Heating type helium purification device

Abstract

The utility model relates to the technical field of helium purification, in particular to a heating type helium purification device which comprises a shell, a first cover body, a gas inlet pipe, a gas outlet pipe, a heating rod, a second cover body, a heat preservation part, a reaction pipe and an exhaust pipe, the first cover body and the second cover body are connected with the shell, the heat preservation part is connected with the shell, two mounting cavities are formed in the heat preservation part, and the reaction pipe and the exhaust pipe are connected with the two mounting cavities respectively; the air inlet pipe and the air outlet pipe are connected with the first cover body; the heating rod is connected with the second cover, and getter is arranged on the inner wall of the reaction tube. The zirconium getters are arranged on the inner walls of the reaction tubes, so that other gases such as hydrogen, oxygen and nitrogen in the gases can be absorbed, inert gases are not absorbed, and the gases are effectively purified; the ends of the bolts and the nuts are respectively pressed on the corresponding fixing plates and the fixing parts, so that the two cover bodies are convenient to mount and dismount, the internal reaction tube and the heating rod are convenient to replace, and the effect of the getter is ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to helium gas purification technical field, concretely is a kind of heating type helium gas purification device. BACKGROUND

[0002] Helium is a very light colorless, odorless monatomic gas at room temperature, and it is generally difficult to react with other substances due to its chemical inertness. It has a wide range of applications in the fields of semiconductors, medical instruments, and aerospace industries. As the demand for helium in these fields increases, there is an urgent need to improve the purity of helium. Currently, the highest purity gas available for purchase is mostly 6N grade gas, which cannot meet the use of higher grade helium, and an additional purifier is required, and the purifier body is large and inconvenient to transport.

[0003] Chinese patent with publication number CN118846971A discloses a compact inert gas purification device, which solves the technical problems of low purification efficiency, uneven heating, large occupation of the purification device, inconvenient installation, and low recovery rate after purification. The present application comprises a protective cover, a purification reaction container, and an inlet pipe and an exhaust pipe arranged thereon; the purification reaction container is filled with a purification reagent; the inner ends of the inlet pipe and the exhaust pipe are located at or near the two ends of the purification reaction container; one end face of the purification reaction container is provided with an external heating cavity, and a heating element is installed in the external heating cavity; the gap between the purification reaction container and the protective cover is filled with a heat insulation material. The present application adopts an internally recessed external heating cavity, and the heat generated by the heating element spreads outward from the center of the device, resulting in high heating efficiency and uniform heating, and at the same time, the surface temperature of the protective cover is reduced, the safety of the entire device is improved, and the problems of low heating efficiency and uneven heating of existing purification devices are effectively solved.

[0004] However, the above technical solution has the following defects: the purification reagent in the above compact inert gas purification device deteriorates after long-term use, and is inconvenient to replace, the temperature in the reagent is uniform, and the reaction temperature of different gases is different, resulting in incomplete gas purification. INVENTION CONTENTS

[0005] The utility model aims at the problems in the background art and proposes a heating type helium gas purification device.

[0006] The technical solution of the utility model is a heating type helium gas purification device, which comprises a shell, a first cover, an inlet pipe, an outlet pipe, a heating rod, a second cover, a heat preservation part, a reaction tube and an exhaust pipe.

[0007] The first cover and the second cover are connected to the two ends of the shell, the heat preservation part is connected to the inner wall of the shell, two mounting cavities are provided in the heat preservation part, and the reaction tube and the exhaust pipe are connected to the two mounting cavities respectively.

[0008] The air inlet pipe and the air outlet pipe are connected with the first cover body, the air inlet pipe is communicated with the reaction pipe, and the air outlet pipe is communicated with the inside of the exhaust pipe.

[0009] The heating rod is connected with the second cover body, the heating rod extends into the reaction pipe, and the inner wall of the reaction pipe is provided with a getter.

[0010] Preferably, the inner wall of the reaction pipe is in a wave shape.

[0011] Preferably, the fixing part, the first fixing plate, the second fixing plate, the bolt and the nut are further included.

[0012] The fixing part is provided with a plurality of fixing parts and is connected with two ends of the shell, the first fixing plate is provided with two first fixing plates and is connected with two ends of the first cover body, the bolt and the nut are provided with a plurality of bolts and nuts, and the bolt is screwed and connected with the nut through the first fixing plate and the corresponding fixing part.

[0013] The second fixing plate is provided with two second fixing plates and is connected with two ends of the second cover body, and the bolt is screwed and connected with the nut through the second fixing plate and the corresponding fixing part.

[0014] The first cover body and the second cover body are respectively pressed on two ends of the shell.

[0015] Preferably, the fixing part is in an L-shaped projection shape.

[0016] Preferably, the limiting part is arranged in the two mounting cavities of the heat preservation part, and the limiting part is located at one end close to the second cover body.

[0017] The first cover body is provided with a first sealing part, the first sealing part is pressed on the end of the reaction pipe and the exhaust pipe, and the other end of the reaction pipe and the exhaust pipe is respectively pressed on the corresponding limiting part.

[0018] The second cover body is provided with a second sealing part, the second sealing part is in a back-shaped projection shape, and the second sealing part is pressed on the end of the heat preservation part.

[0019] Preferably, the getter in the inner wall of the reaction pipe is a zirconium-based non-evaporable getter.

[0020] Preferably, the length of the heating rod is less than the length of the reaction pipe.

[0021] Compared with the prior art, the above technical scheme of the utility model has the following beneficial technical effects:

[0022] 1. In the utility model, the inner wall of the reaction pipe is provided with a zirconium-based getter, which can absorb hydrogen, oxygen and other gases in the gas, but not absorb inert gas, thereby effectively purifying the gas.

[0023] 2. In the utility model, the end of the bolt and the nut are respectively pressed on the corresponding fixing plate and the fixing part, so that the two cover bodies are convenient to install and disassemble, and the internal reaction pipe and the heating rod are convenient to replace, thereby guaranteeing the effect of the getter.

[0024] 3. The length of the heating rod in the present invention is shorter than that of the reaction tube, so that the temperature of the part close to the heating rod in the reaction tube is higher than that of the part far away from the heating rod, so that a temperature gradient is naturally formed in the reaction tube, and different gases can be better absorbed at different temperatures. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Fig. 1 This is a three-dimensional diagram of an embodiment of the present invention.

[0026] Fig. 2 This is a structural schematic diagram of a heating type helium purification device proposed in the utility model.

[0027] Fig. 3 This is a cross-sectional view of a heating type helium purification device proposed by the utility model.

[0028] Figure numerals: 1. shell; 2. first cover; 3. air inlet pipe; 4. air outlet pipe; 5. fixing part; 6. heating rod; 7. first fixing plate; 8. second cover; 9. second fixing plate; 10. heat preservation part; 11. first sealing part; 12. reaction tube; 13. second sealing part; 14. exhaust pipe; 15. bolt; 16. nut; 17. limiting part. DETAILED DESCRIPTION

[0029] Example 1

[0030] like Figs. 1-3 As shown, the utility model proposes a heating type helium purification device, including a shell 1, a first cover 2, an air inlet pipe 3, an air outlet pipe 4, a heating rod 6, a second cover 8, a heat preservation part 10, a reaction tube 12 and an exhaust pipe 14;

[0031] The first cover 2 and the second cover 8 are connected to both ends of the shell 1. The heat preservation part 10 is connected to the inner wall of the shell 1. The heat preservation part 10 is provided with two installation cavities. The reaction tube 12 and the exhaust pipe 14 are connected to the two installation cavities respectively. The inner wall of the reaction tube 12 is wavy, so that the contact area between the gas and the inner wall of the reaction tube 12 is larger.

[0032] The air inlet pipe 3 and the air outlet pipe 4 are both connected to the first cover 2 , the air inlet pipe 3 is connected to the reaction tube 12 , and the air outlet pipe 4 is connected to the inside of the exhaust pipe 14 ;

[0033] The heating rod 6 is connected to the second cover 8 and extends into the reaction tube 12. The inner wall of the reaction tube 12 is provided with a getter.

[0034] Furthermore, the length of the heating rod 6 is smaller than the length of the reaction tube 12, so that the temperature of the part of the reaction tube 12 close to the heating rod 6 is higher than that of the part far away from the heating rod 6, so that a temperature gradient is naturally formed in the reaction tube 12, and different gases can be better absorbed at different temperatures.

[0035] Further, the inner wall of the reaction tube 12 is provided with a zirconium-based non-evaporable getter.

[0036] In the utility model, the gas enters the reaction tube 12 from the air inlet pipe 3, is purified in the reaction tube 12, then enters the air outlet pipe 14 from the end far from the air inlet pipe 3 and is discharged from the air outlet pipe 4; the reaction tube 12 is provided with a zirconium-based getter, which can absorb hydrogen, oxygen and other gases in the gas, but not inert gas, so that the gas is effectively purified.

[0037] Example Two

[0038] As shown in Figs. 1-2 the utility model discloses a kind of heating type helium purification devices, compared with example one, the embodiment also includes fixed part 5, first fixed plate 7, second fixed plate 9, bolt 15 and nut 16;

[0039] Fixed part 5 is provided with multiple and is connected at the both ends of shell 1, first fixed plate 7 is provided with two and is connected the both ends of first cover 2, bolt 15 and nut 16 are all provided with multiple, bolt 15 is screwed with nut 16 with the threaded cooperation connection of passing through first fixed plate 7 and corresponding fixed part 5;

[0040] Second fixed plate 9 is provided with two and is connected at the both ends of second cover 8, bolt 15 is screwed with nut 16 with the threaded cooperation connection of passing through second fixed plate 9 and corresponding fixed part 5;

[0041] First cover 2 and second cover 8 are respectively pressed in the both ends of shell 1.

[0042] Further, fixed part 5 is projected L-shaped.

[0043] In the embodiment, the end of bolt 15 and nut 16 are respectively pressed on corresponding fixed plate and fixed part 5, so that two covers are convenient to install and disassemble, and internal reaction tube 12 and heating rod 6 are convenient to replace.

[0044] Example Three

[0045] As shown in Figs. 2-3 the utility model discloses a kind of heating type helium purification devices, compared with example one, the embodiment is provided with limiting portion 17 in the two mounting cavities of heat preservation part 10, limiting portion 17 is located at the end close to second cover 8;

[0046] First sealing portion 11 is arranged on first cover 2, and the end of reaction tube 12 and air outlet pipe 14 is pressed on first sealing portion 11, and the other end of reaction tube 12 and air outlet pipe 14 is pressed on corresponding limiting portion 17.

[0047] The second cover 8 is provided with a second sealing part 13, which is in the shape of a back-to-back Chinese character and is pressed against the end of the heat preservation part 10, so that the reaction tube 12 and the exhaust tube 14 are in communication with each other at the end of the second cover 8.

[0048] In this embodiment, the first sealing part 11 is pressed against the ends of the reaction tube 12 and the exhaust tube 14, so that the reaction tube 12 and the exhaust tube 14 cannot be in communication with each other at the end of the first cover 2, and the reacted gas is discharged from the lower end of the reaction tube 12 into the exhaust tube 14.

[0049] The above has described the embodiments of the present application in detail in combination with the drawings, but the present application is not limited to this, and various changes can be made within the knowledge of those skilled in the art without departing from the purpose of the present application.

Claims

1. A heating type helium purification device, characterized in that: It includes a housing (1), a first cover (2), an intake pipe (3), an exhaust pipe (4), a heating rod (6), a second cover (8), a heat preservation part (10), a reaction tube (12) and an exhaust pipe (14); The first cover (2) and the second cover (8) are connected to both ends of the housing (1), the heat preservation part (10) is connected to the inner wall of the housing (1), there are two installation cavities in the heat preservation part (10), and the reaction tube (12) and the exhaust pipe (14) are respectively connected to the two installation cavities; Both the intake pipe (3) and the exhaust pipe (4) are connected to the first cover (2), the intake pipe (3) is communicated with the reaction tube (12), and the exhaust pipe (4) is internally communicated with the exhaust pipe (14); The heating rod (6) is connected to the second cover (8), the heating rod (6) extends into the reaction tube (1), and a getter is provided on the inner wall of the reaction tube (12).

2. A heating type helium purification device according to claim 1, characterized in that: The inner wall shape of the reaction tube (12) is wavy.

3. A heating type helium purification device according to claim 1, characterized in that: It also includes a fixing part (5), a first fixing plate (7), a second fixing plate (9), bolts (15) and nuts (16); There are multiple fixing parts (5) which are connected to both ends of the housing (1), there are two first fixing plates (7) which are connected to both ends of the first cover (2), there are multiple bolts (15) and nuts (16), and the bolts (15) pass through the first fixing plate (7) and the corresponding fixing part (5) and are threadedly connected with the nuts (16); There are two second fixing plates (9) which are connected to both ends of the second cover (8), and the bolts (15) pass through the second fixing plate (9) and the corresponding fixing part (5) and are threadedly connected with the nuts (16); The first cover (2) and the second cover (8) are respectively pressed against both ends of the housing (1).

4. A heating type helium purification device according to claim 3, characterized in that: The projected shape of the fixing part (5) is L-shaped.

5. A heating type helium purification device according to claim 1, characterized in that: Limit parts (17) are provided in both installation cavities on the heat preservation part (10), and the limit parts (17) are located at one end close to the second cover (8); A first sealing part (11) is provided on the first cover (2), the first sealing part (11) is pressed against the ends of the reaction tube (12) and the exhaust pipe (1), and the other ends of the reaction tube (12) and the exhaust pipe (14) are respectively pressed against the corresponding limit parts (17); A second sealing part (13) is provided on the second cover (8), the projected shape of the second sealing part (13) is a square frame shape, and the second sealing part (13) is pressed against the end of the heat preservation part (10).

6. A heating type helium purification device according to claim 1, characterized in that: The getter on the inner wall of the reaction tube (chose a zirconium-based non-evaporable getter).

7. The heating type helium purification device according to claim 1, characterized in that: The length of the heating rod (6) is less than the length of the reaction tube (12).

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