Diamond wire silicon wafer slicing machine device facilitating wire replacement

Abstract

The utility model discloses a diamond wire silicon wafer slicer device convenient to change wires, which relates to the field of matched wire change and comprises a rotating shaft, a telescopic component is arranged on the left side of the rotating shaft, a fixing component is arranged on the left side of the telescopic component, a coil component is arranged on the left side of the fixing component, and the fixing component comprises a mounting block. A motor is arranged on the left side of the mounting block, an auxiliary disc is arranged at the execution end of the motor, connecting rods are arranged at the four corners of the auxiliary disc, limiting rods are arranged at the other ends of the connecting rods, auxiliary rods are arranged on the right sides of the limiting rods, and sliding grooves matched with the auxiliary rods are formed in the opposite sides of the auxiliary rods; through cooperation of the limiting rod, the connecting rod, the auxiliary rod, the fixing rod, the auxiliary disc and other parts, the coil assembly can be stably fixed, the limiting rod slides out of the limiting groove, then a diamond wire can be conveniently replaced by the coil assembly, and the replacement efficiency of the diamond wire is improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of matching line changing, specifically a diamond wire silicon wafer slicing machine device convenient for line changing. BACKGROUND

[0002] In the modern semiconductor industry, silicon wafers as important basic materials, its processing quality and efficiency are very important. Diamond wire silicon wafer slicing machine device is the key equipment in the production process of silicon wafer, with the continuous growth of silicon wafer market demand and the increasing demand for silicon wafer quality, the traditional diamond wire silicon wafer slicing machine device exposes many problems and limitations in line changing.

[0003] After searching, the existing Chinese patent No. CN215472268U provides a diamond wire silicon wafer slicing machine device convenient for line changing. The patent is designed to automatically open or lock the screw for installing and positioning the diamond wire, so as to facilitate the replacement of the diamond wire and the automatic and convenient loosening or tightening of the line during the line changing process.

[0004] However, the above-mentioned patent cannot replace the diamond wire coil, and the installation and replacement of the coil are complex and difficult to operate, which often requires a lot of time and manpower. Moreover, during the line changing process, the lack of reasonable design and optimization may lead to unstable coil performance, affecting the working efficiency and slicing quality of the slicing machine. In the face of growing production demand and the pursuit of high-quality silicon wafers, it is imperative to develop a diamond wire silicon wafer slicing machine device with better performance in the coil direction and convenient line changing operation. UTILITY MODEL CONTENTS

[0005] The utility model aims to provide a diamond wire silicon wafer slicing machine device convenient for line changing, to solve the problem of non-replaceable diamond wire coil, complex installation and replacement, high difficulty, long time and manpower, unstable coil performance due to lack of design and optimization during line changing, affecting efficiency and quality.

[0006] To achieve the above object, the utility model provides the following technical scheme: a kind of diamond wire silicon wafer slicing machine device convenient to change line, including rotating shaft, the left side of the rotating shaft is provided with telescopic component, the left side of the telescopic component is provided with fixed component, the left side of the fixed component is provided with coil component.

[0007] Preferably, the fixed component includes a mounting block, the left side of the mounting block is provided with a motor, the execution end of the motor is provided with an auxiliary disc, the four corners of the auxiliary disc are provided with connecting rods, the other end of the connecting rod is provided with a limiting rod, the right side of the limiting rod is provided with an auxiliary rod, and the opposite side of the auxiliary rod is provided with a sliding groove matched therewith, and the adjacent end of the auxiliary rod is provided with a fixed rod.

[0008] Preferably, the telescopic component includes a sliding ring, the inner wall of the sliding ring is provided with an electric telescopic rod, the execution end of the electric telescopic rod is provided with a limiting ring, and the inner wall of the limiting ring is slidingly connected to the outer wall of the sliding ring.

[0009] Preferably, the right part of the limiting rod is slidingly connected to the inside of the left side of the mounting plate, and the left end of the limiting rod is slidingly connected to the inside of the limiting groove.

[0010] Preferably, the two ends of the fixed rod are fixedly connected to the inside of the mounting plate, the opposite end of the auxiliary rod is fixedly connected to the inside of the mounting plate, and the auxiliary disc is rotatably connected to the inside of the mounting plate.

[0011] Preferably, the left side of the limiting ring is fixedly connected to the right side of the mounting block, and the right side of the limiting ring is fixedly connected to the inner wall of the rotating shaft.

[0012] Compared with the prior art, the utility model has the advantages that:

[0013] 1. The cooperation between the limiting rod, connecting rod, auxiliary rod, fixed rod and auxiliary disc can stably fix the coil component, the limiting rod slides out of the limiting groove, which facilitates the replacement of the coil component and improves the replacement efficiency of the diamond wire.

[0014] 2. The cooperation between the sliding ring, limiting ring and electric telescopic rod facilitates the replacement of the diamond wire without the need for workers to reach into the device, thereby improving the work efficiency of the workers. BRIEF DESCRIPTION OF DRAWINGS

[0015] Fig. 1 The utility model structural schematic diagram is shown in the figure;

[0016] Fig. 2 The fixed rod structure schematic diagram of the utility model is shown in the figure;

[0017] Fig. 3 The motor structure schematic diagram of the utility model is shown in the figure.

[0018] In the figure: 1, coil assembly; 11, coil; 12, limiting groove; 2, fixed assembly; 21, limiting rod; 22, connecting rod; 23, auxiliary rod; 24, fixed rod; 25, auxiliary disc; 26, motor; 27, mounting block; 28, mounting plate; 3, telescopic assembly; 31, sliding ring; 32, limiting ring; 33, electric telescopic rod; 4, rotating shaft. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0020] Please refer to Figs. 1-3 The utility model provides a kind of technical solutions: a kind of diamond wire silicon wafer slicing machine device of line replacement, including rotating shaft 4, telescopic assembly 3 is arranged on the left side of rotating shaft 4, rotating shaft 4 supports telescopic assembly 3, fixed assembly 2 is moved to left, it is convenient for worker to replace diamond wire, fixed assembly 2 is arranged on the left side of telescopic assembly 3, telescopic assembly 3 drives fixed assembly 2 to move, coil assembly 1 is arranged on the left side of fixed assembly 2, fixed assembly 2 is convenient to fix the coil assembly 1 of different sizes, to improve the installation efficiency of device in turn.

[0021] Fixed assembly 2 includes mounting block 27, motor 26 is arranged on the left side of mounting block 27, motor 26 is installed on the left side of mounting block 27, it is convenient for the use of motor 26, motor 26 execution end is provided with auxiliary disc 25, motor 26 drives auxiliary disc 25 to rotate in mounting plate 28 inside, auxiliary disc 25 four corners are provided with connecting rod 22, auxiliary disc 25 drives rotating connecting connecting rod 22 to rotate in mounting plate 28 inside, connecting rod 22 other end is provided with limiting rod 21, connecting rod 22 drives limiting rod 21 to slide in the left side inside of mounting plate 28, limiting rod 21 right side is provided with auxiliary rod 23, and auxiliary rod 23 opposite side is all provided with the sliding slot matched therewith, the sliding slot of limiting rod 21 right side, slide in the outer periphery of auxiliary rod 23, auxiliary rod 23 adjacent one end is provided with fixed rod 24, and fixed rod 24 is fixed in mounting plate 28 inside, it is convenient to stably fixed in mounting plate 28 inside.

[0022] The telescopic assembly 3 comprises a sliding ring 31, the inner wall of the sliding ring 31 is provided with an electric telescopic rod 33, the electric telescopic rod 33 is fixedly connected to the right side of the inner wall of the sliding ring 31, and the electric telescopic rod 33 plays a stable operation effect, the execution end of the electric telescopic rod 33 is provided with a limiting ring 32, the electric telescopic rod 33 drives the limiting ring 32 at the execution end to move, wherein the right side of the limiting ring 32 is provided with an inner annular protrusion, and the left side of the sliding ring 31 is provided with an outer annular protrusion, wherein a hole is formed in the two annular protrusions to facilitate exhaust, and the inner wall of the limiting ring 32 is slidably connected to the outer wall of the sliding ring 31, the electric telescopic rod 33 drives the sliding between the sliding ring 31 and the limiting ring 32, so that the coil assembly 1 can be moved to the left side, and the worker is facilitated to install.

[0023] The right part of the limiting rod 21 is slidably connected to the left inner part of the mounting plate 28, the limiting rod 21 is slidably connected to the groove formed in the left side of the mounting plate 28 by the driving of the connecting rod 22, wherein the groove formed in the left side of the mounting plate 28 matches the width of the limiting rod 21, the left end of the limiting rod 21 is slidably connected to the limiting groove 12, and the limiting rod 21 is fixedly connected to the limiting groove 12, which plays a stable effect of fixing the coil assembly 1, and does not slip when the coil assembly 1 rotates, and after the limiting rod 21 slides out of the limiting groove 12, the coil assembly 1 is facilitated to be disassembled and installed.

[0024] The both ends of the fixed rod 24 are fixedly connected to the inside of the mounting plate 28, the fixed rod 24 plays a stable supporting effect, the opposite end of the auxiliary rod 23 is fixedly connected to the inside of the mounting plate 28, the opposite side of the auxiliary rod 23 is fixedly connected to the inside of the mounting plate 28, which plays a stable fixing effect and can support the auxiliary rod 23 to slide in the sliding groove formed in the right side of the limiting rod 21, the auxiliary disc 25 is rotatably connected to the inside of the mounting plate 28, and the auxiliary disc 25 is rotatably connected to the inside of the mounting plate 28 by the driving of the motor 26.

[0025] The left side of the limiting ring 32 is fixedly connected to the right side of the mounting block 27, the limiting ring 32 is fixedly connected to the inside of the right side of the mounting block 27, which can stably fix the fixed assembly 2, the right outer periphery of the limiting ring 32 is fixedly connected to the inner wall of the rotating shaft 4, and the rotating shaft 4 is fixedly connected to the right outer periphery of the limiting ring 32.

[0026] Working principle: when using the device, first when the diamond wire needs to be replaced, the diamond wire can be replaced by replacing the coil assembly 1, wherein the motor 26 is started, and the motor 26 is fixed on the right side of the mounting plate 28 and rotates in the mounting block 27, thereby driving the auxiliary disc 25 at the execution end, thereby driving the connecting rod 22 at the four corners to rotate in the mounting plate 28, thereby driving the limiting rod 21 at the other end of the mounting plate 28 to slide on the outer periphery of the auxiliary rod 23, and the auxiliary rod 23 is fixed at both ends in the mounting plate 28 and the fixed rod 24, which has the effect of supporting, thereby enabling the limiting rod 21 to slide out of the limiting groove 12 in the middle, and then loosening the diamond wire arranged on the outer periphery of the middle of the coil 11, thereby facilitating the replacement of the diamond wire, wherein before starting the motor 26, the electric telescopic rod 33 is started first, driving the limiting ring 32 at the execution end, and then sliding the inner wall of the limiting ring 32 on the outer periphery of the sliding ring 31, wherein the limiting ring 32 and the sliding ring 31 are provided with limiting blocks at the intersection of both ends, which prevent the effect of disengagement when the telescopic assembly 3 is used, wherein the sliding ring 31 slides on the left side of the rotating shaft 4 in the matching slide groove, thereby not needing workers to stretch into the device for operation, thereby facilitating workers to replace the diamond wire.

[0027] Although the embodiments of the present application have been shown and described, it should be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A diamond wire silicon wafer slicing machine device facilitating wire changing, comprising a rotating shaft (4), characterized in that: The rotating shaft (4) left side is provided with telescopic assembly (3), telescopic assembly (3) left side is provided with fixed assembly (2), fixed assembly (2) left side is provided with coil assembly (1); The fixed assembly (2) includes a mounting block (27), the mounting block (27) left side is provided with motor (26), the motor (26) execution end is provided with auxiliary disc (25), the auxiliary disc (25) four corners are provided with connecting rod (22), the connecting rod (22) other end is provided with limit rod (21), the limit rod (21) right side is provided with auxiliary rod (23), and the auxiliary rod (23) opposite side is provided with the sliding groove matched with it, the auxiliary rod (23) adjacent one end is provided with fixed rod (24).

2. The diamond wire saw device for wafer slicing with easy wire changing according to claim 1, characterized in that: The telescopic assembly (3) includes a sliding ring (31), the sliding ring (31) inner wall is provided with electric telescopic rod (33), the electric telescopic rod (33) execution end is provided with limit ring (32), and the limit ring (32) inner wall is slidably connected to the outer wall of sliding ring (31).

3. The diamond wire saw device for wafer slicing with easy wire changing according to claim 1, characterized in that: The limit rod (21) right part is slidably connected to the left side inside of the mounting plate (28), and the limit rod (21) left end is slidably connected to the inside of the limiting groove (12).

4. The diamond wire saw device for wafer slicing with easy wire changing according to claim 1, characterized in that: The fixed rod (24) both ends are fixedly connected to the inside of the mounting plate (28), the auxiliary rod (23) opposite end is fixedly connected to the inside of the mounting plate (28), and the auxiliary disc (25) is rotatably connected to the inside of the mounting plate (28).

5. The diamond wire saw device for facilitating wire change according to claim 2, wherein: The limit ring (32) left side is fixedly connected to the right side of the mounting block (27), and the limit ring (32) right side is fixedly connected to the inner wall of the rotating shaft (4).

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