of silicon wafer processing, and discloses a flower basket checking fixture which comprises a base, a sliding block and a fixing plate, the sliding block is arranged on the base in a sliding mode, the sliding block is used for bearing a silicon wafer flower basket, and the fixing plate is an L-shaped plate. One end of the fixing plate is fixedly connected to the base, the other end of the fixing plate extends to the position above the base and is fixedly connected with a vertically-arranged detection tool plate, and a plurality of detection teeth which are arranged in the vertical direction are fully distributed on the two sides of the detection tool plate and are arranged at equal intervals. According to the scheme, the detection tool plate is designed to be of the full-tooth structure, the detection tool plate of the full-tooth structure can detect the uniformity and the coplanar precision of the center distance of each tooth of the side tooth plate of the silicon wafer flower basket, the silicon wafer flower basket with the qualified side tooth plate can be rapidly screened out through the detection, the machining quality of the silicon wafer in the subsequent machining process is ensured, and the machining efficiency is improved. And adverse conditions such as silicon wafer position deviation and collision caused by the precision problem of the toothed plate on the side of the flower basket are reduced.

Description

Technical Field

[0001] The utility model relates to the field of silicon wafer processing, and more specifically, to a flower basket inspection tool. Background Art

[0002] In the semiconductor manufacturing industry, silicon wafer baskets play a vital role in the transportation and processing of silicon wafers. To ensure the quality of silicon wafer baskets, specialized inspection tools are required.

[0003] Traditional silicon wafer basket inspection fixtures have several shortcomings. Structurally, the original inspection fixture plate lacks a full-tooth structure. The quality of the side teeth of the silicon wafer basket significantly impacts its performance. For example, the uniformity and coplanarity of the center-to-center distances between each tooth on the side teeth directly impact the stability of the wafer's placement in the basket and the accuracy of subsequent processing steps. Because the original inspection fixture plate lacks a full-tooth structure, it's impossible to test the uniformity and coplanarity of the center-to-center distances between each tooth on the side teeth of the basket. This can result in substandard baskets being released into subsequent production processes, impacting the basket's subsequent use and potentially causing problems such as wafer misalignment and collisions within the basket, ultimately affecting the wafer's processing quality.

[0004] In terms of materials, the original gauges were made of mold steel, which is prone to rust during actual use. This rust not only affects the appearance of the gauge, making it look untidy and unprofessional, but also gradually corrodes the surface of the gauge, thereby affecting the accuracy of the gauge. Utility Model Content

[0005] The purpose of the utility model is to solve the shortcomings of the prior art and to provide a flower basket checking fixture.

[0006] In order to solve the above problems, the present invention adopts the following technical solutions:

[0007] A flower basket inspection tool comprises a base, a slider, and a fixed plate. The slider is slidably disposed on the base and is used to support a silicon wafer flower basket. The fixed plate is an L-shaped plate, one end of which is fixedly connected to the base and the other end of which extends above the base and is fixedly connected to a vertically disposed inspection tool plate.

[0008] Both sides of the inspection plate are covered with a number of detection teeth arranged vertically. The detection teeth are arranged at equal intervals, and the spacing between two adjacent detection teeth is consistent with the spacing between the side tooth plate grooves of the silicon wafer basket. The detection teeth are used to detect the uniformity and coplanarity of the center distance of each tooth of the side tooth plate of the silicon wafer basket;

[0009] The base, slider, fixing plate, inspection plate and inspection teeth are all made of stainless steel.

[0010] As a further description of the above technical solution: two slide rails are provided on the base, and the two slide rails are parallel to each other. Two groups of sliding blocks adapted to the slide rails are provided at the bottom of the slider, and the slider can drive the silicon wafer flower basket to move along the slide rail toward the fixed plate.

[0011] As a further description of the above technical solution: a shock-absorbing rubber pad is provided at the bottom of the base.

[0012] As a further description of the above technical solution: two mounting holes are provided on one side of the inspection plate, and the inspection plate is fixedly connected to the fixing plate through the mounting holes and hexagon socket screws.

[0013] As a further description of the above technical solution: a positioning strip is installed on the surface of the slider near the edge, and a plurality of positioning holes are provided on the slider.

[0014] Compared with the prior art, the advantages of the present invention are:

[0015] 1. This solution designs the inspection plate into a full-tooth structure. The inspection plate with a full-tooth structure can detect the uniformity and coplanarity of the center distance of each tooth of the side tooth plate of the silicon wafer flower basket. Through this test, silicon wafer flower baskets with qualified side tooth plates can be quickly screened out, ensuring the processing quality of silicon wafers in the subsequent processing process and reducing the occurrence of adverse conditions such as silicon wafer position deviation and collision caused by accuracy problems of the flower basket side tooth plate.

[0016] Second, the material of the flower basket inspection fixture in this solution has been changed from mold steel to stainless steel. Stainless steel has excellent corrosion resistance and effectively prevents rust. This change ensures that the inspection fixture maintains a clean appearance during long-term use, without the appearance of mottled or corroded marks caused by rust. More importantly, it ensures that the inspection fixture's accuracy is not affected by rust. This ensures that the inspection fixture can provide accurate and reliable test results when inspecting silicon wafer flower baskets, improving the stability and accuracy of the entire inspection process. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is one of the structural diagrams of the present utility model;

[0018] Figure 2 This is the second structural diagram of the present utility model.

[0019] Description of the numbers in the figure:

[0020] 1. Base; 2. Slider; 3. Fixing plate; 4. Inspection plate; 5. Inspection teeth; 6. Slide rail; 7. Shock-absorbing rubber pad; 8. Mounting hole; 9. Positioning strip. DETAILED DESCRIPTION

[0021] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention; it is obvious that the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0022] See also Figure 1-2 A flower basket inspection tool comprises a base 1, a slider 2 and a fixed plate 3. The slider 2 is slidably arranged on the base 1. The slider 2 is used to carry the silicon wafer flower basket. The fixed plate 3 is an L-shaped plate. One end of the fixed plate 3 is fixedly connected to the base 1, and the other end extends to the top of the base 1 and is fixedly connected to a vertically arranged inspection tool plate 4; both sides of the inspection tool plate 4 are covered with a plurality of detection teeth 5 arranged vertically. The plurality of detection teeth 5 are arranged at equal intervals, and the spacing between two adjacent detection teeth 5 is consistent with the spacing between the side tooth plate grooves of the silicon wafer flower basket. The detection teeth 5 are used to detect the uniformity and coplanarity of the center distance of each tooth of the side tooth plate of the silicon wafer flower basket.

[0023] When testing the uniformity and coplanarity of the center-to-center distances of each tooth on the side teeth of the wafer basket, the wafer basket is placed on slider 2. The movement of slider 2 drives the basket's movement, allowing different parts of the side teeth to be compared and tested with the detection teeth 5 on the inspection plate 4. If the spacing between any teeth on the side teeth of the wafer basket does not match the spacing between the detection teeth 5, a deviation in the center-to-center distance of that tooth can be immediately determined. Furthermore, by testing the contact between the teeth 5 and the side teeth, coplanarity can be checked to determine whether the side teeth are aligned. If a tooth does not make good contact with the detection tooth, it may be that the tooth is not aligned correctly, thus enabling rapid testing of the wafer basket.

[0024] Because both sides of the inspection plate 4 are covered with inspection teeth 5, the side teeth on both sides of the wafer basket can be inspected simultaneously. This greatly improves inspection efficiency, eliminating the need to inspect both sides separately, reducing inspection time and workload. Furthermore, simultaneous inspection of both sides ensures better consistency of the teeth on both sides, which is crucial for wafer baskets that require high-precision assembly.

[0025] The base 1, slider 2, fixed plate 3, gauge plate 4, and detection teeth 5 are all made of stainless steel. Stainless steel has excellent corrosion resistance. Even when exposed to potentially corrosive environments (such as the volatile chemicals present in a production workshop) during long-term use, it is not easily rusted or corroded. This ensures the service life of the gauge and reduces detection errors and replacement costs caused by material damage. Stainless steel also has high strength and hardness. During the detection process, the detection teeth 5 are in frequent contact with the side teeth of the silicon wafer basket. The high strength and hardness of stainless steel 5 ensure that the detection teeth 5 will not easily deform or damage, thereby ensuring the accuracy and stability of the detection.

[0026] Specifically, two slide rails 6 are provided on the base 1, and the two slide rails 6 are parallel to each other. Two sets of sliding blocks adapted to the slide rails 6 are provided at the bottom of the slider 2. The slider 2 can drive the silicon wafer basket to move along the slide rails 6 toward the fixed plate 3.

[0027] In addition, a shock-absorbing rubber pad 7 is installed at the bottom of the base 1 to ensure the stability of the inspection fixture. Two mounting holes 8 are opened on one side of the inspection plate 4. The inspection plate 4 is fixed to the fixed plate 3 through the mounting holes 8 and hexagon socket screws, facilitating the installation and removal of the inspection plate 4. A positioning strip 9 is installed near the edge of the surface of the slider 2 to install the silicon wafer basket. In addition, the slider 2 is equipped with multiple sets of positioning holes to assist in the positioning of the silicon wafer basket.

[0028] The above description is merely a preferred embodiment of the present invention; however, the scope of protection of the present invention is not limited thereto. Any person skilled in the art who, within the technical scope disclosed in the present invention, makes equivalent substitutions or modifications based on the technical solutions and improved concepts of the present invention shall be covered by the scope of protection of the present invention.

Claims

1. A flower basket inspection tool, comprising a base (1), a slider (2) and a fixing plate (3), characterized in that: The slider (2) is slidably arranged on the base (1), and the slider (2) is used to carry the silicon wafer basket. The fixed plate (3) is an L-shaped plate, one end of the fixed plate (3) is fixedly connected to the base (1), and the other end extends to the top of the base (1) and is fixedly connected to a vertically arranged inspection plate (4); Both sides of the inspection plate (4) are covered with a plurality of detection teeth (5) arranged vertically, the plurality of detection teeth (5) are arranged at equal intervals, and the interval between two adjacent detection teeth (5) is consistent with the interval between the side tooth plate grooves of the silicon wafer basket, and the detection teeth (5) are used to detect the uniformity and coplanarity of the center distance of each tooth of the side tooth plate of the silicon wafer basket; The base (1), the slider (2), the fixing plate (3), the inspection plate (4) and the inspection teeth (5) are all made of stainless steel.

2. The flower basket inspection tool according to claim 1, characterized in that: Two slide rails (6) are provided on the base (1), and the two slide rails (6) are parallel to each other. Two groups of sliding blocks adapted to the slide rails (6) are provided at the bottom of the slider (2), and the slider (2) can drive the silicon wafer flower basket to move along the slide rails (6) toward the fixed plate (3).

3. The flower basket inspection tool according to claim 1, characterized in that: A shock-absorbing rubber pad (7) is provided at the bottom of the base (1).

4. The flower basket inspection tool according to claim 1, characterized in that: Two mounting holes (8) are provided on one side of the inspection plate (4), and the inspection plate (4) is fixedly connected to the fixing plate (3) via the mounting holes (8) and hexagon socket screws.

5. The flower basket inspection tool according to claim 1, characterized in that: A positioning strip (9) is installed on the surface of the slider (2) near the edge, and a plurality of positioning holes are provided on the slider (2).

Images