Continuous furnace tail gas treatment and argon recovery system

Abstract

The utility model discloses a continuous furnace tail gas treatment and argon recovery system which comprises a tail gas collecting pipe, a dust removal device, a gas drying device, a fan, an air return pipe and a control system, the tail gas collecting pipe is used for being connected with a waste gas outlet of a continuous furnace, and the air return pipe is used for being connected with a gas inlet of the continuous furnace. And a gas regulating valve electrically connected with the control system is arranged on the air return pipe. According to the continuous furnace tail gas treatment and argon recovery system, the fan is used for providing power, gas in the continuous furnace is pumped out, solid dust is removed through the dust removal device, moisture is filtered through the gas drying device, and finally clean argon is blown back to the starting end and the tail end of equipment. Therefore, the flow rate of the gas in the furnace is increased, and the argon is recycled at the same time.

Description

Technical Field

[0001] The utility model relates to the technical field of tail gas treatment, and in particular to a continuous furnace tail gas treatment and argon recovery system used in industries such as new energy and semiconductors. Background Art

[0002] Continuous furnaces include various types of continuous carbonization furnaces, continuous carbon graphitization furnaces, push-boat graphite purification furnaces and other furnace bodies. In actual production, such as in the push-boat graphite purification process, a large number of various by-products such as dust and moisture are generated. These by-products are not only easy to contaminate the product and the heating and insulation components in the furnace, but also easy to clog the pipeline, affecting the long-term stable operation of the equipment. The conventional treatment method is to introduce a large amount of argon gas, carry out the by-products through the flow of argon gas, and discharge the argon gas directly. The above treatment method not only wastes a large amount of argon gas, but also easily causes environmental pollution. At the same time, the speed of argon gas flowing in the furnace is limited, and it is often difficult to quickly and completely carry out the by-products. Not only is it easy to cause secondary pollution of the product, but it is also necessary to reduce the production speed to compensate for this defect. This results in high equipment use costs and low production efficiency. Therefore, a system that can quickly discharge by-products while reducing the cost of argon gas and reducing environmental pollution is crucial.

[0003] In the prior art, dust removal equipment is often used in general tail gas treatment to treat waste gas containing by-products such as dust and moisture. Since the waste gas contains a large amount of argon, it is directly discharged after treatment. However, this treatment method will directly discharge a large amount of argon into the atmosphere, resulting in an increase in cost. At the same time, in the process of maintaining the cost of argon, it is easy to cause the by-products to be discharged untimely, affecting the quality of the product, thereby reducing production efficiency. Utility Model Content

[0004] In order to overcome the shortcomings of the existing technology, the utility model provides a continuous furnace tail gas treatment and argon recovery system, which solves the above-mentioned traditional problems in the actual production process, such as untimely tail gas treatment causing product pollution, argon waste, pipeline blockage, high operating cost and low efficiency.

[0005] The utility model is implemented by the following technical solutions:

[0006] A continuous furnace exhaust gas treatment and argon recovery system includes an exhaust gas collection pipe, a dust removal device, a gas drying device, a fan, a return air duct and a control system. The exhaust gas collection pipe is used to be connected to the exhaust gas outlet of the continuous furnace, and the return air duct is used to be connected to the gas inlet of the continuous furnace. The return air duct is provided with a gas regulating valve electrically connected to the control system.

[0007] Preferably, the exhaust gas collecting pipe is provided with an exhaust gas pressure sensor and a regulating valve, and the exhaust gas pressure sensor and the regulating valve are both electrically connected to the control system.

[0008] Preferably, the dust removal device includes a cyclone dust collector and a bag dust collector.

[0009] Preferably, a dust collection tank is installed at the bottom end of the cyclone dust collector, and a pressure difference sensor is installed on the bag dust collector.

[0010] Preferably, the gas drying device is filled with a desiccant, and the desiccant is one of activated carbon, silica gel, calcium phosphate, and molecular sieve.

[0011] Preferably, the fan is a variable frequency fan.

[0012] Preferably, the variable frequency fan is an induced draft fan or an exhausted draft fan.

[0013] Preferably, the control system is equipped with an audio and visual prompt device.

[0014] Compared with the prior art, the beneficial effects of the present invention are:

[0015] In the continuous furnace tail gas treatment and argon recovery system of the present invention, the gas in the continuous furnace is extracted by a fan to provide power, solid dust is removed by a dust removal device, moisture is filtered by a gas drying device, and finally the clean argon is blown back to the beginning and end of the equipment, thereby increasing the gas flow rate in the furnace and realizing the recovery and utilization of the argon. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a process flow chart of the continuous furnace tail gas treatment and argon recovery system of the utility model.

[0017] In the figure: 10, continuous furnace; 11, furnace body pressure sensor; 20, exhaust gas collection pipe; 21, exhaust gas pressure sensor; 22, regulating valve; 30, dust removal device; 31, cyclone dust collector; 32, bag dust collector; 33, dust collection tank; 34, differential pressure sensor; 40, gas drying device; 50, fan; 60, return air duct. DETAILED DESCRIPTION

[0018] To make the above-mentioned objects, features, and advantages of the present invention more clearly understood, the following detailed description of specific embodiments of the present invention is provided in conjunction with the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described herein, and those skilled in the art may make similar modifications without departing from the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0019] In the description of this utility model, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this utility model, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0020] In the description of the present invention, it should be understood that when an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be intermediate elements at the same time. On the contrary, when an element is said to be "directly" connected to another element, there are no intermediate elements.

[0021] See also Figure 1 , which is a continuous furnace 10 tail gas treatment and argon recovery system of a preferred embodiment of the present invention, is used to be installed on a continuous furnace 10. The continuous furnace 10 includes a cooling section, a high temperature section and a low temperature section, so as to solve the problems of untimely tail gas treatment, product pollution, argon waste, pipeline blockage, high cost of use, low efficiency and so on in the actual production process. Specifically, the tail gas treatment and argon recovery system of the continuous furnace 10 includes a tail gas collection pipe 20, a dust removal device 30, a gas drying device 40, a fan 50, a return air duct 60 and a control system (not shown). The tail gas collection pipe 20 is used to be connected to the exhaust gas outlet of the high temperature section and / or low temperature section of the continuous furnace 10, and the return air duct 60 is used to be connected to the gas inlet of the low temperature section of the continuous furnace 10. The return air duct 60 is provided with a gas regulating valve 22 electrically connected to the control system. By controlling the opening of the gas regulating valve 22, the efficiency of the tail gas treatment is adjusted.

[0022] In the above-mentioned exhaust gas treatment and argon recovery system of the continuous furnace 10, the fan 50 provides power to extract the gas in the continuous furnace 10, and then the solid dust is removed by the dust removal device 30, and then the moisture is filtered by the gas drying device 40, and finally the clean argon is blown back to the beginning and end of the equipment, thereby increasing the gas flow rate in the furnace and realizing the recovery and utilization of the argon.

[0023] In one embodiment, a furnace pressure sensor 11 is provided on the continuous furnace 10, and an exhaust gas collection pipe 20 is provided with an exhaust gas pressure sensor 21 and a regulating valve 22. The furnace pressure sensor 11, exhaust gas pressure sensor 21, and regulating valve 22 are all electrically connected to a control system. The gas velocity from the pipe is controlled by adjusting the opening of the regulating valve 22 according to the furnace pressure. In this embodiment, the exhaust gas collection pipe 20 includes multiple regional gas collection pipes, each equipped with a regulating valve 22. The opening of each regulating valve 22 is adjusted according to specific production needs, and the specific operation is not further described here.

[0024] In other embodiments, the dust removal device 30 includes a cyclone dust collector 31 and a bag dust collector 32. A dust collection tank 33 is mounted at the bottom end of the cyclone dust collector 31 for collecting dust within the cyclone dust collector 31. A pressure differential sensor 34 is mounted on the bag dust collector 32 for monitoring the pressure differential within the bag dust collector 32. In the above structure, the dust removal device 30 composed of the cyclone dust collector 31 and the bag dust collector 32 improves the removal efficiency of dust from the exhaust gas by utilizing the dust removal effects of different dust removal devices. In other embodiments, the dust removal device 30 can also be other dust removal devices, which can be reasonably combined according to specific requirements.

[0025] In this embodiment, the gas drying device 40 is filled with a desiccant, which is one of activated carbon, silica gel, calcium phosphate, and molecular sieve.

[0026] In other embodiments, the fan 50 is a variable frequency fan 50 , wherein the variable frequency fan 50 is an induced draft fan 50 or an exhaust draft fan 50 , and the corresponding type of fan 50 is selected according to the specific process.

[0027] In this embodiment, the control system is equipped with an audio-visual prompt device. When there is a problem with the dust removal device 30, the gas drying device 40 and the pipeline being blocked or other problems occur, the audio-visual prompt device can be used to prompt the operator so that the operator can deal with it in time.

[0028] In the above embodiment, the principle is as follows: first, the variable frequency blower 50 is activated to extract the processed exhaust gas through the high-temperature and low-temperature exhaust pipes. At this point, the exhaust gas extraction rate can be controlled by adjusting the regulating valve 22 on the exhaust pipe to control the exhaust velocity of each pipe, thereby achieving a controllable exhaust gas extraction rate. The exhaust gas passes through the cyclone dust collector, filtering out over 90% of the solid dust. It then passes through a bag filter for precision filtration, removing most of the dust. It is preferably dried in a dryer to obtain relatively clean argon gas, which is then blown back into the furnace by the variable frequency blower 50, initiating a second cycle to reduce argon consumption.

[0029] During this process, the pressure inside the furnace, the pressure in the pipeline, the discharge conditions, etc. can be monitored to adjust the speed of the fan 50 in real time, thereby controlling the wind speed and reducing energy loss while ensuring that the exhaust gas is completely taken out.

[0030] At the same time, the cyclone dust collector 31, the bag dust collector 32, and the gas drying device 40 all have an online cleaning function, which can discharge waste residue and waste water during the allowed process, thereby ensuring the long-term continuous operation of the equipment.

[0031] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0032] The above-described embodiments merely represent several implementations of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that a person skilled in the art would be able to make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present utility model patent shall be determined by the appended claims.

Claims

1. A continuous furnace tail gas treatment and argon recovery system, characterized in that: It includes an exhaust gas collection pipe, a dust removal device, a gas drying device, a fan, a return air duct and a control system. The exhaust gas collection pipe is used to be connected to the exhaust gas outlet of the continuous furnace, and the return air duct is used to be connected to the gas inlet of the continuous furnace. The return air duct is provided with a gas regulating valve electrically connected to the control system.

2. The continuous furnace tail gas treatment and argon recovery system according to claim 1, characterized in that: The exhaust gas collecting pipe is provided with an exhaust gas pressure sensor and a regulating valve, and the exhaust gas pressure sensor and the regulating valve are both electrically connected to the control system.

3. The continuous furnace tail gas treatment and argon recovery system according to claim 1, characterized in that: The dust removal device includes a cyclone dust collector and a bag dust collector.

4. The continuous furnace tail gas treatment and argon recovery system according to claim 3, characterized in that: A dust collecting tank is installed at the bottom end of the cyclone dust collector, and a pressure difference sensor is installed on the bag dust collector.

5. The continuous furnace tail gas treatment and argon recovery system according to claim 1, characterized in that: The gas drying device is filled with a desiccant, which is one of activated carbon, silica gel, calcium phosphate and molecular sieve.

6. The continuous furnace tail gas treatment and argon recovery system according to claim 1, characterized in that: The fan is a variable frequency fan.

7. The continuous furnace tail gas treatment and argon recovery system according to claim 6, characterized in that: The variable frequency fan is an induced draft fan or an exhaust draft fan.

8. The continuous furnace tail gas treatment and argon recovery system according to claim 1, characterized in that: The control system is equipped with an audible and visual prompt device.

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