Single crystal furnace filtering tank cleaning device and single crystal furnace

Abstract

The utility model provides a single crystal furnace filtering tank cleaning device and a single crystal furnace, and relates to the technical field of single crystal silicon production. The single crystal furnace filtering tank cleaning device comprises an air gun, a telescopic pipe, an impeller and a flexible cleaning piece, the first end of the telescopic pipe is connected to an air outlet of the air gun, and airflow sprayed out of the air outlet of the air gun is sprayed out from the second end of the telescopic pipe through the telescopic pipe; the impeller is rotatably mounted at the second end of the telescopic pipe, and the impeller is configured to rotate under the impact of airflow ejected from the second end of the telescopic pipe; the flexible cleaning piece is connected to the periphery of the impeller, and the flexible cleaning piece is configured to swing under the driving of the impeller so as to clean a filter bag of the filter tank. The utility model provides a single crystal furnace filtering tank cleaning device and a single crystal furnace, which are good in cleaning effect.

Description

TECHNICAL FIELD

[0001] The utility model relates to single crystal silicon production technical field especially, relates to a kind of single crystal furnace filter tank cleaning device and single crystal furnace. BACKGROUND

[0002] Single crystal furnace filter tank can filter single crystal silicon molten liquid, to ensure the purity of the single crystal silicon rod produced, single crystal furnace filter tank is used after a period of time, impurities are left on the filter bag therein, in order to guarantee the filtering effect of filter bag, the filter bag in filter tank needs to be cleaned.

[0003] In the prior art, the filter bag in the filter tank is generally cleaned by a high-pressure air gun. However, due to the limitation of the structure of the high-pressure air gun, the cleaning is not thorough. SUMMARY

[0004] To solve at least one problem mentioned in the background art, the utility model provides a single crystal furnace filter tank cleaning device and single crystal furnace, and the cleaning effect is good.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0006] In a first aspect, the utility model provides a single crystal furnace filter tank cleaning device, which comprises an air gun, an extension tube, an impeller and a flexible cleaning member. The first end of the extension tube is connected to the air outlet of the air gun. The airflow sprayed from the air outlet of the air gun is sprayed from the second end of the extension tube through the extension tube.

[0007] The impeller is rotatably installed at the second end of the extension tube. The impeller is configured to rotate under the impact of the airflow sprayed from the second end of the extension tube.

[0008] The flexible cleaning member is connected to the outer periphery of the impeller. The flexible cleaning member is configured to swing under the driving of the impeller to clean the filter bag of the filter tank.

[0009] As an optional implementation, the extension tube comprises a first air guide tube and a second air guide tube. The first end of the first air guide tube is fixedly connected to the air outlet of the air gun. The first end of the second air guide tube is slidably arranged in the first air guide tube.

[0010] As an optional implementation, the extension tube further comprises a third air guide tube. The first end of the third air guide tube is slidably arranged in the second air guide tube. The impeller is connected to the second end of the third air guide tube.

[0011] As an optional implementation, the outer wall of the first end of the second air guide tube has a first flange. The inner wall of the second end of the first air guide tube has a second flange. When the second air guide tube is extended to the longest from the first air guide tube, the first flange abuts against the second flange along the axial direction of the extension tube.

[0012] The outer wall of the first end of the third air duct has a third flange, and the inner wall of the second end of the second air duct has a fourth flange, and when the third air duct is extended to the longest from the second air duct, the third flange abuts against the fourth flange along the axial direction of the telescopic tube.

[0013] As an optional implementation, the first sealing ring is arranged between the outer wall of the second air duct and the inner wall of the first air duct, and the second sealing ring is arranged between the outer wall of the third air duct and the inner wall of the second air duct.

[0014] As an optional implementation, the first sealing ring abuts against the first flange along the axial direction of the second air duct, and the second sealing ring abuts against the third flange along the axial direction of the third air duct.

[0015] As an optional implementation, the inner wall of the second end of the third air duct has a fifth flange.

[0016] As an optional implementation, the utility model further comprises a bearing seat, a bearing and a connecting shaft, the bearing seat is installed on the second end of the third air duct, the outer ring of the bearing is installed on the bearing seat, the inner ring of the bearing is installed on the first end of the connecting shaft, the impeller is installed on the second end of the connecting shaft, and the center line of the impeller and the center line of the third air duct have a spacing.

[0017] As an optional implementation, the flexible cleaning member has a plurality of flexible cleaning members, and the plurality of flexible cleaning members are uniformly distributed on the outer periphery of the impeller.

[0018] In the second aspect, the utility model provides a single crystal furnace, including single crystal furnace filter tank cleaning device in the first aspect.

[0019] The single crystal furnace filter tank cleaning device provided by the utility model comprises an air gun, an extensible pipe, an impeller and a flexible cleaning piece, the first end of the extensible pipe is connected to the air outlet of the air gun, the airflow sprayed from the air outlet of the air gun is sprayed from the second end of the extensible pipe through the extensible pipe, the impeller is rotatably installed at the second end of the extensible pipe, the impeller is configured to rotate under the impact of the airflow sprayed from the second end of the extensible pipe, the flexible cleaning piece is connected to the outer periphery of the impeller, and the flexible cleaning piece is configured to swing under the driving of the impeller so as to clean the filter bag of the filter tank. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are some embodiments of the present utility model, and other drawings can be obtained by those skilled in the art without creative labor under the premise of the drawings.

[0021] Figure 1 The first structure schematic view of the single crystal furnace filter tank cleaning device provided by the embodiments of the present utility model;

[0022] Figure 2 The first structure schematic view of the single crystal furnace filter tank cleaning device provided by the embodiments of the present utility model; Figure 1 The enlarged view of A in the middle;

[0023] Figure 3 The second structure schematic view of the single crystal furnace filter tank cleaning device provided by the embodiments of the present utility model;

[0024] Figure 4 The third structure schematic view of the single crystal furnace filter tank cleaning device provided by the embodiments of the present utility model;

[0025] Figure 5 The third structure schematic view of the single crystal furnace filter tank cleaning device provided by the embodiments of the present utility model; Figure 4 The enlarged view of B in the middle;

[0026] Figure 6The structure diagram of the telescopic pipe in the single crystal furnace filtering tank cleaning device is provided.

[0027] Mark explanation:

[0028] 100-single crystal furnace filtering tank cleaning device;

[0029] 110-gas gun;

[0030] 120-telescopic pipe;

[0031] 121-first gas guide pipe;

[0032] 1211-second flange;

[0033] 122-second gas guide pipe;

[0034] 1221-first flange;

[0035] 1222-fourth flange;

[0036] 123-third gas guide pipe;

[0037] 1231-third flange;

[0038] 1232-fifth flange;

[0039] 130-impeller;

[0040] 140-flexible cleaning piece;

[0041] 150-first sealing ring;

[0042] 160-second sealing ring;

[0043] 170-bearing seat;

[0044] 180-bearing;

[0045] 190-connecting shaft. Specific embodiments

[0046] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0047] In the application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "vertical", "horizontal", "transverse", "longitudinal" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the utility model and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0048] In addition, in addition to indicating the orientation or positional relationship, the above-mentioned terms can also be used to indicate other meanings, for example, the term "upper" can also be used to indicate a certain dependent relationship or connection relationship in some cases. For those skilled in the art, the specific meaning of these terms in the utility model can be understood according to the specific situation.

[0049] In addition, the terms "mounting", "setting", "provided with", "connecting", "connected" should be broadly understood. For example, it can be fixedly connected, detachably connected, or integrally constructed; it can be mechanically connected or electrically connected; it can be directly connected, or indirectly connected through an intermediate medium, or internal communication between two devices, elements or components. For those skilled in the art, the specific meaning of the above-mentioned terms in the utility model can be understood according to the specific situation.

[0050] In addition, the terms "first", "second" and the like are mainly used to distinguish different devices, elements or components (the specific type and structure may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise stated, the meaning of "multiple" is two or more.

[0051] The filter bag in the single crystal furnace filter tank will have impurities left on it after a period of use. In order to ensure the filtering effect of the filter bag, the filter bag in the filter tank needs to be cleaned. At present, the filter bag in the filter tank is generally cleaned by a high-pressure air gun. However, due to the limitation of the structure of the high-pressure air gun, there is a problem of incomplete cleaning.

[0052] Therefore, the utility model provides a single crystal furnace filter tank cleaning device, including air gun, telescopic tube, vane and flexible cleaning spare, the first end of telescopic tube is connected in the air outlet of air gun, the vane rotatably is installed in the second end of telescopic tube, and the flexible cleaning spare is connected to the outer periphery of vane.

[0053] Figure 1 The first structure diagram of the single crystal furnace filter tank cleaning device provided by the utility model embodiment is shown in Fig. Figure 2 The second structure diagram of the single crystal furnace filter tank cleaning device provided by the utility model embodiment is shown in Fig. Figure 1 The enlarged view of the position A in Fig. Figure 3 The third structure diagram of the single crystal furnace filter tank cleaning device provided by the utility model embodiment is shown in Fig. Figure 4 The structure diagram of the telescopic tube in the single crystal furnace filter tank cleaning device provided by the utility model embodiment is shown in Fig. Figure 5 The enlarged view of the position B in Fig. Figure 4 The structure diagram of the telescopic tube in the single crystal furnace filter tank cleaning device provided by the utility model embodiment is shown in Fig. Figure 6 The structure diagram of the telescopic tube in the single crystal furnace filter tank cleaning device provided by the utility model embodiment is shown in Fig.

[0054] The single crystal furnace filter tank cleaning device 100 provided by the utility model embodiment can be used for cleaning the filter bag of the filter tank. Figures 1 to 6 The single crystal furnace filter tank cleaning device 100 provided by the utility model embodiment can be used for cleaning the filter bag of the filter tank.

[0055] The single crystal furnace filter tank cleaning device 100 provided by the embodiment of the utility model can bring one end with the impeller 130 to extend into the filter bag of the filter tank when cleaning the filter tank, and after the air gun 110 is started, the high pressure airflow sprayed by the air gun 110 can be sprayed from the second end of the telescopic pipe 120, and part of the high pressure airflow sprayed from the second end of the telescopic pipe 120 can pass through the gap of the impeller 130 to impact the filter bag, so that the filter bag is cleaned, meanwhile, the other part of the high pressure airflow directly impacts the impeller 130 to provide the rotating power for the impeller 130, and after the impeller 130 rotates, the flexible cleaning piece 140 connected to the outer periphery of the impeller 130 can hit the filter bag to further clean the filter bag, and the telescopic pipe 120 can be telescopic to clean different parts in the filter bag, so that the single crystal furnace filter tank cleaning device 100 provided by the embodiment of the utility model can double clean the filter tank through the high pressure airflow and the flexible cleaning piece 140, and can comprehensively clean each part of the filter tank through the telescopic pipe 120, so that the cleaning effect is greatly improved.

[0056] In the above embodiment, the telescopic pipe 120 can include a first air guide pipe 121 and a second air guide pipe 122, the first end of the first air guide pipe 121 is fixedly connected to the air outlet of the air gun 110, and the first end of the second air guide pipe 122 is slidably arranged in the first air guide pipe 121. Since the high pressure airflow is blown from the first air guide pipe 121 to the second air guide pipe 122, and the second air guide pipe 122 is arranged in the first air guide pipe 121, the high pressure airflow flowing through the first air guide pipe 121 can impact the first end of the second air guide pipe 122, so that the second air guide pipe 122 extends out of the first air guide pipe 121, and the extension range of the second air guide pipe 122 can be adjusted by adjusting the air pressure of the air gun 110, so that the manual adjustment of the length of the telescopic pipe 120 can be omitted, and the cleaning efficiency is improved. It should be noted that when cleaning the filter tank, the spraying port of the air gun 110 is generally extended upward from the bottom of the filter tank, so the second air guide pipe 122 is generally in the retracted state due to its own gravity.

[0057] In the above embodiment, the telescopic pipe 120 can further include a third air guide pipe 123, the first end of the third air guide pipe 123 is slidably arranged in the second air guide pipe 122, and the impeller 130 is connected to the second end of the third air guide pipe 123. By arranging the third air guide pipe 123, the high pressure airflow can impact the first end of the third air guide pipe 123, so that the telescopic force of the telescopic pipe 120 is improved, and the filter tank can be cleaned more thoroughly.

[0058] In the above embodiment, the outer wall of the first end of the second air duct 122 can have a first flange 1221, the inner wall of the second end of the first air duct 121 can have a second flange 1211, when the second air duct 122 is extended to the longest from the first air duct 121, the first flange 1221 abuts against the second flange 1211 along the axial direction of the telescopic tube 120 to prevent the second air duct 122 from being separated from the first air duct 121; the outer wall of the first end of the third air duct 123 can have a third flange 1231, the inner wall of the second end of the second air duct 122 can have a fourth flange 1222, when the third air duct 123 is extended to the longest from the second air duct 122, the third flange 1231 abuts against the fourth flange 1222 along the axial direction of the telescopic tube 120 to prevent the third air duct 123 from being separated from the second air duct 122.

[0059] In the above embodiment, the first sealing ring 150 and the second sealing ring 160 can be further included, the first sealing ring 150 is sealingly arranged between the outer wall of the second air duct 122 and the inner wall of the first air duct 121, and the second sealing ring 160 is sealingly arranged between the outer wall of the third air duct 123 and the inner wall of the second air duct 122. The sealing performance of the telescopic tube 120 can be improved by the first sealing ring 150 and the second sealing ring 160 respectively, so as to ensure the impact force of the high-pressure gas on the impeller 130.

[0060] In the above embodiment, the first sealing ring 150 can abut against the first flange 1221 along the axial direction of the second air duct 122, and the second sealing ring 160 can abut against the third flange 1231 along the axial direction of the third air duct 123. In this way, when the telescopic tube 120 is extended, the first sealing ring 150 and the second sealing ring 160 can abut against the first flange 1221 and the third flange 1231 respectively, which can not only position the first sealing ring 150 and the second sealing ring 160 to prevent them from moving along the axial direction, but also improve the sealing performance between the first air duct 121 and the second air duct 122 and the sealing performance between the second air duct 122 and the third air duct 123.

[0061] In the above embodiment, the inner wall of the second end of the third air duct 123 can have a fifth flange 1232, the fifth flange 1232 can make the diameter of the gas outlet of the second end of the third air duct 123 smaller than the diameter of other parts of the third air duct 123, which can not only improve the impact force of the high-pressure gas flow in the telescopic tube 120, but also improve the impact force of the high-pressure gas flow on the first end of the second air duct 122 and the first end of the third air duct 123, so that the telescopic tube 120 is more stable after being extended.

[0062] In the above embodiment, the bearing seat 170 can be mounted on the second end of the third air duct 123, the outer ring of the bearing 180 can be mounted on the bearing seat 170, the inner ring of the bearing 180 can be mounted on the first end of the connecting shaft 190, the impeller 130 can be mounted on the second end of the connecting shaft 190, and the center line of the impeller 130 and the center line of the third air duct 123 can have a spacing. By biasing the impeller 130 and the telescopic pipe 120, the high-pressure airflow ejected from the second end of the third air duct 123 can be avoided from the center of the impeller 130 and applied to the periphery of the impeller 130, so that the impeller 130 is more easily driven to rotate.

[0063] In the above embodiment, the flexible cleaning member 140 can be provided in plurality, and the plurality of flexible cleaning members 140 can be uniformly distributed on the periphery of the impeller 130. When the impeller 130 rotates, all the flexible cleaning members 140 are swung and hit the filter bag of the filter tank, so that the filter bag is cleaned. The plurality of flexible cleaning members 140 can improve the fault tolerance, and even if a small number of flexible cleaning members 140 are damaged, the cleaning effect will not be greatly affected.

[0064] In addition, the utility model discloses a single crystal furnace, including the single crystal furnace filter tank cleaning device 100 in the above embodiment, the single crystal furnace filter tank cleaning device 100 includes air gun 110, telescopic pipe 120, impeller 130 and flexible cleaning member 140, the first end of telescopic pipe 120 is connected to the air outlet of air gun 110, and the impeller 130 is rotatably mounted on the second end of telescopic pipe 120, and the flexible cleaning member 140 is connected to the periphery of the impeller 130. When cleaning the filter tank, one end with the impeller 130 can be inserted into the filter bag of the filter tank, and after starting the air gun 110, the high-pressure airflow ejected from the air gun 110 can be ejected from the second end of the telescopic pipe 120. Part of the high-pressure airflow ejected from the second end of the telescopic pipe 120 can pass through the gap of the impeller 130 and impact the filter bag, so that the filter bag is cleaned. At the same time, another part of the high-pressure airflow directly impacts the impeller 130, providing power for the rotation of the impeller 130. After the impeller 130 rotates, the flexible cleaning member 140 connected to the periphery of the impeller 130 can hit the filter bag, so that the filter bag is further cleaned. The telescopic pipe 120 can be telescoped to clean different parts in the filter bag, greatly improving the cleaning effect of the filter tank and improving the purity and quality of the single crystal silicon rod produced by the single crystal furnace.

[0065] Finally, it needs to be explained that: the above embodiments are only used to illustrate the technical solutions of the utility model, and not to limit them; although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the utility model.

Claims

1. A single crystal furnace filter tank cleaning device, characterized in that: The invention comprises an air gun, a telescopic tube, an impeller and a flexible cleaning member, wherein a first end of the telescopic tube is connected to an air outlet of the air gun, and an air flow ejected from the air outlet of the air gun passes through the telescopic tube and is ejected from a second end of the telescopic tube; The impeller is rotatably mounted on the second end of the telescopic tube, and the impeller is configured to rotate under the impact of the airflow ejected from the second end of the telescopic tube; The flexible cleaning member is connected to the outer periphery of the impeller, and the flexible cleaning member is configured to swing under the drive of the impeller to clean the filter bag of the filter tank.

2. The single crystal furnace filter tank cleaning device according to claim 1, characterized in that: The telescopic tube includes a first air guide tube and a second air guide tube. The first end of the first air guide tube is fixedly connected to the air outlet of the air gun, and the first end of the second air guide tube is slidably arranged in the first air guide tube.

3. The single crystal furnace filter tank cleaning device according to claim 2, characterized in that: The telescopic tube further includes a third air duct, a first end of the third air duct is slidably disposed in the second air duct, and the impeller is connected to the second end of the third air duct.

4. The single crystal furnace filter tank cleaning device according to claim 3, characterized in that: The outer wall of the first end of the second air duct has a first flange, and the inner wall of the second end of the first air duct has a second flange. When the second air duct is extended from the first air duct to its longest length, the first flange abuts against the second flange along the axial direction of the telescopic tube. The outer wall of the first end of the third air duct has a third flange, and the inner wall of the second end of the second air duct has a fourth flange. When the third air duct extends from the second air duct to its longest length, the third flange abuts against the fourth flange along the axial direction of the telescopic tube.

5. The single crystal furnace filter tank cleaning device according to claim 4, characterized in that: It also includes a first sealing ring and a second sealing ring, wherein the first sealing ring is sealed between the outer wall of the second air duct and the inner wall of the first air duct, and the second sealing ring is sealed between the outer wall of the third air duct and the inner wall of the second air duct.

6. The single crystal furnace filter tank cleaning device according to claim 5, characterized in that: The first sealing ring abuts against the first flange along the axial direction of the second air duct, and the second sealing ring abuts against the third flange along the axial direction of the third air duct.

7. The single crystal furnace filter tank cleaning device according to claim 6, characterized in that: The inner wall of the second end of the third air guide tube has a fifth flange.

8. The single crystal furnace filter tank cleaning device according to claim 7, characterized in that: It also includes a bearing seat, a bearing and a connecting shaft, the bearing seat is installed on the second end of the third air duct, the outer ring of the bearing is installed on the bearing seat, the inner ring of the bearing is installed on the first end of the connecting shaft, the impeller is installed on the second end of the connecting shaft, and there is a distance between the center line of the impeller and the center line of the third air duct.

9. The single crystal furnace filter tank cleaning device according to any one of claims 1 to 8, characterized in that: There are multiple flexible cleaning pieces, and the multiple flexible cleaning pieces are evenly distributed on the periphery of the impeller.

10. A single crystal furnace, characterized in that: The invention comprises the single crystal furnace filter tank cleaning device described in any one of claims 1-9.

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