Inner diameter measuring jig

Abstract

The utility model belongs to the technical field of semiconductor equipment, and provides an inner diameter measuring jig which comprises a first ruler body, a second ruler body and an inner wall grabbing foot, the first ruler body comprises a first outer measuring jaw and a main caliper extending in the first direction, the first outer measuring jaw is connected to one end of the main caliper, and the second ruler body comprises a vernier scale and a second outer measuring jaw. The vernier scale is clamped on the periphery of the main caliper and can slide in the first direction, the second outer measuring jaw is connected to the end, close to the first outer measuring jaw, of the vernier scale, and the inner wall grabbing feet comprise the first grabbing foot connected to the first outer measuring jaw and the second grabbing foot connected to the second outer measuring jaw. The second grabbing foot can be in contact with the first grabbing foot, the inner wall grabbing foot is provided with an arc-shaped outer side face and a straight outer side face and can be in contact alignment with the inner face of the crystal box, and the straight outer side faces of the first grabbing foot and the second grabbing foot are coplanar, so that the inner diameter of the crystal box is effectively measured, and the size change of the inner diameter of the crystal box is more visually reflected; and the measurement precision and the measurement efficiency are improved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor equipment, and in particular to an inner diameter measuring jig. Background Art

[0002] In the semiconductor manufacturing process, the processing, manufacturing, and transportation of wafers are important links in the entire production process. The wafer box, as a carrier for carrying and protecting wafers, plays an indispensable role in the entire process. The stability and durability of the wafer box are related to the production quality and production efficiency of the wafer.

[0003] During the wafer manufacturing process, the wafer cassette operates in an extremely complex environment, subject to extreme conditions such as high temperature, high pressure, and chemical corrosion, which can significantly impact the structural stability of the cassette. During production, the cassette requires frequent mechanical handling and handling. Long-term use and material aging can cause changes in the cassette's structural dimensions, particularly the position of the wafer-carrying slots within the cassette. These changes can cause friction or collisions between the wafers, leading to surface defects and debris, severely impacting wafer quality and production efficiency.

[0004] Currently, cassette dimensional inspection primarily relies on manual visual inspection or simple measuring tools. These methods suffer from issues such as insufficient precision, low efficiency, and poor reliability. Therefore, to improve the accuracy and efficiency of cassette inspection and reduce defects and wafer fragmentation during production and transportation, an easy-to-use, highly accurate, and efficient inner diameter measurement fixture is urgently needed. Utility Model Content

[0005] The purpose of this application is to provide an inner diameter measuring jig to solve the problems of insufficient accuracy and low efficiency in the structural dimension detection of crystal boxes in the prior art, and to achieve high-precision and high-efficiency dimension and structure detection of the inner diameter of the crystal box.

[0006] To achieve the above-mentioned and other related purposes, the present application provides an inner diameter measuring jig, comprising a first ruler body, a second ruler body, and an inner wall gripping foot;

[0007] The first ruler body includes a main caliper and a first outer measuring jaw. The main caliper extends along a first direction and has main scale graduations on its surface. The main caliper has a first end and a second end opposite to each other along the first direction, and a first side and a second side opposite to each other perpendicular to the first direction. The first outer measuring jaw is connected to the first end of the main caliper and is located on a first side of the main caliper.

[0008] The second scale includes a vernier scale and a second outer scale claw, the vernier scale is clamped to the outer circumference of the main scale and can slide along the first direction, the surface of the vernier scale is provided with vernier graduation lines matched with the graduation lines of the main scale, and the second outer scale claw is connected to one end of the vernier scale close to the first outer scale claw and located on the first side of the main scale.

[0009] The inner wall claw includes a first claw connected to the first outer scale claw and a second claw connected to the second outer scale claw, and when the second outer scale claw moves towards the first outer scale claw, the second claw can be in contact with the first claw.

[0010] Optionally, the inner wall claw is a plate structure, the thickness direction of the inner wall claw plate structure is a second direction, the second direction is perpendicular to the first direction and perpendicular to the line between the first side and the second side of the main scale.

[0011] In the front view of the inner diameter measuring jig along the second direction, the arc-shaped outer side surface of the inner wall claw forms an arc-shaped contour line, and the flat outer side surface of the inner wall claw forms a flat contour line.

[0012] Optionally, in the front view of the inner diameter measuring jig along the second direction, the arc-shaped outer side surface of the inner wall claw forms an arc-shaped contour line, and the flat outer side surface of the inner wall claw forms a flat contour line.

[0013] Optionally, in the front view of the inner diameter measuring jig along the second direction, the arc-shaped contour line of the first claw is a circular arc line, and the central angle of the arc-shaped contour line of the first claw and the central angle of the arc-shaped contour line of the second claw are both less than or equal to 180°.

[0014] Optionally, in the front view of the inner diameter measuring jig along the second direction, the flat contour line of the first claw and the flat contour line of the second claw are both perpendicular to the first direction.

[0015] Optionally, the diameter of the circle where the arc-shaped contour line of the first claw is located is equal to the diameter of the circle where the arc-shaped contour line of the second claw is located.

[0016] Optionally, the line between the center of the circle where the arc-shaped contour line of the first claw is located and the center of the circle where the arc-shaped contour line of the second claw is located is parallel to the first direction.

[0017] Optionally, the central angle of the arc-shaped contour line of the first claw is equal to the central angle of the arc-shaped contour line of the second claw.

[0018] Optionally, the central angle of the arc-shaped contour line of the first gripping foot and the central angle of the arc-shaped contour line of the second gripping foot are both 180°.

[0019] Optionally, a central angle of the arc-shaped contour line of the first gripping foot and a central angle of the arc-shaped contour line of the second gripping foot are both smaller than 180°.

[0020] Optionally, the first ruler body further includes a first inner measuring jaw, which is connected to the first end of the main caliper and located on the second side of the main caliper; the second ruler body further includes a second inner measuring jaw, which is connected to an end of the vernier caliper close to the first inner measuring jaw and located on the second side of the main caliper.

[0021] The inner diameter measuring jig provided in this application has at least the following beneficial effects:

[0022] The first outer measuring claw and the second outer measuring claw can be used to measure the outer diameter of the product, and the first inner measuring claw and the second inner measuring claw can be used to measure the inner diameter of a smaller size. By providing an inner wall gripping foot with an arc-shaped outer side surface and a flat outer side surface, effective measurement of the inner diameter of the crystal box is achieved; by controlling the position and posture of the first gripping foot and the second gripping foot, the contact and alignment of the first gripping foot and the second gripping foot with the inner wall of the crystal box can be facilitated, thereby improving the measurement efficiency. By controlling the values ​​of the diameter and the central angle of the first gripping foot and the second gripping foot, when the splicing pattern of the first gripping foot and the second gripping foot is When the contour is circular, the inner diameter of the crystal box can be measured more intuitively. When the spliced ​​pattern of the first gripping foot and the second gripping foot is smaller than the contour of the circle where the arc contour line is located, the inner diameter of the crystal box with a reduced inner diameter can be measured, thereby improving the applicability of the inner diameter measuring jig. The inner diameter measuring jig realizes the effective measurement of the inner diameter of the crystal box, and has the advantages of high measurement efficiency and high measurement accuracy, and can more intuitively reflect the structure and size changes of the inner wall of the crystal box, effectively avoiding product scrapping due to crystal box deformation during the production process, and has extremely high use value and promotion value. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0024] Figure 1 Shown is a schematic structural diagram of the inner diameter measuring jig provided in this application.

[0025] Figure 2 Display as Figure 1The diagram shows the structure of the inner diameter measuring jig when the first gripping foot is in contact with the second gripping foot.

[0026] Figure 3 It is a schematic diagram showing a structure in which the wafer cannot fall to the bottom of the wafer box in the prior art.

[0027] Figure 4 It shows a schematic structural diagram of the case where the central angles of the first gripping foot and the second gripping foot provided by the present application are both less than 180°.

[0028] Figure 5 The diagram shows the structure of the first gripping foot provided by the present application when the central angle of the first gripping foot is less than 180°.

[0029] Figure 6 The diagram shows the structure of the second gripping foot provided by the present application when the central angle of the second gripping foot is less than 180°.

[0030] Reference numerals:

[0031] 11. First scale body; 111. Main caliper; 112. First outer jaw; 113. Main scale graduation; 114. First inner jaw; 12. Second scale body; 121. Vernier scale; 122. Second outer jaw; 123. Vernier scale; 124. Second inner jaw; 13. Inner wall gripper; 131. First gripper; 132. Second gripper; 14. Fastening screw. DETAILED DESCRIPTION

[0032] To make the technical objectives, technical solutions, and technical effects of this application more clear, the technical solutions of this application will be clearly and completely described below in conjunction with embodiments. Obviously, the described embodiments are only part of the embodiments of this application, not all of them. Generally, the components of the embodiments of this application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0033] Therefore, the following detailed description of the embodiments of the present application is not intended to limit the scope of the claimed application, but rather merely represents selected embodiments of the present application. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments in this application without creative effort are within the scope of protection of this application. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance.

[0034] In the description of the application, it should be noted that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the application.

[0035] In the description of the application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixed connection, or detachable connection. In addition, the description of the terms "one embodiment", "some embodiments", "illustrative embodiment", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiments or examples are included in at least one embodiment or example of the application. In the description, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0036] The embodiment provides an inner diameter measuring jig, which can effectively measure the structural size of the inner wall of the crystal box with high precision and high efficiency. Referring to Figure 1 and Figure 2 The inner diameter measuring jig provided by the embodiment includes a first ruler 11, a second ruler 12 and an inner wall grabbing foot 13.

[0037] Specifically, in the embodiment, the first ruler 11 includes a main caliper 111 and a first outer measuring claw 112. The main caliper 111 extends in a first direction. The surface of the main caliper 111 is provided with a main scale line 113, which is used to enable the main caliper 111 to measure the length in the first direction. The main caliper 111 has a first end and a second end oppositely arranged in the first direction, and a first side and a second side oppositely arranged perpendicular to the first direction. The first outer measuring claw 112 is connected to the first end of the main caliper 111 and located on the first side of the main caliper 111. Optionally, the first outer measuring claw 112 is fixedly connected to the first end of the main caliper 111.

[0038] The second scale body 12 includes a vernier scale 121 and a second outer jaw 122. The vernier scale 121 is secured to the outer periphery of the main caliper 111 and is capable of sliding in a first direction. The surface of the vernier scale 121 is provided with vernier scale lines 123 that align with the main scale scale lines 113. Optionally, the vernier scale 121 exposes the main scale scale lines 113, and the vernier scale lines 123 can be aligned with the main scale scale lines 113. The second outer jaw 122 is connected to an end of the vernier scale 121 proximal to the first outer jaw 112 and is located on a first side of the main caliper 111, such that the second outer jaw 122 is opposite and engages with the first outer jaw 112. When the vernier scale 121 slides, the second outer jaw 122 can slide with the vernier scale 121. Optionally, the second outer jaw 122 is fixedly connected to the oil dipstick.

[0039] The inner wall gripping foot 13 includes a first gripping foot 131 and a second gripping foot 132. The first gripping foot 131 is connected to the first outer measuring jaw 112, and the second gripping foot 132 is connected to the second outer measuring jaw 122. When the sliding vernier 121 moves the second outer measuring jaw 122 toward the first outer measuring jaw 112, the second gripping foot 132 moves with the second outer measuring jaw 122 and is able to contact the first gripping foot 131. At this time, the reading of the inner diameter measuring jig is 0.

[0040] In an optional embodiment, the first grasping foot 131 is fixedly connected to the first outer measuring claw 112, and the second grasping foot 132 is fixedly connected to the second outer measuring claw 122. Optionally, the first grasping foot 131 and the first outer measuring claw 112 are detachably fixedly connected, and the second grasping foot 132 and the second outer measuring claw 122 are detachably fixedly connected. When the first grasping foot 131 and the second grasping foot 132 are not connected to the first outer measuring claw 112 and the second outer measuring claw 122, the first outer measuring claw 112 and the second outer measuring claw 122 can be used to measure the outer diameter of the product.

[0041] Reference Figure 3 Since the crystal box often changes in size during use, if the size is too large, the wafer will collide with the crystal box. If the size is too small, the wafer will rub against the crystal box or cannot be placed in the crystal box. Due to the special internal structure of the crystal box, it is difficult for the existing jigs in the prior art to measure the size of the inner wall of the crystal box, and there are problems such as low measurement accuracy and low efficiency. Based on the above problems, referring to Figures 1 to 3 Using the inner diameter measuring jig of this embodiment, the inner wall grasping foot 13 is placed in the crystal box. By sliding the vernier scale 121, the first grasping foot 131 and the second grasping foot 132 can be respectively contacted with the opposite sides of the inner wall of the crystal box. According to the readings of the main scale scale line 113 and the vernier scale line 123, the distance between the opposite sides of the inner wall of the crystal box can be calculated, thereby realizing the measurement of the inner diameter of the crystal box, which has the characteristics of high precision, high efficiency and simple operation.

[0042] In this embodiment, the inner wall gripping foot 13 is a plate-like structure, with the thickness direction of the plate-like structure of the inner wall gripping foot 13 being a second direction. The second direction is perpendicular to the first direction and also perpendicular to the line connecting the first and second sides of the main caliper 111. When viewing the inner diameter measuring jig from the front along the second direction, the inner wall gripping foot 13 has an arcuate outer side surface and a flat outer side surface that are arranged opposite each other along the first direction, and the arcuate outer side surface and the flat outer side surface are interconnected. The arcuate outer side surface of the first gripping foot 131 is located on the side away from the second gripping foot 132, while the arcuate outer side surface of the second gripping foot 132 is located on the side away from the first gripping foot 131. The flat outer side surface of the first gripping foot 131 faces the flat outer side surface of the second gripping foot 132. When the first gripping foot 131 and the second gripping foot 132 are in contact, the flat outer side surfaces of the first gripping foot 131 and the second gripping foot 132 are located in the same plane.

[0043] In this embodiment, when viewing the inner diameter measuring jig from the second direction, the curved outer side of the inner wall gripping foot 13 forms a curved contour line, while the straight outer side of the inner wall gripping foot 13 forms a straight contour line. Furthermore, the straight contour line of the inner wall gripping foot 13 is a circular arc line. Optionally, the central angle of the curved contour line of the first gripping foot 131 is less than or equal to 180°, and the central angle of the curved contour line of the second gripping foot 132 is less than or equal to 180°.

[0044] In an alternative embodiment, in a front view of the inner diameter measurement jig along the second direction, the straight outline of the first gripping foot 131 is parallel to the straight outline of the second gripping foot 132, and the straight outline of the first gripping foot 131 is perpendicular to the first direction. By controlling the position and orientation of the straight outer surfaces of the first gripping foot 131 and the second gripping foot 132, the inner diameter of the wafer box can be calculated based on the measurement data of the inner diameter measurement jig.

[0045] In this embodiment, when viewing the inner diameter measuring jig along the second direction, the diameter of the circle encompassing the curved outline of the first gripping foot 131 is equal to the diameter of the circle encompassing the curved outline of the second gripping foot 132. Consequently, the curvature of the curved outer surface of the first gripping foot 131 is equal to the curvature of the curved outer surface of the second gripping foot 132. Furthermore, the line connecting the center of the circle encompassing the curved outline of the first gripping foot 131 and the center of the circle encompassing the curved outline of the second gripping foot 132 is parallel to the first direction, thereby ensuring that the first gripping foot 131 and the second gripping foot 132 cooperate with each other. When measuring a wafer box using the inner diameter measuring jig, by aligning the first direction parallel to the opening of the wafer box and sliding the vernier scale 121 along the first direction, the curved outer surfaces of the first gripping foot 131 and the second gripping foot 132 are aligned with the inner wall surfaces of the wafer box facing each other along the first direction. This simplifies operation and facilitates intuitive measurement of the wafer box's inner diameter, thereby improving measurement efficiency.

[0046] In an alternative embodiment, reference Figure 1 The central angle of the arcuate outline of the first gripping foot 131 and the central angle of the arcuate outline of the second gripping foot 132 are both 180°. In this case, in a front view of the inner diameter measuring jig along the second direction, the outer contours of the first gripping foot 131 and the second gripping foot 132 are both semicircular. The diameter of the circle containing the arcuate outline of the first gripping foot 131 is denoted as the first diameter D1, the diameter of the circle containing the arcuate outline of the second gripping foot 132 is denoted as the second diameter D2, the measured value of the inner diameter measuring jig is denoted as L3, and the inner diameter value measured by the inner diameter measuring jig is denoted as D0. Then, the inner diameter value D0 = 0.5D1 + 0.5D2 + L3. Alternatively, if the first diameter D1 is equal to the second diameter D2, then the inner diameter value D0 = D1 + L3. The value of the first diameter and the value of the second diameter can be determined according to the structural dimensions of the crystal box. Optionally, the first diameter D1 can be, for example, 150mm, 200mm, 300mm, or other suitable values. Setting the first diameter D1 to 150mm, 200mm, and 300mm respectively can facilitate the measurement of the inner diameters of 6-inch, 8-inch, and 12-inch crystal boxes, respectively.

[0047] Among them, the inner diameter value D0 is the maximum distance between the curved contour line of the first gripping foot 131 and the curved contour line of the second gripping foot 132 along the first direction. When the curved outer surface of the first gripping foot 131 and the curved outer surface of the second gripping foot 132 are aligned and in contact with the inner wall of the crystal box, the inner diameter value D0 is equal to the inner diameter of the crystal box. The measured value L3 is the distance between the straight outer surface of the first gripping foot 131 and the straight outer surface of the second gripping foot 132. The measured value L3 is directly read based on the main scale mark 113 and the vernier scale mark 123 of the inner diameter measuring jig.

[0048] In an alternative embodiment, reference Figures 4 to 6 At least one of the central angles of the curved outline of the first gripping foot 131 and the central angle of the curved outline of the second gripping foot 132 is less than 180°. In a front view of the inner diameter measuring jig along the second direction, the straight outline of the inner wall gripping foot 13 is perpendicular to the first direction. The distance between the straight outline of the first gripping foot 131 and the center of the circle containing the curved outline of the first gripping foot 131 is recorded as the first distance L1, and the distance between the straight outline of the second gripping foot 132 and the center of the circle containing the curved outline of the second gripping foot 132 is recorded as the second distance L2. Thus, the inner diameter value D0 = 0.5D1 + 0.5D2 + L3 - L1 - L2. By controlling at least one of the central angles of the arcuate contours of the first and second gripping legs 131, 132 to be less than 180°, the contour formed by the joined first and second gripping legs 131, 132 is smaller than the contour of the circle within which their arcuate contours lie. This enables inner diameter measurement of wafer cassettes with reduced inner diameters, improving the applicability of the inner diameter measurement jig. Optionally, when the first diameter D1 is equal to the second diameter D2, D0 = D1 + L3 - L1 - L2.

[0049] In an optional embodiment, the central angle of the arc-shaped contour line of the first gripping foot 131 is equal to the central angle of the arc-shaped contour line of the second gripping foot 132. When the first diameter is equal to the second diameter, the first gripping foot 131 and the second gripping foot 132 have the same structural dimensions and are arranged relative to each other along the first direction. When in use, the contact alignment between the inner wall gripping foot 13 and the inner wall of the crystal box is facilitated, thereby further improving the measurement efficiency.

[0050] In an alternative embodiment, reference Figure 4 The central angle of the arcuate contour line of the first gripping foot 131 and the central angle of the arcuate contour line of the second gripping foot 132 are both less than 180°. In this case, the central angle of the arcuate contour line of the first gripping foot 131 can be equal to the central angle of the arcuate contour line of the second gripping foot 132, or can be smaller than or greater than the central angle of the arcuate contour line of the second gripping foot 132. Optionally, the central angle of the arcuate contour line of the first gripping foot 131 can be set to be equal to the central angle of the arcuate contour line of the second gripping foot 132. In this case, the first distance L1 is equal to the second distance L2. Since the straight outer surface of the inner wall gripping foot 13 is perpendicular to the first direction, the inner diameter value D0 is calculated according to the measured value L3 of the inner diameter measuring jig as D0 = 0.5D1 + 0.5D2 + L3 - 2L1. Optionally, the first diameter D1 is equal to the second diameter D2, and the above formula is further simplified to D0 = D1 + L3 - 2L1.

[0051] In an alternative embodiment, reference Figure 5 and Figure 6 In a front view of the inner diameter measuring jig along the second direction, the central angles of the curved outline of the first gripping foot 131 and the curved outline of the second gripping foot 132 are both 180° and less than 180°. Specifically, for example, if the central angle of the curved outline of the first gripping foot 131 is 180°, the first distance L1 is 0, and when the first diameter D1 equals the second diameter D2, the inner diameter is D0 = D1 + L3 - L2. Alternatively, if the central angle of the curved outline of the second gripping foot 132 is 180°, the second distance L2 is 0, and when the first diameter D1 equals the second diameter D2, the inner diameter is D0 = D1 + L3 - L1.

[0052] In this embodiment, the first ruler body 11 further includes a first inner jaw 114, which is connected to a first end of the main caliper 111 and located on a second side of the main caliper 111. Optionally, the first inner jaw 114 is fixedly connected to the main caliper 111. The second ruler body 12 further includes a second inner jaw 124, which is connected to an end of the vernier scale 121 proximal to the first inner jaw 114 and located on a second side of the main caliper 111. Optionally, the second inner jaw 124 is fixedly connected to the vernier scale 121. When the second inner jaw 124 contacts the first inner jaw 114, the zero value on the main scale scale line 113 aligns with the zero value on the vernier scale line 123, indicating that the inner diameter measuring jig reads zero. Using the first and second inner jaws 114, 124 enables measurement of smaller inner diameters.

[0053] In an optional embodiment, the inner diameter measuring jig further includes a fastening screw 14, which is connected to the vernier 121 and is used to fix the vernier 121 on the main caliper 111. Optionally, a threaded hole is provided in the vernier 121, and the fastening screw 14 is used to cooperate with the threaded hole to fix the vernier 121 to the main caliper 111.

[0054] The inner diameter measuring jig provided in this embodiment can measure the outer diameter of the product by using the first outer measuring jaw 112 and the second outer measuring jaw 122, and can measure the inner diameter of a smaller size by using the first inner measuring jaw 114 and the second inner measuring jaw 124. By setting the inner wall gripping foot 13 with an arc-shaped outer side and a flat outer side, effective measurement of the inner wall of the crystal box is achieved; by controlling the position and posture of the first gripping foot 131 and the second gripping foot 132, it is possible to facilitate the first gripping foot 131 and the second gripping foot 132 to measure the inner diameter of the product. The contact alignment of the inner wall of the crystal box improves the measurement efficiency. By controlling the diameter and central angle of the first gripping foot 131 and the second gripping foot 132, when the spliced ​​pattern of the first gripping foot 131 and the second gripping foot 132 is a circular outline, the inner diameter of the crystal box can be measured more intuitively. When the spliced ​​pattern of the first gripping foot 131 and the second gripping foot 132 is smaller than the outline of the circle where its arc outline lies, the inner diameter of the crystal box with a reduced inner diameter can be measured, thereby improving the applicability of the inner diameter measurement fixture. Therefore, the inner diameter measurement fixture of the present application realizes effective measurement of the inner diameter of the crystal box, and has the advantages of high measurement efficiency and high measurement accuracy. It can also more intuitively reflect the structural and dimensional changes of the inner wall of the crystal box, effectively avoiding product scrapping due to crystal box deformation during production, and has extremely high use value and promotion value.

[0055] The above embodiments are merely illustrative of the principles and effects of this application and are not intended to limit this application. Anyone skilled in the art may modify, alter, or combine the above embodiments without departing from the spirit and scope of this application. Therefore, all equivalent modifications or variations accomplished by a person of ordinary skill in the art without departing from the spirit and technical concepts disclosed in this application shall be covered by the claims of this application.

Claims

1. An inner diameter measuring jig, characterized in that: It includes a first scale body, a second scale body and an inner wall grasping foot; The first ruler body includes a main caliper and a first outer measuring jaw. The main caliper extends along a first direction and has main scale graduations on its surface. The main caliper has a first end and a second end opposite to each other along the first direction, and a first side and a second side opposite to each other perpendicular to the first direction. The first outer measuring jaw is connected to the first end of the main caliper and is located on a first side of the main caliper. The second scale body includes a vernier scale and a second outer jaw. The vernier scale is clamped to the outer periphery of the main caliper and can slide in the first direction. The surface of the vernier scale is provided with vernier scale lines that match the scale lines of the main scale. The second outer jaw is connected to an end of the vernier scale near the first outer jaw and is located on the first side of the main caliper. The inner wall gripping foot comprises a first gripping foot connected to the first outer measuring claw and a second gripping foot connected to the second outer measuring claw, and when the second outer measuring claw moves in a direction close to the first outer measuring claw, the second gripping foot can contact the first gripping foot; The inner wall gripping foot is a plate-shaped structure, and the thickness direction of the inner wall gripping foot plate-shaped structure is the second direction, the second direction is perpendicular to the first direction, and is perpendicular to the line between the first side and the second side of the main caliper; Looking directly at the inner diameter measuring jig along the second direction, the inner wall gripping foot has an arcuate outer side surface and a flat outer side surface that are oppositely arranged and connected to each other along the first direction, and when the first gripping foot contacts the second gripping foot, the flat outer side surface of the first gripping foot and the flat outer side surface of the second gripping foot are located in the same plane.

2. The inner diameter measuring jig according to claim 1, characterized in that: In a front view of the inner diameter measuring jig along the second direction, the curved outer side surface of the inner wall gripping foot forms a curved contour line, and the straight outer side surface of the inner wall gripping foot forms a straight contour line; Wherein, the arc-shaped contour line of the inner wall gripping foot is a circular arc line, and the central angle of the arc-shaped contour line of the first gripping foot and the central angle of the arc-shaped contour line of the second gripping foot are both less than or equal to 180°.

3. The inner diameter measuring jig according to claim 2, characterized in that: In a front view of the inner diameter measuring jig along the second direction, the straight contour line of the first gripping foot and the straight contour line of the second gripping foot are both perpendicular to the first direction.

4. The inner diameter measuring jig according to claim 2, characterized in that: The diameter of the circle where the arc-shaped outline of the first gripping foot lies is equal to the diameter of the circle where the arc-shaped outline of the second gripping foot lies.

5. The inner diameter measuring jig according to claim 2, characterized in that: A line connecting the center of the circle where the first gripping foot arc outline lies and the center of the circle where the second gripping foot arc outline lies is parallel to the first direction.

6. The inner diameter measuring jig according to claim 2, characterized in that: The central angle of the arcuate contour line of the first gripping foot is equal to the central angle of the arcuate contour line of the second gripping foot.

7. The inner diameter measuring jig according to claim 2 or 6, characterized in that: The central angle of the arc-shaped contour line of the first gripping foot and the central angle of the arc-shaped contour line of the second gripping foot are both 180°.

8. The inner diameter measuring jig according to claim 2 or 6, characterized in that: The central angle of the arc-shaped contour line of the first gripping foot and the central angle of the arc-shaped contour line of the second gripping foot are both smaller than 180°.

9. The inner diameter measuring jig according to claim 1, characterized in that: The first ruler body further includes a first inner measuring jaw, which is connected to the first end of the main caliper and is located on the second side of the main caliper. The second ruler body further includes a second inner measuring jaw, which is connected to an end of the vernier caliper close to the first inner measuring jaw and is located on the second side of the main caliper.

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