Automatic vacuum degree adjusting system for high-vacuum coating equipment

Abstract

The utility model discloses an automatic vacuum degree regulating system for high-vacuum coating equipment, which comprises a vacuum cavity, an automatic vacuum regulating valve, a high-vacuum gate valve and a high-vacuum molecular pump, the high-vacuum molecular pump is fixed with the high-vacuum gate valve, the high-vacuum gate valve is fixed with the automatic vacuum regulating valve through a vacuum flange, and the high-vacuum molecular pump is fixed with the automatic vacuum regulating valve through a vacuum flange. The vacuum automatic regulating valve is connected with the vacuum cavity; and the flow fine adjustment assembly is composed of a plurality of sets of flow components and a driving component, and the multiple sets of flow components are symmetrically arranged on the vacuum automatic adjusting valve. According to the high-vacuum molecular pump, through the design of the automatic vacuum regulating valve, the opening and closing angle of the regulating baffle inside the regulating valve body is regulated, so that the pumping speed of the high-vacuum molecular pump is reduced, the vacuum degree is accurately controlled, and meanwhile, through the design of the flow fine-tuning assembly, the automatic vacuum regulating valve can be assisted; and the precise control of the vacuum degree is further improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of high vacuum coating, and in particular relates to a vacuum degree automatic adjustment system for high vacuum coating equipment. Background Art

[0002] Vacuum coating equipment is a device that uses vacuum evaporation technology, sputtering technology and other methods to form a thin film on the surface of an object. When the vacuum coating equipment is in operation, it has very high requirements for the vacuum degree, and different processes require different vacuum degrees, so automatic adjustment is required.

[0003] However, there are some problems with the existing technology: the existing technology is achieved by a vacuum pump and adjusting the amount of air supply, and the vacuum degree cannot be accurately adjusted, resulting in poor coating effect and certain limitations. Therefore, we propose a vacuum degree automatic adjustment system for high vacuum coating equipment. Utility Model Content

[0004] In response to the problems existing in the prior art, the purpose of the utility model is to provide a vacuum degree automatic adjustment system for high vacuum coating equipment. By designing a vacuum automatic regulating valve, the opening and closing angle of the regulating baffle inside the regulating valve body is adjusted to reduce the pumping speed of the high vacuum molecular pump and achieve precise control of the vacuum degree. At the same time, the design of the flow fine-tuning component can assist the vacuum automatic regulating valve to further improve the precise control of the vacuum degree.

[0005] The utility model is implemented as follows: a vacuum degree automatic adjustment system for high vacuum coating equipment, comprising:

[0006] A vacuum chamber, a vacuum automatic regulating valve, a high vacuum plug-in valve, and a high vacuum molecular pump, wherein the high vacuum molecular pump is fixed to the high vacuum plug-in valve, the high vacuum plug-in valve is fixed to the vacuum automatic regulating valve via a vacuum flange, and the vacuum automatic regulating valve is connected to the vacuum chamber;

[0007] A flow fine-tuning component is composed of multiple groups of flow components and driving components. The multiple groups of flow components are symmetrically arranged on the vacuum automatic regulating valve, and the driving component is arranged in the middle of the end of the vacuum automatic regulating valve. The multiple groups of flow components are all connected to the driving component in a transmission manner, so that the multiple groups of flow components are all rotated and set at the end of the vacuum automatic regulating valve through the driving component.

[0008] Optionally, the vacuum automatic regulating valve includes a regulating valve body, an regulating motor is provided on the upper surface of the regulating valve body, an regulating spindle is fixedly installed on one end of the output shaft of the regulating motor, the regulating spindle is detachably connected to an regulating baffle by screws, and the regulating baffle is rotatably installed inside the regulating valve body through the regulating spindle, two groups of sensors are provided above the regulating spindle, and multiple groups of flow components and driving components are arranged on one side of the regulating baffle.

[0009] Optionally, the flow component includes a bonding plate and multiple groups of adjustment plates, the bonding plate is fixedly installed on one side of the adjustment baffle, and the multiple groups of adjustment plates are arranged at equal distances, the multiple groups of adjustment plates are rotatably connected to the bonding plate, and the same end of the multiple groups of adjustment plates are inclined.

[0010] Optionally, a third gear is fixedly installed in the middle of the same side of multiple groups of adjustment plates, multiple groups of rotating grooves are opened on one side of the bonding plate, the third gear is rotatably installed inside the rotating groove, a linkage groove is opened inside the bonding plate, and multiple groups of rotating grooves are connected to the inside of the linkage groove, the upper surfaces of multiple groups of the third gears are meshed and connected with a third tooth plate, and the third tooth plate is slidably installed inside the linkage groove, a connecting rod is fixedly installed between two adjacent groups of third tooth plates, and one group of the third gear plates is transmission connected to the driving component.

[0011] Optionally, the driving component includes multiple groups of mounting shells, which are arranged between two symmetrically arranged groups of bonding plates, the mounting shell is fixedly connected to one side of the adjusting baffle, and multiple groups of mounting shells are rotatably connected to the first gear, both sides of the first gear are meshed with the first tooth plate, and one end of the two groups of first tooth plates away from each other is fixedly installed with a special-shaped connecting rod, and the special-shaped connecting rod is slidably installed inside the mounting shell, so that the first tooth plate is slidably installed inside the mounting shell through the special-shaped connecting rod, and connecting grooves are provided on both sides of the mounting shell, and a docking groove is provided at one end of the bonding plate, and the docking groove and the connecting groove are connected to each other, one end of the special-shaped connecting rod passes through the inside of the connecting groove to the inside of the docking groove, and one end of the special-shaped connecting rod is fixedly connected to one of the groups of third tooth plates.

[0012] Optionally, a positioning shell is fixedly installed between two adjacent groups of mounting shells, and the positioning shell is hollow, the positioning shell is fixedly connected to the adjusting baffle, a second gear is fixedly installed in the middle of the first gear, the second gear is rotatably installed inside the mounting shell, and a second tooth plate is meshed and connected to one side of the second gear, the second tooth plate is slidably installed inside the mounting shell, through holes are opened at both ends of the mounting shell, and the second tooth plate and the through holes are correspondingly arranged, the positioning shell and the through holes are correspondingly arranged, a linkage rod is fixedly installed between the two adjacent groups of second tooth plates, and the linkage rod is slidably installed inside the positioning shell.

[0013] Optionally, a protective shell is fixedly installed on the upper end of one group of mounting shells, a mounting groove is provided at the bottom of the protective shell, an electric telescopic rod is provided inside the mounting groove, and one end of the movable end of the electric telescopic rod is fixedly connected to the upper end of one group of second tooth plates.

[0014] Compared with the prior art, the beneficial effects of the present invention are:

[0015] 1. Through the design of the vacuum automatic regulating valve, the opening and closing angle of the regulating baffle inside the regulating valve body is adjusted to reduce the pumping speed of the high vacuum molecular pump and achieve precise control of the vacuum degree.

[0016] 2. Through the design of the flow fine-tuning component, the angles of multiple adjustment plates can be rotated, so that the adjustment plates can be rotated to the optimal angle according to the pumping speed, thereby assisting the vacuum automatic regulating valve, further improving the control of the pumping speed of the high vacuum molecular pump, and further improving the precise control of the vacuum degree.

[0017] Other features and advantages of the present invention will become apparent from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure provided by the utility model;

[0019] Figure 2 This is a schematic cross-sectional view of the regulating valve body provided by the utility model;

[0020] Figure 3 This is a schematic diagram of the laminating board provided by the utility model;

[0021] Figure 4 The utility model provides Figure 3 A magnified schematic diagram of point A;

[0022] Figure 5 It is a schematic diagram of the adjustment plate provided by the utility model.

[0023] In the figure: 1. Vacuum chamber; 2. Vacuum automatic regulating valve; 3. High vacuum plug-in valve; 4. High vacuum molecular pump; 5. Flow fine-tuning component; 6. Positioning shell; 7. Linkage rod; 21. Regulating valve body; 22. Regulating motor; 23. Sensor; 24. Regulating main shaft; 25. Regulating baffle; 51. Fitting plate; 52. Driving component; 5201. Special-shaped connecting rod; 5202. First tooth plate; 5203. Mounting shell; 5204. Second tooth plate; 5205. First gear; 5206. Second gear; 53. Protective shell; 54. Electric telescopic rod; 55. Adjustment plate; 56. Third tooth plate; 57. Third gear; 58. Connecting rod. DETAILED DESCRIPTION

[0024] In order to further understand the content, features and effects of the present invention, the following embodiments are given as examples and described in detail with reference to the accompanying drawings.

[0025] like Figures 1 to 5 As shown, an embodiment of the present invention provides a vacuum degree automatic adjustment system for high vacuum coating equipment, comprising: a vacuum chamber 1, a vacuum automatic adjustment valve 2, a high vacuum plug-in valve 3 and a high vacuum molecular pump 4, wherein the high vacuum molecular pump 4 is fixed to the high vacuum plug-in valve 3, the high vacuum plug-in valve 3 is fixed to the vacuum automatic adjustment valve 2 through a vacuum flange, and the vacuum automatic adjustment valve 2 is connected to the vacuum chamber 1; the vacuum automatic adjustment valve 2 comprises a adjustment valve body 21, an adjustment motor 22 is provided on the upper surface of the adjustment valve body 21, an adjustment spindle 24 is fixedly installed on one end of the output shaft of the adjustment motor 22, the adjustment spindle 24 is detachably connected to an adjustment baffle 25 by screws, and the adjustment baffle 25 is rotatably installed inside the adjustment valve body 21 through the adjustment spindle 24, two sets of sensors 23 are provided above the adjustment spindle 24, and multiple sets of flow components and drive components 52 are all provided on one side of the adjustment baffle 25;

[0026] like Figures 1 to 2 As shown, through the mutual cooperation of the regulating valve body 21, the regulating motor 22, the sensor 23, the regulating spindle 24 and the regulating baffle 25, the opening and closing angle of the regulating baffle 25 inside the regulating valve body 21 can be adjusted by rotating the regulating motor 22 in cooperation with the regulating spindle 24 to reduce the pumping speed of the high vacuum molecular pump 4 and achieve precise control of the vacuum degree.

[0027] The flow fine-tuning component 5 is composed of multiple groups of flow components and a driving component 52. The multiple groups of flow components are symmetrically arranged on the vacuum automatic regulating valve 2, and the driving component 52 is arranged in the middle of the end of the vacuum automatic regulating valve 2. The multiple groups of flow components are all connected to the driving component 52 by transmission, so that the multiple groups of flow components are all rotated and set at the end of the vacuum automatic regulating valve 2 through the driving component 52.

[0028] like Figures 1 to 5 As shown, by the design that multiple groups of flow components are rotated at the end of the vacuum automatic regulating valve 2 through the driving component 52, the multiple groups of flow components can rotate synchronously to fine-tune the speed of vacuum gas flow, thereby further improving the control accuracy of the vacuum degree on the basis of the vacuum automatic regulating valve 2.

[0029] Furthermore, the flow component includes a laminating plate 51 and multiple sets of adjustment plates 55. The laminating plate 51 is fixedly mounted on one side of the adjustment baffle 25. The multiple sets of adjustment plates 55 are equidistantly arranged. The multiple sets of adjustment plates 55 are rotatably connected to the laminating plate 51. The same end of the multiple sets of adjustment plates 55 is inclined.

[0030] like Figures 1 to 5 As shown, the same end of multiple groups of adjustment plates 55 are designed to be inclined, so that when the gas flows, it can flow along the inclined end of the adjustment plate 55. Therefore, it can effectively avoid excessive resistance during gas flow, resulting in unsmooth gas flow.

[0031] Furthermore, a third gear 57 is fixedly mounted on the middle portion of the same side of the multiple groups of adjustment plates 55. Multiple groups of rotating grooves are provided on one side of the laminating plate 51. The third gear 57 is rotatably mounted inside the rotating grooves. A linkage groove is provided inside the laminating plate 51, and the multiple groups of rotating grooves are all connected to the inside of the linkage grooves. The upper surfaces of the multiple groups of third gears 57 are meshedly connected with a third tooth plate 56, and the third tooth plate 56 is slidably mounted inside the linkage groove. A connecting rod 58 is fixedly mounted between two adjacent groups of third tooth plates 56, and one group of the third tooth plates 56 is transmission-connected to the driving component 52.

[0032] like Figures 1 to 5 As shown, by the design of fixing a connecting rod 58 between two adjacent sets of third tooth plates 56, when only one set of the third tooth plates 56 moves, the remaining multiple sets of third tooth plates 56 can move synchronously, thereby achieving synchronous rotation of multiple sets of third gears 57. Therefore, multiple sets of adjustment plates 55 can rotate synchronously and in the same direction, thereby further improving the precise control of the vacuum degree.

[0033] Furthermore, the driving component 52 includes multiple groups of mounting shells 5203, which are arranged between two groups of symmetrically arranged fitting plates 51, and the mounting shells 5203 are fixedly connected to one side of the adjusting baffle 25, and the multiple groups of mounting shells 5203 are rotatably connected to the first gear 5205, and the first gear 5205 is meshed with the first tooth plate 5202 on both sides, and the two groups of first tooth plates 5202 are fixedly installed with a special-shaped connecting rod 5201 at one end away from each other, and the special-shaped connecting rod 5201 is slidably installed in the mounting shell 5203, so that the first tooth plate 5202 is slidably installed in the mounting shell 5203 through the special-shaped connecting rod 5201. Connecting grooves are provided on both sides of the mounting shell 5203, and a docking groove is provided at one end of the fitting plate 51, and the docking groove and the connecting groove are connected to each other. One end of the special-shaped connecting rod 5201 passes through the connecting groove The inside of the groove is connected to the inside of the docking groove, and one end of the special-shaped connecting rod 5201 is fixedly connected to one of the third tooth plates 56; a positioning shell 6 is fixedly installed between two adjacent groups of mounting shells 5203, and the positioning shell 6 is hollow, the positioning shell 6 is fixedly connected to the adjusting baffle 25, a second gear 5206 is fixedly installed in the middle of the first gear 5205, the second gear 5206 is rotatably installed inside the mounting shell 5203, and one side of the second gear 5206 is meshed and connected with the second tooth plate 5204, the second tooth plate 5204 is slidably installed inside the mounting shell 5203, through holes are provided at both ends of the mounting shell 5203, and the second tooth plate 5204 is corresponding to the through hole, the positioning shell 6 is corresponding to the through hole, a linkage rod 7 is fixedly installed between the two adjacent groups of second tooth plates 5204, and the linkage rod 7 is slidably installed inside the positioning shell 6;

[0034] like Figures 1 to 5 As shown, by the design of fixing a linkage rod 7 between two adjacent sets of second tooth plates 5204, multiple sets of second tooth plates 5204 can move up and down synchronously. At this time, multiple sets of second gears 5206 can rotate synchronously, so that the first gear 5205 drives the two sets of first tooth plates 5202 to move in opposite directions, thereby realizing the simultaneous rotation of multiple sets of adjustment plates 55 that are symmetrically and equidistantly arranged.

[0035] In summary, by using simple gear transmission, the synchronous transmission of multiple groups of adjustment plates 55 can be achieved, the gas flow speed can be controlled more accurately, and the overall compact structure is simple, which is convenient for later maintenance.

[0036] Furthermore, a protective shell 53 is fixedly mounted on the upper end of one of the mounting shells 5203. A mounting slot is provided at the bottom of the protective shell 53. An electric telescopic rod 54 is provided inside the mounting slot. One end of the movable end of the electric telescopic rod 54 is fixedly connected to the upper end of one of the second tooth plates 5204.

[0037] like Figures 1 to 5As shown, through the design in which one end of the movable end of the electric telescopic rod 54 is fixedly connected to the upper end of one group of second tooth plates 5204, the electric telescopic rod 54 can drive all the second tooth plates 5204 to move up and down through the linkage rod 7 and one group of second tooth plates 5204, thereby realizing the synchronous rotation angle of all adjustment plates 55.

[0038] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vacuum degree automatic adjustment system for high vacuum coating equipment, characterized by: include: A vacuum chamber (1), a vacuum automatic regulating valve (2), a high vacuum plug valve (3) and a high vacuum molecular pump (4), wherein the high vacuum molecular pump (4) is fixed to the high vacuum plug valve (3), the high vacuum plug valve (3) is fixed to the vacuum automatic regulating valve (2) via a vacuum flange, and the vacuum automatic regulating valve (2) is connected to the vacuum chamber (1); A flow fine-tuning assembly (5) is provided, wherein the flow fine-tuning assembly (5) is composed of a plurality of flow components and a drive component (52), wherein the plurality of flow components are symmetrically arranged on the vacuum automatic regulating valve (2), and the drive component (52) is arranged in the middle of the end of the vacuum automatic regulating valve (2), and the plurality of flow components are all connected to the drive component (52) in a transmission manner, so that the plurality of flow components are all arranged to rotate and move at the end of the vacuum automatic regulating valve (2) through the drive component (52).

2. The vacuum degree automatic adjustment system for high vacuum coating equipment according to claim 1, characterized in that: The vacuum automatic regulating valve (2) comprises a regulating valve body (21), an regulating motor (22) is provided on the upper surface of the regulating valve body (21), an regulating main shaft (24) is fixedly mounted on one end of the output shaft of the regulating motor (22), the regulating main shaft (24) is detachably connected to an regulating baffle (25) via a screw, and the regulating baffle (25) is rotatably mounted inside the regulating valve body (21) via the regulating main shaft (24), two groups of sensors (23) are provided above the regulating main shaft (24), and a plurality of groups of the flow components and the driving components (52) are all arranged on one side of the regulating baffle (25).

3. The vacuum degree automatic adjustment system for high vacuum coating equipment according to claim 2, characterized in that: The flow component includes a bonding plate (51) and multiple groups of adjustment plates (55), wherein the bonding plate (51) is fixedly mounted on one side of the adjustment baffle (25), and the multiple groups of adjustment plates (55) are arranged at equal intervals, and the multiple groups of adjustment plates (55) are all rotatably connected to the bonding plate (51), and the same end of the multiple groups of adjustment plates (55) are all inclined.

4. The vacuum degree automatic adjustment system for high vacuum coating equipment according to claim 3, characterized in that: A third gear (57) is fixedly mounted in the middle of the same side of the plurality of adjustment plates (55), a plurality of rotation grooves are provided on one side of the bonding plate (51), the third gear (57) is rotatably mounted inside the rotation groove, a linkage groove is provided inside the bonding plate (51), and the plurality of rotation grooves are connected to the inside of the linkage groove, the upper surfaces of the plurality of third gears (57) are meshedly connected with a third tooth plate (56), and the third tooth plate (56) is slidably mounted inside the linkage groove, a connecting rod (58) is fixedly mounted between two adjacent third tooth plates (56), and one of the third tooth plates (56) is transmission-connected to the driving component (52).

5. The vacuum degree automatic adjustment system for high vacuum coating equipment according to claim 4, characterized in that: The driving component (52) includes multiple groups of mounting shells (5203), the mounting shells (5203) are arranged between two groups of symmetrically arranged fitting plates (51), the mounting shells (5203) are fixedly connected to one side of the adjustment baffle (25), and the multiple groups of mounting shells (5203) are rotatably connected to the first gear (5205) inside, the first gear (5205) is meshed with the first tooth plate (5202) on both sides, and the ends of the two groups of first tooth plates (5202) away from each other are fixedly installed with a special-shaped connecting rod (5201), the The special-shaped connecting rod (5201) is slidably mounted inside the mounting shell (5203), so that the first tooth plate (5202) is slidably mounted inside the mounting shell (5203) through the special-shaped connecting rod (5201). Both sides of the mounting shell (5203) are provided with connecting grooves, and one end of the fitting plate (51) is provided with a docking groove, and the docking groove and the connecting groove are arranged to be interconnected. One end of the special-shaped connecting rod (5201) passes through the interior of the connecting groove to the interior of the docking groove, and one end of the special-shaped connecting rod (5201) is fixedly connected to one of the sets of third tooth plates (56).

6. The vacuum degree automatic adjustment system for high vacuum coating equipment according to claim 5, characterized in that: A positioning shell (6) is fixedly installed between two adjacent groups of mounting shells (5203), and the positioning shell (6) is hollow. The positioning shell (6) is fixedly connected to the adjustment baffle (25). A second gear (5206) is fixedly installed in the middle of the first gear (5205). The second gear (5206) is rotatably installed inside the mounting shell (5203), and a second tooth plate (5204) is meshedly connected to one side of the second gear (5206). The second tooth plate (5204) is slidably installed inside the mounting shell (5203). Through holes are provided at both ends of the mounting shell (5203), and the second tooth plate (5204) is correspondingly arranged to the through holes. The positioning shell (6) is correspondingly arranged to the through holes. A linkage rod (7) is fixedly installed between the two adjacent groups of second tooth plates (5204), and the linkage rod (7) is slidably installed inside the positioning shell (6).

7. The vacuum degree automatic adjustment system for high vacuum coating equipment according to claim 6, characterized in that: A protective shell (53) is fixedly mounted on the upper end of one of the mounting shells (5203), a mounting slot is provided at the bottom of the protective shell (53), an electric telescopic rod (54) is provided inside the mounting slot, and one end of the movable end of the electric telescopic rod (54) is fixedly connected to the upper end of one of the second tooth plates (5204).

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