Monocrystalline silicon rod transfer equipment
By adding a support plate integrated device to the support plate of the single crystal silicon rod transfer equipment, the problem of the support plate tilting and falling off caused by inertia and weight is solved, and more efficient and safe silicon rod transfer is achieved.
Patent Information
- Application Number
- CN202422575713.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-24
- Publication Date
- 2025-10-10
- Estimated Expiration
- 2034-10-24
AI Technical Summary
When traditional single crystal silicon rod transfer equipment transports large single crystal silicon rods, the transfer support plate is easily tilted or falls off due to inertia and weight, posing a risk of damaging the silicon rods.
A single crystal silicon rod transfer equipment was designed, which adopted multiple transfer support plates and added support plate integrated devices at the front and rear ends. The equipment was connected into a solid whole through metal integrated rods and anti-slip blocks to enhance the stability and load-bearing capacity of the support plates.
The stability and safety of the single crystal silicon rod transfer process are improved, the loosening or breakage of the support plate is avoided, and the integrity of the silicon rod during transportation is ensured.
Smart Images
Figure CN223422824U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the related technical field of transfer equipment, and specifically relates to a single crystal silicon rod transfer equipment. BACKGROUND
[0002] In the complex process of silicon wafer manufacturing, the transfer of single crystal silicon rods is a critical step in ensuring product quality and production efficiency. However, traditional single crystal silicon rod transfer methods rely on manual operation, which not only leads to low efficiency but also poses a risk of damaging the silicon rods and injuring personnel. In addition, existing equipment often struggles to accommodate single crystal silicon rods of different sizes and weights, limiting its widespread application. Therefore, there is an urgent need for a new type of single crystal silicon rod transfer equipment that can provide higher efficiency and safety, ensuring that single crystal silicon rods are not damaged during handling and accommodating a variety of specifications. The present invention proposes such a device, which, through optimized design, addresses many problems with traditional equipment and provides an efficient solution for the production of semiconductor and electronic industries.
[0003] However, when using the single crystal silicon rod transfer equipment, the single crystal silicon rod needs to be lifted and placed onto the transfer equipment, and then the transfer equipment can transfer the single crystal silicon rod to the desired location for use or transportation. However, when transferring a single crystal silicon rod with a large volume, the weight of the entire single crystal silicon rod is extremely heavy. When using the transfer equipment to transfer a single crystal silicon rod with a large volume, inertia will be generated during the transfer process. The inertia and the weight of the single crystal silicon rod will have a very heavy effect on the transfer support plate used to hold the single crystal silicon rod. The weight will concentrate on the fixed part of the transfer support plate. In addition to the effect of inertia, it will easily cause the transfer support plate to tilt or even fall off, which may easily damage the single crystal silicon rod. SUMMARY
[0004] The utility model aims at providing a single crystal silicon rod transfer equipment to solve the problem of transferring a single crystal silicon rod with a large volume using the transfer equipment, which generates inertia during the transfer process. The inertia and the weight of the single crystal silicon rod will have a very heavy effect on the transfer support plate used to hold the single crystal silicon rod. The weight will concentrate on the fixed part of the transfer support plate. In addition to the effect of inertia, it will easily cause the transfer support plate to tilt or even fall off.
[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a single crystal silicon rod transfer equipment, comprising a transfer support frame and a plurality of transfer support plates arranged on the top of the transfer support frame. The plurality of transfer support plates are equidistantly arranged on the top of the transfer support frame. The transfer support plates are fixedly connected to the transfer support frame by welding. A fixed groove is arranged in the upper half of the transfer support plate. A support plate integrated device is connected to the front and rear ends of the plurality of transfer support plates.
[0006] The support plate integrated device connected to the front end of the transfer support plate includes a connecting groove, an anti-slip groove, a metal integrated rod and a rectangular anti-slip block. Anti-slip grooves are provided inside the center of the front end of multiple transfer support plates, and multiple anti-slip grooves are connected to connecting grooves at both ends, and multiple anti-slip grooves are inserted with rectangular anti-slip blocks. Metal integrated rods are connected between multiple cuboid anti-slip blocks, and the metal integrated rods pass through the connecting grooves at the left and right ends of the anti-slip grooves.
[0007] Preferably, the support plate integrated device also includes multiple anti-slip strips and multiple fixing screws. The multiple anti-slip strips are respectively located in the corresponding connecting grooves and the outside of the front end of the rectangular anti-slip block. Both ends of the anti-slip strips are fixed to the outer wall of the front end of the transfer support plate by fixing screws.
[0008] Preferably, the rectangular anti-falling block and the metal integrated rod are both made of aluminum alloy, the rectangular anti-falling block is flush with the front end outer wall of the metal integrated rod, and the rectangular anti-falling block and the metal integrated rod are flush with the front end outer wall of the transfer support plate, and the anti-falling strip can prevent the rectangular anti-falling block from falling off from the anti-falling groove.
[0009] Preferably, a wooden board is fixed inside the fixing groove, and a V-shaped placement groove is provided at the center of the upper half of the wooden board.
[0010] Preferably, movable push rods are provided at the four corners of the top of the transfer support frame, and a plurality of reinforcing connecting rods are equidistantly connected to the outer walls at the front and rear ends of the transfer support frame. The movable push rods and the reinforcing connecting rods are fixedly connected to the transfer support frame by welding.
[0011] Preferably, U-shaped support bases are welded to the bottoms of the left and right ends and the center of the transfer support frame, and multiple U-shaped support bases are provided with moving wheels at the bottoms of the front and rear ends, and multiple moving wheels are universal wheels.
[0012] Preferably, triangular reinforcement frames are provided at the connection points between the front and rear ends of the transfer support plate and the transfer support frame, and the triangular reinforcement frames are fixedly connected to the transfer support plate and the transfer support frame by welding.
[0013] Compared with the prior art, the present invention provides a single crystal silicon rod transfer device with the following beneficial effects:
[0014] The utility model discloses a novel support plate integrated device is increased to the single crystal silicon rod transfer equipment's multiple transfer support plate front and rear both ends, and support plate integrated device can play the role of strengthening the connection to multiple transfer support plate front and rear both ends, and multiple transfer support plate can be connected as a more firm and stable whole by support plate integrated device, when single crystal silicon rod is placed to the placing wood board of multiple transfer support plate top inside, because single crystal silicon rod whole is very heavy, when transferring, will produce very great weight load to the transfer of support plate and transfer support frame connection, and support plate integrated device connects multiple transfer support plate as a firm whole, can increase the bearing capacity of transfer support plate, and also can avoid the single transfer support plate because of the heavy weight and appear loose fracture situation, to increase the stability and safety of single crystal silicon rod when transferring. BRIEF DESCRIPTION OF DRAWINGS
[0015] Figure 1 It is a single crystal silicon rod transfer equipment whole three-dimensional structure schematic view of the utility model.
[0016] Figure 2 It is a single crystal silicon rod transfer equipment local three-dimensional structure schematic view of the utility model.
[0017] Figure 3 It is a support plate integrated device three-dimensional structure schematic view of the utility model.
[0018] In the drawing: 1, U type support chassis, 2, moving wheel, 3, transfer support frame, 4, strengthen connecting rod, 5, support plate integrated device, 6, transfer support plate, 7, fixed recess, 8, placing wood board, 9, V type placing groove, 10, triangular strengthening frame, 11, moving push rod, 12, anti -drop strip, 13, connecting recess, 14, anti -drop recess, 15, metal integrated rod, 16, fixed screw, 17, cuboid anti -drop block. DETAILED DESCRIPTION
[0019] The technical scheme in the embodiments of the utility model will be apparently and completely described in combination with the drawings in the embodiments of the utility model, and obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the ordinary skill in the art without making creative labor belong to the range of protection of the utility model.
[0020] The utility model provides a kind of single crystal silicon rod transfer equipment, including U type support chassis, moving wheel, transfer support frame, strengthen connecting rod, support plate integrated device, transfer support plate, fixed recess, placing wood board, V type placing groove, triangular strengthening frame, moving push rod, anti -drop strip, connecting recess, anti -drop recess, metal integrated rod, fixed screw and cuboid anti -drop block. Figure 1-3The single crystal silicon rod transfer equipment shown includes a transfer support frame 3 and a plurality of transfer support plates 6 arranged on the top of the transfer support frame 3, the plurality of transfer support plates 6 are equidistantly arranged on the top of the transfer support frame 3, the transfer support plates 6 are fixedly connected with the transfer support frame 3 by welding, the upper half of the transfer support plates 6 is internally provided with a fixed groove 7, the fixed groove 7 is internally fixed with a placing board 8, the upper half of the placing board 8 is provided with a V-shaped placing groove 9 at the center, the four corners of the top of the transfer support frame 3 are provided with a moving push rod 11, a plurality of reinforcing connecting rods 4 are equidistantly connected with the outer walls of the front and rear ends of the transfer support frame 3, the moving push rod 11 and the reinforcing connecting rod 4 are fixedly connected with the transfer support frame 3 by welding, the bottom of the left and right ends and the center of the transfer support frame 3 are welded with a U-shaped support chassis 1, the bottom of the front and rear ends of the plurality of U-shaped support chassis 1 is provided with a moving wheel 2, the plurality of moving wheels 2 are universal wheels, the connection positions of the front and rear ends of the transfer support plates 6 and the transfer support frame 3 are provided with a triangular reinforcing frame 10, the triangular reinforcing frame 10 is fixedly connected with the transfer support plates 6 and the transfer support frame 3 by welding, when the single crystal silicon rod transfer equipment is used, first, the moving push rod 11 needs to be held and the single crystal silicon rod transfer equipment is pushed to the vicinity of the single crystal silicon rod through the plurality of moving wheels 2, then the single crystal silicon rod transfer equipment needs to be parked, then a crane is used to hoist the single crystal silicon rod and place it in the V-shaped placing groove 9 at the center of the plurality of placing boards 8, the plurality of placing boards 8 will stably place the single crystal silicon rod through the V-shaped placing groove 9, then the moving push rod 11 needs to be held and the single crystal silicon rod is transferred again through the moving wheels 2 at the bottom of the U-shaped support chassis 1, until the single crystal silicon rod is transferred to the storage or use position, then the single crystal silicon rod is hoisted by the crane and placed.
[0021] As Figure 1 And Figure 3As shown, the front and rear ends of the multiple transfer support plates 6 are connected to the support plate integrated device 5, and the support plate integrated device 5 connected to the front end of the transfer support plate 6 includes a connecting groove 13, an anti-slip groove 14, a metal integrated rod 15 and a rectangular anti-slip block 17. The anti-slip groove 14 is provided inside the center of the front end of the multiple transfer support plates 6, and the left and right ends of the multiple anti-slip grooves 14 are connected to the connecting groove 13. The rectangular anti-slip blocks 17 are inserted into the multiple anti-slip grooves 14, and the metal integrated rod 15 is connected between the multiple cuboid anti-slip blocks 17. The metal integrated rod 15 passes through the connecting grooves 13 on the left and right ends of the anti-slip groove 14. The support plate integrated device 5 also includes a plurality of anti-slip strips 12 and a plurality of fixing screws 16. The plurality of anti-slip strips 12 are respectively located at the outside of the corresponding connecting grooves 13 and the front end of the rectangular anti-slip block 17. Both ends of the anti-slip strips 12 are fixed to the outer wall of the front end of the transfer support plate 6 by fixing screws 16. The rectangular anti-slip block 17 and the metal integrated rod 15 are both made of aluminum alloy. The rectangular anti-slip block 17 is flush with the outer wall of the front end of the metal integrated rod 15, and the rectangular anti-slip block 17 and the metal integrated rod 15 are flush with the outer wall of the front end of the transfer support plate 6. The anti-slip strips 12 can prevent the rectangular anti-slip block 17 from falling off from the anti-slip groove 14.
[0022] like Figure 1 and Figure 3As shown, after the single crystal silicon rod is placed on the placing wooden board 8 inside the top of multiple transfer support plates 6, in order to increase the safety and stability of the transfer of the single crystal silicon rod, it is necessary to use a support plate integrated device 5 to connect and reinforce the multiple transfer support plates 6, so that the multiple transfer support plates 6 can support heavier single crystal silicon rods, and avoid the single crystal silicon rods in the transfer process from loosening or breaking the transfer support plates 6 due to excessive weight. Taking the installation of the support plate integrated device 5 at the front end of multiple transfer support plates 6 as an example, first, it is necessary to insert multiple rectangular anti-slip blocks 17 connected by metal integrated rods 15 into the corresponding anti-slip grooves 14 inside the front end of the transfer support plate 6 until the outer wall of the front end of the rectangular anti-slip block 17 is flush with the outer wall of the front end of the transfer support plate 6. At this time, the multiple metal integrated rods 15 connected to the rectangular anti-slip blocks 17 completely penetrate the two ends of the anti-slip grooves 14. The two ends of the anti-slip bar 12 are fixed to the front end outer wall of the transfer support plate 6 by fixing screws 16, so that the anti-slip bar 12 can be blocked by the front end of the cuboid anti-slip block 17 and prevent the cuboid anti-slip block 17 from falling out of the anti-slip groove 14.
[0023] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.
Claims
1. A single crystal silicon rod transfer device, comprising a transfer support frame (3) and a plurality of transfer support plates (6) arranged on the top of the transfer support frame (3), wherein the plurality of transfer support plates (6) are arranged equidistantly on the top of the transfer support frame (3), the transfer support plates (6) are fixedly connected to the transfer support frame (3) by welding, and a fixing groove (7) is provided inside the upper half of the transfer support plate (6), characterized in that: The front and rear ends of the plurality of transfer support plates (6) are both connected to a support plate integration device (5); The support plate integrated device (5) connected to the front end of the transfer support plate (6) comprises a connecting groove (13), an anti-slip groove (14), a metal integrated rod (15) and a rectangular anti-slip block (17). The anti-slip groove (14) is provided at the center of the front end of the plurality of transfer support plates (6). The left and right ends of the plurality of anti-slip grooves (14) are connected to the connecting groove (13). The rectangular anti-slip blocks (17) are inserted into the plurality of anti-slip grooves (14). The metal integrated rod (15) is connected between the plurality of rectangular anti-slip blocks (17). The metal integrated rod (15) passes through the connecting grooves (13) at the left and right ends of the anti-slip groove (14).
2. The single crystal silicon rod transfer device according to claim 1, characterized in that: The support plate integrated device (5) further comprises a plurality of anti-slipping strips (12) and a plurality of fixing screws (16), wherein the plurality of anti-slipping strips (12) are respectively located outside the front end of the corresponding connecting grooves (13) and the rectangular anti-slipping block (17), and both ends of the anti-slipping strips (12) are fixed to the front end outer wall of the transfer support plate (6) by fixing screws (16).
3. The single crystal silicon rod transfer device according to claim 2, characterized in that: The rectangular anti-slip block (17) and the metal integrated rod (15) are both made of aluminum alloy. The rectangular anti-slip block (17) is flush with the front end outer wall of the metal integrated rod (15), and the rectangular anti-slip block (17) and the metal integrated rod (15) are flush with the front end outer wall of the transfer support plate (6). The anti-slip strip (12) can prevent the rectangular anti-slip block (17) from falling off from the anti-slip groove (14).
4. The single crystal silicon rod transfer device according to claim 1, characterized in that: A placement wooden board (8) is fixed inside the fixing groove (7), and a V-shaped placement groove (9) is provided at the center of the upper half of the placement wooden board (8).
5. The single crystal silicon rod transfer device according to claim 1, characterized in that: The transfer support frame (3) is provided with movable push rods (11) at the four corners of the top, and a plurality of reinforcing connecting rods (4) are equidistantly connected to the outer walls at the front and rear ends of the interior of the transfer support frame (3). The movable push rods (11) and the reinforcing connecting rods (4) are fixedly connected to the transfer support frame (3) by welding.
6. The single crystal silicon rod transfer device according to claim 1, characterized in that: The bottoms of the left and right ends and the center of the transfer support frame (3) are welded with U-shaped support base frames (1), and the bottoms of the front and rear ends of the plurality of U-shaped support base frames (1) are provided with moving wheels (2), and the plurality of moving wheels (2) are universal wheels.
7. The single crystal silicon rod transfer device according to claim 1, characterized in that: Triangular reinforcement frames (10) are provided at the connection points between the front and rear ends of the transfer support plate (6) and the transfer support frame (3), and the triangular reinforcement frames (10) are fixedly connected to the transfer support plate (6) and the transfer support frame (3) by welding.