Clamp and push-pull force machine
The combination of the fixture's positioning mechanism and vacuum adsorption mechanism solves the problem of same-position fixation during semiconductor chip testing, ensuring the stability and accuracy of the test.
Patent Information
- Application Number
- CN202422525002.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-18
- Publication Date
- 2025-10-10
- Estimated Expiration
- 2034-10-18
AI Technical Summary
Existing push-pull testing machines cannot achieve uniform fixation during semiconductor chip testing, which affects detection accuracy.
The first positioning mechanism and the second positioning mechanism in the fixture cooperate with each other, and the panel to be tested is initially fixed and finally fixed by adsorption through the vacuum adsorption mechanism to ensure that the panel to be tested is stably placed.
The stable positioning and fixation of the panel to be tested is achieved, and the accuracy and repeatability of the test are improved.
Smart Images

Figure CN223426413U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of semiconductor processing equipment, in particular to a clamp and a push-pull testing machine. Background Art
[0002] In the semiconductor discrete device and IC packaging industry, after the chip is mounted and cured in the wafer mounting section, a thrust test is required to test the chip's cured structure; after wire bonding in the bonding section, a tensile test of the solder joints is required. Both tests require thrust and tensile testing machines. Before testing, the product to be tested (the semiconductor device, i.e., the chip, mounted on the lead frame) must be fixed in a designated equipment position and a certain degree of stability is required to support the entire testing process. Before the test is carried out, the board to be tested needs to be positioned so that each test can correspond to the same position to improve accuracy. However, existing push-pull testing machines only have a preliminary positioning structure and cannot fix the chip in the same position, which affects subsequent testing. Utility Model Content
[0003] The present invention aims to solve at least one of the technical problems in the prior art. To this end, the present invention provides a fixture capable of fixing the position of a plate to be tested.
[0004] The utility model also provides a push-pull testing machine with the clamp.
[0005] According to the first aspect of the present invention, the clamp comprises a substrate, a first positioning mechanism and a second positioning mechanism, a surface of the substrate is provided with a test area, the test area is provided with a plurality of adsorption holes, the substrate is provided with an adsorption air duct, one end of the adsorption air duct is connected to the plurality of adsorption holes, and the other end passes through the side of the substrate and is connected to a vacuum adsorption mechanism; the first positioning mechanism comprises two L-shaped first positioning blocks, the two first positioning blocks are slidably connected to the surface of the substrate, and are respectively located at the two ends of the test area, and the two first positioning blocks can slide toward each other synchronously, or slide relative to each other synchronously; the second positioning mechanism comprises two L-shaped second positioning blocks, the two second positioning blocks are slidably provided on the substrate, and are respectively located at the two ends of the test area, and the two second positioning blocks can slide toward each other synchronously, or slide relative to each other synchronously; wherein, the first positioning mechanism and the second positioning mechanism are located on both sides of the test area, and the second positioning mechanism can move on the substrate to approach or move away from the first positioning mechanism; wherein, the recessed positions of the first positioning block and the second positioning block are both facing the test area.
[0006] The fixture according to the embodiment of the present invention has at least the following beneficial effects: through the cooperation of the first positioning mechanism and the second positioning mechanism, the panel to be tested is initially fixed, and finally the panel to be tested is adsorbed and fixed by the vacuum adsorption mechanism to ensure that the panel to be tested is stably placed in the test area.
[0007] According to some embodiments of the present invention, the first positioning mechanism also includes two first rotating seats and a first screw, the two ends of the first screw are respectively rotatably connected to the two first rotating seats, the first positioning block is penetrated by a first screw hole, the first screw is passed through the first screw hole, and is threadedly engaged with the first screw hole, wherein the first screw takes the midpoint as the starting point, and the threads at the two ends of the first screw have opposite rotation directions.
[0008] According to some embodiments of the present invention, the second positioning mechanism also includes two second rotating seats, a sliding plate and a second screw, the sliding plate is slidingly connected to the surface of the substrate, the two ends of the second screw are respectively rotatably connected to the two second rotating seats, the second rotating seat is fixed at both ends of the sliding plate, the second positioning block is slidably connected to the sliding plate, the second positioning block is penetrated by a second screw hole, the second screw is passed through the second screw hole, and is threadedly engaged with the second screw hole, wherein the second screw takes the midpoint as the starting point, and the threads at both ends of the second screw have opposite rotation directions.
[0009] According to some embodiments of the present invention, two slide rails are provided at both ends of the base plate, and both ends of the sliding plate are slidably connected to the two slide rails respectively.
[0010] According to some embodiments of the present invention, sponge pads are provided at the recessed positions of the first positioning block and the second positioning block.
[0011] According to some embodiments of the present invention, avoidance grooves are provided at the corners of the recessed positions of the first positioning block and the second positioning block.
[0012] According to some embodiments of the present invention, the adsorption air duct includes a main air duct and multiple branch air ducts, one end of the multiple branch air ducts corresponds one-to-one to the adsorption holes, one end of the branch air duct is connected to the adsorption holes, and the other end is connected to the main air duct, and the end of the main air duct away from the branch air duct passes through the side wall of the substrate.
[0013] A push-pull testing machine according to a second embodiment of the present invention includes the clamp according to the first embodiment.
[0014] The push-pull testing machine according to the embodiment of the present invention has at least the following beneficial effects: through the cooperation of the first positioning mechanism and the second positioning mechanism, the panel to be tested is initially fixed, and finally the panel to be tested is adsorbed and fixed by the vacuum adsorption mechanism to ensure that the panel to be tested is stably placed in the test area.
[0015] Additional aspects and advantages of the present invention will be given in part in the following description and will become apparent from the following description or learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:
[0017] Figure 1 A schematic diagram of a clamp according to an embodiment of the present invention;
[0018] Figure 2 A schematic cross-sectional view of a substrate of a fixture according to one embodiment of the present invention;
[0019] Figure 3 This is a cross-sectional schematic diagram of a substrate of a clamp in another direction of an embodiment of the present invention.
[0020] 100, substrate; 110, test area; 120, adsorption hole; 130, adsorption air duct; 131, main air duct; 132, branch air duct; 140, slide rail;
[0021] 200, first positioning mechanism; 210, first positioning block; 220, first rotating seat; 230, first screw;
[0022] 300, second positioning mechanism; 310, second positioning block; 320, second rotating seat; 330, second screw; 340, sliding plate;
[0023] 400, sponge pad; 500, avoidance groove; DETAILED DESCRIPTION
[0024] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.
[0025] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.
[0026] In the description of this utility model, "several" means one or more, "many" means more than two, "greater than," "less than," and "exceed" are understood to exclude the number itself, while "above," "below," and "within" are understood to include the number itself. The use of "first" and "second" in the description is solely for the purpose of distinguishing technical features and is not to be construed as indicating or implying relative importance, implicitly specifying the number of the indicated technical features, or implicitly specifying the order of the indicated technical features.
[0027] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, and connecting should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.
[0028] Reference Figures 1 to 3 The push-pull testing machine of the present invention includes a fixture for fixing a plate to be tested, wherein the fixture includes a substrate 100, a first positioning mechanism 200 and a second positioning mechanism 300. A test area 110 is provided on the surface of the substrate 100, and a plurality of adsorption holes 120 are provided in the test area 110. An adsorption air duct 130 is built into the substrate 100. One end of the adsorption air duct 130 is connected to the plurality of adsorption holes 120, and the other end passes through the side of the substrate 100 and is connected to a vacuum adsorption mechanism; the first positioning mechanism 200 includes two L-shaped first positioning blocks 210, and the two first positioning blocks 210 are slidably connected to the surface of the substrate 100 and are respectively located on both sides of the test area 110. end, the two first positioning blocks 210 can slide toward each other synchronously, or slide relative to each other synchronously; the second positioning mechanism 300 includes two L-shaped second positioning blocks 310, the two second positioning blocks 310 can be slidably arranged on the substrate 100, and are respectively located at the two ends of the area to be tested 110, and the two second positioning blocks 310 can slide toward each other synchronously, or slide relative to each other synchronously; wherein, the first positioning mechanism 200 and the second positioning mechanism 300 are located on both sides of the area to be tested 110, and the second positioning mechanism 300 can move on the substrate 100 to approach or move away from the first positioning mechanism 200; wherein, the recessed positions of the first positioning block 210 and the second positioning block 310 are both facing the area to be tested 110.
[0029] In actual use, the following steps are used:
[0030] 1. Place the panel to be tested directly in the test area 110;
[0031] 2. Drive the two first positioning blocks 210 to move synchronously toward the direction of the panel to be tested, and adjust the position of the panel to be tested so that the first positioning blocks 210 respectively abut against the corners at both ends of the same side of the panel to be tested;
[0032] 3. Drive the second positioning mechanism 300 to move toward the panel to be tested, so that the second positioning block 310 is in a recessed position and the inner sidewall close to the side of the panel to be tested abuts against the panel to be tested;
[0033] 4. Drive the second positioning blocks 310 to move toward each other so that the second positioning blocks 310 respectively abut against the corners at both ends of the same side of the panel to be tested, and cooperate with the first positioning mechanism 200 to perform preliminary positioning on the panel to be tested;
[0034] 5. Start the vacuum adsorption mechanism to form negative pressure at the adsorption hole 120 to fix the position of the panel to be tested;
[0035] 6. Drive the first positioning blocks 210 away from each other, and drive the second positioning blocks 310 away from each other, so that the push-pull machine can perform subsequent processes.
[0036] In summary, the panel to be tested is initially fixed by the cooperation of the first positioning mechanism 200 and the second positioning mechanism 300 , and finally the panel to be tested is adsorbed and fixed by the vacuum adsorption mechanism to ensure that the panel to be tested is stably placed in the test area 110 .
[0037] In some embodiments, the first positioning mechanism 200 also includes two first rotating seats 220 and a first screw 230. The two ends of the first screw 230 are respectively rotatably connected to the two first rotating seats 220. The first positioning block 210 is penetrated by a first screw hole. The first screw 230 is passed through the first screw hole and is threadedly engaged with the first screw hole. The first screw 230 starts at the midpoint, and the threads at both ends of the first screw 230 rotate in opposite directions.
[0038] In the above step 2, since the threads at both ends of the first screw 230 rotate in opposite directions, after rotating in the same direction, the first positioning blocks 210 respectively connected to the two ends of the first screw 230 can move synchronously and approach each other, and when performing step 6, the two second positioning blocks 310 can be moved synchronously and away from each other by rotating in the other direction.
[0039] Similarly, the second positioning mechanism 300 also includes two second rotating seats 320, a sliding plate 340 and a second screw 330. The sliding plate 340 is slidably connected to the surface of the substrate 100. The two ends of the second screw 330 are respectively rotatably connected to the two second rotating seats 320. The second rotating seats 320 are fixed to the two ends of the sliding plate 340. The second positioning block 310 is slidably connected to the sliding plate 340. The second positioning block 310 is provided with a second screw hole extending through the second positioning block 310. The second screw 330 is inserted into the second screw hole and threadedly engaged with the second screw hole. The second screw 330 starts at the midpoint and the threads of the two ends of the second screw 330 rotate in opposite directions. In the above step 3, since the threads of the two ends of the second screw 330 rotate in opposite directions, after rotating in the same direction, the second positioning blocks 310 respectively connected to the two ends of the second screw 330 can move synchronously and approach each other. When performing step 6, the two second positioning blocks 310 can be moved synchronously and away from each other by rotating in the other direction.
[0040] Furthermore, two slide rails 140 are provided at both ends of the substrate 100, and the two ends of the sliding plate 340 are slidably connected to the two slide rails 140. The sliding plate 340 slides on the slide rails 140 to constrain the movement direction of the entire second positioning mechanism 300, so that the second positioning mechanism 300 can move closer to or farther away from the test area 110.
[0041] In some embodiments, in order to avoid damage to the panel to be tested, sponge pads 400 are provided at the recessed positions of the first positioning block 210 and the second positioning block 310. In addition, in order to avoid damage to the corners of the panel to be tested, avoidance grooves 500 are provided at the corners of the recessed positions of the first positioning block 210 and the second positioning block 310.
[0042] Preferably, the adsorption duct 130 includes a main duct 131 and multiple branch ducts 132. One end of each branch duct 132 corresponds to each of the adsorption holes 120. One end of each branch duct 132 is connected to the adsorption holes 120, and the other end is connected to the main duct 131. The end of the main duct 131 away from the branch duct 132 extends through the side wall of the substrate 100. By connecting multiple branch ducts 132 simultaneously through one main duct 131, vacuum is simultaneously applied to multiple adsorption holes 120, resulting in uniform suction force in the adsorption area, ensuring the stability of the panel under test.
[0043] The embodiments of the present invention are described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various changes can be made within the scope of knowledge possessed by ordinary technicians in the relevant technical field without departing from the purpose of the present invention.
Claims
1. A clamp, characterized in that: include: A substrate (100) is provided with a test area (110) on its surface, the test area (110) is provided with a plurality of adsorption holes (120), and the substrate (100) is provided with an adsorption air duct (130) built therein, one end of the adsorption air duct (130) is connected to the plurality of adsorption holes (120), and the other end thereof passes through the side of the substrate (100) and is connected to a vacuum adsorption mechanism; The first positioning mechanism (200) comprises two L-shaped first positioning blocks (210), the two first positioning blocks (210) being slidably connected to the surface of the substrate (100) and respectively located at two ends of the test area (110), and the two first positioning blocks (210) being capable of synchronously sliding toward each other or synchronously sliding relative to each other; The second positioning mechanism (300) comprises two L-shaped second positioning blocks (310), the two second positioning blocks (310) being slidably arranged on the substrate (100) and respectively located at two ends of the test area (110), and the two second positioning blocks (310) being capable of synchronously sliding toward each other or synchronously sliding relative to each other; The first positioning mechanism (200) and the second positioning mechanism (300) are located on both sides of the test area (110), and the second positioning mechanism (300) can move on the substrate (100) to approach or move away from the first positioning mechanism (200); The recessed positions of the first positioning block (210) and the second positioning block (310) are both oriented toward the area to be tested (110).
2. The clamp according to claim 1, characterized in that The first positioning mechanism (200) further comprises two first rotating seats (220) and a first screw (230), the two ends of the first screw (230) being rotatably connected to the two first rotating seats (220), the first positioning block (210) being provided with a first screw hole, the first screw (230) being passed through the first screw hole and being threadedly engaged with the first screw hole, wherein the first screw (230) takes the midpoint as a starting point, and the threads at the two ends of the first screw (230) are rotated in opposite directions.
3. The clamp according to claim 1, characterized in that The second positioning mechanism (300) further comprises two second rotating seats (320), a sliding plate (340) and a second screw (330), wherein the sliding plate (340) is slidably connected to the surface of the substrate (100), and the two ends of the second screw (330) are rotatably connected to the two second rotating seats (320), respectively, and the second rotating seat (320) is fixed to the two ends of the sliding plate (340), and the second positioning block (310) is slidably connected to the sliding plate (340), and the second positioning block (310) is provided with a second screw hole through it, and the second screw (330) is passed through the second screw hole and is threadedly engaged with the second screw hole, wherein the second screw (330) takes the midpoint as the starting point, and the threads at the two ends of the second screw (330) are rotated in opposite directions.
4. The clamp according to claim 3, characterized in that Two slide rails (140) are provided at both ends of the base plate (100), and both ends of the sliding plate (340) are slidably connected to the two slide rails (140) respectively.
5. The clamp according to claim 1, wherein: Sponge pads (400) are provided at the recessed positions of the first positioning block (210) and the second positioning block (310).
6. The clamp according to claim 5, characterized in that Avoidance grooves (500) are provided at the corners of the recessed positions of the first positioning block (210) and the second positioning block (310).
7. The clamp according to claim 1, wherein: The adsorption air duct (130) includes a main air duct (131) and multiple branch air ducts (132), one end of each of the multiple branch air ducts (132) corresponds to the adsorption hole (120), one end of each branch air duct (132) is connected to the adsorption hole (120), and the other end is connected to the main air duct (131), and the end of the main air duct (131) away from the branch air duct (132) passes through the side wall of the substrate (100).
8. Push-pull testing machine, characterized in that, The clamp comprises the clamp according to any one of claims 1 to 7.