Device for controlling uniformity of flow field of high-temperature heat treatment furnace

Abstract

The utility model relates to the field of industrial heat treatment, and discloses a device for controlling the uniformity of a flow field of a high-temperature heat treatment furnace, which comprises a furnace body, the top of the furnace body is fixedly connected with an air inlet pipe, the top of the inner wall of the furnace body is fixedly connected with a shell, the inner wall of the furnace body is fixedly connected with a circular plate, and the surface of the circular plate is provided with vent holes. A control mechanism is arranged at the bottom of the shell and comprises a stepping motor and a connecting plate, the stepping motor is fixedly installed at the bottom of the shell, and a first gear is fixedly connected to the bottom of an output shaft of the stepping motor. According to the utility model, through the cooperation of the stepping motor, the gear I, the gear II, the rotating shaft, the connecting plate and the baffle plate, the number of the vent holes shielded by the baffle plate can be changed, so that the throughput of gas can be changed by controlling the rotating angle of the output shaft of the stepping motor, and real-time adjustment can be conveniently carried out according to the production requirements of products; and the control flexibility of the gas flow is better.

Description

Technical Field

[0001] The utility model relates to the field of industrial heat treatment, in particular to a device for controlling the uniformity of the flow field of a high-temperature heat treatment furnace. Background Art

[0002] Chemical vapor deposition and chemical vapor infiltration are newly developed methods for densifying materials. The device primarily consists of a housing designed for chemical vapor industrial heat treatment. The housing is equipped with an air inlet and an air outlet. Inside the housing, the inlet and outlet are connected sequentially to form an inlet gas buffer zone, a deposition zone, and an outlet gas buffer zone. A buffer baffle is placed between the inlet and deposition zones, and a bottom baffle is placed between the deposition zone and the outlet gas buffer zone. Both the buffer baffle and the bottom baffle are equipped with multiple gas delivery holes evenly distributed in a circular array.

[0003] After searching, Chinese patent announcement number: CN220224332U discloses a device for controlling the uniformity of the flow field of a high-temperature heat treatment furnace, including a shell for being arranged in a chemical vapor deposition furnace, the shell being provided with an air inlet and an air outlet, and the shell being provided with an intake gas buffer zone, a deposition zone, and an outlet gas buffer zone in sequence connected from the air inlet to the air outlet, and a buffer partition being provided between the intake gas and the deposition zone.

[0004] The above patent improves the stability of the deposition effect and stabilizes the product quality by making the gas flow field of the gas entering the deposition area from the buffer partition and the gas flow field of the gas entering the outlet gas buffer zone through the bottom baffle uniform. However, the gas flows inside the aluminum furnace body through the air vents set at fixed positions. Once the furnace body is produced, it is difficult to change the gas flow rate, and it cannot be adjusted accordingly according to the needs of product production. The flexibility of controlling the gas flow rate is low. Therefore, a device for controlling the uniformity of the flow field of a high-temperature heat treatment furnace is proposed to solve the above problems. Utility Model Content

[0005] In order to make up for the above shortcomings, the utility model provides a device for controlling the uniformity of the flow field of a high-temperature heat treatment furnace, aiming to improve the problem in the prior art that "it is difficult to change the flow rate of gas passing through and it cannot be adjusted accordingly according to the needs of product production."

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a device for controlling the uniformity of the flow field of a high-temperature heat treatment furnace, comprising a furnace body, the top of the furnace body is fixedly connected to an air inlet pipe, the top of the inner wall of the furnace body is fixedly connected to a shell, the inner wall of the furnace body is fixedly connected to a circular plate, the surface of the circular plate is provided with a vent, and the bottom of the shell is provided with a control mechanism, the control mechanism includes a stepper motor and a connecting plate, the stepper motor is fixedly installed at the bottom of the shell, the output shaft of the stepper motor is fixedly connected to gear 1 at the bottom, the top of the connecting plate is fixedly connected to a rotating shaft, the rotating shaft passes through and is rotatably installed on the inner wall of the circular plate, the top of the rotating shaft is fixedly connected to gear 2, the gear 1 and gear 2 are meshed, the circumferential surface of the connecting plate is fixedly connected to a baffle, the top of the baffle is in contact with the bottom of the circular plate, the interior of the furnace body is fixedly connected to a bottom shell, and the bottom of the bottom shell is fixedly connected to the air outlet pipe.

[0007] As a further description of the above technical solution:

[0008] An intake gas buffer zone is provided inside the shell, and the interior of the intake pipe is communicated with the intake gas buffer zone.

[0009] As a further description of the above technical solution:

[0010] The shell is provided with a plurality of gas delivery holes, which are arranged in a circular shape at equal angles inside the shell. The intake gas buffer zone is connected to the outside of the shell through the gas delivery holes.

[0011] As a further description of the above technical solution:

[0012] The diameter of the gear 1 is larger than that of the gear 2. The number of the gear 2 is set to be multiple, and the multiple gears 2 are arranged in a ring shape with equal angles around the gear 1.

[0013] As a further description of the above technical solution:

[0014] The baffle is arranged in a fan shape, and the number of the baffle is set to be multiple, and the multiple baffles are arranged in a ring shape with equal angles around the connecting plate.

[0015] As a further description of the above technical solution:

[0016] A through slot is provided on the top of the bottom shell, and the shape of the through slot is set to be arc-shaped.

[0017] As a further description of the above technical solution:

[0018] A deposition area is provided inside the furnace body, and an outlet gas buffer area is provided inside the bottom shell. The outlet gas buffer area is connected to the deposition area through a through groove.

[0019] As a further description of the above technical solution:

[0020] A buffer partition is fixedly connected to the inner wall of the bottom shell, and a circular hole is opened on the surface of the buffer partition.

[0021] The utility model has the following beneficial effects:

[0022] 1. In the present invention, by cooperating with the stepper motor, gear 1, gear 2, rotating shaft, connecting plate and baffle, the number of vents blocked by the baffle can be changed, and then the amount of gas passing through can be changed by controlling the rotation angle of the stepper motor output shaft, which is convenient for real-time adjustment according to the needs of product production, and the control flexibility of gas flow is better.

[0023] 2. In the present invention, through the coordination of the air intake pipe, the shell, the air intake buffer zone, the air delivery hole, the circular plate and the air vent, the gas first enters the air intake buffer zone after entering the shell from the air intake pipe, which helps to slow down the gas flow rate and make it enter the deposition area more smoothly. In addition, the gas is ejected from the air vents in multiple directions to the outside of the shell, which can further evenly distribute the gas and ensure that the gas reaches the ideal flow rate and distribution state before entering the deposition area. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the overall three-dimensional structure of the utility model;

[0025] Figure 2 It is a cross-sectional view of the overall three-dimensional structure of the present invention;

[0026] Figure 3 It is a schematic cross-sectional view of the three-dimensional structure of the housing and the control mechanism in the present invention;

[0027] Figure 4 This is a bottom-up schematic diagram of the three-dimensional structure of the control mechanism when all the vent holes on the circular plate of the present invention are not blocked;

[0028] Figure 5 It is a schematic cross-sectional view of the three-dimensional structure of the bottom shell, buffer partition and air outlet pipe of the utility model.

[0029] Legend:

[0030] 1. Furnace body; 2. Air inlet pipe; 3. Shell; 4. Inlet gas buffer zone; 5. Gas delivery hole; 6. Circular plate; 7. Air vent; 8. Stepper motor; 9. Gear 1; 10. Gear 2; 11. Rotating shaft; 12. Connecting plate; 13. Baffle; 14. Deposition zone; 15. Bottom shell; 16. Through groove; 17. Buffer partition; 18. Outlet gas buffer zone; 19. Outlet pipe. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0032] Reference Figure 1 - Figure 3 The utility model provides an embodiment: a device for controlling the uniformity of the flow field of a high-temperature heat treatment furnace, comprising a furnace body 1, an air intake pipe 2 fixedly connected to the top of the furnace body 1, a shell 3 fixedly connected to the top of the inner wall of the furnace body 1, an air intake gas buffer zone 4 is provided inside the shell 3, and after the gas enters the shell 3 from the air intake pipe 2, it first enters the air intake gas buffer zone 4. The design of this area helps to slow down the gas flow rate and make the gas enter the deposition area 14 more smoothly. The interior of the air intake pipe 2 is connected to the air intake gas buffer zone 4.

[0033] Reference Figure 2 - Figure 4 The shell 3 is provided with a gas delivery hole 5, and the number of the gas delivery holes 5 is set to be multiple. The multiple gas delivery holes 5 are arranged in a ring-shaped manner at equal angles inside the shell 3, so that the gas is ejected from the gas delivery holes 5 in multiple directions to the outside of the shell 3. The intake gas buffer zone 4 is connected to the outside of the shell 3 through the gas delivery holes 5. A circular plate 6 is fixedly connected to the inner wall of the furnace body 1, and a vent hole 7 is opened on the surface of the circular plate 6. By adjusting the number of overlaps between the vent holes 7 on the circular plate 6 and the baffle 13, the gas flow rate and gas can be flexibly controlled. A control mechanism is provided at the bottom of the shell 3.

[0034] Reference Figure 3 、 Figure 4The control mechanism includes a stepper motor 8 and a connecting plate 12. The stepper motor 8 has good control accuracy and can accurately control the rotation angle of the output shaft, thereby improving the accuracy of airflow control. A protective shell can be set outside the stepper motor 8 to keep the stepper motor 8 in normal working condition. The stepper motor 8 is fixedly mounted on the bottom of the shell 3. The bottom of the output shaft of the stepper motor 8 is fixedly connected to a gear 9. The top of the connecting plate 12 is fixedly connected to a rotating shaft 11 arranged in a vertical state. The rotating shaft 11 passes through and is rotatably mounted on the inner wall of the circular plate 6. The top of the rotating shaft 11 is fixedly connected to a gear 2 10. Gear 1 9 and gear 2 10 are meshed. The rotating shaft 11 drives the baffle 13 on the outer wall of the connecting plate 12 to rotate through the cooperation of gear 1 9 and gear 2 10. The diameter of gear 1 9 is larger than that of gear 2 10. The number of gear 2 10 is set to multiple. Multiple gears 2 10 are arranged around gear 1 9 in a ring with equal angles. The multiple gears 2 10 have the same rotation direction.

[0035] Reference Figure 3 - Figure 5 The circumferential surface of the connecting plate 12 is fixedly connected with a baffle 13, which is arranged in a fan shape. The number of baffles 13 is set to be multiple, and multiple baffles 13 are arranged in a ring-shaped and equiangular interval around the connecting plate 12. There is a certain interval between the multiple baffles 13 to facilitate the airflow to pass through the unobstructed vent 7. The top of the baffle 13 is fitted with the bottom of the circular plate 6. The inside of the furnace body 1 is fixedly connected with a bottom shell 15, and a through groove 16 is provided on the top of the bottom shell 15. The shape of the through groove 16 is set to be arc-shaped, which can slow down the gas flow rate.

[0036] Reference Figure 2 、 Figure 5 The furnace body 1 is provided with a deposition area 14 inside, in which the gas reacts chemically or is physically deposited with the workpiece. Due to the uniform distribution of the gas, the deposition effect can be kept consistent in both the horizontal and vertical directions. The bottom shell 15 is provided with an outlet gas buffer zone 18 inside, which is connected to the deposition area 14 through a through groove 16. After the deposition is completed, the gas enters the outlet gas buffer zone 18. The design of this area helps to collect and treat exhaust gas while slowing down the gas flow rate. A buffer baffle 17 is fixedly connected to the inner wall of the bottom shell 15. The surface of the buffer baffle 17 is provided with a plurality of circular holes arranged in a circular array. The circular holes on the buffer baffle 17 can further evenly distribute the gas and change the flow rate and distribution state of the gas. An outlet pipe 19 is fixedly connected to the bottom of the bottom shell 15.

[0037] Working principle: When in use, the gas first enters the intake gas buffer zone 4 inside the shell 3 from the intake pipe 2, allowing the gas to stay briefly in the shell 3, and then is ejected from the gas delivery holes 5 in multiple directions to the outside of the shell 3, and then enters the deposition area 14 after passing through the air vents 7 on the circular plate 6. The gas is evenly discharged from the evenly distributed circular holes on the outlet gas buffer zone 18 and the buffer partition 17, and then discharged from the outlet pipe 19 to achieve the effect of uniformity of the flow field and temperature in the deposition area 14.

[0038] By starting the power supply of the stepper motor 8, the stepper motor 8 works to rotate gear 1 9, and the rotation of gear 1 9 drives multiple gears 2 10 to rotate, and then drives the connecting plate 12 to rotate through the rotating shaft 11, and the angles and directions of rotation of multiple connecting plates 12 are the same. The rotation of the connecting plate 12 causes the baffle 13 to rotate. The rotation of the baffle 13 can change the number of vents 7 blocked by the baffle 13, and then the amount of gas passing through can be changed by controlling the rotation angle of the output shaft of the stepper motor 8, thereby improving the flexibility of control.

[0039] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A device for controlling the uniformity of the flow field of a high-temperature heat treatment furnace, comprising a furnace body (1), characterized in that: The top of the furnace body (1) is fixedly connected to an air inlet pipe (2), the top of the inner wall of the furnace body (1) is fixedly connected to a shell (3), the inner wall of the furnace body (1) is fixedly connected to a circular plate (6), the surface of the circular plate (6) is provided with an air vent (7), the bottom of the shell (3) is provided with a control mechanism, the control mechanism includes a stepper motor (8) and a connecting plate (12), the stepper motor (8) is fixedly mounted on the bottom of the shell (3), the bottom of the output shaft of the stepper motor (8) is fixedly connected to a gear 1 (9), the connecting plate The top of the plate (12) is fixedly connected to a rotating shaft (11), which passes through and is rotatably mounted on the inner wall of the circular plate (6). The top of the rotating shaft (11) is fixedly connected to gear 2 (10), and gear 1 (9) and gear 2 (10) are meshed. The circumferential surface of the connecting plate (12) is fixedly connected to a baffle (13), and the top of the baffle (13) fits the bottom of the circular plate (6). The interior of the furnace body (1) is fixedly connected to a bottom shell (15), and the bottom of the bottom shell (15) is fixedly connected to an exhaust pipe (19).

2. The device for controlling flow field uniformity of a high-temperature heat treatment furnace according to claim 1, characterized in that: An intake gas buffer zone (4) is provided inside the housing (3), and the interior of the intake pipe (2) is in communication with the intake gas buffer zone (4).

3. The device for controlling flow field uniformity of a high-temperature heat treatment furnace according to claim 2, characterized in that: The shell (3) is provided with a gas delivery hole (5), the number of which is set to be multiple, and the multiple gas delivery holes (5) are arranged in a circular shape at equal angles inside the shell (3), and the intake gas buffer zone (4) is connected to the outside of the shell (3) through the gas delivery hole (5).

4. The device for controlling flow field uniformity of a high-temperature heat treatment furnace according to claim 1, characterized in that: The diameter of the gear one (9) is larger than the diameter of the gear two (10), and the number of the gear two (10) is set to be multiple, and the multiple gear twos (10) are arranged in a ring shape with equal angles around the gear one (9).

5. The device for controlling flow field uniformity of a high-temperature heat treatment furnace according to claim 1, characterized in that: The baffle (13) is arranged in a fan shape, the number of the baffles (13) is set to be multiple, and the multiple baffles (13) are arranged in a ring shape at equal angles around the connecting plate (12).

6. The device for controlling flow field uniformity of a high-temperature heat treatment furnace according to claim 1, characterized in that: A through slot (16) is provided on the top of the bottom shell (15), and the shape of the through slot (16) is set to be an arc.

7. The device for controlling flow field uniformity of a high-temperature heat treatment furnace according to claim 6, characterized in that: A deposition area (14) is provided inside the furnace body (1), and an outlet gas buffer area (18) is provided inside the bottom shell (15). The outlet gas buffer area (18) is connected to the deposition area (14) via a through groove (16).

8. The device for controlling flow field uniformity of a high-temperature heat treatment furnace according to claim 7, characterized in that: A buffer partition (17) is fixedly connected to the inner wall of the bottom shell (15), and a circular hole is opened on the surface of the buffer partition (17).

Images