Heating mechanism of vacuum coating equipment

Abstract

The utility model relates to the technical field of vacuum coating, and discloses a heating mechanism of vacuum coating equipment, which comprises a frame plate, a mounting plate is arranged on the outer wall of the frame plate, a halogen lamp component is arranged on the inner wall of the frame plate, and antifouling glass is arranged on the inner wall of the frame plate. A pulling plate can be pulled to enable a scraping plate to move synchronously, the scraping plate can scrape dust and scraps on the surface of antifouling glass, a jacking plate can be driven to move forwards when the scraping plate moves, then a blocking door on a torsional spring hinge is jacked open, and finally the scraps scraped and gathered by the scraping plate can be discharged out of a dust removal groove. And by arranging a shielding plate, external dust and debris can be prevented from entering the sliding groove, it is guaranteed that the antifouling glass can still be cleaned without dismounting the heating mechanism, and external dust and debris can be prevented from entering the sliding groove in daily heating.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, specifically to a heating mechanism for a vacuum coating equipment. Background Technology

[0002] During the coating process in vacuum coating equipment, the substrate temperature affects the quality and density of the film. Therefore, within the range that the substrate and equipment can withstand, it is necessary to increase the temperature of the substrate surface as much as possible to improve the film quality. Under the current technology, the substrate is placed on the upper layer of the umbrella-shaped coating rack, which has openings. The heating source is usually a heating wire set above the coating rack, which radiates the back of the substrate, that is, the side of the substrate facing the heating source, which is roughly the upper surface of the substrate, to increase the temperature of the substrate.

[0003] According to a heating mechanism for vacuum coating equipment disclosed in the above application (Announcement No.: CN221117598U), the heating efficiency is high and the heat transfer is rapid by setting up an installation frame, halogen lamp assembly, first anti-fouling glass and lamp cover. The heating mechanism can be set at the bottom of the vacuum chamber, that is, below the planetary rotating mechanism, thereby reducing the heat radiation received by the planetary rotating mechanism, improving the working condition of the planetary rotating mechanism and extending its service life.

[0004] However, in actual use, the anti-fouling glass is located below the mesh, and debris gradually accumulates on its surface during use, which makes it difficult to efficiently transfer the heat generated by the halogen lamp assembly. Furthermore, cleaning the anti-fouling glass after disassembling the outer casing is too cumbersome. Therefore, we propose a heating mechanism for a vacuum coating equipment. Utility Model Content

[0005] The purpose of this invention is to provide a heating mechanism for a vacuum coating equipment to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a heating mechanism for a vacuum coating equipment, comprising a frame plate, an mounting plate on the outer wall of the frame plate, a halogen lamp assembly on the inner wall of the frame plate, a dirt-proof glass on the inner wall of the frame plate, a cover on the outer wall of the frame plate, a mesh cover on the outer wall of the cover, a cleaning assembly on the outer wall of the frame plate, the cleaning assembly including a dust removal groove formed on the outer wall of the frame plate, a receiving groove formed on the outer wall of the frame plate, a sliding groove formed on the outer wall of the cover, a torsion spring hinge on the outer wall of the frame plate, and a stop door fixedly connected to the outer wall of the torsion spring hinge;

[0007] A spring is fixedly connected to the inner wall of a sliding groove. A pull plate is fixedly connected to the end of the spring. A scraper is fixedly connected to the end of the pull plate. A cover plate is fixedly connected to the outer wall of the pull plate. A top pressure plate is fixedly connected to the outer wall of the scraper.

[0008] Preferably, the length of the baffle is adapted to the length of the sliding groove, so that the baffle can prevent external dust and debris from entering the sliding groove.

[0009] Preferably, the outer wall of the pull plate is slidably connected to the inner wall of the sliding groove, and the pull plate is adapted to the sliding groove so that the pull plate can be displaced on the inner wall of the sliding groove.

[0010] Preferably, the springs are provided in two sets, and the two sets of springs are arranged on both sides of the central plane of the cover.

[0011] Preferably, the outer wall of the top pressure plate is provided with a toggle assembly, the toggle assembly includes an arc-shaped moving block, the arc-shaped moving block is fixedly connected to the outer wall of the top pressure plate, and the inner wall of the frame plate is fixedly connected with an arc-shaped pressure block.

[0012] Preferably, the number of the arc-shaped moving blocks is several, and the several arc-shaped moving blocks are arranged in a linear array on the outer wall of the top pressure plate, so that the arc-shaped moving blocks can rub against each other with the arc-shaped pressure block when they are displaced.

[0013] Compared with the prior art, the present invention provides a heating mechanism for a vacuum coating equipment, which has the following advantages:

[0014] 1. The heating mechanism of this vacuum coating equipment allows the scraper to move synchronously when cleaning debris and dust from the surface of the anti-fouling glass is required. This scraper removes the dust and debris from the surface of the anti-fouling glass. As the scraper moves, it also moves the top pressure plate forward, which opens the stop on the torsion spring hinge. This allows the debris collected by the scraper to be discharged from the dust removal trough. The baffle prevents external dust and debris from entering the sliding groove, ensuring that the anti-fouling glass can still be cleaned without removing the heating mechanism. Furthermore, it prevents external dust and debris from entering the sliding groove during normal heating.

[0015] 2. In the heating mechanism of this vacuum coating equipment, when the pull plate is pulled to make the scraper move synchronously, the arc-shaped moving block on the top pressure plate will also move synchronously. This allows the arc-shaped moving block to rub against the arc-shaped pressure block during its movement, and ultimately, through vibration, the debris attached to the periphery of the dust removal tank can be further removed, preventing debris and dust from remaining around the dust removal tank, thereby further improving the overall practicality and stability. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of the utility model;

[0017] Figure 2 This is a schematic diagram of the cover and sliding groove structure of this utility model;

[0018] Figure 3 This is a schematic diagram of the structure of the frame plate and halogen lamp assembly of this utility model;

[0019] Figure 4 This is a schematic diagram of the dust removal tank and the receiving tank of this utility model;

[0020] Figure 5 This is a schematic diagram of the scraper structure of this utility model;

[0021] Figure 6 This is a schematic diagram of the anti-fouling glass structure of this utility model;

[0022] Figure 7 This is an enlarged schematic diagram of region A of this utility model;

[0023] Figure 8 This is a schematic diagram of the shield and spring structure of this utility model;

[0024] Figure 9 This is a schematic diagram of the top pressure plate and the arc-shaped moving block structure of this utility model.

[0025] In the diagram: 1. Frame plate; 2. Mounting plate; 3. Halogen lamp assembly; 4. Anti-fouling glass; 5. Cover; 6. Mesh cover; 7. Cleaning assembly; 701. Dust removal trough; 702. Receiving trough; 703. Sliding trough; 704. Torsion spring hinge; 705. Door stop; 706. Spring; 707. Pull plate; 708. Scraper; 709. Cover plate; 710. Top pressure plate; 8. Actuating assembly; 801. Arc-shaped moving block; 802. Arc-shaped pressure block. Detailed Implementation

[0026] like Figures 1-9 As shown, this utility model provides a technical solution: a heating mechanism for a vacuum coating equipment, including a frame plate 1, an mounting plate 2 on the outer wall of the frame plate 1, a halogen lamp assembly 3 on the inner wall of the frame plate 1, a dirt-proof glass 4 on the inner wall of the frame plate 1, a cover 5 on the outer wall of the frame plate 1, a mesh cover 6 on the outer wall of the cover 5, and a cleaning assembly 7 on the outer wall of the frame plate 1. The cleaning assembly 7 includes a dust removal groove 701, which is formed on the outer wall of the frame plate 1. The outer wall of the frame plate 1 has a receiving groove 702, the outer wall of the cover 5 has a sliding groove 703, and the outer wall of the frame plate 1 is provided with a torsion spring hinge 704. A stop door 705 is fixedly connected to the outer wall of the torsion spring hinge 704.

[0027] Furthermore, the spring 706 is fixedly connected to the inner wall of the sliding groove 703, the end of the spring 706 is fixedly connected to the pull plate 707, the end of the pull plate 707 is fixedly connected to the scraper 708, the outer wall of the pull plate 707 is fixedly connected to the cover plate 709, and the outer wall of the scraper 708 is fixedly connected to the top pressure plate 710.

[0028] In this embodiment of the utility model, the length of the baffle 709 is adapted to the length of the sliding groove 703, so that the baffle 709 can block external dust and debris from entering the interior of the sliding groove 703. The outer wall of the pull plate 707 is slidably connected to the inner wall of the sliding groove 703, and the pull plate 707 is adapted to the sliding groove 703, so that the pull plate 707 can move on the inner wall of the sliding groove 703. The number of springs 706 is two sets, and the two sets of springs 706 are mirror images of the center plane of the cover 5 on both sides.

[0029] Furthermore, the outer wall of the top pressure plate 710 is provided with a toggle assembly 8, which includes an arc-shaped moving block 801. The arc-shaped moving block 801 is fixedly connected to the outer wall of the top pressure plate 710, and an arc-shaped pressure block 802 is fixedly connected to the inner wall of the frame plate 1. The number of arc-shaped moving blocks 801 is several, and the several arc-shaped moving blocks 801 are arranged in a linear array on the outer wall of the top pressure plate 710, so that when the arc-shaped moving blocks 801 are displaced, they can rub against each other with the arc-shaped pressure block 802.

[0030] In this invention, during daily use, the overall heating mechanism is connected to the device via the mounting plate 2. During use, the halogen lamp assembly 3 provides heat. When debris and dust on the surface of the anti-fouling glass 4 need to be cleaned, the pull plate 707 can be pulled to cause the scraper 708 to move synchronously, allowing the scraper 708 to remove the dust and debris from the surface of the anti-fouling glass 4. When the scraper 708 moves, it will drive the top pressure plate 710 forward, thereby opening the stop 705 on the torsion spring hinge 704. Finally, the debris scraped by the scraper 708 can be discharged from the dust removal groove 701. The baffle 709 prevents external dust and debris from entering the sliding groove 703, ensuring that the anti-fouling glass 4 can still be cleaned without removing the heating mechanism, and preventing external dust and debris from entering the sliding groove 703 during daily heating.

[0031] When the pull plate 707 is pulled to make the scraper 708 move synchronously, the arc-shaped moving block 801 on the top pressure plate 710 will also move synchronously. This allows the arc-shaped moving block 801 to rub against the arc-shaped pressure block 802 during its movement. Ultimately, the vibration will further remove the debris attached to the periphery of the dust removal trough 701, preventing debris and dust from remaining around the dust removal trough 701. This further improves the overall practicality and stability.

[0032] The above generally describes the present invention in detail. However, it is obvious to those skilled in the art that modifications or improvements may be made to the present invention. Therefore, modifications or improvements that do not depart from the spirit of the present invention are within the scope of protection of the present invention.

Claims

1. A heating mechanism for a vacuum coating apparatus, comprising a frame plate (1), an mounting plate (2) disposed on the outer wall of the frame plate (1), a halogen lamp assembly (3) disposed on the inner wall of the frame plate (1), a dirt-proof glass (4) disposed on the inner wall of the frame plate (1), a cover (5) disposed on the outer wall of the frame plate (1), and a mesh cover (6) disposed on the outer wall of the cover (5), characterized in that: The outer wall of the shelf (1) is provided with a cleaning component (7), the cleaning component (7) comprising: A dust removal trough (701) is provided on the outer wall of the frame plate (1). The outer wall of the frame plate (1) has a receiving groove (702). The outer wall of the cover (5) has a sliding groove (703). The outer wall of the frame plate (1) is provided with a torsion spring hinge (704). The outer wall of the torsion spring hinge (704) is fixedly connected with a door (705). A spring (706) is fixedly connected to the inner wall of a sliding groove (703). A pull plate (707) is fixedly connected to the end of the spring (706). A scraper (708) is fixedly connected to the end of the pull plate (707). A cover plate (709) is fixedly connected to the outer wall of the pull plate (707). A top pressure plate (710) is fixedly connected to the outer wall of the scraper (708).

2. The heating mechanism of a vacuum coating equipment according to claim 1, characterized in that: The length of the baffle (709) is adapted to the length of the sliding groove (703).

3. The heating mechanism of a vacuum coating equipment according to claim 1, characterized in that: The outer wall of the pull plate (707) is slidably connected to the inner wall of the sliding groove (703), and the pull plate (707) is adapted to the sliding groove (703).

4. The heating mechanism of a vacuum coating equipment according to claim 1, characterized in that: The springs (706) are arranged in two sets, and the two sets of springs (706) are arranged on both sides with the center plane of the cover (5) as a mirror image.

5. The heating mechanism of a vacuum coating equipment according to claim 1, characterized in that: The outer wall of the top pressure plate (710) is provided with a toggle assembly (8), the toggle assembly (8) includes an arc-shaped moving block (801), the arc-shaped moving block (801) is fixedly connected to the outer wall of the top pressure plate (710), and the inner wall of the frame plate (1) is fixedly connected with an arc-shaped pressure block (802).

6. The heating mechanism of a vacuum coating equipment according to claim 5, characterized in that: The number of the arc-shaped moving blocks (801) is several, and the several arc-shaped moving blocks (801) are arranged in a linear array on the outer wall of the top pressure plate (710).

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