Equipment for detecting appearance of CMOS (Complementary Metal Oxide Semiconductor) chip

Abstract

The utility model discloses equipment for detecting the appearance of a CMOS (Complementary Metal Oxide Semiconductor) chip. The equipment comprises a feeding conveying mechanism, a detecting mechanism and a jacking mechanism, wherein the feeding conveying mechanism is used for conveying a carrier plate; the feeding conveying mechanism comprises a first mounting support and a second mounting support which are arranged in parallel, and the first mounting support and the second mounting support are each provided with a plurality of magnetic wheels capable of transferring the carrier plate to the position below the detection mechanism. The jacking mechanism is located below the carrier plate and comprises a jacking driving part, a lifting plate located at the driving end of the jacking driving part and a limiting plate located above the lifting plate, and a limiting space for installing the light source plate is reserved between the lifting plate and the limiting plate. The chip appearance detection device automatically detects whether the chip is cracked or not and whether the surface of the chip has a gap or not, and improves the efficiency and precision of chip appearance detection.

Description

TECHNICAL FIELD

[0001] The utility model relates to chip appearance detection technical field especially relates to a device for CMOS chip appearance detection. BACKGROUND

[0002] CMOS is the abbreviation of complementary metal oxide semiconductor, it refers to the technology of manufacturing large scale integrated circuit chip or the chip manufactured by this technology, it is a readable and writable RAM chip on the computer mainboard. CMOS chip is a low power consumption memory, and its main role is to store the setting information in BIOS and system time date.

[0003] In the production and processing process of chip, the appearance may be scratched, dark crack or even broken, and the appearance anomaly cannot be found by direct visual inspection in the normal manufacturing process, the subsequent manual detection efficiency is low, the appearance inspection still has the phenomenon of missing detection, and the abnormal chip source is directly continued to flow to the next manufacturing process, causing the production accident.

[0004] Therefore, it is necessary to provide a device for CMOS chip appearance detection to solve the above problems. UTILITY MODEL CONTENTS

[0005] In order to overcome the above-mentioned shortcomings, the purpose of the utility model is to provide a device for CMOS chip appearance detection, which can automatically detect whether the chip is cracked and whether there is a gap on the surface of the chip, and improve the efficiency and precision of chip appearance detection.

[0006] In order to achieve the above purpose, the utility model adopts the technical scheme: a device for CMOS chip appearance detection, including feeding conveying mechanism for conveying carrier plate, detection mechanism and jacking mechanism, the feeding conveying mechanism includes mutually parallel installation support one and installation support two, the installation support one and the installation support two are provided with a plurality of magnetic wheels capable of moving the carrier plate to the lower side of the detection mechanism, the jacking mechanism is located below the carrier plate and includes a jacking drive, a lifting plate located at the driving end thereof and a limiting plate located above the lifting plate, the lifting plate and the limiting plate are provided with a limited space for installing the light source plate.

[0007] Further, the detection mechanism includes a three-axis drive and a detection camera, and a cleaning mechanism is horizontally arranged on the side close to the feeding direction of the carrier plate. The three-axis drive can drive the detection camera to move in X, Y and Z directions, so that the detection camera can completely detect the multiple chips on the carrier plate, and the detection efficiency of the chips is effectively improved.

[0008] Further, the feeding conveying mechanism further comprises driving motors arranged on the sides of the mounting bracket one and the mounting bracket two respectively, the magnetic wheels on the mounting bracket one and the mounting bracket two are arranged along the length direction and correspond to each other, and the driving motor rotating shaft is connected with any magnetic wheel on the same side to drive the magnetic wheel to rotate. Each driving motor drives the magnetic wheel on the same side to rotate, so that the carrier plate on the magnetic wheel can be moved from the feeding port to the detection mechanism, and the automatic feeding of the carrier plate is realized.

[0009] Further, the adjusting slide rail perpendicular to the feeding direction of the carrier plate is arranged, and the mounting bracket two is slidingly arranged on the adjusting slide rail. The mounting bracket two can move along the adjusting slide rail towards the direction of approaching or moving away from the mounting bracket one, so as to adjust the distance between the two magnetic wheels on the mounting bracket two, and then the distance can meet the transportation and feeding of carrier plates with different widths, and the applicability of the detection equipment is effectively improved.

[0010] Further, the fixing bracket for mounting the jacking driving member and the jacking pressing plate are further arranged, the fixing guide rods penetrating through the fixing bracket are arranged on the bottom of the lifting plate, the limiting plate is connected with the lifting plate through the connecting column, a plurality of limiting pins corresponding to the positions of the positioning holes on the carrier plate are arranged on the upper surface of the limiting plate, the jacking pressing plate is arranged in a hollow structure penetrating from top to bottom, and a supporting groove for mounting the jacking pressing plate is arranged on the side opposite to the top of the mounting bracket one and the mounting bracket two. The detection of the chip on the carrier plate has high requirements for the flatness of the surface, when the limiting plate is positioned by the jacking cylinder, the limiting plate is continuously moved upwards until the part of the carrier plate without the chip is abutted against the jacking pressing plate, so that the flatness of the detection section of the carrier plate is maintained, and the detection result is more accurate.

[0011] Further, the buffer springs are arranged on the part of the fixing guide rods between the lifting plate and the fixing bracket, and a plurality of light transmission holes corresponding to the positions of the chips on the carrier plate are arranged on the limiting plate along the height direction. The light source can transmit through the light transmission holes on the lifting plate to light the lower surface of the chip on the carrier plate, so that the result of the subsequent detection camera shooting and detecting the appearance of the chip is more accurate.

[0012] Further, the stop mechanism arranged at the two ends of the jacking mechanism in the length direction is further arranged, the stop mechanism comprises a vertically arranged stop cylinder and a stop rod on the top of the piston rod of the stop cylinder. The stop rod corresponds to the limiting insertion hole on the jacking pressing plate, so that the carrier plate is kept in a stationary state, and the detection camera can take pictures for detection.

[0013] Further, the detection table is further arranged, the detection mechanism, the feeding conveying mechanism and the jacking mechanism are arranged on the detection table, and the detection table is covered with a protective cover. The protective cover can protect the detection mechanism, the feeding conveying mechanism and the jacking mechanism, and then the service life of the mechanisms is improved.

[0014] The utility model discloses the beneficial effect of:

[0015] 1, the utility model discloses detection mechanism, feeding conveying mechanism and jacking mechanism cooperate with each other, wherein the magnetic wheel can automatically send the carrier plate that is equipped with the chip to the detection mechanism under the driving effect of the driving part, can effectively improve the feeding efficiency of carrier plate;

[0016] 2, the utility model discloses the detection camera on detection mechanism can move in many directions to ensure that every chip on the carrier plate is photographed and whether the chip surface layer and inside appear to crack, detect whether the chip surface exists the gap, effectively improve the efficiency and precision of chip appearance detection under the driving effect of three -axis driving part;

[0017] 3, the utility model discloses jacking mechanism is provided with the light source board, and the light source board opens when the detection camera detects, provides the diffuse light source for the chip back, makes the accurate of detection camera photographing. BRIEF DESCRIPTION OF DRAWINGS

[0018] Fig. 1 It is the overall structure axle side view of an embodiment of the utility model;

[0019] Fig. 2 It is the partial structure axle side view of an embodiment of the utility model;

[0020] Fig. 3 It is the jacking mechanism front view of an embodiment of the utility model;

[0021] In the drawing: 1, detection table;2, protective cover;3, detection mechanism;31, three -axis driving part;32, detection camera;4, feeding conveying mechanism;41, driving motor;42, magnetic wheel;43, mounting support one;44, mounting support two;45, adjust slide rail;46, support groove;5, jacking mechanism;51, jacking pressure plate;52, jacking cylinder;53, fixed guide rod;54, fixed support;55, buffer spring;56, lifting plate;57, light source board;58, connecting column;59, limiting plate;510, limiting pin;511, light transmission hole;6, carrier plate;7, stop mechanism;71, stop cylinder;72, stop rod;8, screw hole;9, limiting jack. DETAILED DESCRIPTION

[0022] The preferred embodiments of the utility model are described in detail below with reference to the drawings, so that the advantages and features of the utility model can be more easily understood by the person skilled in the art, and the protection scope of the utility model is more clearly and explicitly defined.

[0023] Reference is made to the drawings Figs. 1 to 3As shown, the device for CMOS chip appearance detection in the embodiment comprises a feeding conveying mechanism 4 for conveying the carrier plate 6, a detection mechanism 3, and a jacking mechanism 5. The feeding conveying mechanism 4 comprises a mounting bracket one 43 and a mounting bracket two 44 arranged in parallel with each other, and a plurality of magnetic wheels 42 capable of moving the carrier plate 6 to below the detection mechanism 3 are arranged on the mounting bracket one 43 and the mounting bracket two 44. The mounting bracket one 43 and the mounting bracket two 44 are arranged opposite to each other and can support the magnetic wheels 42 arranged thereon, so that the magnetic wheels 42 can rotate and convey the carrier plate 6 placed thereon to the next station.

[0024] Specifically, as to the arrangement of the magnetic wheels 42, the principle is that when one of the magnetic wheels 42 rotates, the magnetic pole position changes, and the adjacent magnetic poles of different natures are used to push the other magnetic wheels 42 to rotate, so as to realize non-contact magnetic transmission of power. The above-mentioned magnetic wheels 42 are used as power bridge to convey the carrier plate 6, which can achieve the effect of non-contact, non-friction and no dust. In some embodiments, the surface of the magnetic wheel 42 is sleeved with a friction-resistant rubber ring, so that the conveying of the carrier plate 6 is smoother.

[0025] The jacking mechanism 5 is located below the carrier plate 6 and comprises a jacking driving part, a lifting plate 56 located at the driving end thereof, and a limiting plate 59 located above the lifting plate 56. A limited space for installing a light source plate 57 is left between the lifting plate 56 and the limiting plate 59. The limiting plate 59 is used to support the carrier plate 6 on which the chips to be detected are placed. When the carrier plate 6 moves to the limiting plate 59, the jacking driving part drives the lifting plate 56 to move upward to push the limiting plate 59 and the carrier plate 6 thereon to move upward, so that the carrier plate 6 approaches the detection camera 32, which facilitates the detection camera 32 to take a photo of the plurality of chips thereon for detection, and can effectively improve the efficiency of chip defect detection.

[0026] The light source plate 57 is a light source device used to ensure that light is emitted from the back of the lifting plate 56. By arranging the light source plate 57, the back of the lifting plate 56 can be illuminated, so that the light source can pass through the light-transmitting hole 511 on the lifting plate 56 to illuminate the lower surface of the chip on the carrier plate 6, so that the subsequent detection camera 32 can more accurately capture and detect the appearance of the chip.

[0027] In some embodiments, the jacking driving part is a jacking cylinder 52. The jacking cylinder 52 can drive the lifting plate 56 to move upward or downward by extending or retracting the piston rod, and in turn drive the carrier plate 6 located on the limiting plate 59 to move toward or away from the detection camera 32.

[0028] The detection mechanism 3 comprises a three-axis driving member 31 and a detection camera 32, and a cleaning mechanism is horizontally arranged on the side of the detection camera 32 close to the feeding direction of the carrier plate 6. The three-axis driving member 31 can drive the detection camera 32 to move in the X-axis, Y-axis and Z-axis directions, so that the detection camera 32 can completely capture and detect the chips on the carrier plate 6, and the detection efficiency of the chips is effectively improved.

[0029] Preferably, the three-axis driving member 31 is a three-axis driving module.

[0030] In some embodiments, the cleaning mechanism is a plasma gun, which can clean the dust or plasma static electricity attached to the surface of the chip before the chip is captured and detected, so as to ensure the accuracy of the subsequent capturing and detecting.

[0031] In some embodiments, a code reader is further arranged on the side of the detection camera 32, which can identify the two-dimensional code corresponding to each chip on the carrier plate 6 below the detection camera 32, and the two-dimensional code contains the position coordinates of each chip, so that the staff can accurately take out the chips with defects for unified storage.

[0032] The feeding conveying mechanism 4 further comprises driving motors 41 arranged on the sides of the mounting bracket one 43 and the mounting bracket two 44, respectively. The magnetic wheels 42 on the mounting bracket one 43 and the mounting bracket two 44 are arranged in an array along the length direction and one-to-one corresponding. The rotating shaft of the driving motor 41 is connected with any magnetic wheel 42 on the same side to drive the magnetic wheel 42 to rotate. Each driving motor 41 drives the magnetic wheel 42 on the same side to rotate, so that the carrier plate 6 on the magnetic wheel 42 can be moved from the feeding port to the detection mechanism 3, and the automatic feeding of the carrier plate 6 is realized.

[0033] It should be noted that the upper surface of the magnetic wheel 42 abuts against the lower surface of the carrier plate 6, so as to stably convey the carrier plate 6.

[0034] Further comprising an adjusting slide rail 45 arranged perpendicularly to the feeding direction of the carrier plate 6, and the mounting bracket two 44 is slidingly arranged on the adjusting slide rail 45. The mounting bracket two 44 can move along the adjusting slide rail 45 towards the mounting bracket one 43 or away from the mounting bracket one 43, so as to adjust the distance between the two magnetic wheels 42 on the mounting bracket two 44, and the distance can meet the transportation feeding of the carrier plate 6 with different widths, and the applicability of the detection equipment is effectively improved.

[0035] Further comprising a fixed bracket 54 for mounting a jacking driving member and a jacking pressing plate 51. The bottom of the lifting plate 56 is provided with a plurality of fixed guide rods 53 penetrating through the fixed bracket 54, and the fixed guide rods 53 can provide a guide when the lifting plate 56 moves up and down under the driving of the jacking cylinder 52.

[0036] The limiting plate 59 is connected with the lifting plate 56 through the connecting column 58, and a plurality of limiting pins 510 corresponding to the positions of the positioning holes on the carrier plate 6 are arranged on the upper surface of the limiting plate 59. When the piston rod of the jacking cylinder 52 is extended, the lifting plate 56 and the limiting plate 59 connected with the lifting plate 56 through the connecting column 58 can be pushed to move upwards. In the process of moving upwards, the limiting pins 510 can be inserted into the corresponding positioning holes on the carrier plate 6, so as to position a plurality of chips on the detection section of the carrier plate 6, and ensure that the carrier plate 6 does not move in the chip detection process, and the accuracy of chip detection is ensured.

[0037] The jacking pressing plate 51 is arranged in a hollow structure from top to bottom, and a supporting groove 46 for installing the jacking pressing plate 51 is arranged on one side of the top of the mounting bracket one 43 and the mounting bracket two 44 from top to bottom. The detection of the chips on the carrier plate 6 has high requirements for the flatness of the surface. After the jacking cylinder 52 drives the limiting plate 59 to position the carrier plate 6, the carrier plate 6 is continuously moved upwards until the part of the carrier plate 6 on which the chips are not placed is abutted against the jacking pressing plate 51, so that the flatness of the detection section of the carrier plate 6 is maintained, and the detection result is more accurate.

[0038] In some embodiments, the jacking pressing plate 51 is detachably connected with the supporting groove 46. Threaded holes 8 and limiting insertion holes 9 are arranged on the edge of the jacking pressing plate 51. The jacking pressing plate 51 can be threadedly connected with the supporting groove 46, so that the jacking pressing plate 51 can be conveniently disassembled, cleaned or replaced and maintained.

[0039] The part of the fixed guide rod 53 located between the lifting plate 56 and the fixed bracket 54 is sleeved with a buffer spring 55, so that when the piston rod of the jacking cylinder 52 is retracted, the lifting plate 56 does not directly impact the fixed bracket 54 to cause damage, and the service life of the jacking mechanism 5 is ensured.

[0040] A plurality of light transmission holes 511 corresponding to the positions of the chips on the carrier plate 6 are arranged on the limiting plate 59 in the height direction. The light source can transmit through the light transmission holes 511 on the lifting plate 56 to light the lower surface of the chips on the carrier plate 6, so that the result of the subsequent detection camera 32 shooting and detecting the appearance of the chips is more accurate.

[0041] The stop mechanism 7 arranged at both ends of the jacking mechanism 5 in the length direction also includes a stop cylinder 71 arranged vertically and a stop rod 72 located at the top of the piston rod of the stop cylinder 71. The stop rod 72 corresponds to the position of the limiting insertion hole 9 arranged on the jacking pressing plate 51, so that the carrier plate 6 is kept in a stationary state, and the detection camera 32 can take pictures for detection.

[0042] Also include detection platform 1, detection mechanism 3, feeding conveying mechanism 4 and jacking mechanism 5 are located on detection platform 1, cover with protective cover 2 on detection platform 1.The protective cover 2 can protect detection mechanism 3, feeding conveying mechanism 4 and jacking mechanism 5, and further improve the service life of the above mechanism.

[0043] The above embodiments are only for illustrating the technical concept and characteristics of the present application, and the purpose is to enable those skilled in the art to understand the content of the present application and implement it, and cannot limit the protection scope of the present application. Any equivalent changes or modifications made in accordance with the spirit and essence of the present application shall be covered within the protection scope of the present application.

Claims

1. A device for CMOS chip appearance inspection, characterized by: It includes a loading and conveying mechanism, a detection mechanism and a lifting mechanism for conveying the carrier; the loading and conveying mechanism includes a mounting bracket 1 and a mounting bracket 2 arranged parallel to each other, and both the mounting bracket 1 and the mounting bracket 2 are provided with a number of magnetic wheels that can move the carrier to the bottom of the detection mechanism. The lifting mechanism is located below the carrier and includes a lifting drive component, a lifting plate located at its driving end and a limit plate located above the lifting plate. A limited space for the installation of the light source board is left between the lifting plate and the limit plate.

2. The device for CMOS chip appearance inspection according to claim 1, characterized in that: The detection mechanism includes a three-axis driving component and a detection camera. A cleaning mechanism is horizontally arranged on one side of the detection camera close to the feeding direction of the carrier plate.

3. The device for CMOS chip appearance inspection according to claim 1, characterized in that: The loading and conveying mechanism also includes a driving motor respectively arranged on the sides of the mounting bracket one and the mounting bracket two. The magnetic wheels on the mounting bracket one and the mounting bracket two are arranged in an array along their length direction and correspond one to one. The driving motor's rotating shaft is connected to any magnetic wheel on the same side to drive the magnetic wheel to rotate.

4. The device for CMOS chip appearance inspection according to claim 1, characterized in that: It also includes an adjusting slide rail arranged perpendicular to the loading direction of the carrier plate, and the second mounting bracket is slidably arranged on the adjusting slide rail.

5. The device for CMOS chip appearance inspection according to claim 1, characterized in that: The lifting plate is connected to the lifting plate by a connecting column, and the upper surface of the limiting plate is provided with a plurality of limit pins corresponding to the positions of the positioning holes on the carrier plate. The lifting plate is provided with a hollow structure that passes through from top to bottom, and a supporting groove for installing the lifting plate is provided from top to bottom on the side opposite to the top of the mounting bracket one and the mounting bracket two.

6. The device for CMOS chip appearance inspection according to claim 5, characterized in that: The fixed guide rod is provided with a buffer spring sleeve on the part located between the lifting plate and the fixed bracket, and the limit plate is provided with a plurality of light-transmitting holes corresponding to the positions of the chips on the carrier plate along its height direction.

7. The device for CMOS chip appearance inspection according to claim 1, characterized in that: It also includes a stopping mechanism arranged at both ends of the lifting mechanism in the length direction, and the stopping mechanism includes a vertically arranged stopping cylinder and a stopping rod located at the top of its piston rod.

8. The device for CMOS chip appearance inspection according to claim 1, characterized in that: It also includes a testing platform, the testing mechanism, the feeding and conveying mechanism and the lifting mechanism are all located on the testing platform, and the testing platform is covered with a protective cover.

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