MOCVD coating equipment

Abstract

The utility model provides MOCVD (Metal Organic Chemical Vapor Deposition) coating equipment, belongs to the technical field of semiconductor processing, and solves the problem of poor coating quality of MOCVD coating equipment in the prior art. The device comprises a shell, a reaction cavity is formed in the shell, the reaction cavity is communicated with an air inlet pipe, and the air inlet pipe is used for conveying a precursor; the base station is arranged in the reaction cavity, and the base station is used for bearing a substrate; the heating assembly is arranged below the base table, and the heating assembly acts on the base table to conduct heating; the adjusting assembly comprises a top pressing piece and a force applying piece, the top pressing piece is arranged in the reaction cavity and connected with the base table, at least part of the force applying piece is located outside the reaction cavity, the force applying piece is connected with the top pressing piece, and the force applying piece has the moving freedom degree in the horizontal direction. The horizontal position of the base table can be adjusted by arranging the adjusting assembly, so that the position of the substrate on the base table is corrected, it is guaranteed that the substrate is located in the center of the reaction cavity, the uniformity of metal deposition is improved, and the coating quality is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor processing, and in particular relates to MOCVD coating equipment. Background Art

[0002] Coating equipment is a technology used to grow semiconductor thin films on substrates. It uses metal organic compounds and hydrides as raw materials to perform vapor phase epitaxy on the substrate, growing materials with specific optical and electrical properties.

[0003] The coating equipment mainly consists of an evaporation chamber, a reaction chamber, and a heating assembly. The evaporation chamber heats and sublimates the metal compound into a raw gas, which is then transferred to the reaction chamber for reactive coating. The heating assembly provides high temperature conditions in the reaction chamber, allowing the raw gas to react and coat the substrate inside the reaction chamber.

[0004] However, due to assembly errors or processing errors, the coating equipment in the prior art easily causes the base position to deviate from the center of the reaction chamber, thereby reducing the uniformity of metal deposition, that is, reducing the coating quality.

[0005] Based on the above content, the technical problem to be solved by this application is: how to improve the coating quality of MOCVD coating equipment. Utility Model Content

[0006] The purpose of this utility model is to address the above-mentioned problems existing in the prior art and propose an MOCVD coating device to solve the problem of poor coating quality in the prior art. The technical effect of this application solution is to improve the coating quality of the MOCVD device.

[0007] The objectives of the present utility model can be achieved through the following technical solutions: an MOCVD coating device, comprising a shell, a reaction chamber is formed in the shell, the reaction chamber is used for material reaction, the reaction chamber is connected to an air inlet pipe, and the air inlet pipe is used to transport a precursor; a base, the base is arranged in the reaction chamber, the base is used to support a substrate; a heating component, the heating component is arranged below the base, and the heating component acts on the base to heat it; and an adjustment component, the adjustment component comprises: a top pressure piece, the top pressure piece is arranged in the reaction chamber, and the top pressure piece is connected to the base; a force member, the force member is at least partially located outside the reaction chamber, and the force member is connected to the top pressure piece, and the force member has horizontal freedom of movement.

[0008] It is understandable that the air inlet pipe is used to connect the gas source and transport it to the reaction chamber, so that there are precursors and oxygen in the reaction chamber. The precursor is a metal organic substance. The two can react at high temperature to obtain a metal deposit, which can be deposited on the substrate on the base, thereby completing the coating. The base is heated by setting a heating component, and the base can be placed on a supporting substrate. With the reaction in the reaction chamber, a metal film layer will gradually be generated on the substrate. The horizontal position of the base can be adjusted by setting an adjustment component, thereby correcting the position of the substrate on the base, thereby ensuring that the substrate is located in the center of the reaction chamber, improving the uniformity of metal deposition, and thus improving the quality of the coating. Specifically, a force-applying member is used to drive the top pressure member to move, and the top pressure member drives the base to move, wherein the power source of the force-applying member can be manually driven by the operator, or it can be driven by an external drive mechanism, such as a motor, a cylinder, etc.

[0009] In the aforementioned MOCVD coating apparatus, the force-applying member is a stud, and the stud is threadedly connected to the housing. It is understood that by configuring the force-applying member as a stud, and utilizing the threads on the stud to connect with the threads of the housing, when the stud is rotated under force, it can spirally move in a horizontal direction, thereby driving the pressing member to move synchronously.

[0010] In the aforementioned MOCVD coating apparatus, the force-applying member is a slide bar, and the slide bar is slidably connected to the housing. It is understood that by configuring the force-applying member as a slide bar, and utilizing the guide grooves or rails of the slide bar to slidably connect with the guide rails or grooves of the housing, when the slide bar is forced to slide, it can move linearly in the horizontal direction, thereby driving the pressing member to move synchronously.

[0011] In the above-mentioned MOCVD coating equipment, a first drive mechanism is provided on the outer side of the housing, and the first drive mechanism acts on the force-applying member to drive the force-applying member to move. For example, the first drive mechanism can be a motor that drives the force-applying member to rotate, or a cylinder that drives the force-applying member to move linearly.

[0012] In the aforementioned MOCVD coating apparatus, the adjustment components are provided in multiple groups, each of which is positioned at different angular positions around the periphery of the base. It is understood that by placing multiple adjustment components at different positions around the periphery of the base, the base position can be adjusted from multiple angles, such as forward, backward, left, and right, resulting in more efficient deviation correction.

[0013] In the above-mentioned MOCVD coating equipment, the portion of the pressing member near the base is a buffer portion, which is made of a flexible or elastic material. It is understood that by configuring the flexible or elastic buffer portion, the base can be prevented from being damaged by the pressing.

[0014] In the aforementioned MOCVD coating equipment, the heating assembly includes: a heating element movably disposed within the reaction chamber and below the base, acting on the base; and a second drive mechanism having an output end that acts on the heating element to provide the heating element with vertical freedom of movement. It is understood that the heating element may be an electromagnetic induction coil that is heated by electrical current, and the second drive mechanism may be an electric cylinder or a pneumatic cylinder. Driven by the second drive mechanism, the height of the heating element, and thus the base, can be freely adjusted.

[0015] In the aforementioned MOCVD coating apparatus, the housing is provided with an inspection port, which is equipped with a CCD camera, and the CCD camera is directed upward toward the base. It is understood that the inspection port facilitates observation of the base position within the reaction chamber, and the CCD camera provided at the inspection port enables real-time monitoring. In particular, when the CCD camera is communicatively or electrically connected to the adjustment assembly, the base position can be adaptively adjusted based on the monitoring information.

[0016] In the above-mentioned MOCVD coating equipment, there are at least two air inlet pipes, and at least two of the air inlet pipes are arranged at intervals around the circumference of the housing. It is understood that by providing multiple air inlet pipes and disposing them around the circumference of the housing, the air intake can be made more uniform, thereby ensuring more uniform reaction deposition.

[0017] In the aforementioned MOCVD coating apparatus, one end of the inlet pipe that penetrates the housing has an inlet opening that gradually converges toward the center of the housing. It is understood that providing a converging inlet prevents gas from diffusing upward or downward, concentrating its diffusion toward the center of the housing, thereby accelerating the deposition rate.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] 1. The present application can adjust the horizontal position of the base by setting an adjustment component, thereby correcting the position of the substrate on the base, thereby ensuring that the substrate is located in the center of the reaction chamber, improving the uniformity of metal deposition, and thus improving the coating quality;

[0020] 2. By configuring multiple sets of adjustment components at different positions on the periphery of the base, the base position can be adjusted from multiple angles, such as front, back, left, and right, which improves the correction efficiency;

[0021] 3. The present application provides multiple air intake pipes, which are respectively arranged in the circumference of the shell, so that the air intake can be made more uniform, thereby ensuring more uniform reaction deposition. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1It is a schematic diagram of the three-dimensional structure of the MOCVD coating equipment of the present application;

[0023] Figure 2 yes Figure 1 Schematic diagram of the cross-sectional structure;

[0024] Figure 3 yes Figure 2 Schematic diagram of the enlarged structure of area A in the middle;

[0025] Figure 4 It is a simplified structural diagram of the adjustment base of the adjustment component of the present application;

[0026] In the figure, 100, shell; 110, reaction chamber; 120, air inlet pipe; 121, air inlet; 130, detection port; 200, base; 300, heating assembly; 310, heating element; 320, second driving mechanism; 400, adjustment assembly; 410, top pressure member; 411, buffer part; 420, force-applying member; 500, first driving mechanism; 600, CCD camera. Specific embodiments

[0027] To make the above-mentioned objects, features, and advantages of the present invention more clearly understood, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described herein, and those skilled in the art may make similar modifications without violating the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0028] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.

[0029] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this utility model, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0030] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0031] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0032] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only embodiments.

[0033] Please refer to the attached drawings in the manual Figure 1-Figure 3 The present application includes a shell 100, a base 200, a heating component 300 and an adjustment component 400. A reaction chamber 110 is formed in the shell 100. The reaction chamber 110 is used for material reaction. The reaction chamber 110 is connected to an air inlet pipe 120. The air inlet pipe 120 is used to transport a precursor. The base 200 is arranged in the reaction chamber 110 and is used to carry a substrate. The heating component 300 is arranged below the base 200, and the heating component 300 acts on the base 200 for heating. The adjustment component 400 includes a top pressure piece 410 and a force piece 420. The top pressure piece 410 is arranged in the reaction chamber 110 and is connected to the base 200. The force piece 420 is at least partially located outside the reaction chamber 110 and is connected to the top pressure piece 410. The force piece 420 has horizontal freedom of movement.

[0034] It is understood that the air inlet pipe 120 is used to connect the gas source and transport it to the reaction chamber 110, so that the reaction chamber 110 has a precursor and oxygen. The precursor is a metal organic compound. The two can react at high temperature to obtain a metal deposit, which can be deposited on the substrate on the base 200, thereby completing the coating. By setting the heating component 300 to heat the base 200, the base 200 can be placed on the supporting substrate. As the reaction in the reaction chamber 110 progresses, a metal film layer will gradually form on the substrate. By setting the adjustment component 400, the horizontal position of the base 200 can be adjusted to correct the position of the substrate on the base 200, thereby ensuring that the substrate is located in the center of the reaction chamber 110, improving the uniformity of metal deposition, and thus improving the quality of the coating. Specifically, the force member 420 is used to drive the top pressure member 410 to move, and the top pressure member 410 drives the base 200 to move. The power source of the force member 420 can be manually driven by the operator or driven by an external drive mechanism, such as a motor, a cylinder, etc.

[0035] In some embodiments, the force-applying member 420 is a stud, and the stud is threadedly connected to the housing 100. It is understood that by configuring the force-applying member 420 as a stud and utilizing the threads on the stud to connect with the threads of the housing 100, when the stud is rotated under force, it can spirally move in the horizontal direction, thereby driving the pressing member 410 to move synchronously.

[0036] In some embodiments, the force-applying member 420 is a slide bar, and the slide bar is slidably connected to the housing 100. It is understood that by configuring the force-applying member 420 as a slide bar, the guide groove or guide rail of the slide bar is slidably connected to the guide rail or guide groove of the housing 100, so that when the slide bar is forced to slide, it can move linearly in the horizontal direction, thereby driving the pressing member 410 to move synchronously.

[0037] In some embodiments, a first drive mechanism 500 is disposed outside the housing 100. The first drive mechanism 500 acts on the force-applying member 420 to drive the force-applying member 420 to move. For example, the first drive mechanism 500 can be a motor that drives the force-applying member 420 to rotate, or the first drive mechanism 500 can be a cylinder that drives the force-applying member 420 to move linearly.

[0038] In some embodiments, there are multiple sets of adjustment assemblies 400, and each set of adjustment assemblies 400 is disposed at different angular positions around the periphery of the base 200. It will be appreciated that by disposing multiple sets of adjustment assemblies 400 at different positions around the periphery of the base 200, the position of the base 200 can be adjusted from multiple angles, such as forward, backward, left, and right, resulting in higher correction efficiency.

[0039] In some embodiments, the portion of the pressing member 410 near the base 200 is a buffer portion 411, which is made of a flexible or elastic material. It is understood that by configuring the flexible or elastic buffer portion 411, the base 200 can be prevented from being damaged by the pressing.

[0040] In some embodiments, the heating assembly 300 includes a heating element 310 and a second drive mechanism 320. The heating element 310 is movably disposed within the reaction chamber 110 and below the base 200. The heating element 310 acts on the base 200. The second drive mechanism 320 has an output terminal that acts on the heating element 310, thereby allowing the heating element 310 to move vertically. It is understood that the heating element 310 may be an electromagnetic induction coil that is heated by electricity, and the second drive mechanism 320 may be an electric cylinder or a pneumatic cylinder. Driven by the second drive mechanism 320, the height of the heating element 310 can be freely adjusted, thereby indirectly adjusting the height of the base 200.

[0041] In some embodiments, the housing 100 is provided with an inspection port 130, which is equipped with a CCD camera 600, with the CCD camera 600 facing upwards toward the base 200. It will be appreciated that the inspection port 130 facilitates observation of the position of the base 200 within the reaction chamber 110, and the installation of the CCD camera 600 in the inspection port 130 enables real-time monitoring. In particular, when the CCD camera 600 is communicatively or electrically connected to the adjustment assembly 400, the position of the base 200 can be adaptively adjusted based on the monitoring information.

[0042] In some embodiments, there are at least two air inlet pipes 120, and the at least two air inlet pipes 120 are spaced apart circumferentially around the housing 100. It is understood that by providing multiple air inlet pipes 120, and disposing them circumferentially around the housing 100, the air intake can be made more uniform, thereby ensuring more uniform reaction deposition.

[0043] In some embodiments, one end of the air inlet pipe 120 that penetrates into the housing 100 has an air inlet 121, which gradually contracts toward the center of the housing 100. It is understood that by providing the contracting air inlet 121, the gas can be prevented from diffusing upward or downward, and the gas can be more concentratedly diffused toward the center of the housing 100, thereby accelerating the deposition rate.

[0044] Beneficial effects:

[0045] The present application can adjust the horizontal position of the base 200 by setting an adjustment component 400, thereby correcting the position of the substrate on the base 200, thereby ensuring that the substrate is located in the center of the reaction chamber 110, improving the uniformity of metal deposition, and thus improving the coating quality; by arranging multiple groups of adjustment components 400 at different positions on the periphery of the base 200, the position of the base 200 can be adjusted from multiple angles, such as front, back, left, and right directions, and the correction efficiency is higher; by setting multiple air inlet pipes 120, and respectively arranging them in the circumference of the shell 100, the air intake can be made more uniform, thereby ensuring that the reaction deposition is more uniform.

[0046] The specific embodiments described herein are merely illustrative of the spirit of the present invention. Persons skilled in the art may make various modifications, additions, or substitutions to the described specific embodiments without departing from the spirit of the present invention or exceeding the scope defined by the appended claims.

Claims

1. A MOCVD coating device, characterized in that: include: A shell (100) is formed in the shell (100), wherein a reaction chamber (110) is formed in the shell (100), wherein the reaction chamber (110) is used for material reaction, and wherein the reaction chamber (110) is connected to an air inlet pipe (120), wherein the air inlet pipe (120) is used for conveying a precursor; A base (200), the base (200) is arranged in the reaction chamber (110), and the base (200) is used to carry a substrate; A heating component (300), the heating component (300) is disposed below the base (200), and the heating component (300) acts on the base (200) to heat the base; as well as An adjustment component (400), the adjustment component (400) comprising: A pressing member (410), the pressing member (410) is disposed in the reaction chamber (110), and the pressing member (410) is connected to the base (200); A force-applying member (420), wherein the force-applying member (420) is at least partially located outside the reaction chamber (110), and the force-applying member (420) is connected to the pressing member (410), and the force-applying member (420) has a horizontal degree of freedom of movement.

2. The MOCVD coating equipment according to claim 1, characterized in that: The force applying member (420) is a stud, and the stud is connected to the housing (100) via a threaded connection.

3. The MOCVD coating equipment according to claim 1, characterized in that: The force applying member (420) is a slide bar, and the slide bar is in sliding connection with the housing (100).

4. The MOCVD coating equipment according to claim 1, characterized in that: A first driving mechanism (500) is provided on the outside of the housing (100), and the first driving mechanism (500) acts on the force applying member (420) to drive the force applying member (420) to move.

5. The MOCVD coating equipment according to claim 1, characterized in that: There are multiple groups of adjustment components (400), and the multiple groups of adjustment components (400) are respectively arranged at different angular positions in the circumferential direction of the outer periphery of the base (200).

6. The MOCVD coating equipment according to claim 1, characterized in that: The portion of the pressing member (410) close to the base (200) is a buffer portion (411), and the buffer portion (411) is made of a flexible material or an elastic material.

7. The MOCVD coating equipment according to claim 1, characterized in that: The heating assembly (300) comprises: a heating element (310), the heating element (310) being movably disposed in the reaction chamber (110) and located below the base (200), the heating element (310) acting on the base (200); A second driving mechanism (320) is provided, wherein the second driving mechanism (320) has an output end, and the output end acts on the heating element (310) so as to allow the heating element (310) to have a degree of freedom of movement in a vertical direction.

8. The MOCVD coating equipment according to claim 1, characterized in that: The housing (100) is provided with a detection port (130), the detection port (130) is provided with a CCD camera (600), and the CCD camera (600) faces upwards of the base (200).

9. The MOCVD coating equipment according to claim 1, characterized in that: There are at least two air intake pipes (120), and at least two air intake pipes (120) are arranged at intervals in the circumferential direction of the housing (100).

10. The MOCVD coating equipment according to claim 1, characterized in that: One end of the air inlet pipe (120) that penetrates into the housing (100) is provided with an air inlet (121), and the air inlet (121) gradually shrinks toward the center of the housing (100).

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