Cold trap device for ALD equipment

Abstract

The utility model belongs to the technical field of tail gas cold trap treatment, and relates to a cold trap device for ALD (Atomic Layer Deposition) equipment, which comprises a cold trap shell for containing reaction substances; the cold trap shell is provided with an air inlet pipe, a containing cavity and an air outlet pipe, and the containing cavity is communicated with the air inlet pipe and the air outlet pipe; the cold trap inner cavity is used for accommodating a cooling substance; the cold trap inner cavity is arranged in the accommodating cavity, and the opening edge of the cold trap inner cavity is hermetically connected with the opening edge of the cold trap shell; the cooling pipe is used for containing cooling liquid; and the cooling pipe is arranged in the cold trap inner cavity and is connected with the cold trap shell. According to the cold trap device for the ALD equipment, the design of the cold trap inner cavity and the cold trap outer cavity is adopted, the temperature uniformity of a cooling medium is better improved, the powder collecting cavity is formed in the bottom, and the convenience of powder discharging is improved; the device has the excellent characteristic that excessive precursors and reaction byproducts are fully cooled so as to effectively capture the byproducts contained in the tail gas.

Description

Technical Field

[0001] The utility model relates to the technical field of tail gas cold trap treatment, in particular to a cold trap device for ALD equipment. Background Art

[0002] Atomic layer deposition (ALD) is a specialized chemical vapor deposition (CVD) technique. During the ALD process, a gas delivery system transports one or more gaseous precursors into the chamber for reaction. After the reaction, excess precursors and reaction byproducts are mechanically pumped into an exhaust treatment system. These excess precursors and reaction byproducts can be toxic, flammable, explosive, or corrosive, resulting in the exhaust gas produced during the process often containing low-melting-point byproducts.

[0003] The exhaust gas generated by the ALD vacuum process contains low-melting-point byproducts that can easily contaminate the mechanical pump rotor and pump oil, leading to rotor seizure, pump oil failure due to contamination, and even complete process line shutdown, significantly impacting production. Furthermore, these byproducts enter the exhaust gas treatment system after passing through the mechanical pump, significantly increasing the difficulty of exhaust gas treatment.

[0004] The existing cooling treatment device has a poor structural rationality, which not only leads to insufficient cooling effect, but also makes it difficult to clean the deposits after cooling. Utility Model Content

[0005] In view of this, the utility model provides a cold trap device for ALD equipment.

[0006] Specifically, the present invention is achieved through the following technical solutions:

[0007] According to a first aspect of the present invention, a cold trap device for an ALD device is provided, comprising:

[0008] The cold trap shell is used to hold the reaction material; the cold trap shell has an air inlet pipe, a receiving cavity and an air outlet pipe, and the receiving cavity is connected to the air inlet pipe and the air outlet pipe respectively;

[0009] A cold trap inner cavity, for accommodating a cooling substance; the cold trap inner cavity is arranged in the accommodating cavity, and an opening edge of the cold trap inner cavity is sealedly connected to an opening edge of the cold trap shell;

[0010] A cooling pipe is used to hold cooling liquid; the cooling pipe is arranged in the inner cavity of the cold trap and connected to the cold trap shell.

[0011] Optionally, the opening sealing cover of the cold trap housing is provided with a cold trap cover plate, and the end of the cooling pipe is arranged on the cold trap cover plate and extends out of the cold trap cover plate.

[0012] Optionally, the opening of the cold trap inner cavity is connected to the cold trap cover.

[0013] Optionally, the air inlet pipe is arranged on the side wall of the cold trap shell, and an air inlet filter plate is provided in the air inlet pipe.

[0014] Optionally, the air outlet pipe is arranged on the side wall of the cold trap shell, and an air outlet filter plate is provided in the air outlet pipe.

[0015] Optionally, the bottom of the cold trap housing protrudes downward to form a powder collection chamber, and the powder collection chamber is communicated with the accommodating chamber.

[0016] Optionally, a powder discharge port is provided at the bottom of the powder collection chamber.

[0017] Optionally, the powder discharge port is detachably sealed and provided with a blind plate.

[0018] Optionally, the liquid inlet of the cooling pipe is sleeved with a liquid inlet ferrule joint, and the liquid outlet of the cooling pipe is sleeved with a liquid outlet ferrule joint, and the liquid inlet ferrule joint and the liquid outlet ferrule joint are arranged on the cold trap cover.

[0019] Optionally, the cooling tube extends in a spiral shape within the inner cavity of the cold trap.

[0020] The technical solution provided by the utility model brings at least the following beneficial effects:

[0021] The cold trap device provided in the present application for ALD equipment adopts an inner and outer cavity design of the cold trap, which better improves the temperature uniformity of the cooling medium, and has a powder collection cavity at the bottom, which improves the convenience of powder discharge; the present application has the excellent characteristic of fully cooling excess precursors and reaction by-products to effectively capture the by-products contained in the exhaust gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present invention, and together with the description, serve to explain the principles of the present invention.

[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or related technical descriptions. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0024] Figure 1 A schematic side view of a cold trap device for an ALD device provided in an embodiment of the present invention;

[0025] Figure 2 A schematic diagram of the structure of a cooling tube in a cold trap device for an ALD device provided in an embodiment of the present invention;

[0026] Figure 3 A schematic top view of a cold trap device for ALD equipment provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0027] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0028] Figure 1 A cold trap device for ALD equipment applicable to an embodiment of the present utility model is schematically shown.

[0029] Reference Figure 1-3 As shown, the present application provides a cold trap device for an ALD device, comprising:

[0030] The cold trap housing 10 is used to hold the reaction material; the cold trap housing 10 has an air inlet pipe 11, a receiving cavity 12 and an air outlet pipe 13, and the receiving cavity 12 is connected to the air inlet pipe 11 and the air outlet pipe 13 respectively;

[0031] The cold trap cavity 20 is used to accommodate the cooling material; the cold trap cavity 20 is arranged in the accommodating cavity 12, and the opening edge of the cold trap cavity 20 is sealedly connected to the opening edge of the cold trap housing 10;

[0032] The cooling pipe 30 is used to hold cooling liquid. The cooling pipe 30 is disposed in the cold trap cavity 20 and connected to the cold trap housing 10 .

[0033] In an embodiment of the present application, the inner wall of the cold trap housing 10 and the outer wall of the cold trap inner cavity 20 are in direct contact with the exhaust gas. To reduce gas resistance, they can be set as electrolytically polished surfaces that have been polished. The cold trap inner cavity 20 is filled with cooling medium, and the cooling pipe 30 is fed with liquid cooling medium. The air inlet pipe 11 and the air outlet pipe 13 are located on both sides of the cold trap inner cavity 20 and are in the same horizontal straight line. The cold trap inner cavity 20 and the cooling pipe 30 are connected by a clamp or welding. The cooling pipe 30 and the cold trap inner cavity 20 are both made of heat-conducting materials. The heat-conducting materials can be selected from rust-resistant metal materials, ceramics or graphite, etc. For example, stainless steel is preferably used in this embodiment. The cooling pipe 30 can be made of stainless steel or oxygen-free copper, that is, it can be formed by bending a stainless steel pipe or a copper pipe in one piece. To reduce fluid flow resistance, the inner wall of the cooling pipe 30 can be set as a polished surface that has been polished. The present application adopts a cold trap structure with inner and outer cavities. The cooling medium in the inner cavity 20 of the cold trap has a higher specific heat capacity, and the liquid cooling medium in the cooling tube 30 has better cooling performance. In this way, the combination of the two can also multiply the thermal conductivity, thereby significantly improving the overall cooling effect of the cold trap.

[0034] Exemplarily, the opening sealing cover of the cold trap housing 10 is provided with a cold trap cover plate 14 , and the end of the cooling pipe 30 is provided on the cold trap cover plate 14 and extends out of the cold trap cover plate 14 .

[0035] In the embodiment of the present application, the cooling pipe 30 is located inside the cold trap cavity 20, and the ends on both sides are connected by the cold trap cover 14. The cold trap shell 10 and the cold trap cover 14 are both made of stainless steel or aluminum alloy material, and the two are connected by clamps or welding.

[0036] Exemplarily, the opening of the cold trap inner cavity 20 is connected to the cold trap cover plate 14 .

[0037] In the embodiment of the present application, the cold trap inner cavity 20 and the cold trap cover plate 14 are connected by a clamp.

[0038] Exemplarily, the air inlet pipe 11 is provided on a side wall of the cold trap housing 10 , and an air inlet filter plate 15 is provided in the air inlet pipe 11 .

[0039] In the embodiment of the present application, the air intake filter plate 15 is used to filter substances entering through the air intake pipe 11 .

[0040] Exemplarily, the air outlet pipe 13 is provided on a side wall of the cold trap housing 10 , and an air outlet filter plate 16 is provided in the air outlet pipe 13 .

[0041] In the embodiment of the present application, the air outlet filter plate 16 is used to filter the substances discharged through the air outlet pipe 13 , and the substances that cannot be discharged are collected in the cold trap housing 10 .

[0042] Illustratively, the bottom of the cold trap housing 10 protrudes downward to form a powder collection chamber 17 , and the powder collection chamber 17 is communicated with the accommodating chamber 12 .

[0043] In the embodiment of the present application, a powder collecting chamber 17 is provided at the bottom of the cold trap housing 10 , and the powder collecting chamber 17 is used to collect the powdered material obtained after cooling.

[0044] Exemplarily, a powder discharge port 18 is provided at the bottom of the powder collecting chamber 17 .

[0045] In the embodiment of the present application, the powder in the powder collecting chamber 17 is discharged through the powder discharge port 18 .

[0046] Exemplarily, the powder discharge port 18 is detachably sealed and provided with a blind plate 19 .

[0047] In the embodiment of the present application, the opening of the powder discharge port 18 is sealed by a blind plate 19, and the blind plate 19 can be removed when it needs to be opened.

[0048] Illustratively, the liquid inlet 31 of the cooling tube 30 is sleeved with a liquid inlet ferrule joint 32 , and the liquid outlet 33 of the cooling tube 30 is sleeved with a liquid outlet ferrule joint 34 . The liquid inlet ferrule joint 32 and the liquid outlet ferrule joint 34 are arranged on the cold trap cover 14 .

[0049] In an embodiment of the present application, industrial cooling water, cooling gel or liquid nitrogen is used as a refrigerant in the cooling tube 30. The refrigerant enters the cooling tube 30 in the cold trap inner cavity 20 through the liquid inlet 31. After the refrigerant contacts the cooling medium in the cold trap inner cavity 20 in the cooling tube 30 and fully exchanges heat, it is discharged from the liquid outlet 33.

[0050] Exemplarily, the cooling pipe 30 extends in the cold trap cavity 20 in a spiral shape.

[0051] In an embodiment of the present application, the cooling tube 30 is made of a material with high thermal conductivity (such as copper, iron or alloy) and has a spiral structure. The cooling tube 30 has a double helix structure. Its purpose is, on the one hand, to increase the contact area between the cooling tube 30 and the cold trap cavity 20, exponentially increase the thermal conductivity, and significantly improve the overall cooling effect of the cold trap; on the other hand, the cooling tube 30 and the cold trap cover plate 14 are connected by a sleeve, which is convenient for disassembly and cleaning of the cooling tube 30, thereby reducing maintenance costs. The use of a spiral cooling tube 30 can provide a larger surface contact area than cooling tubes of other structures such as a columnar structure, so that the coolant in the cold trap cavity 20 can fully contact the cooling tube 30, providing better thermal conductivity.

[0052] In the embodiment of the present application, the exterior of the cooling outer cavity is fixed by three feet 110 .

[0053] The cold trap device for ALD equipment provided by the application adopts an inner and outer cavity design of the cold trap, better improves the temperature uniformity of the cooling medium, has a powder collection cavity at the bottom, and improves the convenience of powder discharge; the application has the excellent characteristics of fully cooling excessive precursors and reaction byproducts to effectively capture byproducts contained in the tail gas.

[0054] It should be noted that in the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not intended to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0055] In addition, in addition to being used to indicate the orientation or positional relationship, the above-mentioned terms can also be used to indicate other meanings, for example, the term "upper" can also be used to indicate a certain dependent relationship or connection relationship in some cases. For those skilled in the art, the specific meaning of these terms in the present application can be understood according to the specific circumstances.

[0056] In addition, the terms "mount", "set", "provided with", "connected", "connected" should be broadly understood. For example, it can be fixedly connected, detachably connected, or integrally constructed; it can be mechanically connected, or electrically connected; it can be directly connected, or indirectly connected through an intermediate medium, or internal communication between two devices, elements or components. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0057] In addition, the terms "first", "second" and the like are mainly used to distinguish different devices, elements or components (the specific types and structures can be the same or different), and are not intended to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise stated, the meaning of "multiple" is two or more.

[0058] The above is only a specific embodiment of the present application, which enables those skilled in the art to understand or implement the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application should not be limited to the embodiments shown herein, but should conform to the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A cold trap device for ALD equipment, characterized in that: include: The cold trap shell is used to hold the reaction material; the cold trap shell has an air inlet pipe, a receiving cavity and an air outlet pipe, and the receiving cavity is connected to the air inlet pipe and the air outlet pipe respectively; A cold trap inner cavity, for accommodating a cooling substance; the cold trap inner cavity is arranged in the accommodating cavity, and an opening edge of the cold trap inner cavity is sealedly connected to an opening edge of the cold trap shell; A cooling pipe is used to hold cooling liquid; the cooling pipe is arranged in the inner cavity of the cold trap and connected to the cold trap shell.

2. The cold trap device for ALD equipment according to claim 1, characterized in that The opening sealing cover of the cold trap housing is provided with a cold trap cover plate, and the end of the cooling pipe is arranged on the cold trap cover plate and extends out of the cold trap cover plate.

3. The cold trap device for ALD equipment according to claim 2, characterized in that The opening of the cold trap inner cavity is connected to the cold trap cover plate.

4. The cold trap device for ALD equipment according to claim 1, characterized in that The air inlet pipe is arranged on the side wall of the cold trap shell, and an air inlet filter plate is arranged in the air inlet pipe.

5. The cold trap device for ALD equipment according to claim 1, characterized in that: The air outlet pipe is arranged on the side wall of the cold trap shell, and an air outlet filter plate is arranged in the air outlet pipe.

6. The cold trap device for ALD equipment according to claim 1, characterized in that The bottom of the cold trap shell protrudes downward to form a powder collection chamber, and the powder collection chamber is communicated with the accommodating chamber.

7. The cold trap device for ALD equipment according to claim 6, characterized in that: A powder discharge port is provided at the bottom of the powder collecting chamber.

8. The cold trap device for ALD equipment according to claim 7, characterized in that: The powder discharge port is detachably sealed and provided with a blind plate.

9. The cold trap device for ALD equipment according to claim 2, characterized in that: The liquid inlet of the cooling pipe is sleeved with a liquid inlet ferrule joint, and the liquid outlet of the cooling pipe is sleeved with a liquid outlet ferrule joint. The liquid inlet ferrule joint and the liquid outlet ferrule joint are arranged on the cold trap cover plate.

10. The cold trap device for ALD equipment according to claim 1, characterized in that: The cooling pipe extends in a spiral shape in the inner cavity of the cold trap.

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