Driving device, alignment device and semiconductor process equipment

Abstract

The utility model provides a driving device, an alignment device and semiconductor process equipment, the driving device comprises a linear driving mechanism and a turning transmission structure, and the linear driving mechanism is used for providing linear driving force and is connected with a piece to be driven through the turning transmission structure; the direction-changing transmission structure is used for converting the linear driving force into linear transmission force different from the linear driving force in direction and transmitting the linear transmission force to a part to be driven. According to the driving device, the alignment device and the semiconductor process equipment provided by the utility model, the design flexibility of the alignment device can be improved, the space occupied by the alignment device can be reduced, and the alignment device can be arranged below the workbench, so that the driving stroke of the alignment device can be shortened, and the stability of the alignment device can be improved; and the alignment efficiency can be improved, and the cost of the alignment device can be reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and in particular to a driving device, an alignment device and semiconductor process equipment. Background Art

[0002] Curing LCD screens is a manufacturing process. During curing, the workpiece to be cured is placed on a workbench. A patterned substrate with a hollowed-out pattern is positioned above the workpiece. Ultraviolet (UV) light shines downward from above the patterned substrate, allowing the UV light to penetrate the hollowed-out pattern and reach the workpiece, curing it. Because the multiple placement movements of the robotic arm that places the workpiece can result in cumulative errors, causing misalignment between the workpiece and the patterned substrate, an alignment device is required to align the workpiece and the patterned substrate before curing.

[0003] In the prior art, the alignment device includes three interconnected linear drive mechanisms and a CCD (Charge Coupled Device) camera. In order for the CCD camera to achieve three-dimensional movement, the linear displacement elements of the three linear drive mechanisms need to be perpendicular to each other, so that the driving directions of the linear drives provided by the three linear drive mechanisms can be perpendicular to each other. With the help of the CCD camera, the position marks of the workpiece to be cured and the pattern substrate are respectively obtained. By comparing the position marks of the workpiece to be cured and the pattern substrate, the offset distance between the workpiece to be cured and the pattern substrate is obtained. Then, based on the offset distance, the workbench drives the workpiece to be cured to translate laterally or rotate slightly relative to the pattern substrate so that the position marks of the workpiece to be cured and the pattern substrate are aligned, completing the alignment.

[0004] However, since the linear displacement parts of the three linear drive mechanisms need to be perpendicular to each other, the design flexibility of the alignment device is poor and the space it occupies is large. It cannot be set in the small space below the workbench and can only be set beside the workbench. This results in the workbench first carrying the pattern substrate to a high position during alignment. After the pattern substrate is fixed at the high position, the alignment device then drives the CCD camera from the side of the workbench to the bottom of the workbench to obtain the position mark of the pattern substrate (the position of the workbench corresponding to the position mark is provided with a through hole for the CCD camera to pass through and obtain the position mark). After that, the alignment device first drives the CCD camera to move to the side of the workbench, and the workbench is then lowered to a low position. When the workpiece to be cured is placed on the workbench, the workbench first carries the workpiece to be cured to a high position, and the alignment device then drives the CCD camera to move to the bottom of the workbench to obtain the position mark of the workpiece to be cured. This results in a long drive stroke of the alignment device, resulting in greater shaking of the CCD camera, poor stability, and a long alignment time, low efficiency, and requires a linear drive mechanism that can provide a large drive stroke, which is expensive. Utility Model Content

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art, and proposes a driving device, an alignment device and a semiconductor process equipment, which can improve the design flexibility of the alignment device, so as to reduce the space occupied by the alignment device, enable the alignment device to be arranged under the workbench, thereby shortening the driving stroke of the alignment device, and further improving the stability of the alignment device, and can improve the alignment efficiency and reduce the cost of the alignment device.

[0006] To achieve the purpose of the present invention, a driving device is provided for use in semiconductor process equipment, comprising a linear driving mechanism and a direction-changing transmission structure. The linear driving mechanism is used to provide a linear driving force and is connected to a driven member via the direction-changing transmission structure.

[0007] The direction-changing transmission structure is used to convert the linear driving force into a linear transmission force with a direction different from that of the linear driving force, and transmit the linear transmission force to the driven member.

[0008] Optionally, there are multiple linear drive mechanisms, which are sequentially connected to the driven member in a power transmission direction;

[0009] The direction-changing transmission structure is provided between the driven member and the linear drive mechanism connected thereto; and / or the direction-changing transmission structure is provided between at least one of all two adjacent linear drive mechanisms.

[0010] Optionally, directions of the linear driving forces provided by at least two of the linear driving mechanisms are parallel.

[0011] Optionally, directions of the linear driving forces provided by at least three of the linear driving mechanisms are parallel, and directions of the linear driving forces provided by the at least three parallel linear driving mechanisms are spaced apart in a circumferential direction.

[0012] Optionally, the number of the linear drive mechanisms is at least three, and the direction of the linear drive force and the direction of the linear transmission force include a first direction, a second direction, and a third direction that are perpendicular to each other.

[0013] Optionally, the direction-changing transmission structure includes a transmission assembly and a guide assembly, wherein the transmission assembly is provided in cooperation with one of the linear drive mechanisms and is provided in cooperation with the driven member or the other linear drive mechanism, and is used to convert the linear driving force provided by one of the linear drive mechanisms into the linear transmission force and transmit it to the driven member or the other linear drive mechanism;

[0014] The guide assembly is arranged in cooperation with the driven member or another linear drive mechanism, and the guide direction of the guide assembly serves as the direction of the linear transmission force, so as to enable the driven member or another linear drive mechanism to move along the guide direction on the guide assembly under the action of the linear transmission force.

[0015] Optionally, the transmission assembly includes a transmission component and a return component, the direction of the linear driving force provided by one of the linear driving mechanisms includes a first driving sub-direction and a second driving sub-direction in opposite directions, and the guide direction includes a first guide sub-direction and a second guide sub-direction in opposite directions, and the transmission component contacts and cooperates with one of the linear driving mechanisms and contacts and cooperates with the to-be-driven member or the other linear driving mechanism, and is configured to transmit the linear driving force in the first driving sub-direction provided by one of the linear driving mechanisms to the to-be-driven member or the other linear driving mechanism, thereby driving the to-be-driven member or the other linear driving mechanism to move along the first guide sub-direction on the guide assembly;

[0016] The return component is connected to one of the linear drive mechanisms and to the driven member or another of the linear drive mechanisms, and is used to drive the driven member or another of the linear drive mechanisms to move along the second guide sub-direction on the guide assembly when one of the linear drive mechanisms provides a linear driving force in the second guide sub-direction.

[0017] Optionally, the transmission component includes a rotating member and a rotating shaft, and the rotating shaft is fixedly arranged. The rotating member is in contact and cooperate with one of the linear drive mechanisms, and in contact and cooperate with the member to be driven or another of the linear drive mechanisms, and is arranged in cooperation with the rotating shaft, and is used to rotate around the rotating shaft as the rotation center when one of the linear drive mechanisms provides the linear driving force in the direction of the first drive sub-direction, and transmit the linear transmission force to the member to be driven or another of the linear drive mechanisms.

[0018] Optionally, the transmission component also includes a first rolling member and a second rolling member, and the first rolling member and the second rolling member are respectively rotatably connected to the rotating member, and the rotating member is in rolling contact with one of the linear drive mechanisms through the first rolling member, and is in rolling contact with the driven member or another linear drive mechanism through the second rolling member.

[0019] Optionally, the return component includes a first elastic component and a second elastic component, the first elastic component is connected to the transmission component and one of the linear drive mechanisms, respectively, the second elastic component is connected to the transmission component and to the driven component or another linear drive mechanism, and the elastic deformation of the first elastic component and the second elastic component both meet the requirement of occurring when one of the linear drive mechanisms provides a linear driving force in the first drive sub-direction, and recovering when one of the linear drive mechanisms provides a linear driving force in the second drive sub-direction;

[0020] Alternatively, the return component includes a third elastic member, which is connected to one of the linear drive mechanisms and to the driven member or another of the linear drive mechanisms. The elastic deformation of the third elastic member occurs when one of the linear drive mechanisms provides a linear driving force in the direction of the first drive sub-drive, and recovers when one of the linear drive mechanisms provides a linear driving force in the direction of the second drive sub-drive.

[0021] Optionally, there are multiple third elastic members, the extension direction of the third elastic members is the same as the relative movement direction of one of the linear drive mechanisms, the driven member or another linear drive mechanism, and the multiple third elastic members are spaced apart in a direction perpendicular to the extension direction of the third elastic members.

[0022] Optionally, the guide assembly includes a guide part and a mating part, and the guide assembly is mated with the driven part or another linear drive mechanism through the mating part, and the mating part is mated with the guide part and can move along the guide direction on the guide assembly, and the transmission assembly is mated with the driven part or another linear drive mechanism by mating with the mating part.

[0023] Optionally, the second elastic member and the third elastic member are both connected to the member to be driven or another linear drive mechanism by being connected to the matching component.

[0024] Optionally, the guide component includes a first guide component and a second guide component, and the guide assembly further includes a fixed component, the fixed component is arranged opposite to the matching component, the first guide component is connected to the fixed component, the second guide component is connected to the matching component, the first guide component and the second guide component are arranged in coordination, and the first guide component and the second guide component can move relative to each other in the guide direction.

[0025] The utility model also provides a kind of alignment device, including position acquisition component and as the driving device provided by the utility model described, the position acquisition component is as the to-be-driven component, the driving device is connected with the position acquisition component, for driving the position acquisition component moves.

[0026] The utility model also provides a kind of semiconductor process equipment, including workbench and as the alignment device provided by the utility model described, the alignment device is arranged below the workbench, for the to-be-aligned component above the workbench is aligned.

[0027] The utility model has the following beneficial effects:

[0028] The driving device provided by the utility model, linear drive mechanism is connected with to-be-driven component by direction-changing transmission structure, linear drive force provided by linear drive mechanism can be converted into linear transmission force different from the direction of linear drive force by direction-changing transmission structure, and linear transmission force is transmitted to to-be-driven component, so that the driving device provided by the utility model compared with prior art, the direction of linear drive force provided by each linear drive mechanism is not identical with the direction of to-be-driven component to be moved, but the direction of linear drive force provided by linear drive mechanism can be different from the direction of to-be-driven component to be moved, so that the placement direction of linear drive mechanism can be flexibly adjusted according to the actual assembly space of driving device, in turn the design flexibility of alignment device can be improved, to be able to reduce the space occupied by alignment device, so that alignment device can be arranged below workbench, in turn the driving stroke of alignment device can be shortened, further the stability of alignment device can be improved, and alignment efficiency can be improved, and the cost of alignment device can be reduced.

[0029] The alignment device provided by the utility model, position acquisition component is driven to move by the driving device provided by the utility model, the design flexibility of alignment device can be improved, to be able to reduce the space occupied by alignment device, so that alignment device can be arranged below workbench, so that the driving stroke of alignment device can be shortened, further the stability of alignment device can be improved, and alignment efficiency can be improved, and the cost of alignment device can be reduced.

[0030] The semiconductor process equipment provided by the utility model, by arranging the alignment device provided by the utility model below workbench, to-be-aligned component above workbench is aligned by the alignment device provided by the utility model, the driving stroke of alignment device can be shortened, further the stability of alignment device can be improved, and alignment efficiency can be improved, and the cost of semiconductor process equipment can be reduced. BRIEF DESCRIPTION OF DRAWINGS

[0031] Figure 1 It is a perspective structural schematic diagram of one angle of the driving device and alignment device provided by the utility model embodiment.

[0032] Figure 2 A schematic diagram of the three-dimensional structure of the driving device and the positioning device provided by an embodiment of the utility model from another angle;

[0033] Figure 3 The driving device and the positioning device provided in the embodiment of the utility model are Figure 1 Schematic diagram of a three-dimensional structure of a part of the angle;

[0034] Figure 4 The driving device and the positioning device provided in the embodiment of the utility model are Figure 1 Schematic diagram of the three-dimensional structure of another part of the angle;

[0035] Figure 5 A schematic diagram of the three-dimensional structure of the driving device and the positioning device provided in an embodiment of the utility model from another angle;

[0036] Figure 6 A schematic diagram of the main structure of a semiconductor process equipment provided by an embodiment of the present utility model;

[0037] Figure 7 A schematic top view of the structure of a semiconductor process equipment provided by an embodiment of the present utility model;

[0038] Figure 8 A schematic diagram of the three-dimensional structure of the second linear drive mechanism and the first direction-changing transmission structure provided in an embodiment of the present utility model;

[0039] Figure 9 A schematic diagram of the three-dimensional structure of a first direction-changing transmission structure provided by an embodiment of the present utility model;

[0040] Figure 10 A schematic diagram of the three-dimensional structure of a second direction-changing transmission structure provided by an embodiment of the present utility model;

[0041] Figure 11 A schematic diagram of the three-dimensional structure of a first linear drive mechanism provided in an embodiment of the present utility model;

[0042] Figure 12 A schematic structural diagram of a portion of the guide assembly on the position acquisition component side provided by an embodiment of the present utility model;

[0043] Figure 13 A schematic structural diagram of a guide assembly on the position acquisition component side provided by an embodiment of the present utility model;

[0044] Description of reference numerals:

[0045] 11-first linear drive mechanism; 12-second linear drive mechanism; 13-third linear drive mechanism; 111-rotational drive source; 112-rotational transmission member; 113-connecting member; 114-linear guide member; 115-support member; 116-linear displacement member; 21-first direction-changing transmission structure; 22-second direction-changing transmission structure; 211-rotating member; 212-rotating shaft; 213-first rolling member; 214-second rolling member; 221-first elastic member; 222-second elastic member; 223-third elastic member;

[0046] 231 - guide component; 232 - mating component; 233 - fixing component; 241 - fixing bracket; 100 - position acquisition component; 200 - workbench; 300 - ultraviolet light source; 400 - part to be cured; 500 - pattern substrate; 600 - position mark. DETAILED DESCRIPTION

[0047] In order to enable those skilled in the art to better understand the technical solution of the present invention, the driving device, alignment device and semiconductor process equipment provided by the present invention are described in detail below with reference to the accompanying drawings.

[0048] An embodiment of the present utility model provides a driving device, which is applied to semiconductor process equipment, including a linear driving mechanism and a direction-changing transmission structure. The linear driving mechanism is used to provide a linear driving force and is connected to the driven part through the direction-changing transmission structure; the direction-changing transmission structure is used to convert the linear driving force into a linear transmission force with a direction different from the linear driving force, and transmit the linear transmission force to the driven part.

[0049] The driving device provided by the embodiment of the present invention has a linear driving mechanism connected to the driven member through a direction-changing transmission structure. With the help of the direction-changing transmission structure, the linear driving force provided by the linear driving mechanism can be converted into a linear transmission force with a direction different from that of the linear driving force, and the linear transmission force is transmitted to the driven member. In this way, compared with the prior art, the driving device provided by the embodiment of the present invention does not require the direction of the linear driving force provided by each linear driving mechanism to be the same as the direction to be moved of the driven member. Instead, the direction of the linear driving force provided by the linear driving mechanism can be made different from the direction to be moved of the driven member. Therefore, the placement direction of the linear driving mechanism can be flexibly adjusted according to the actual assembly space of the driving device, thereby improving the design flexibility of the alignment device, so as to reduce the space occupied by the alignment device and enable the alignment device to be arranged on the workbench 200 (such as Figure 6 and Figure 7 As shown), the driving stroke of the alignment device can be shortened, thereby improving the stability of the alignment device, improving the alignment efficiency, and reducing the cost of the alignment device.

[0050] In one embodiment of the present invention, there are multiple linear drive mechanisms, which are connected to the driven member in sequence according to the power transmission direction; a direction-changing transmission structure is provided between the driven member and the linear drive mechanism connected thereto; and / or a direction-changing transmission structure is provided between at least one of all adjacent two linear drive mechanisms.

[0051] Specifically, Figure 1-Figure 5 Taking a driving device and a positioning device provided by the embodiment of the present invention as an example, the positioning device may include a position acquisition component 100 and a driving device. The driving device may include three linear driving mechanisms and two direction-changing transmission structures. The three linear driving mechanisms are respectively a first linear driving mechanism 11, a second linear driving mechanism 12 and a third linear driving mechanism 13. The two direction-changing transmission structures are respectively a first direction-changing transmission structure 21 and a second direction-changing transmission structure 22. Each linear drive mechanism may include a linear displacement member 116. The linear drive mechanism may be connected to the direction-changing transmission structure through the linear displacement member 116, and may provide a linear driving force by driving the linear displacement member 116 to perform linear displacement. That is, the linear movement direction of the linear displacement member 116 is the direction of the linear driving force provided by the linear drive mechanism. The linear displacement directions of the linear displacement members 116 of the three linear drive mechanisms may be arranged in parallel, that is, the directions of the linear driving forces provided by the three linear drive mechanisms are parallel, thereby reducing the space occupied by the drive device and the alignment device, and the linear displacement directions of the linear displacement members 116 of the three linear drive mechanisms are spaced apart in a circumferential direction, that is, the directions of the linear driving forces provided by the three linear drive mechanisms are spaced apart in a circumferential direction, thereby further reducing the space occupied by the drive device and the alignment device.

[0052] The linear displacement member 116 of the first linear drive mechanism 11 is directly connected to the second linear drive mechanism 12, without being connected to the second linear drive mechanism 12 through a direction-changing transmission structure. The first linear drive mechanism 11 provides a first linear driving force, which can drive the second linear drive mechanism 12 to move in a first direction to be moved, which is the same as the direction of the first linear driving force. The linear displacement member 116 of the second linear drive mechanism 12 is connected to the third linear drive mechanism 13 through a first direction-changing transmission structure 21. The second linear drive mechanism 12 provides a second linear driving force parallel to the direction of the first linear driving force. The first direction-changing transmission structure 21 can convert the second linear driving force into a first linear transmission force perpendicular to the direction of the second linear driving force, and transmit the first linear transmission force to the third linear drive mechanism 13, which can drive the third linear drive mechanism 13 to move in a second direction to be moved, which is perpendicular to the first direction to be moved. The linear displacement member 116 of the third linear drive mechanism 13 is connected to the position acquisition component 100 through the second direction-changing transmission structure 22. The third linear drive mechanism 13 provides a third linear driving force parallel to the first linear driving direction. The second direction-changing transmission structure 22 can convert the third linear driving force into a second linear transmission force perpendicular to the directions of the second linear driving force and the third linear driving force, and transmit the second linear transmission force to the position acquisition component 100, which can drive the position acquisition component 100 to move in the third direction to be moved that is perpendicular to the first direction to be moved and the second direction to be moved. In this way, the position acquisition component 100 can be driven to achieve three-dimensional movement with the help of the driving device.

[0053] As Figure 6 and Figure 7Taking the workbench 200 used in the LCD screen curing process as an example, in actual applications, the space below the workbench 200 used in the LCD screen curing process is limited in the horizontal direction. Therefore, the driving device and the alignment device provided in the embodiment of the present invention can be vertically arranged below the workbench 200, that is, the first linear driving mechanism 11, the second linear driving mechanism 12 and the third linear driving mechanism 13 can all be arranged parallel to the vertical direction, and the directions of the linear driving forces provided by the first linear driving mechanism 11, the second linear driving mechanism 12 and the third linear driving mechanism 13 are all in the vertical direction. In this way, the first linear drive mechanism 11 can drive the second linear drive mechanism 12 to move linearly in the vertical direction (i.e., the first direction to be moved), thereby driving the second linear drive mechanism 12 to move linearly in the vertical direction, thereby driving the position acquisition component 100 to move linearly in the vertical direction. Under the linear driving force in the vertical direction provided by the second linear drive mechanism 12, the first direction-changing transmission structure 21 can drive the third linear drive mechanism 13 to move in the first horizontal direction (i.e., the second direction to be moved) perpendicular to the vertical direction, thereby driving the position acquisition component 100 to move in the first horizontal direction. Under the linear driving force in the vertical direction provided by the third linear drive mechanism 13, the second direction-changing transmission structure 22 can drive the position acquisition component 100 to move in the second horizontal direction (i.e., the third direction to be moved) perpendicular to both the vertical direction and the first horizontal direction, thereby driving the position acquisition component 100 to achieve three-dimensional movement.

[0054] By vertically arranging the driving device and the positioning device provided by the embodiment of the present invention below the workbench 200, the positioning device can be raised and lowered along with the workbench 200 during positioning. In this way, when the workbench 200 is raised from the low position to the high position carrying the pattern substrate 500, the positioning device can be raised along with the rise of the workbench 200. After the pattern substrate 500 is fixed at the high position, the positioning device can directly obtain the position mark 600 of the pattern substrate 500 below the workbench 200, that is, the driving device can directly drive the position acquisition component 100 below the workbench 200 to obtain the position mark 600 of the pattern substrate 500 from below the workbench 200 (the position of the workbench 200 corresponding to the position mark 600 is provided with a through hole for the position acquisition component 100 to obtain the position mark 600 through it). Afterwards, the workbench 200 can be lowered from the high position to the low position, and the positioning device can be raised along with the rise of the workbench 200. The workbench 200 lowers with the workpiece 400 being placed on the workbench 200, and the alignment device can obtain the position mark 600 of the workpiece 400 directly under the workbench 200. After that, by comparing the position marks 600 of the workpiece 400 and the pattern substrate 500, the misalignment distance between the workpiece 400 and the pattern substrate 500 can be obtained. According to the misalignment distance, the workbench 200 can drive the workpiece 400 to be cured to translate laterally or rotate at a small angle relative to the pattern substrate 500, so that the position marks 600 of the workpiece 400 to be cured and the pattern substrate 500 are aligned, and the alignment is completed. After that, the alignment device can carry the workpiece 400 to be cured from the low position to the high position, and the workpiece 400 to be cured is ready for the curing process.

[0055] In the process of the positioning device acquiring the position identifier 600 through the position acquisition component 100, the first linear drive mechanism 11 drives the position acquisition component 100 to move linearly in the vertical direction, so that the position acquisition component 100 can be close to or away from the workbench 200, so that the position acquisition component 100 can be close to or away from the position identifier 600, and thus it is convenient for the position acquisition component 100 to focus. The second linear drive mechanism 12 and the third linear drive mechanism 13 drive the position acquisition component 100 to move linearly in the first horizontal direction and the second horizontal direction, and the relative position of the position acquisition component 100 and the position identifier 600 in the horizontal direction can be adjusted, so that the position acquisition component 100 can acquire the position of the position identifier 600. Then, ultraviolet light is used to irradiate the workpiece to be cured 400 downward from above the pattern substrate 500 through the hollow pattern of the pattern substrate 500. During the curing process of the workpiece to be cured 400, the first linear drive mechanism 11 can be used to drive the position acquisition component 100 to move linearly in the vertical direction, so that the position acquisition component 100 is away from the workbench 200, and the position acquisition component 100 can be away from the ultraviolet light source 300, thereby reducing the possibility of damage to the position acquisition component 100 due to ultraviolet light irradiation.

[0056] like Figure 1-Figure 5 The embodiment of the utility model shown provides a driving device and an alignment device. By making the directions of the linear driving forces provided by the three linear driving mechanisms parallel, the space occupied by the driving device and the alignment device can be reduced. By making the directions of the linear driving forces provided by the three linear driving mechanisms spaced apart in a circumferential direction, the space occupied by the driving device and the alignment device can be further reduced. Compared with the prior art, the alignment device can be installed below the workbench 200 instead of being installed on the side of the workbench 200. Therefore, when the alignment device is actually performing alignment, there is no need to use the driving device to move the workbench 200 during the lifting and lowering process in order to avoid the interference of the alignment device with the lifting and lowering of the workbench 200. The driving position acquisition component 100 is moved to the side of the workbench 200, and since the positioning device is assembled under the workbench 200, when the positioning device is aligned, compared with the prior art, the driving device only needs to drive the position acquisition component 100 to move linearly a smaller distance (for example, 5 mm) in the horizontal and vertical directions. That is to say, each linear driving mechanism only needs to provide a linear driving force with a shorter stroke to enable the position acquisition component 100 to acquire the position of the position mark 600, thereby shortening the driving stroke of the positioning device, thereby improving the stability of the positioning device, improving the positioning efficiency, and reducing the cost of the positioning device.

[0057] In one embodiment of the present invention, the directions of the linear driving forces provided by the multiple linear drive mechanisms can be parallel or have an angle less than 90°. That is, in the embodiment of the present invention, the directions of the linear driving forces provided by the multiple linear drive mechanisms are not limited to parallel. For example, the directions of the linear driving forces provided by the multiple linear drive mechanisms can also have an angle less than 90°. Compared with the prior art in which the directions of the linear driving forces provided by the three linear drive mechanisms are all arranged perpendicularly, this can also reduce the space occupied by the drive device and the alignment device.

[0058] In an embodiment of the present invention, directions of the linear driving forces provided by the at least three linear driving mechanisms are parallel, and the directions of the linear driving forces provided by the at least three parallel linear driving mechanisms may be distributed at intervals in a circumferential direction.

[0059] For example, Figure 1 As shown, the direction of the first linear driving force provided by the first linear driving mechanism 11, the direction of the second linear driving force provided by the second linear driving mechanism 12, and the direction of the third linear driving force provided by the third linear driving mechanism 13 can all be parallel to the first direction to be moved, and the direction of the first linear driving force, the direction of the second linear driving force, and the direction of the third linear driving force can be distributed at intervals in a circumferential direction.

[0060] Such a design can further reduce the space occupied by the driving device and the alignment device compared to the direction of the linear driving force provided by at least three linear driving mechanisms being parallel and distributed at intervals in a straight line.

[0061] In one embodiment of the present invention, the number of linear drive mechanisms may be at least three, and the directions of the linear drive force and the linear transmission force may include a first direction (e.g., a first direction to be moved), a second direction (e.g., a second direction to be moved), and a third direction (e.g., a third direction to be moved) that are perpendicular to each other. This design can achieve three-dimensional drive.

[0062] In one embodiment of the present invention, the direction-changing transmission structure may include a guide assembly and a transmission assembly. The transmission assembly is arranged in cooperation with a linear drive mechanism and is arranged in cooperation with a driven member or another linear drive mechanism, and is used to convert the linear drive force provided by a linear drive mechanism into a linear transmission force and transmit it to the driven member or another linear drive mechanism; the guide assembly is arranged in cooperation with the driven member or another linear drive mechanism, and the guide direction of the guide assembly serves as the direction of the linear transmission force, and is used to make the driven member or another linear drive mechanism move along the guide direction on the guide assembly under the action of the linear transmission force.

[0063] In actual applications, the linear drive mechanism can provide a linear driving force to the transmission component through its linear displacement member 116, and the transmission component can convert the linear driving force into a linear transmission force and transmit it to the driven member or another linear drive mechanism, so as to drive the driven member or another linear drive mechanism to move on the guide component relative to the guide component in the guide direction of the guide component. Since the guide direction of the guide component serves as the direction of the linear transmission force, the guide direction of the guide component can be designed to be the same as the direction to be moved, so that the driven member or another linear drive mechanism can move in the direction to be moved, thereby enabling the change of direction transmission structure to convert the linear driving force into a linear transmission force different from the direction of the linear driving force, that is, to realize the change of direction transmission function of the change of direction transmission structure.

[0064] In one embodiment of the present invention, the transmission assembly may include a transmission component and a return component. The direction of the linear driving force provided by a linear driving mechanism may include a first driving sub-direction (for example, the vertical upward direction of the first linear driving force in the vertical direction) and a second driving sub-direction (for example, the vertical downward direction of the first linear driving force in the vertical direction) with opposite directions. The guide direction may include a first guiding sub-direction and a second guiding sub-direction with opposite directions. The transmission component contacts and cooperates with a linear driving mechanism and contacts and cooperates with the driven member or another linear driving mechanism, and is used to transmit the linear driving force of the first driving sub-direction provided by a linear driving mechanism to the driven member or another linear driving mechanism, driving the driven member or another linear driving mechanism to move along the first guiding sub-direction on the guide assembly; the return component is connected to a linear driving mechanism and connected to the driven member or another linear driving mechanism, and is used to drive the driven member or another linear driving mechanism to move along the second guiding sub-direction on the guide assembly when a linear driving mechanism provides a linear driving force in the second driving sub-direction.

[0065] In actual application, when the linear drive mechanism provides a linear driving force in the first driving sub-direction through its linear displacement member 116, the linear displacement member 116 of the linear drive mechanism can be close to the transmission component, so that the linear driving force in the first driving sub-direction is provided to the transmission component through the contact between the linear displacement member 116 and the transmission component. Under the action of the linear driving force, the transmission component can be pushed close to the driven member or another linear drive mechanism, so that the transmission component can transmit the power to the driven member or another linear drive mechanism through the contact between the transmission component and the driven member or another linear drive mechanism, thereby pushing the driven member or another linear drive mechanism to move along the first guide sub-direction on the guide assembly. When the linear drive mechanism provides a linear driving force in the second driving sub-direction through its linear displacement member 116, the linear displacement member 116 of the linear drive mechanism can be away from the transmission component. Since the linear displacement member 116 of the linear drive mechanism is in contact with the transmission component, the linear drive mechanism cannot provide the linear driving force in the second driving sub-direction to the transmission component through its linear displacement member 116. At this time, the return component can pull the driven member or another linear drive mechanism to move along the second guide sub-direction on the guide assembly.

[0066] like Figures 8-10 As shown, in one embodiment of the present invention, the transmission component may include a rotating member 211 and a rotating shaft 212. The rotating shaft 212 is fixedly arranged. The rotating member 211 is in contact with and cooperates with a linear drive mechanism, and is in contact with and cooperates with a member to be driven or another linear drive mechanism, and is arranged in cooperation with the rotating shaft 212. When a linear drive mechanism provides a linear driving force in the first driving sub-direction, the rotating member rotates with the rotating shaft 212 as the rotation center to transmit the linear transmission force to the member to be driven or another linear drive mechanism.

[0067] In actual application, when the linear drive mechanism provides a linear drive force in the first drive sub-direction through its linear displacement member 116, the linear displacement member 116 of the linear drive mechanism can be close to the rotating member 211 to provide a linear drive force in the first drive sub-direction to the rotating member 211 through the contact between the linear displacement member 116 and the rotating member 211. Under the action of the linear drive force, the rotating member 211 can be pushed to rotate with the rotating shaft 212 as the rotation center and approach the member to be driven or another linear drive mechanism, so as to transmit the power to the member to be driven or another linear drive mechanism through the contact between the rotating member 211 and the member to be driven or another linear drive mechanism, thereby pushing the member to be driven or another linear drive mechanism to move along the first guide sub-direction on the guide assembly.

[0068] like Figures 8-10As shown, in one embodiment of the present invention, the transmission component may also include a first rolling member 213 and a second rolling member 214, and the first rolling member 213 and the second rolling member 214 are respectively rotatably connected to the rotating member 211, and the rotating member 211 is in rolling contact with a linear drive mechanism through the first rolling member 213, and is in rolling contact with the driven member or another linear drive mechanism through the second rolling member 214.

[0069] In actual application, when the rotating member 211 is pushed by the linear displacement member 116 to rotate around the rotating shaft 212 as the rotation center and pushes the driven member or another linear driving mechanism, relative displacement will occur between the rotating member 211 and the linear displacement member 116, the driven member or another linear driving mechanism, resulting in friction. By setting the first rolling member 213 and the second rolling member 214 to be rotatably connected to the rotating member 211 respectively, and making the rotating member 211 roll in contact with the linear displacement member 116 through the first rolling member 213, and roll in contact with the to-be-driven member or another linear drive mechanism through the second rolling member 214, when relative displacement occurs between the rotating member 211 and the linear displacement member 116, the to-be-driven member or another linear drive mechanism, the first rolling member 213 can rotate relative to the rotating member 211 and roll in contact with the linear displacement member 116, the second rolling member 214 can rotate relative to the rotating member 211 and roll in contact with the to-be-driven member or another linear drive mechanism, thereby reducing the friction between the rotating member 211 and the linear displacement member 116, the to-be-driven member or another linear drive mechanism, thereby improving the service life of the rotating member 211, the linear displacement member 116, the to-be-driven member or another linear drive mechanism.

[0070] Optionally, the rotating member 211 may include a first fixed portion and a second fixed portion, the first fixed portion and the second fixed portion are spaced apart and connected to each other, the first rolling member 213 and the second rolling member 214 are arranged between the first fixed portion and the second fixed portion, and the rotating shaft 212 is arranged through the first fixed portion and the second fixed portion.

[0071] Optionally, the first rolling member 213 may include a first roller.

[0072] Optionally, the second rolling member 214 may include a second roller.

[0073] like Figure 8 and Figure 9As shown, in one embodiment of the present invention, the return component may include a first elastic component 221 and a second elastic component 222, the first elastic component 221 is respectively connected to the transmission component and a linear drive mechanism, the second elastic component 222 is connected to the transmission component, and is connected to the driven component or another linear drive mechanism, and the elastic deformation of the first elastic component 221 and the second elastic component 222 both meets the requirements of occurring when a linear drive mechanism provides a linear drive force in the first drive sub-direction, and recovering when a linear drive mechanism provides a linear drive force in the second drive sub-direction.

[0074] In actual application, when the linear drive mechanism provides a linear driving force in the first driving sub-direction through its linear displacement member 116, the rotating member 211 is pushed by the linear displacement member 116 to rotate with the rotating shaft 212 as the rotation center, and pushes the driven member or another linear drive mechanism, the relative displacement between the rotating member 211 and the linear displacement member 116 can cause the first elastic member 221 to undergo elastic deformation, and the relative displacement between the rotating member 211 and the driven member or another linear drive mechanism can cause the second elastic member 222 to undergo elastic deformation. When the linear drive mechanism provides a linear driving force in the second driving sub-direction through its linear displacement member 116, , the linear displacement member 116 can be away from the rotating member 211 and separated from the rotating member 211, so that the elastic deformation of the first elastic member 221 can be restored (i.e., rebound), and the elastic deformation restored by the first elastic member 221 can pull the rotating member 211 to rotate around the rotating shaft 212 as the rotation center to restore to its previous state, so that the rotating member 211 is away from the driven member or another linear driving mechanism and separated from the driven member or another linear driving mechanism, thereby allowing the elastic deformation of the second elastic member 222 to be restored, and the elastic deformation restored by the second elastic member 222 can pull the driven member or another linear driving mechanism to restore to its previous state.

[0075] Optionally, the first elastic member 221 may include a tension spring.

[0076] Optionally, the second elastic member 222 may include a tension spring.

[0077] By making the first elastic member 221 and the second elastic member 222 both include tension springs, the rotating member 211 and the linear displacement member 116 can be tightened with the help of the tension of the tension springs, and the rotating member 211 and the member to be driven or another linear drive mechanism can be tightened, so that the rotating member 211 and the linear displacement member 116 are in close contact, and the rotating member 211 and the member to be driven or another linear drive mechanism are in close contact, that is, the first rolling member 213 and the linear displacement member 116 are in close contact, and the second rolling member 214 and the member to be driven or another linear drive mechanism are in close contact.

[0078] like Figure 5 、 Figure 12and Figure 13 As shown, in one embodiment of the present invention, the return component may include a third elastic member 223, which is connected to a linear drive mechanism and to a driven member or another linear drive mechanism. The elastic deformation of the third elastic member 223 occurs when a linear drive mechanism provides a linear drive force in a first drive sub-direction, and recovers when a linear drive mechanism provides a linear drive force in a second drive sub-direction.

[0079] In actual application, when the driven member or another linear driving mechanism moves in the direction of the first guide sub-member, a relative displacement will be generated between the driven member or another linear driving mechanism and the linear driving mechanism of the driving rotating member 211. The relative displacement can cause the third elastic member 223 to undergo elastic deformation. When the driven member or another linear driving mechanism moves in the direction of the second guide sub-member, the elastic deformation of the third elastic member 223 can be restored. The restored elastic deformation of the third elastic member 223 can pull the linear driving mechanism of the driving rotating member 211, the driven member or another linear driving mechanism to restore to their previous state.

[0080] Optionally, the third elastic member 223 may include a tension spring.

[0081] like Figure 5 、 Figure 12 and Figure 13 As shown, in one embodiment of the present invention, the number of third elastic members 223 can be multiple, the extension direction of the third elastic member 223 is the same as the relative movement direction of a linear drive mechanism, a member to be driven or another linear drive mechanism, and multiple third elastic members 223 are spaced apart in a direction perpendicular to the extension direction of the third elastic member 223.

[0082] Such a design can improve the stability of the linear drive mechanism driving the rotating member 211, the driven member or another linear drive mechanism in recovering to the previous state.

[0083] like Figure 1-Figure 5 and Figure 11-13 As shown, in one embodiment of the present invention, the guide assembly may include a guide part 231 and a mating part 232. The guide assembly is mated with the driven part or another linear drive mechanism through the mating part 232. The mating part 232 is mated with the guide part 231 and can move in the guide direction of the guide assembly. The transmission part is mated with the driven part or another linear drive mechanism by mating with the mating part 232.

[0084] In actual application, the transmission component can push the mating component 232 to make the mating component 232 move in the first guide sub-direction relative to the guide component 231 on the guide component 231, thereby driving the driven part or another linear drive mechanism to move in the first guide sub-direction through the mating component 232.

[0085] like Figure 8 、 Figure 12 and Figure 13 As shown, in one embodiment of the present invention, the second elastic member 222 and the third elastic member 223 can be connected to the driven member or another linear drive mechanism by being connected to the matching component 232 .

[0086] In actual application, the second elastic member 222 and the third elastic member 223 can both pull the mating member 232 to move the mating member 232 in the second guide sub-direction relative to the guide member 231 on the guide member 231, thereby driving the driven member or another linear drive mechanism to move in the second guide sub-direction through the mating member 232.

[0087] In one embodiment of the present invention, the guide component 231 may include a first guide component and a second guide component, and the guide assembly may also include a fixed component 233, the fixed component 233 is arranged opposite to the matching component 232, the first guide component is connected to the fixed component 233, the second guide component is connected to the matching component 232, the first guide component and the second guide component are arranged in coordination, and the first guide component and the second guide component can move relative to each other in the guide direction.

[0088] In actual application, when the transmission component pushes the matching component 232, the matching component 232 can be transmitted to the second guide component, so that the second guide component moves in the first guide sub-direction relative to the first guide component, thereby causing the matching component 232 to move in the first guide sub-direction. When the second elastic component 222 and the third elastic component 223 pull the matching component 232, the matching component 232 can be transmitted to the second guide component, so that the second guide component moves in the second guide sub-direction relative to the first guide, thereby causing the matching component 232 to move in the second guide sub-direction.

[0089] Optionally, the fixing component 233 and the matching component 232 may both be plate-shaped, and the first guide member and the second guide member may be disposed between the fixing component 233 and the matching component 232 .

[0090] Optionally, the guide member 231 may include a cross roller guide.

[0091] like Figure 1-Figure 5 As shown, optionally, the linear drive mechanism can be connected to the fixing component 233 or the matching component 232.

[0092] like Figure 3 、 Figure 4 、 Figure 5 and Figure 8 As shown, optionally, the linear drive mechanism may also include a rotary drive source 111, a rotary transmission member 112, a connecting member 113, a linear guide member 114 and a support member 115, the output shaft of the rotary drive source 111 is connected to the rotary transmission member 112 through the connecting member 113, the rotary transmission member 112 and the support member 115 are rotatably connected, and the rotary transmission member 112 is provided with an external thread, the linear displacement member 116 is provided with an internal thread, the linear displacement member 116 and the rotary transmission member 112 are matched through the external thread and the internal thread, the linear guide member 114 is connected to the fixed part 233 or the matching part 232, the support member 115 is fixedly connected to the linear guide 114, and the linear displacement member 116 and the linear guide 114 are linearly displaceable.

[0093] In actual application, the rotary driving source 111 provides a rotary driving force through the output shaft to drive the rotary transmission member 112 to rotate. The rotary transmission member 112 transmits the rotary driving force to the linear displacement member 116 through the cooperation of the external thread and the internal thread. Since the linear displacement member 116 and the linear guide member 114 are linearly displaced, under the action of the rotary driving force transmitted by the rotary transmission member 112, the linear displacement member 116 can be linearly displaced relative to the linear guide member 114 on the linear guide member 114.

[0094] Optionally, the rotation driving source 111 may include a rotary motor.

[0095] Optionally, the connection member 113 may include a coupling.

[0096] Optionally, the rotation transmission member 112 may include a lead screw.

[0097] Alternatively, the linear guide 114 may include a linear rail.

[0098] Optionally, the linear guide 114 may include a nut holder.

[0099] like Figure 12 As shown, optionally, the third elastic member 223 can be connected to at least one linear drive mechanism by being connected to the fixing component 233 .

[0100] Optionally, the third elastic member 223 may be disposed between the fixing component 233 and the matching component 232 .

[0101] like Figures 8-10As shown, optionally, the transmission component may also include a fixed bracket 241, the fixed bracket 241 includes a connecting portion and a fixing portion, the connecting portion is connected to the fixing component 233 or the matching component 232, the fixing portion is connected to the connecting portion and is opposite to the fixing component 233 or the matching component 232, and the rotating shaft 212 is arranged between the fixing portion and the fixing component 233 or the matching component 232, and is fixedly connected to the fixing portion and connected to the fixing component 233 or the matching component 232.

[0102] like Figure 1 and Figure 2 As shown, an embodiment of the present invention further provides a positioning device, including a position acquisition component 100 and a driving device as provided in an embodiment of the present invention. The position acquisition component 100 serves as a driven component, and the driving device is connected to the position acquisition component 100 for driving the position acquisition component 100 to move.

[0103] The positioning device provided by the embodiment of the present invention drives the position acquisition component 100 to move with the help of the driving device provided by the embodiment of the present invention, which can improve the design flexibility of the positioning device, so as to reduce the space occupied by the positioning device, so that the positioning device can be set under the workbench 200, thereby shortening the driving stroke of the positioning device, and further improving the stability of the positioning device, and can improve the positioning efficiency and reduce the cost of the positioning device.

[0104] Optionally, the position acquisition component 100 may include an image acquisition component that can acquire an image of the position marker 600 , thereby obtaining the position of the position marker 600 through the image of the position marker 600 .

[0105] Optionally, the image acquisition component may include a CCD (Charge Coupled Device) camera.

[0106] like Figure 6 and Figure 7 As shown, an embodiment of the present invention further provides a semiconductor process equipment, including a workbench 200 and an alignment device as provided in an embodiment of the present invention, wherein the alignment device is arranged below the workbench 200 and is used to align the parts to be aligned above the workbench 200.

[0107] The semiconductor process equipment provided by the embodiment of the present invention can shorten the driving stroke of the alignment device by arranging the alignment device provided by the embodiment of the present invention below the workbench 200, and thereby improve the stability of the alignment device, improve the alignment efficiency, and reduce the cost of the semiconductor process equipment.

[0108] Optionally, the workbench 200 can be used to carry the pattern substrate 500 or the workpiece to be cured 400 in the liquid crystal display curing process.

[0109] like Figure 6 As shown, optionally, the semiconductor process equipment may further include an ultraviolet light source 300 , which is disposed above the workbench 200 and is used to emit ultraviolet light.

[0110] To sum up, the driving device, positioning device and semiconductor process equipment provided by the embodiments of the present invention can improve the design flexibility of the positioning device, so as to reduce the space occupied by the positioning device, enable the positioning device to be set under the workbench 200, thereby shortening the driving stroke of the positioning device, and further improving the stability of the positioning device, and can improve the positioning efficiency and reduce the cost of the positioning device.

[0111] It is understood that the above embodiments are merely exemplary embodiments for illustrating the principles of the present invention, and the present invention is not limited thereto. Those skilled in the art will be able to make various modifications and improvements without departing from the spirit and substance of the present invention, and such modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A driving device, applied to semiconductor process equipment, characterized in that: It includes a linear drive mechanism and a direction-changing transmission structure, wherein the linear drive mechanism is used to provide a linear driving force and is connected to the driven member through the direction-changing transmission structure; The direction-changing transmission structure is used to convert the linear driving force into a linear transmission force with a direction different from that of the linear driving force, and transmit the linear transmission force to the driven member.

2. The driving device according to claim 1, characterized in that There are multiple linear drive mechanisms, which are sequentially connected to the driven member in the power transmission direction; The direction-changing transmission structure is provided between the driven member and the linear drive mechanism connected thereto; and / or the direction-changing transmission structure is provided between at least one of all two adjacent linear drive mechanisms.

3. The driving device according to claim 2, characterized in that The directions of the linear driving forces provided by at least two of the linear driving mechanisms are parallel.

4. The driving device according to claim 3, characterized in that The directions of the linear driving forces provided by at least three of the linear driving mechanisms are parallel, and the directions of the linear driving forces provided by the at least three parallel linear driving mechanisms are spaced apart in a circumferential direction.

5. The driving device according to claim 2, characterized in that The number of the linear drive mechanisms is at least three, and the directions of the linear drive force and the linear transmission force include a first direction, a second direction, and a third direction that are perpendicular to each other.

6. The driving device according to claim 2, characterized in that The direction-changing transmission structure includes a transmission assembly and a guide assembly. The transmission assembly is provided in cooperation with one of the linear drive mechanisms and is provided in cooperation with the driven member or the other linear drive mechanism, and is used to convert the linear driving force provided by one of the linear drive mechanisms into the linear transmission force and transmit it to the driven member or the other linear drive mechanism. The guide assembly is arranged in cooperation with the driven member or another linear drive mechanism, and the guide direction of the guide assembly serves as the direction of the linear transmission force, so as to enable the driven member or another linear drive mechanism to move along the guide direction on the guide assembly under the action of the linear transmission force.

7. The driving device according to claim 6, characterized in that The transmission assembly includes a transmission component and a return component. The direction of the linear driving force provided by one of the linear driving mechanisms includes a first driving sub-direction and a second driving sub-direction in opposite directions. The guide direction includes a first guide sub-direction and a second guide sub-direction in opposite directions. The transmission component contacts and cooperates with one of the linear driving mechanisms and contacts and cooperates with the driven member or the other linear driving mechanism, and is used to transmit the linear driving force in the first driving sub-direction provided by one of the linear driving mechanisms to the driven member or the other linear driving mechanism, thereby driving the driven member or the other linear driving mechanism to move along the first guide sub-direction on the guide assembly. The return component is connected to one of the linear drive mechanisms and to the driven member or another of the linear drive mechanisms, and is used to drive the driven member or another of the linear drive mechanisms to move along the second guide sub-direction on the guide assembly when one of the linear drive mechanisms provides a linear driving force in the second guide sub-direction.

8. The driving device according to claim 7, characterized in that The transmission component includes a rotating member and a rotating shaft, and the rotating shaft is fixedly arranged. The rotating member contacts and cooperates with one of the linear drive mechanisms and contacts and cooperates with the driven member or another of the linear drive mechanisms, and is arranged in cooperation with the rotating shaft. When one of the linear drive mechanisms provides the linear driving force in the first driving sub-direction, the rotating member rotates with the rotating shaft as the rotation center to transmit the linear transmission force to the driven member or the other of the linear drive mechanisms.

9. The driving device according to claim 8, characterized in that The transmission component also includes a first rolling member and a second rolling member, which are rotatably connected to the rotating member respectively. The rotating member is in rolling contact with one of the linear drive mechanisms through the first rolling member, and is in rolling contact with the driven member or another linear drive mechanism through the second rolling member.

10. The driving device according to claim 7, characterized in that The return component includes a first elastic member and a second elastic member, the first elastic member is connected to the transmission component and one of the linear drive mechanisms, respectively, the second elastic member is connected to the transmission component and is connected to the driven member or another linear drive mechanism, and the elastic deformation of the first elastic member and the second elastic member both meet the requirements of occurring when one of the linear drive mechanisms provides a linear drive force in the first drive sub-direction, and recovering when one of the linear drive mechanisms provides a linear drive force in the second drive sub-direction; Alternatively, the return component includes a third elastic member, which is connected to one of the linear drive mechanisms and to the driven member or another of the linear drive mechanisms. The elastic deformation of the third elastic member occurs when one of the linear drive mechanisms provides a linear driving force in the direction of the first drive sub-drive, and recovers when one of the linear drive mechanisms provides a linear driving force in the direction of the second drive sub-drive.

11. The driving device according to claim 10, characterized in that: There are multiple third elastic members, and the extension direction of the third elastic members is the same as the relative movement direction of one of the linear drive mechanisms, the member to be driven or another linear drive mechanism. The multiple third elastic members are spaced apart in a direction perpendicular to the extension direction of the third elastic members.

12. The driving device according to claim 10, characterized in that The guide assembly includes a guide part and a mating part. The guide assembly is mated with the driven part or another linear drive mechanism through the mating part. The mating part is mated with the guide part and can move along the guide direction on the guide assembly. The transmission assembly is mated with the driven part or another linear drive mechanism by mating with the mating part.

13. The driving device according to claim 12, characterized in that The second elastic member and the third elastic member are both connected to the member to be driven or another linear drive mechanism by being connected to the matching component.

14. The driving device according to claim 12, characterized in that The guide component includes a first guide component and a second guide component, and the guide assembly also includes a fixed component, the fixed component is arranged opposite to the matching component, the first guide component is connected to the fixed component, the second guide component is connected to the matching component, the first guide component and the second guide component are arranged in coordination, and the first guide component and the second guide component can move relative to each other in the guide direction.

15. A positioning device, characterized in that: It comprises a position acquisition component and a driving device according to any one of claims 1 to 14, wherein the position acquisition component serves as the driven component, and the driving device is connected to the position acquisition component for driving the position acquisition component to move.

16. A semiconductor process equipment, characterized in that: It comprises a workbench and the alignment device as claimed in claim 15, wherein the alignment device is arranged below the workbench and is used to align the parts to be aligned above the workbench.

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