Fixing device and atomic layer deposition equipment

Abstract

The utility model provides a fixing device and atomic layer deposition equipment, and the fixing device comprises a bottom supporting assembly which is arranged at the head end of an outer cavity and is used for supporting the bottom of the head end of an inner cavity; the opposite-pulling assembly comprises two tensioning sets arranged on the two sides of the head end of the inner cavity respectively, each tensioning set comprises a small pulling and fixing set, a fixing block arranged in the inner cavity and a fixing base arranged in the outer cavity, the fixing bases and the fixing blocks are opposite and have a first gap, and the small pulling and fixing sets are connected with the fixing blocks and / or the fixing bases and apply pulling force in the direction from inside to outside to the fixing blocks; the limiting assembly is arranged on the inner top wall of the outer cavity, and a second gap is formed between the limiting assembly and the top of the head end of the inner cavity; the tail end supporting assembly is arranged at the tail end of the outer cavity, the tail end supporting assembly is provided with a supporting face, and the tail end of the inner cavity can slide along the supporting face. According to the fixing device, the position deviation of the inner cavity can be avoided.

Description

Technical Field

[0001] The present application belongs to the technical field of atomic layer deposition, and more specifically, relates to a fixing device and an atomic layer deposition device. Background Art

[0002] Photovoltaic atomic layer deposition equipment usually adopts a double-layer structure design of inner cavity and outer cavity. A heating plate is provided between the inner cavity and the outer cavity to heat the inner cavity, and a cooling pipe is provided outside the outer cavity to cool it down.

[0003] The inner cavity and the outer cavity are connected and fixed, but due to the large expansion coefficient of the cavity material, the inner cavity expands after being heated, while the outer cavity remains at room temperature under the action of cooling water. Under the temperature difference between the two, the connection structure between the inner cavity and the outer cavity cannot absorb the change in expansion coefficient, resulting in failure of cavity fixation and position deviation. Utility Model Content

[0004] An embodiment of the present application provides a fixing device that can prevent the position of the inner cavity from shifting.

[0005] The technical solution adopted in the embodiment of the present application is to provide a fixing device for fixing the inner cavity to the outer cavity, comprising:

[0006] A bottom support assembly, provided at the head end of the outer cavity, for supporting the bottom of the head end of the inner cavity;

[0007] The tensioning assembly comprises two tensioning groups respectively provided on both sides of the head end of the inner cavity, the tensioning group comprising a tightening group, a fixing block provided on the inner cavity, and a fixing seat provided on the outer cavity, the fixing seat and the fixing block being opposite to each other and having a first gap, the tightening group being connected to the fixing block and / or the fixing seat, and applying a pulling force from the inside to the outside to the fixing block;

[0008] a limiting assembly, disposed on the inner top wall of the outer cavity, and having a second gap between it and the top of the head end of the inner cavity, wherein the inner cavity can reduce the second gap after thermal expansion until it abuts against the limiting assembly;

[0009] a tail end support assembly, provided at the tail end of the outer cavity, the tail end support assembly having a support surface parallel to the axis of the outer cavity, the tail end of the inner cavity abutting against the support surface and being able to slide along the support surface;

[0010] The telescopic tube has one end connected to the tail end of the inner cavity and the other end fixedly penetrated through the outer cavity.

[0011] Furthermore, the bottom support assembly includes an outer cavity support seat and an inner cavity support block, the outer cavity support seat is arranged on the inner bottom wall of the outer cavity body, the inner cavity support block is arranged on the outer bottom wall of the inner cavity body, and the inner cavity support block is supported by the outer cavity support seat.

[0012] Furthermore, the bottom support assembly also includes a support adjustment member, which is passed through the outer cavity support seat and abuts against the bottom of the inner cavity support block. The length of the support adjustment member passing through the outer cavity support seat is adjustable.

[0013] Furthermore, the outer cavity support seat is provided in a first positioning groove into which the inner cavity support block can be inserted.

[0014] Furthermore, the tightening group includes a fastening element and a fastening fitting, the fastening element is movably inserted into the fixing seat and one end is connected to the fixing block, the fastening fitting cooperates and fastens with the fastening element on the side of the fixing seat away from the fixing block, and the fastening fitting abuts the fixing seat.

[0015] Furthermore, the fixing seat is provided in a second positioning groove for inserting the fixing block, the second positioning groove is provided in a channel for the fastening element to pass through, and the first gap is located between the fixing block and the groove wall of the second positioning groove.

[0016] Furthermore, the limit assembly includes a limit adjustment member, an external cavity limit seat and an internal cavity limit block, the external cavity limit seat is arranged on the inner top wall of the external cavity body, the internal cavity limit block is arranged on the outer top wall of the internal cavity body, the limit adjustment member is passed through the external cavity limit seat, the second gap is located between the lower end of the limit adjustment member and the internal cavity limit, and the length of the limit adjustment member passing through the external cavity limit seat can be adjusted to adjust the size of the second gap.

[0017] Furthermore, the limiting assembly also includes a locking fitting, which is assembled on one end of the limiting adjustment member away from the inner cavity limiting block, and is used to fix the position of the limiting adjustment member on the outer cavity limiting seat.

[0018] Furthermore, the tail end support assembly includes multiple support plates and multiple support feet, the multiple support plates are arranged at intervals around the axis of the outer cavity, each of the support plates is provided with the support surface, and the multiple support feet are arranged at the tail end of the inner cavity and correspond one-to-one to each of the support plates, and the support feet have a bending portion that abuts against the support surface, and the bending portion can slide along the support surface.

[0019] An embodiment of the present application also provides an atomic layer deposition device, including the fixing device as described above.

[0020] The fixing device provided by the embodiments of the present application has the following beneficial effects: A bottom support assembly is provided in the fixing device of the embodiments of the present application. The head end of the inner cavity is supported only on the bottom support assembly, so that the volume change of the inner cavity due to thermal expansion does not affect the bottom support assembly. A tensioning assembly employs two tensioning groups for tensioning to fix the tension direction of the inner and outer cavities. In the tensioning groups, a first gap is defined between the fixing seat and the fixing block, which can accommodate the volume change during thermal expansion. A stopper assembly is located above the head end of the inner cavity, with a second gap defined between them. This second gap can accommodate the volume change during thermal expansion, and the inner cavity is fixed only when it abuts the stopper assembly after thermal expansion. A tail support assembly is supported on the support surface of the tail support assembly. Due to the tensioning of the head end by the tensioning assembly, the tail end cannot deform forward. The inner cavity can only expand backward along its axis. During expansion, the tail end of the inner cavity can slide along the support surface to accommodate the volume change. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the embodiments or descriptions of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0022] Figure 1 A schematic diagram of the three-dimensional structure of the connecting inner cavity and outer cavity of the fixing device provided in an embodiment of the present application;

[0023] Figure 2 A vertical cross-sectional view of the fixing device provided in an embodiment of the present application when connecting the inner cavity and the outer cavity;

[0024] Figure 3 for Figure 2 Magnified view at point A in the middle;

[0025] Figure 4 for Figure 2 Magnified view at point B in the middle;

[0026] Figure 5 A transverse cross-sectional view of the fixing device provided in an embodiment of the present application when connecting the inner cavity and the outer cavity;

[0027] Figure 6 for Figure 5 Enlarged view at center C;

[0028] Figure 7 A schematic diagram of the tail end support assembly provided in an embodiment of the present application.

[0029] Among them, the reference numerals in the figures are:

[0030] 10. Bottom support assembly; 11. Outer cavity support seat; 111. First straight portion; 112. First vertical portion; 113. Support portion; 1131. First positioning groove; 12. Inner cavity support block; 13. Support adjustment member;

[0031] 20. Tensioning assembly; 21. Tensioning group; 211. Tensioning group; 2111. Fastening element; 2112. Fastening fitting; 212. Fixing block; 213. Fixing seat; 2131. Second straight portion; 2132. Second vertical portion; 2133. Positioning portion; 2134. Hole; 2135. Second positioning groove; 214. First gap;

[0032] 30. Limiting assembly; 31. Limiting adjustment member; 32. External cavity limiting seat; 33. Internal cavity limiting block; 34. Locking fitting; 35. Second gap;

[0033] 40. Tail end support assembly; 41. Support plate; 411. Support surface; 42. Support foot; 421. Bending portion;

[0034] 50. Telescopic tube;

[0035] 60, inner cavity;

[0036] 70. External cavity. DETAILED DESCRIPTION

[0037] In order to make the technical problems, technical solutions and beneficial effects to be solved by this application more clearly understood, this application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this application and are not intended to limit this application.

[0038] It should be noted that when an element is referred to as being “fixed on” or “disposed on” another element, it may be directly on the other element or indirectly on the other element. When an element is referred to as being “connected to” another element, it may be directly connected to the other element or indirectly connected to the other element.

[0039] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0040] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. Throughout the description of this application, "plurality" means two or more, unless otherwise specifically defined.

[0041] See also Figure 1 The fixing device provided in the embodiment of the present application is now described. The fixing device provided in the embodiment of the present application is used to fix the inner cavity 60 to the outer cavity 70.

[0042] Among them, reference Figure 1 The inner cavity 60 needs to be fixed in the outer cavity 70. It is understood that the outer cavity 70 is larger than the inner cavity 60. After the inner cavity 60 is installed in the outer cavity 70, a gap is formed between the outer surface of the inner cavity 60 and the inner surface of the outer cavity 70. This gap can be used to install other structures, such as a heating plate. The fixing device provided in the embodiment of the present application is installed in this gap to connect and fix the inner cavity 60 and the outer cavity 70.

[0043] Among them, reference Figure 1 and Figure 2 The fixing device provided in the embodiment of the present application includes a bottom support assembly 10, a tension assembly 20, a limit assembly 30 and a tail end support assembly 40.

[0044] Reference Figure 2 and Figure 3 The bottom support assembly 10 is provided at the head end of the outer cavity 70, and is used to support the bottom of the head end of the inner cavity 60. The bottom support assembly 10 is specifically provided by being fixed to the head end of the outer cavity 70, and can be fixed by screws or welding. In terms of the support method, the bottom support assembly 10 can directly support the inner cavity 60, or it can be indirectly supported, for example, by fixing a pad at the bottom of the inner cavity 60, and then the pad is pressed on the bottom support assembly 10. Among them, the head end of the inner cavity 60 can specifically be an inner cavity flange.

[0045] Reference Figure 5 and Figure 6 The tensioning assembly 20 includes two tensioning groups 21 respectively arranged on both sides of the head end of the inner cavity 60. The tensioning group 21 includes a tensioning group 211, a fixed block 212 arranged on the inner cavity 60 and a fixed seat 213 arranged on the outer cavity 70. The fixed seat 213 and the fixed block 212 are opposite to each other and have a first gap 214. The tensioning group 211 is connected to the fixed block 212 and / or the fixed seat 213, and applies a pulling force from the inside to the outside to the fixed block 212.

[0046] In the tensioning group 21, the fixed block 212 can be fixed to the inner cavity 60 by screws or welding, and the fixed seat 213 is correspondingly fixed to the inner wall of the outer cavity 70. The fixed block 212 and the fixed seat 213 are arranged opposite to each other, with a first gap 214 between them. The tightening group 211 pulls the fixed block 212 toward the fixed seat 213. It can be understood that one end of the tightening group 211 is connected to the fixed block 212, and the other end can be connected to the fixed seat 213 or the outer cavity 70. Since the two tensioning groups 21 pull on both sides of the inner cavity 60 respectively, the two pulling forces are opposite at this time. For example, if one tensioning group 21 is located on the left side of the inner cavity 60, its pulling force is to the left. If the other tensioning group 21 is located on the right side of the inner cavity 60, its pulling force is to the right. The two pulling forces on the left and right achieve opposite pulling, thereby fixing the inner cavity 60.

[0047] When the inner cavity 60 expands due to heat, the first gap 214 accommodates this volume change. Simultaneously, as the left and right side panels of the inner cavity 60 expand and move, the tension applied by the tensioning group 211 can be reduced without breaking the inner cavity 60, as the tension applied to the sides of the inner cavity 60 is in the same direction as the left and right expansion. Furthermore, when the inner cavity 60 expands due to heat, the front end is held in place by the tensioning assembly 20, preventing it from deforming forward. The inner cavity flange is mounted at the front end and does not move with it, thus preventing front-end process gas leakage caused by flange movement.

[0048] Reference Figure 2 and Figure 4 The limiting component 30 is provided on the inner top wall of the outer cavity 70, and has a second gap 35 between it and the top of the head end of the inner cavity 60. The inner cavity 60 can reduce the second gap 35 after thermal expansion until it abuts the limiting component 30. The function of the limiting component 30 is to limit and fix the inner cavity 60 after expansion. It can be understood that when there is no thermal expansion, there is a gap between the top of the head end of the inner cavity 60 and the inner top wall of the outer cavity 70. The second gap 35 is calculated based on the coefficient of thermal expansion of the material of the inner cavity 60. After thermal expansion, the inner cavity 60 expands upward to eliminate the second gap 35 and abuts the limiting component 30.

[0049] Reference Figure 2 and Figure 7 The tail end support assembly 40 is located at the tail end of the outer cavity 70. The tail end support assembly 40 has a support surface 411 parallel to the axis of the outer cavity 70. The tail end of the inner cavity 60 abuts against the support surface 411 and can slide along the support surface 411. When the inner cavity 60 expands due to heat, because the head end is tightened and fixed by the tension assembly 20 and cannot deform forward, the inner cavity 60 can only expand backward along the axis. During this process, the tail end of the inner cavity 60 can slide along the support surface 411, thereby adapting to the change in volume.

[0050] Furthermore, there can be multiple support surfaces 411, arranged around the axis. This design allows for support of the rear end of the inner cavity 60 from multiple directions, providing more stable support. Furthermore, because these support surfaces 411 are all parallel to the axis, they do not hinder the rearward sliding of the rear end of the inner cavity 60 after expansion, ensuring smooth movement of the inner cavity 60 during expansion.

[0051] In summary, the fixing device can effectively fix the inner cavity 60 to the outer cavity 70 through the coordinated action of various components, and adapt to the volume change of the inner cavity 60 when it expands due to heat, thereby ensuring the stability, safety and reliability of the device.

[0052] Reference Figure 2 The fixing device also includes a telescopic tube 50, one end of which is connected to the rear end of the inner cavity 60 and the other end is fixedly inserted into the outer cavity 70. When the rear end of the inner cavity 60 expands and moves backward, the telescopic tube 50 can adapt to this movement, ensuring smooth ventilation between the rear end and the outer cavity 70 while preventing exhaust gas leakage. The telescopic tube 50 can specifically be a metal bellows.

[0053] Further, refer to Figure 3 The bottom support assembly 10 includes an outer cavity support seat 11 and an inner cavity support block 12. The outer cavity support seat 11 is arranged on the inner bottom wall of the outer cavity body 70, and the inner cavity support block 12 is arranged on the outer bottom wall of the inner cavity body 60. The inner cavity support block 12 is supported on the outer cavity support seat 11.

[0054] The outer cavity support seat 11 is provided on the inner bottom wall of the outer cavity body 70 and may be in the form of a raised or flat plate structure to adapt to the outer bottom wall of the inner cavity body 60. The outer cavity support seat 11 is fixedly connected to the inner bottom wall of the outer cavity body 70, which may be achieved by welding, bolt connection or other fixing methods. The inner cavity support block 12 is provided on the outer bottom wall of the inner cavity body 60 and may be designed to have a shape that matches the outer cavity support seat 11, such as a groove or a raised shape, so as to properly cooperate with the outer cavity support seat 11. The inner cavity support block 12 is also fixedly connected to the outer bottom wall of the inner cavity body 60 to ensure structural stability.

[0055] The inner cavity body 60 is firmly supported inside the outer cavity body 70 by the outer cavity support seat 11 and the inner cavity support block 12. The outer cavity support seat 11 and the inner cavity support block 12 work together as the positioning basis for the bottom of the inner cavity body 60, so that when the inner cavity body 60 expands due to heat, the bottom reference of the inner cavity body 60 remains unchanged and will not expand downward.

[0056] Further, refer to Figure 3The bottom support assembly 10 further includes a support adjustment member 13, which extends through the outer cavity support seat 11 and abuts the bottom of the inner cavity support block 12. The length of the support adjustment member 13 extending beyond the outer cavity support seat 11 is adjustable. The main function of the support adjustment member 13 is to adjust the height of the inner cavity 60 within the outer cavity 70 to meet different usage requirements and ensure the stability of the device.

[0057] Specifically, the support adjustment member 13 can be a screw threadedly connected to the outer cavity support base 11. By rotating the screw, the height of its upward extension from the outer cavity support base 11 can be changed. When the screw's upward extension length increases, it pushes the inner cavity support block 12 upward, thereby raising the height of the inner cavity 60 within the outer cavity 70. Conversely, when the screw's upward extension length decreases, the height of the inner cavity 60 within the outer cavity 70 decreases.

[0058] To ensure height stability after adjustment, a nut is also provided on the support adjustment member 13. After adjusting the height of the screw, the nut is tightened onto the screw, ensuring close contact with the outer chamber support seat 11, thereby locking the screw and preventing it from loosening during use. This ensures the stability of the inner chamber 60 during use and prevents the height position of the inner chamber 60 from changing due to loose screws.

[0059] Further, refer to Figure 3 The outer cavity support seat 11 is provided with a first positioning groove 1131 for inserting the inner cavity support block 12. The shape and size of the first positioning groove 1131 match the inner cavity support block 12, so that the inner cavity support block 12 can be accurately inserted therein.

[0060] Through the first positioning groove 1131, the position of the inner cavity support block 12 in the outer cavity 70 can be accurately positioned and fixed. Since the inner cavity support block 12 is fixedly connected to the head end of the inner cavity 60, when the inner cavity support block 12 is stably positioned and fixed in the first positioning groove 1131, the head end of the inner cavity 60 is also fixed. In this case, when the inner cavity 60 expands due to heat, since its head end is fixed, it cannot expand forward and can only expand backward. Such a design plays an important role. Because the head end of the inner cavity 60 is usually connected to the process gas pipeline, when the position of the inner cavity 60 is stable and can only expand backward, it will not affect the process gas pipeline connected to the head end, thereby avoiding deformation or displacement of the process gas pipeline due to the expansion of the inner cavity 60, thereby effectively preventing the leakage of process gas and improving the safety and reliability of the entire device.

[0061] In one embodiment, referring to Figure 3The outer cavity support base 11 comprises a first flat portion 111, a first vertical portion 112 vertically connected to one end of the first flat portion 111, and a support portion 113 fixed on the first vertical portion 112, the support portion 113 partially extends above the first flat portion 111, and a first positioning groove 1131 is formed on the upper end surface of the support portion 113. The first flat portion 111 is fixedly connected to the bottom inner wall of the outer cavity 70 by screws, and the inner cavity support block 12 is fixedly connected to the bottom outer wall of the inner cavity 60 by screws. A through threaded hole is formed on the groove bottom wall of the first positioning groove 1131, the support adjusting part 13 is a screw, which is threaded on the threaded hole, the upper end of the support adjusting part 13 extends into the first positioning groove 1131 and abuts against the bottom surface of the inner cavity support block 12, and the bottom surface of the inner cavity support block 12 is a plane. Since the bottom surface of the inner cavity support block 12 is a plane, it can stably contact the upper end of the support adjusting part 13, and by rotating the support adjusting part 13, the extension length of the support adjusting part 13 on the outer cavity support base 11 can be adjusted, thereby adjusting the height of the inner cavity support block 12. A locking nut is sleeved on the screw below the support portion 113.

[0062] Further, referring to Figure 5 and Figure 6 The pull-fixing group 211 comprises a fastening element 2111 and a fastening matching part 2112, the fastening element 2111 is movably threaded on the fixing seat 213 and one end is connected to the fixing block 212, the fastening matching part 2112 is fastened with the fastening element 2111 on the side of the fixing seat 213 away from the fixing block 212, and the fastening matching part 2112 abuts against the fixing seat 213.

[0063] The fastening element 2111 is movably threaded on the fixing seat 213, which means that the connection between the fastening element 2111 and the fixing seat 213 is not completely fixed, but allows a certain degree of relative movement, for example, the fixing seat 213 is provided with a hole 2134, and the fastening element 2111 is threaded on the hole 2134. One end of the fastening element 2111 is connected to the fixing block 212 in a firm manner, and this connection can be achieved by welding, threaded connection or other reliable connection methods, which ensures that the fastening element 2111 can effectively transmit force to the fixing block 212 under the action of tension. When the other end of the fastening element 2111 passes through the fixing seat 213, the fastening matching part 2112 is fastened with the fastening element 2111 on the side of the fixing seat 213 away from the fixing block 212. The fastening matching part 2112 tightly abuts against the fixing seat 213, which is generated by cooperation with the fastening element 2111, so as to pull the fixing block 212 towards the fixing seat 213. The pull-fixing group 211 of the other pull-tightening group 21 also generates tension, and the directions of the two tensions are opposite, so as to fix the inner cavity 60.

[0064] Specifically, the fastening element 2111 can be a screw made of high-quality steel. One end of the screw is connected and fixed to the fixing block 212, and the other end passes through the channel 2134 on the fixing seat 213. The size and shape of this channel 2134 match the fastening element 2111, allowing the fastening element 2111 to move within a certain range while ensuring that it will not shake or loosen excessively under normal working conditions. The fastening fitting 2112 is usually a nut. The nut and the screw fit tightly. By rotating the nut, the pressure on the fixing seat 213 can be gradually increased, thereby generating a strong pulling force to achieve stable fixation of the inner cavity 60 and the outer cavity 70.

[0065] When the inner cavity 60 expands due to heat, its expansion direction is the same as the direction of the tension generated by the tightening group 211. In this case, the fastening element 2111 will move in the direction of the tension as the inner cavity 60 expands, thereby reducing the first gap 214. Since the fastening element 2111 and the fixing seat 213 are movably arranged, the fastening element 2111 can be relatively displaced with the fixing seat 213 during the expansion process. This design is very clever because it prevents the fastening element 2111 from squeezing the fixing seat 213 when the inner cavity 60 expands. If the fastening element 2111 and the fixing seat 213 were completely fixed, then when the inner cavity 60 expands, the expansion force may generate huge pressure on the inner cavity 60 and the outer cavity 70, which may cause deformation or damage to the inner cavity 60 and the outer cavity 70. Through the movable penetration design, the fastening element 2111 can move with the expansion of the inner cavity 60, thereby adapting to the expansion of the inner cavity 60 and ensuring that the entire fixing device can maintain stable and reliable performance under different working conditions.

[0066] Further, refer to Figure 6 The fixing seat 213 is located in a second positioning slot 2135 for inserting the fixing block 212. The second positioning slot 2135 is located in a channel 2134 for the fastening element 2111 to pass through. The first gap 214 is located between the fixing block 212 and the wall of the second positioning slot 2135. The shape and size of the second positioning slot 2135 match the fixing block 212, ensuring that the fixing block 212 is accurately inserted therein. Once the fixing block 212 is inserted into the second positioning slot 2135, the mating relationship between the two effectively restricts the movement of the fixing block 212 in other directions, allowing it to move relative to the fixing seat 213 only in a direction parallel to the pulling force, thereby ensuring the stability and reliability of the tightening process.

[0067] The hole 2134 allows the fastening element 2111 to smoothly pass through the fixing seat 213 and connect with the fixing block 212. The fastening element 2111 is inserted into the hole 2134 in a manner that ensures that it can generate tension when needed and can also adapt to changes such as expansion and contraction of the inner cavity 60 to a certain extent.

[0068] There may be two fastening fittings 2112 , both mounted on the fastening element 2111 , and double locking is achieved by fitting the two fastening elements 2111 with the fastening element 2111 .

[0069] In one embodiment, referring to Figure 6 The fixing seat 213 includes a second straight portion 2131, a second vertical portion 2132 perpendicularly connected to one end of the second straight portion 2131, and a positioning portion 2133 fixed to the second vertical portion 2132. The positioning portion 2133 partially extends above the second straight portion 2131. The upper end surface of the positioning portion 2133 is provided with a second positioning slot 2135 for inserting the fixing block 212. The second straight portion 2131 is fixedly connected to the inner wall of the outer cavity 70 by screws, ensuring the stability of the fixing seat 213 in the outer cavity 70. The bottom wall of the second positioning slot 2135 is provided with a through hole 2134, which is used for the fastening element 2111 (such as a screw) to pass through. The hole 2134 on the fixing seat 213 matches the fastening element 2111, allowing the fastening element 2111 to be movably inserted therein to adapt to the expansion and contraction of the inner cavity 60. The fixing block 212 may be a block-shaped structure as a whole, with one side surface being a plane, for connecting and fixing with one end of a fastening element 2111 (such as a screw).

[0070] Further, refer to Figure 2 and Figure 4 The limit assembly 30 includes a limit adjustment member 31, an outer cavity limit seat 32 and an inner cavity limit block 33. The outer cavity limit seat 32 is arranged on the inner top wall of the outer cavity body 70, and the inner cavity limit block 33 is arranged on the outer top wall of the inner cavity body 60. The limit adjustment member 31 is passed through the outer cavity limit seat 32, and the second gap 35 is located between the lower end of the limit adjustment member 31 and the inner cavity limit. The length of the limit adjustment member 31 passing through the outer cavity limit seat 32 can be adjusted to adjust the size of the second gap 35.

[0071] The outer cavity limiting seat 32 is arranged on the inner top wall of the outer cavity body 70 and is usually fixed by welding, screw connection, etc. to ensure its stability on the outer cavity body 70.

[0072] The limit adjustment member 31 is disposed through the outer cavity limit seat 32. Its function is to adjust the size of the second gap 35 so that it matches the expansion value calculated based on the expansion coefficient of the material of the inner cavity 60. When the inner cavity 60 expands due to heat, the inner cavity limit block 33 just abuts the limit adjustment member 31, thereby improving the stability of the inner cavity 60. The second gap 35 allows the inner cavity 60 to have a certain amount of upward movement when it expands due to heat, but can still be restricted by the limit adjustment member 31. The limit adjustment member 31 can be a screw. The second gap 35 can be adjusted by adjusting the length of the screw extending downward so that the size of the second gap 35 meets the requirements. Correspondingly, the outer cavity limit seat 32 is provided with a screw hole that cooperates with the screw.

[0073] Further, refer to Figure 4 The position-limiting assembly 30 also includes a locking member 34, which is assembled on the end of the position-limiting adjustment member 31 away from the inner cavity limit block 33. The locking member 34 is used to secure the position of the position-limiting adjustment member 31 on the outer cavity limit seat 32. After the position-limiting adjustment member 31 adjusts the size of the second gap 35 to meet the desired size, the locking member 34 is used to lock and fix the size of the second gap 35. This effectively secures the position of the position-limiting adjustment member 31 on the outer cavity limit seat 32, preventing it from loosening due to vibration or other external forces during use, thereby ensuring that the size of the second gap 35 remains stable. Specifically, the locking member 34 can be a nut.

[0074] Further, refer to Figure 2 and Figure 7 The tail end support assembly 40 includes multiple support plates 41 and multiple support feet 42. The multiple support plates 41 are arranged at intervals around the axis of the outer cavity 70. Each support plate 41 is provided with a support surface 411. The multiple support feet 42 are arranged at the tail end of the inner cavity 60 and correspond one-to-one to each support plate 41. The support feet 42 have a bending portion 421 that abuts against the support surface 411, and the bending portion 421 can slide along the support surface 411.

[0075] Multiple support plates 41 are spaced apart around the axis of the outer chamber 70. This arrangement provides uniform support in multiple directions for the rear end of the inner chamber 60. Each support plate 41 is provided with a support surface 411, which provides a stable guide for the movement of the rear end of the inner chamber 60. The design of multiple support plates 41 makes the entire support system more stable, effectively bearing the weight and pressure of the inner chamber 60 in different operating conditions.

[0076] Reference Figure 7The support leg 42 has a bent portion 421 that abuts against the support surface 411. When the inner cavity 60 expands due to heat, it cannot expand forward because the front end is fixed and can only expand backward. At this time, the bent portion 421 of the support leg 42 at the rear end is tightly attached to the support surface 411 of the support plate 41 and can slide along the support surface 411. This sliding method can adapt to the expansion of the inner cavity 60, ensuring that the inner cavity 60 can maintain a stable position and posture during the expansion process.

[0077] The contact area between the bent portion 421 and the support surface 411 is a flat surface. This design increases the contact area, improving support stability and smooth sliding. Specifically, when there are four support plates 41, for a rectangular inner cavity 60, the four support plates 41 are respectively arranged at the four corners of the rear end. This arrangement provides balanced support for the inner cavity 60 in all four directions, ensuring that the expansion of the inner cavity 60 in any direction can be effectively guided and restricted.

[0078] An embodiment of the present application also provides an atomic layer deposition device, including the fixing device in any of the above embodiments.

[0079] Since the atomic layer deposition equipment of the embodiment of the present application includes the fixing device in any of the above embodiments, it has the beneficial effects brought by the fixing device in any of the above embodiments, which will not be described in detail here.

[0080] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present application should be included in the scope of protection of the present application.

Claims

1. A fixing device for fixing an inner cavity to an outer cavity, characterized in that: The fixing device comprises: A bottom support assembly, provided at the head end of the outer cavity, for supporting the bottom of the head end of the inner cavity; The tensioning assembly comprises two tensioning groups respectively provided on both sides of the head end of the inner cavity, the tensioning group comprising a tightening group, a fixing block provided on the inner cavity, and a fixing seat provided on the outer cavity, the fixing seat and the fixing block being opposite to each other and having a first gap, the tightening group being connected to the fixing block and / or the fixing seat, and applying a pulling force from the inside to the outside to the fixing block; a limiting assembly, disposed on the inner top wall of the outer cavity, and having a second gap between it and the top of the head end of the inner cavity, wherein the inner cavity can reduce the second gap after thermal expansion until it abuts against the limiting assembly; The tail end support assembly is arranged at the tail end of the outer cavity. The tail end support assembly has a support surface parallel to the axis of the outer cavity. The tail end of the inner cavity abuts against the support surface and can slide along the support surface.

2. The fixing device according to claim 1, characterized in that The bottom support assembly includes an outer cavity support seat and an inner cavity support block. The outer cavity support seat is arranged on the inner bottom wall of the outer cavity body, and the inner cavity support block is arranged on the outer bottom wall of the inner cavity body. The inner cavity support block is supported by the outer cavity support seat.

3. The fixing device according to claim 2, characterized in that The bottom support assembly further includes a support adjustment member, which is passed through the outer cavity support seat and abuts against the bottom of the inner cavity support block. The length of the support adjustment member passing through the outer cavity support seat is adjustable.

4. The fixing device according to claim 2, characterized in that The outer cavity support seat is arranged in a first positioning groove into which the inner cavity support block can be inserted.

5. The fixing device according to claim 1, characterized in that The tightening group includes a fastening element and a fastening fitting. The fastening element is movably inserted into the fixing seat and one end is connected to the fixing block. The fastening fitting cooperates with the fastening element on the side of the fixing seat away from the fixing block and is fastened. The fastening fitting abuts the fixing seat.

6. The fixing device according to claim 5, characterized in that The fixing seat is arranged in a second positioning groove for inserting the fixing block, the second positioning groove is arranged in a channel for the fastening element to pass through, and the first gap is located between the fixing block and the groove wall of the second positioning groove.

7. The fixing device according to claim 1, characterized in that The limit assembly includes a limit adjustment member, an outer cavity limit seat and an inner cavity limit block. The outer cavity limit seat is arranged on the inner top wall of the outer cavity body, and the inner cavity limit block is arranged on the outer top wall of the inner cavity body. The limit adjustment member is passed through the outer cavity limit seat, and the second gap is located between the lower end of the limit adjustment member and the inner cavity limit. The length of the limit adjustment member passing through the outer cavity limit seat can be adjusted to adjust the size of the second gap.

8. The fixing device according to claim 7, characterized in that The limiting assembly further includes a locking fitting, which is assembled on one end of the limiting adjustment member away from the inner cavity limiting block, and is used to fix the position of the limiting adjustment member on the outer cavity limiting seat.

9. The fixing device according to claim 1, characterized in that The tail end support assembly includes multiple support plates and multiple support feet. The multiple support plates are arranged at intervals around the axis of the outer cavity. Each of the support plates is provided with the support surface. The multiple support feet are arranged at the tail end of the inner cavity and correspond one-to-one to each of the support plates. The support feet have a bending portion that abuts against the support surface, and the bending portion can slide along the support surface.

10. An atomic layer deposition device, characterized in that: Comprising the fixing device according to any one of claims 1 to 9.

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