Photoresist filtering device

Abstract

The utility model discloses a photoresist filtering device which comprises a stirring cylinder, a stirring assembly is arranged on the stirring cylinder, the stirring assembly comprises a fixing plate, a filtering cylinder, a feeding pipe, a first motor and a stirring rod, the fixing plate is arranged on the stirring cylinder, the filtering cylinder is arranged at one end of the stirring cylinder, and the feeding pipe is arranged at the other end of the stirring cylinder. The feeding pipe is connected between the stirring barrel and the filtering barrel, the first motor is fixedly installed on the fixing plate, the stirring rod is connected to the output end of the first motor, a scraping assembly is arranged on the filtering barrel and comprises a top cover, a second motor and a driving wheel, the top cover is arranged at the top of the filtering barrel, and the second motor is arranged on the top of the filtering barrel. The second motor is fixedly mounted on the top cover, and the driving wheel is connected to the output end of the second motor, so that the technical problem that bubbles in the photoresist can influence the filtering process when the photoresist is filtered in the background art is solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to filter device technical field more specifically, it relates to a photoresist filter device. BACKGROUND

[0002] In the prior art, when the photoresist is filtered, the bubbles in the photoresist will affect the filtering process. The conventional method for removing bubbles from photoresist usually adopts a static method, i.e. allowing the photoresist to stand in a container for a period of time, relying on the action of gravity and the surface tension of the bubbles to make the bubbles gradually rise to the surface and break. However, this method for removing bubbles is very inefficient, often requiring a long standing time, and the effect of removing bubbles is not ideal. The presence of bubbles not only prolongs the production cycle, but also increases the production cost.

[0003] In addition, the existing photoresist filter device also has another significant problem in actual use, i.e. lacking an effective scraping assembly for photoresist residues on the filter plate. During the filtering process of photoresist, the filter membrane on the filter plate will gradually accumulate photoresist residues. These residues not only block the filter membrane, reducing the filtering efficiency, but also affect the filtering effect, resulting in that the impurities in the photoresist cannot be completely removed.

[0004] Photoresist usually needs to be filtered several times in the separation process to remove photoresist residues in the waste liquid. This process usually adopts filter membranes with different pore sizes for fractional filtration to ensure that the impurities in the photoresist are gradually removed. However, photoresist is a polymer material with very high viscosity and adhesion, which is very easy to block the filter membrane and filter holes. SUMMARY

[0005] (I) Technical problem solved

[0006] In view of the problems existing in the prior art, the utility model provides a photoresist filter device to solve the technical problem that the bubbles in the photoresist affect the filtering process when the photoresist is filtered.

[0007] (II) Technical solution

[0008] In order to achieve the above object, the utility model provides the following technical scheme: A photoresist filtering device, including stirring drum, the stirring drum is provided with stirring assembly, the stirring assembly includes fixed plate, filter cartridge, feed pipe, first motor and stirring rod, the fixed plate sets up on the stirring drum, the filter cartridge sets up at one end of the stirring drum, the feed pipe is connected between the stirring drum and the filter cartridge, the first motor is fixedly installed on the fixed plate, the stirring rod is connected at the output of first motor, the filter cartridge is provided with scraping assembly, the scraping assembly includes top cap, second motor and driving wheel, the top cap sets up at the top of filter cartridge, the second motor is fixedly installed on the top cap, the driving wheel is connected at the output of second motor.

[0009] The utility model further sets up, install stirring piece on the stirring rod, uniform spiral blade is equipped on the stirring piece, through cooperation of each component makes the stirring process to material is completed.

[0010] The utility model further sets up, install filter box in the filter cartridge, install break bubble needle evenly in the filter box, through cooperation of each component makes the break bubble process to material is completed.

[0011] The utility model further sets up, the top cap is rotatably connected with rotating rod, one end of the rotating rod is connected with driven wheel, belt transmission is connected between the driven wheel and the driving wheel, through cooperation of each component makes the rotation process to driven wheel is completed.

[0012] The utility model further sets up, connect the brush block on the rotating rod, install filter screen in the filter cartridge, one end of the filter screen is in abutment with the brush block, through cooperation of each component makes the scraping process to filter screen is completed.

[0013] The utility model further sets up, install filter assembly in the filter cartridge, the filter assembly includes baffle, pneumatic cylinder and plug body, the baffle sets up on the filter cartridge, the pneumatic cylinder is installed in the inside bottom of filter cartridge, the plug body is connected at the output of pneumatic cylinder, the output of pneumatic cylinder penetrates the baffle, through cooperation of each component makes the movement process to plug body is completed.

[0014] The utility model further sets up, install sealing ring on the plug body, the sealing ring is in close contact with the inside of filter cartridge, the filter layer, adsorption layer and suction filter layer are slidably connected on the filter cartridge, through cooperation of each component makes the multilayer filtering process to material is completed.

[0015] The utility model further sets up, one end of filter layer, adsorption layer and filter layer all is connected with handle, install the discharge pipe on the filter cartridge, install the pump body on all install the discharge pipe and feed pipe, through the cooperation of each component makes the completion to the material discharge process.

[0016] (Three) beneficial effects

[0017] Compared with the prior art, the utility model provides a photoresist filtering device, has the following beneficial effects:

[0018] 1, the stirring assembly passes through the design of stirring rod and spiral vane, can carry out efficient stirring to material, ensure that material mixes evenly, improve the uniformity and stability of photoresist, in the stirring process, the design of spiral vane helps to destroy the bubble in material, reduces the influence of bubble on photoresist quality, and the stirring system of motor drive can complete the stirring process quickly, shortens the production cycle, improves production efficiency.

[0019] 2, the scraping assembly passes through the transmission system of driving wheel and driven wheel, drives the brush block to scrape the residue on the surface of filter screen periodically, effectively prevents filter screen from being blocked, maintains filtering efficiency, scrapes the residue on the surface of filter screen periodically, reduces the replacement frequency of filter screen, prolongs the service life of filter screen, reduces maintenance cost, maintains the clean state of filter screen, ensures that material can be effectively filtered through filter screen, improves the purity of photoresist.

[0020] 3, the filter assembly realizes multistage filtration through the setting of filter layer, adsorption layer and filter layer, gradually removes the impurity in material, improves the purity of photoresist, and the sealing ring on the plug body is tightly attached to the inner side of filter cartridge, effectively prevents material from leaking in the filtration process, ensures the sealing property of the filtration process, through the handle design, operating personnel can conveniently take out the filtered material, simplifies the operation process, improves work efficiency. ACCURACY OF DRAWINGS

[0021] Figure 1 It is the overall structure schematic view of a photoresist filtering device in the utility model;

[0022] Figure 2 It is the sectional view structure schematic view in the utility model;

[0023] Figure 3 It is the side view sectional view structure schematic view in the utility model;

[0024] Figure 4 It is the enlarged structure schematic view of A in the utility model;

[0025] Figure 5 It is the enlarged structure schematic view of B in the utility model.

[0026] In the figure: 1, stirring drum; 2, fixed plate; 3, filter drum; 4, feed pipe; 5, first motor; 6, stirring rod; 7, top cover; 8, second motor; 9, driving wheel; 10, stirring piece; 11, spiral blade; 12, filter box; 13, bubble breaking needle; 14, rotating rod; 15, driven wheel; 16, belt; 17, brush block; 18, filter screen; 19, partition plate; 20, air cylinder; 21, plug body; 22, sealing ring; 23, filter layer; 24, adsorption layer; 25, suction filter layer; 26, handle; 27, discharge pipe; 28, pump body. DETAILED DESCRIPTION

[0027] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0028] It should be noted that, unless otherwise specified, all technical and scientific terms used in the present application have the same meaning as generally understood by those skilled in the art to which the present application belongs.

[0029] In the present application, unless otherwise stated, the directions used such as "up, down" are generally with respect to the directions shown in the drawings, or with respect to the vertical, perpendicular or gravity directions; similarly, for the convenience of understanding and description, "left, right" is generally with respect to the left and right shown in the drawings; "inner, outer" refers to the inner and outer with respect to the contour of each component itself, but the above directional words are not used to limit the present application.

[0030] Please refer to Figures 1-5 A photoresist filtering device, comprising a stirring drum 1, the stirring drum 1 is provided with a stirring assembly, the stirring assembly comprises a fixed plate 2, a filter drum 3, a feed pipe 4, a first motor 5 and a stirring rod 6, the fixed plate 2 is arranged on the stirring drum 1, the filter drum 3 is arranged at one end of the stirring drum 1, the feed pipe 4 is connected between the stirring drum 1 and the filter drum 3, the first motor 5 is fixedly installed on the fixed plate 2, the stirring rod 6 is connected to the output end of the first motor 5, the filter drum 3 is provided with a scraping assembly, the scraping assembly comprises a top cover 7, a second motor 8 and a driving wheel 9, the top cover 7 is arranged at the top of the filter drum 3, the second motor 8 is fixedly installed on the top cover 7, and the driving wheel 9 is connected to the output end of the second motor 8.

[0031] The stirring rod 6 is provided with a stirring piece 10, and the stirring piece 10 is uniformly provided with a spiral blade 11.

[0032] The inside of the filter drum 3 is provided with a filter box 12, and the filter box 12 is uniformly provided with a bubble breaking needle 13.

[0033] The top cover 7 is rotatably connected with a rotating rod 14, one end of the rotating rod 14 is connected with a driven wheel 15, the driven wheel 15 and the driving wheel 9 are transmissionally connected with a belt 16.

[0034] The rotating rod 14 is connected with a brush block 17, and a filter screen 18 is arranged in the filter cylinder 3 and abuts against the brush block 17.

[0035] In the embodiment, in use, the material is injected into the stirring cylinder 1, the first motor 5 on the fixed plate 2 is started to drive the stirring rod 6 at the output end to rotate, the stirring blade 10 on the stirring rod 6 is driven to rotate, the spiral blade 11 connected with the stirring blade 10 is used to fully stir the material in the stirring cylinder 1, after the stirring, the pump body 28 on the feeding pipe 4 is used to introduce the material from the stirring cylinder 1 into the filter cylinder 3 and pass through the filter box 12, the filter box 12 is uniformly provided with the bubble breaking needle 13, so that the bubbles in the material are broken, then the bubbles fall on the filter screen 18 in the filter cylinder 3, the filter screen 18 is scraped, the second motor 8 is started to drive the driving wheel 9 at the output end to rotate, the driving wheel 9 drives the driven wheel 15 to rotate under the action of the belt 16, the rotating rod 14 is driven to rotate, and the brush block 17 on the rotating rod 14 is used to scrape the filter screen 18.

[0036] Please refer to Figures 2-3 , as a photoresist filtering device embodiment of the filter assembly: the filter cylinder 3 is provided with a filter assembly, the filter assembly includes a partition plate 19, a gas cylinder 20 and a plug body 21, the partition plate 19 is arranged on the filter cylinder 3, the gas cylinder 20 is arranged on the inner bottom of the filter cylinder 3, the plug body 21 is connected to the output end of the gas cylinder 20, and the output end of the gas cylinder 20 penetrates the partition plate 19.

[0037] The plug body 21 is provided with a sealing ring 22, the sealing ring 22 is tightly attached to the inner side of the filter cylinder 3, and the filter cylinder 3 is slidably connected with a filter layer 23, an adsorption layer 24 and a suction layer 25.

[0038] One end of the filter layer 23, the adsorption layer 24 and the suction layer 25 is connected with a handle 26, the filter cylinder 3 is provided with a discharge pipe 27, and the feeding pipe 4 and the discharge pipe 27 are provided with pump bodies 28.

[0039] More specifically, when the material is in the process of the filter cylinder 3, it will pass through the filter layer 23, the adsorption layer 24 and the filter screen 18 in turn, and after collecting the filtered material, the handle 26 is used to drive the sliding removal process, and the filtered material falls on the plug body 21, and the sealing ring 22 arranged on the plug body 21 effectively prevents the outflow of the material, and the movement of the plug body 21 is controlled by the air cylinder 20, so that when the plug body 21 moves below the liquid level of the discharge pipe 27, the discharge pipe 27 can be fully discharged, and the material is sucked out under the action of the pump body 28.

[0040] In summary, the overall equipment in use or operation: in the process of use, the material is injected into the stirring cylinder 1, the first motor 5 on the fixed plate 2 is started to drive the stirring rod 6 on the output end to rotate, and in the rotating process, the stirring blade 10 on the stirring rod 6 is driven to rotate, so that the spiral blade 11 connected with the stirring blade 10 can fully stir the material in the stirring cylinder 1, after the stirring process is completed, the pump body 28 on the feeding pipe 4 is used to introduce the material from the stirring cylinder 1 into the filter cylinder 3, and it will pass through the filter box 12, and when passing through the filter box 12, the bubble in the material can be broken because the bubble breaking needle 13 is uniformly arranged in the filter box 12, then it will fall on the filter screen 18 in the filter cylinder 3, and when passing through the filter screen 18, it will cause blockage, at this time, the surface of the filter screen 18 needs to be scraped, the second motor 8 is started to drive the driving wheel 9 on the output end to rotate, and then under the action of the belt 16, the driven wheel 15 is driven to rotate, and the rotating rod 14 is driven to rotate, so that the brush block 17 on the rotating rod 14 can scrape the filter screen 18.

[0041] When the material is in the process of the filter cylinder 3, it will pass through the filter layer 23, the adsorption layer 24 and the filter screen 18 in turn, and after collecting the filtered material, the handle 26 is used to drive the sliding removal process, and the filtered material falls on the plug body 21, and the sealing ring 22 arranged on the plug body 21 effectively prevents the outflow of the material, and the movement of the plug body 21 is controlled by the air cylinder 20, so that when the plug body 21 moves below the liquid level of the discharge pipe 27, the discharge pipe 27 can be fully discharged, and the material is sucked out under the action of the pump body 28.

[0042] In all the above-mentioned solutions, the connection between the two components can be selected according to the actual situation, such as welding, bolt and nut connection, bolt or screw connection or other known connection mode, which will not be described here. In the above, whenever there is a fixed connection, welding is preferred. Although the embodiments of the utility model have been shown and described, those skilled in the art can understand that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the utility model, and the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A photoresist filtration device comprising a mixing bowl (1), characterised in that: The stirring barrel (1) is provided with a stirring assembly, the stirring assembly comprises a fixed plate (2), a filter cylinder (3), a feeding pipe (4), a first motor (5) and a stirring rod (6), the fixed plate (2) is arranged on the stirring barrel (1), the filter cylinder (3) is arranged at one end of the stirring barrel (1), the feeding pipe (4) is connected between the stirring barrel (1) and the filter cylinder (3), the first motor (5) is fixedly installed on the fixed plate (2), the stirring rod (6) is connected to the output end of the first motor (5), the filter cylinder (3) is provided with a scraping assembly, the scraping assembly comprises a top cover (7), a second motor (8) and a driving wheel (9), the top cover (7) is arranged at the top of the filter cylinder (3), the second motor (8) is fixedly installed on the top cover (7), and the driving wheel (9) is connected to the output end of the second motor (8).

2. The photoresist filtration device of claim 1, wherein: The stirring rod (6) is provided with a stirring blade (10), and the stirring blade (10) is uniformly provided with a spiral blade (11).

3. A photoresist filtration device according to claim 2, wherein: The filter cylinder (3) is internally provided with a filter box (12), and the filter box (12) is internally and uniformly provided with a bubble breaking needle (13).

4. The photoresist filtration device of claim 3, wherein: The top cover (7) is rotatably connected with a rotating rod (14), one end of the rotating rod (14) is connected with a driven wheel (15), and the driven wheel (15) and the driving wheel (9) are in transmission connection through a belt (16).

5. A photoresist filtration device according to claim 4, wherein: The rotating rod (14) is connected with a brush block (17), the filter cylinder (3) is internally provided with a filter screen (18), and one end of the filter screen (18) abuts against the brush block (17).

6. The photoresist filtration device of any of claims 1-5, wherein: The filter cylinder (3) is internally provided with a filter assembly, the filter assembly comprises a partition plate (19), an air cylinder (20) and a plug body (21), the partition plate (19) is arranged on the filter cylinder (3), the air cylinder (20) is installed on the inner bottom of the filter cylinder (3), the plug body (21) is connected to the output end of the air cylinder (20), and the output end of the air cylinder (20) penetrates the partition plate (19).

7. A photoresist filtration device according to claim 6, wherein: The plug body (21) is provided with a sealing ring (22), the sealing ring (22) is tightly attached to the inner side of the filter cylinder (3), and the filter cylinder (3) is slidably connected with a filter layer (23), an adsorption layer (24) and a suction layer (25).

8. A photoresist filtration device according to claim 7, wherein: One end of the filter layer (23), the adsorption layer (24) and the suction layer (25) is connected with a handle (26), the filter cylinder (3) is provided with a discharge pipe (27), and the feeding pipe (4) and the discharge pipe (27) are provided with a pump body (28).

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