Filament ion source coating equipment with long service life

Abstract

The utility model relates to filament ion source long-service-life coating equipment, which comprises a coating box main body, the coating box main body is provided with the filament ion source long-service-life coating equipment, the filament ion source long-service-life coating equipment comprises a loading plate, and the loading plate is provided with a plurality of filament ion source modules. Every two filament ion source modules are arranged in one group, two ends of each group of filament ion source are connected to a power supply circuit, and the power supply circuit connected with one end is provided with an on-off control module; one filament ion source module, two filament ion source modules and three filament ion source modules are adaptively selected until all the filament ion source modules are electrified for ion source supply, so that an adaptive switching type rapid ion source supply structure is formed; therefore, the film coating structure which does not need to frequently circulate different currents and can prolong the service life of the filament ion source is formed.

Description

Technical Field

[0001] This utility model relates to surface coating preparation technology, and in particular to surface coating technology and its equipment. Specifically, it relates to a coating equipment for a filament ion source with a long service life. Background Technology

[0002] In the process of preparing a precision surface coating, it is necessary to ensure the density of the ion source inside the coating chamber. The filament ion source is the main component that generates ion sources inside the coating chamber. At present, the current of the filament ion source is increased to achieve the required ion source density. However, the filament ion source is easily damaged and has a short service life due to the frequent flow of different currents.

[0003] Therefore, there is a need to provide a coating equipment with a long service life for the filament ion source to solve the above problems. Utility Model Content

[0004] The purpose of this invention is to provide a coating equipment with a long service life for a filament ion source.

[0005] This utility model achieves the above objectives through the following technical solution:

[0006] A coating equipment with a long service life of filament ion source includes a coating box body, on which a coating equipment with a long service life of filament ion source is installed. The coating equipment with a long service life of filament ion source includes a loading plate, on which a plurality of filament ion source modules are installed. Every two filament ion source modules are arranged in a group. Both ends of each group of filament ion sources are connected to a power supply circuit, and one end of the power supply circuit is connected to an on / off control module.

[0007] Adaptively select one filament ion source module, two filament ion source modules, three filament ion source modules, or all filament ion source modules, and power them on to supply ion sources, forming an adaptive and rapidly changeable ion source supply structure. This results in a coating structure that does not require frequent flow of different currents and improves the service life of the filament ion source.

[0008] Furthermore, the filament ion source module includes a filament protective housing, and a filament is disposed inside the filament protective housing.

[0009] Furthermore, the filament is a tungsten wire with a diameter of 1mm.

[0010] Furthermore, the filament length is 0.5-1.8m.

[0011] Furthermore, the on / off control module is an on and off switch.

[0012] Furthermore, the on / off control module includes a closed end connected to the electromagnet, and a corresponding adsorption part is provided for the closed end. When the electromagnet is energized or de-energized, it controls whether the corresponding closed end is attracted or not, and the closed end is connected to or moved away from the corresponding docking end, forming a filament on / off control structure.

[0013] Furthermore, the electromagnet connection has a resilient return element.

[0014] Furthermore, the elastic restoring element is composed of a tension spring.

[0015] Compared with the prior art, this invention can provide different numbers of filaments for ion source supply to accommodate different ion source densities, without the need to adjust the current passing through the filaments, thus effectively improving the service life of the filament ion source. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the main body of the coating box.

[0017] Figure 2 This is a schematic diagram of the structure of Embodiment 1 of this utility model.

[0018] Figure 3 This is a schematic diagram of the structure of Embodiment 2 of this utility model. Detailed Implementation

[0019] Example 1:

[0020] See Figure 1-2 This embodiment demonstrates a coating equipment with a long service life of filament ion source, including a coating box body 100, on which a coating equipment 200 with a long service life of filament ion source is disposed. The coating equipment 200 with a long service life of filament ion source includes a loading plate 201, on which a plurality of filament ion source modules 1 are disposed. Every two filament ion source modules 1 are arranged in a group, and both ends of each group of filament ion sources are connected to a power supply circuit 2. One end of the power supply circuit 2 is connected to an on / off control module 3.

[0021] Adaptively select one filament ion source module 1, two filament ion source modules 1, three filament ion source modules 1, or all filament ion source modules 1, and power on them to supply ion sources, forming an adaptive and rapidly changeable ion source supply structure, thereby forming a coating structure that does not require frequent flow of different currents and improves the service life of the filament ion source.

[0022] The filament ion source module 1 includes a filament protective housing 11, and a filament 12 is disposed inside the filament protective housing 11.

[0023] Filament 12 is a tungsten wire with a diameter of 1mm.

[0024] The length of filament 12 is 0.5-1.8m.

[0025] The on / off control module 3 is for on and off switching.

[0026] Example 2:

[0027] See Figure 1 , 3 This embodiment demonstrates a coating equipment with a long service life of filament ion source, including a coating box body 100, on which a coating equipment 200 with a long service life of filament ion source is disposed. The coating equipment 200 with a long service life of filament ion source includes a loading plate 201, on which a plurality of filament ion source modules 1 are disposed. Every two filament ion source modules 1 are arranged in a group, and both ends of each group of filament ion sources are connected to a power supply circuit 2. One end of the power supply circuit 2 is connected to an on / off control module 3.

[0028] Adaptively select one filament ion source module 1, two filament ion source modules 1, three filament ion source modules 1, or all filament ion source modules 1, and power on them to supply ion sources, forming an adaptive and rapidly changeable ion source supply structure, thereby forming a coating structure that does not require frequent flow of different currents and improves the service life of the filament ion source.

[0029] The filament ion source module 1 includes a filament protective housing 11, and a filament 12 is disposed inside the filament protective housing 11.

[0030] Filament 12 is a tungsten wire with a diameter of 1mm.

[0031] The length of filament 12 is 0.5-1.8m.

[0032] The on / off control module 3 includes a closed end 32 connected to the electromagnet 31, and an adsorption corresponding part 33 is provided for the closed end 32. The electromagnet 31 is turned on and off to control whether the corresponding closed end 32 is attracted or not. The closed end 32 is connected to or moved away from the corresponding docking end 34, forming a filament on / off control structure.

[0033] The electromagnet 31 is connected to a spring-loaded restoring element 35.

[0034] The elastic restoring element 35 is made of a tension spring.

[0035] Compared with the prior art, this invention can provide different numbers of filaments for ion source supply to accommodate different ion source densities, without the need to adjust the current passing through the filaments, thus effectively improving the service life of the filament ion source.

[0036] The above are merely some embodiments of this utility model. For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and these all fall within the protection scope of this utility model.

Claims

1. A coating equipment with a long service life for a filament ion source, characterized in that: The coating equipment includes a coating box body, on which a coating equipment with a long service life of filament ion source is installed. The coating equipment with a long service life of filament ion source includes a loading plate, on which several filament ion source modules are installed. Each pair of filament ion source modules is set up as a group. Both ends of each group of filament ion sources are connected to a power supply circuit, and one end of the power supply circuit is connected to an on / off control module. Adaptively select one filament ion source module, two filament ion source modules, three filament ion source modules, or all filament ion source modules, and power them on to supply ion sources, forming an adaptive and rapidly changeable ion source supply structure. This results in a coating structure that does not require frequent flow of different currents and improves the service life of the filament ion source.

2. The coating equipment with a long service life of filament ion source according to claim 1, characterized in that: The filament ion source module includes a filament protective housing, and the filament is disposed inside the filament protective housing.

3. The coating equipment with a long service life for a filament ion source according to claim 2, characterized in that: The filament is a tungsten wire with a diameter of 1mm.

4. The coating equipment with a long service life of filament ion source according to claim 3, characterized in that: The filament length is 0.5-1.8m.

5. A coating equipment with a long service life for a filament ion source according to any one of claims 1-4, characterized in that: The on / off control module is an on and off switch.

6. A coating equipment with a long service life for a filament ion source according to any one of claims 1-4, characterized in that: The on / off control module includes a closed end connected to the electromagnet, and a corresponding adsorption part is provided for the closed end. When the electromagnet is energized or de-energized, it controls whether the corresponding closed end is attracted or not, and the closed end is connected or moved away from the corresponding docking end, forming a filament on / off control structure.

7. A coating equipment with a long service life for a filament ion source according to claim 6, characterized in that: The electromagnet connection has a flexible return element.

8. A coating equipment with a long service life for a filament ion source according to claim 7, characterized in that: The elastic restoring element is composed of a tension spring.

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