Fixing device

The combined design of the positioning seat and the multi-clamping mechanism solves the problems of unstable fixation and difficult-to-control clamping force of the existing device, realizes stable fixation and precise clamping of the semiconductor chip, and is suitable for semiconductor testing.

CN223486038UActive Publication Date: 2025-10-28VERIZON UNITED SEMICON (TEXAS) CO LTD
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Patent Information

Application Number
CN202422756022.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-11-12
Publication Date
2025-10-28
Estimated Expiration
2034-11-12

AI Technical Summary

Technical Problem

Existing fixing devices can only fix the two ends of the semiconductor chip, resulting in unstable fixation and difficulty in controlling the clamping force, which may damage the chip.

Method used

A combination design of a positioning seat, a first clamping mechanism, a second clamping mechanism, a third clamping mechanism and a driving mechanism is adopted. The driving mechanism enables the clamping mechanism to move in different directions to achieve four-end fixation, and the clamping force is adjusted by the elastic mechanism.

Benefits of technology

The fixing stability and clamping effect of the semiconductor chip are improved to ensure that the chip is not damaged during the detection process, and the clamping force can be adjusted accurately.

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Abstract

The utility model belongs to the technical field of semiconductor detection, and discloses a fixing device which comprises a positioning seat, a first clamping mechanism, a second clamping mechanism, a third clamping mechanism and a driving mechanism, the first clamping mechanism, the second clamping mechanism, the third clamping mechanism and the driving mechanism are arranged on the positioning seat, the second clamping mechanism and the third clamping mechanism are arranged on the two sides of the positioning piece respectively, the driving mechanism is configured to drive the first clamping mechanism to move relative to the positioning piece in the first direction and drive the second clamping mechanism and the third clamping mechanism to move relative to each other in the second direction, and the first direction is perpendicular to the second direction. By means of the arrangement, the fixing device can improve the fixing effect on the semiconductor chip and other fixing parts.
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Description

Technical Field

[0001] This utility model relates to the field of semiconductor testing technology, and in particular to a fixing device. Background Art

[0002] Semiconductors are materials whose conductivity at room temperature falls between that of conductors and insulators. Semiconductor chips have wide applications in radios, televisions, and temperature measurement. After semiconductor chips are manufactured, they need to be tested. There are various testing methods, one of which involves applying a signal to one pin and receiving the signal through another pin to determine whether the semiconductor chip meets the requirements.

[0003] To perform semiconductor chip testing, a clamping device is needed to hold and secure the chip. However, existing clamping devices can only secure two ends of the chip, leaving the other ends unsecured, thus affecting the stability of the clamping. Furthermore, these devices rely on springs for elastic clamping, but the spring force is difficult to control and adjust. Operators can only test the clamping force using pressure sensors, making it difficult to control the clamping force and potentially damaging the semiconductor, thus disrupting normal testing operations. Utility Model Content

[0004] The purpose of this invention is to provide a fixing device that can improve the fixing effect of semiconductor chips and other fasteners.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A fixing device includes a positioning seat and a first clamping mechanism, a second clamping mechanism, a third clamping mechanism, and a driving mechanism disposed on the positioning seat, wherein:

[0007] The positioning seat is provided with a positioning element, and the positioning seat is configured to support the element to be fixed.

[0008] The first clamping mechanism is disposed opposite to the positioning member;

[0009] The second clamping mechanism and the third clamping mechanism are respectively disposed on both sides of the positioning member;

[0010] The drive mechanism is configured to drive the first clamping mechanism to move relative to the positioning member in a first direction, and simultaneously drive the second clamping mechanism and the third clamping mechanism to move relative to each other in a second direction, wherein the first direction is perpendicular to the second direction.

[0011] Optionally, the fixing device further includes an elastic mechanism disposed on the first clamping mechanism, and / or the second clamping mechanism, and / or the third clamping mechanism. The elastic mechanism is capable of adjusting the clamping force of the first clamping mechanism and / or the second clamping mechanism and / or the third clamping mechanism on the member to be fixed.

[0012] Optionally, the first clamping mechanism and / or the second clamping mechanism and / or the third clamping mechanism include a support plate and an adjusting plate movably connected to the support plate, and the elastic mechanism is configured to provide an elastic resisting force to the adjusting plate.

[0013] Optionally, the support plate and the adjusting plate are connected by a resilient pin.

[0014] Optionally, the elastic mechanism includes an elastic element disposed between the support plate and the adjusting plate.

[0015] Optionally, the elastic mechanism further includes a second threaded rod, two sliders, and a knob, wherein:

[0016] The second threaded rod is rotatably mounted on the support plate and has two threaded segments with opposite directions of rotation;

[0017] The two sliders are respectively threaded to the two threaded segments and respectively connected to the two ends of the elastic element, and the two sliders are slidably engaged with the support plate;

[0018] The knob is configured to rotate the second threaded rod relative to the support plate.

[0019] Optionally, the drive mechanism includes a drive motor, a first transmission assembly, and two sets of second transmission assemblies, wherein:

[0020] The output end of the drive motor is connected to a first threaded rod, which extends along the first direction.

[0021] The first transmission component is connected to the first threaded rod and also to the first clamping mechanism;

[0022] The two sets of the second transmission components are connected to the first transmission component, and are respectively connected to the second clamping mechanism and the third clamping mechanism.

[0023] Optionally, the first transmission assembly includes a sliding member rotatably connected to the first threaded rod and a connecting rod connecting the sliding member to the first clamping mechanism, wherein the sliding member is slidably engaged with the positioning seat.

[0024] Optionally, the second transmission assembly includes a sliding seat and a transmission rod, with both ends of the transmission rod rotatably connected to the sliding member and the sliding seat, respectively, and the sliding seat connected to the corresponding second clamping mechanism / third clamping mechanism.

[0025] Optionally, the positioning seat is further provided with a slide rail that slides in cooperation with the two sliding seats.

[0026] The beneficial effects of this utility model are:

[0027] This utility model provides a fixing device, which includes a positioning base and a first clamping mechanism, a second clamping mechanism, a third clamping mechanism, and a driving mechanism disposed on the positioning base. The positioning base has a positioning element, allowing one end of a semiconductor chip to be fixed to abut against the positioning element, thereby limiting the position of one end of the chip. The first clamping mechanism is disposed opposite to the positioning element. The driving mechanism drives the first clamping mechanism to move relative to the positioning element along a first direction, allowing the chip to be fixed to be clamped between the positioning element and the first clamping mechanism, improving the stability of the chip. The second and third clamping mechanisms are disposed on opposite sides of the positioning element. When the first clamping mechanism moves towards the positioning element, the driving mechanism simultaneously drives the second and third clamping mechanisms to move relative to each other along a second direction, thereby clamping the chip between the second and third clamping mechanisms. Since the first and second directions are perpendicular, all four ends of the chip can be fixed and limited, thus improving the fixing effect. Through the above configuration, the fixing device of this application can improve the fixing effect of semiconductor chips and other components. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the fixing device provided in an embodiment of the present utility model;

[0029] Figure 2 This is a schematic diagram of a portion of the structure of the fixing device provided in an embodiment of this utility model;

[0030] Figure 3 This is a schematic diagram of the driving mechanism provided in an embodiment of the present utility model;

[0031] Figure 4 yes Figure 3 A partial enlarged view of point A in the middle;

[0032] Figure 5 This is a schematic diagram of the first clamping mechanism, the second clamping mechanism, and the third clamping mechanism provided in the embodiments of this utility model;

[0033] Figure 6 This is a schematic diagram of the elastic mechanism provided in an embodiment of the present invention.

[0034] In the picture:

[0035] 1. Positioning seat; 11. Positioning component; 12. Slide rail; 2. First clamping mechanism; 21. Support plate; 22. Adjusting plate; 23. Elastic pin; 3. Second clamping mechanism; 4. Third clamping mechanism; 5. Elastic mechanism; 51. Elastic component; 52. Second threaded rod; 521. Threaded segment; 53. Slider; 54. Knob; 6. Drive mechanism; 61. Drive motor; 611. First threaded rod; 62. First transmission assembly; 621. Sliding component; 622. Connecting rod; 63. Second transmission assembly; 631. Sliding seat; 632. Transmission rod. Detailed Implementation

[0036] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0037] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0038] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0039] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0040] like Figures 1-6 As shown, this embodiment provides a fixing device, which includes a positioning base 1 and a first clamping mechanism 2, a second clamping mechanism 3, a third clamping mechanism 4 and a driving mechanism 6 disposed on the positioning base 1. The positioning base 1 is provided with a positioning element 11 and is configured to support the element to be fixed. The first clamping mechanism 2 is disposed opposite to the positioning element 11. The second clamping mechanism 3 and the third clamping mechanism 4 are disposed on both sides of the positioning element 11. The driving mechanism 6 is configured to drive the first clamping mechanism 2 to move relative to the positioning element 11 in a first direction and simultaneously drive the second clamping mechanism 3 and the third clamping mechanism 4 to move relative to each other in a second direction. The first direction and the second direction are perpendicular to each other.

[0041] In this embodiment, the positioning base 1 is provided with a positioning element 11, which allows one end of the semiconductor chip to be fixed to abut against the positioning element 11. The positioning element 11 provides a stable abutment point for one end of the chip to be fixed, thus limiting the position of one end of the chip. The first clamping mechanism 2 is disposed opposite to the positioning element 11. The first clamping mechanism 2 is driven by the driving mechanism 6 to move relative to the positioning element 11 along a first direction, so that the chip to be fixed can be clamped between the positioning element 11 and the first clamping mechanism 2, improving the stability of the chip. The second clamping mechanism 3 and the third clamping mechanism 4 are disposed on both sides of the positioning element 11. When the first clamping mechanism 2 moves toward the positioning element 11, the driving mechanism 6 can simultaneously drive the second clamping mechanism 3 and the third clamping mechanism 4 to move relative to each other along a second direction, thereby clamping the chip to be fixed between the second clamping mechanism 3 and the third clamping mechanism 4. Since the first direction is perpendicular to the second direction, all four ends of the chip to be fixed can be fixed and limited, thereby improving the fixing effect of the chip. With the above-described configuration, the fixing device of this application can improve the fixing effect on semiconductor chips and other fasteners.

[0042] It should be noted that in this embodiment, the first direction and the second direction are mutually perpendicular horizontal directions. In other embodiments, the first direction and the second direction may be set at an angle to the horizontal direction, which can be adjusted according to the fixing requirements of the component to be fixed, and will not be limited in detail here.

[0043] The specific structure of the fixing device is described below:

[0044] Specifically, if Figures 1-3As shown, the drive mechanism 6 includes a drive motor 61, a first transmission assembly 62, and two sets of second transmission assemblies 63. The output end of the drive motor 61 is connected to a first threaded rod 611, which extends along a first direction. The first transmission assembly 62 is connected to the first threaded rod 611 and to a first clamping mechanism 2. The drive motor 61 drives the first threaded rod 611 to move, thereby driving the first transmission assembly 62 connected to the first threaded rod 611 to move. The movement of the first transmission assembly 62 causes the first clamping mechanism 2 to move along the first direction toward the positioning member 11, thus clamping the part to be fixed between the positioning member 11 and the first clamping mechanism 2. The two sets of second transmission assemblies 63 are connected to the first transmission assembly 62 and are respectively connected to the second clamping mechanism 3 and the third clamping mechanism 4. When the first transmission assembly 62 moves, the second transmission assembly 63 drives the second clamping mechanism 3 and the third clamping mechanism 4 to move toward each other along a second direction, thereby fixing and limiting the parts to be fixed at both ends in the first direction and both ends in the second direction, improving the fixing effect.

[0045] More specifically, such as Figure 3 and Figure 4 As shown, in this embodiment, the first transmission assembly 62 includes a sliding member 621 rotatably connected to the first threaded rod 611 and a connecting rod 622 connecting the sliding member 621 and the first clamping mechanism 2. The sliding member 621 is slidably engaged with the positioning seat 1. When the drive motor 61 drives the first threaded rod 611 to rotate around its own axis, it can drive the sliding member 621 to move stably relative to the positioning seat 1 in a first direction. Then, through the connecting rod 622, it drives the first clamping mechanism 2 to move in the first direction, so that the two ends of the part to be fixed can respectively abut against the positioning member 11 and the first clamping mechanism 2, thus achieving the fixing of the part to be fixed in the first direction. In this embodiment, the sliding member 621 can be a sliding plate or a sliding block, and the specific structure of the sliding member 621 is not limited here.

[0046] Specifically, in this embodiment, the drive motor 61 is a stepper motor, which can drive the first threaded rod 611 to rotate around the first direction, thereby achieving high-precision positioning and motion control. When the first threaded rod 611 rotates, it can drive the sliding member 621 connected to it to slide relative to the positioning seat 1 along the first direction. Since the connecting rod 622 is connected to the sliding member 621 and the first clamping mechanism 2, when the sliding member 621 slides, it can drive the first clamping mechanism 2 to move towards the positioning member 11 along the first direction, so that the two ends of the member to be fixed in the first direction abut against the positioning member 11 and the first clamping mechanism 2 respectively, thereby improving the fixing effect of the member to be fixed.

[0047] More specifically, in other embodiments, the drive motor 61 is a servo motor, which has higher control precision and faster response speed, and can drive the first threaded rod 611 to rotate around a first direction. It is understood that the specific structure of the drive motor 61 is not limited, as long as it can achieve the above-mentioned functions. Furthermore, in other embodiments, the drive motor 61 is a linear motor, and the first transmission component 62 includes a transmission plate connected to the first clamping mechanism 2. The output end of the linear motor is connected to the transmission plate through the first threaded rod 611, enabling it to drive the first clamping mechanism 2 to move relative to the positioning member 11, thereby clamping the part to be fixed between the positioning member 11 and the first clamping mechanism 2. Here, the specific structure of the first transmission component 62 is not limited in detail, as long as it can achieve the above-mentioned functions.

[0048] Specifically, if Figure 3 and Figure 4 As shown, in this embodiment, the second transmission assembly 63 includes a sliding seat 631 and a transmission rod 632. The two ends of the transmission rod 632 are rotatably connected to the sliding member 621 and the sliding seat 631, respectively. The sliding seat 631 is connected to the corresponding second clamping mechanism 3 / third clamping mechanism 4. When the sliding member 621 slides relative to the positioning seat 1 along the first direction, the transmission rod 632 can drive the sliding seat 631 to move, thereby driving the second clamping mechanism 3 and the third clamping mechanism 4 connected to the sliding seat 631 to move. This clamps the part to be fixed between the second clamping mechanism 3 and the third clamping mechanism 4. In other words, while the drive motor 61 drives the first clamping mechanism 2 to move, it can simultaneously drive the second clamping mechanism 3 and the third clamping mechanism 4 to move, thereby achieving the fixing and limiting of the part to be fixed in both the first and second directions, improving the fixing effect and facilitating the operator's inspection of the part. In this embodiment, the sliding seat 631 is selected from structures such as a sliding block or a sliding rod; the specific structure of the sliding seat 631 is not limited here.

[0049] Specifically, if Figures 2-4 As shown, the positioning base 1 is also provided with a slide rail 12 that slidably engages with the two sliding seats 631. When the sliding member 621 slides relative to the positioning base 1 along the first direction, since the two ends of the transmission rod 632 are respectively rotatably connected to the sliding member 621 and the sliding seat 631, the sliding seat 631 can slide on the slide rail 12, thereby driving the second clamping mechanism 3 / third clamping mechanism 4 connected to the sliding seat 631 to move. It can be understood that the slide rail 12 extends along the second direction. When the sliding member 621 moves, it can drive the two sliding seats 631 to move towards each other along the slide rail 12 along the second direction through the transmission rod 632, thereby driving the second clamping mechanism 3 and the third clamping mechanism 4 to move towards each other along the second direction, thereby clamping the part to be fixed between the second clamping mechanism 3 and the third clamping mechanism 4.

[0050] More specifically, in this embodiment, the sliding seat 631 is provided with a sliding groove extending along the second direction. Through the sliding cooperation between the slide rail 12 and the sliding groove, the two sliding seats 631 can slide relative to the slide rail 12 along the second direction.

[0051] Specifically, if Figures 1-6 As shown, the fixing device also includes a spring mechanism 5, which is disposed on the first clamping mechanism 2, and / or the second clamping mechanism 3, and / or the third clamping mechanism 4. The positioning seat 1 is configured to support the part to be fixed. The spring mechanism 5 can adjust the clamping force of the first clamping mechanism 2 and / or the second clamping mechanism 3 and / or the third clamping mechanism 4 on the part to be fixed. By adjusting the elastic force of the spring mechanism 5, the clamping force on the part to be fixed can be precisely controlled, thereby ensuring that the part to be fixed will not be damaged due to excessive clamping force or loosened due to insufficient clamping force during the clamping process.

[0052] Specifically, if Figure 1 , Figure 2 and Figure 5 As shown, the first clamping mechanism 2 and / or the second clamping mechanism 3 and / or the third clamping mechanism 4 include a support plate 21 and an adjusting plate 22 movably connected to the support plate 21. The adjusting plate 22 is used to abut against the part to be fixed. The elastic mechanism 5 is configured to provide an elastic bearing force to the adjusting plate 22, thereby adjusting the bearing force of the adjusting plate 22 on the part to be fixed, so as to realize the elastic clamping and fixing of the part to be fixed in the first direction and the second direction, and prevent the part to be fixed from being damaged due to rigid clamping during the fixing process.

[0053] More specifically, Figure 2 and Figure 5 As shown, in this embodiment, the support plate 21 and the adjustment plate 22 are connected by an elastic pin 23. Since the elastic pin 23 itself has a certain elasticity and restoring force, by setting the elastic pin 23, not only can a stable connection be provided between the support plate 21 and the adjustment plate 22, but the adjustment plate 22 can also move relative to the support plate 21 within a certain range, so that when the elastic mechanism 5 adjusts the elastic force, the adjustment plate 22 can slide relative to the support plate 21 under the action of the elastic force, and then press against the part to be fixed, thereby realizing the elastic clamping of the part to be fixed.

[0054] Specifically, the elastic mechanism 5 includes an elastic element 51, which is disposed between the support plate 21 and the adjusting plate 22. When the adjusting plate 22 abuts against the object to be fixed, the elastic element 51 is compressed and generates elastic force, allowing the adjusting plate 22 to tightly abut against the object to be fixed, ensuring the stability and reliability of the clamping force. The elastic element 51 may employ a spring or elastic washer, etc., and its specific structure will not be described in detail here.

[0055] Specifically, if Figure 5 and Figure 6 As shown, the elastic mechanism 5 also includes a second threaded rod 52, two sliders 53, and a knob 54. The second threaded rod 52 is rotatably mounted on the support plate 21 and has two threaded segments 521 with opposite directions of rotation. The two sliders 53 are threadedly connected to the two threaded segments 521 and respectively connected to both ends of the elastic element 51. The two sliders 53 are in sliding engagement with the support plate 21. The knob 54 is configured to drive the second threaded rod 52 to rotate relative to the support plate 21. When the clamping force needs to be adjusted, the operator rotates the knob 54 to drive the second threaded rod 52 to rotate. Because the two threaded segments 521 of the second threaded rod 52 rotate in opposite directions, the two sliders 53 will move in opposite directions. The movement of the sliders 53 will stretch or compress the elastic element 51, thereby changing the magnitude of the elastic force exerted by the elastic element 51 on the adjusting plate 22. Through the above configuration, the operator can precisely adjust the rotation amount and direction of the knob 54, thereby achieving precise control of the clamping force on the fixed part.

[0056] More specifically, in this embodiment, the elastic element 51 is an arc-shaped elastic plate. When the second threaded rod 52 rotates around its own axis, it drives the two sliders 53 to move towards each other, causing the arc-shaped elastic plate to bulge towards the adjusting plate 22. The arc-shaped elastic plate pushes against the adjusting plate 22 to increase the clamping force on the fixed part. When it is necessary to reduce the clamping force on the fixed part, the second threaded rod 52 is rotated in the opposite direction, causing the two sliders 53 to move away from each other. At this time, the arc-shaped elastic plate will release its elasticity and gradually return to its original shape, thereby reducing the clamping force on the fixed part. It can be understood that the operator can precisely control the moving distance of the two sliders 53 and the degree of deformation of the elastic element 51 by rotating the second threaded rod 52, thereby achieving precise adjustment of the clamping force and making the operation more convenient and faster.

[0057] Specifically, if Figure 5 As shown, the support plate 21 has a groove, in which the slider 53 is slidably disposed, thereby guiding the sliding process of the slider 53 and preventing deviation or shaking. More specifically, the second threaded rod 52 is rotatably disposed in the groove. When the second threaded rod 52 rotates, it can drive the two sliders 53 to move towards or away from each other in the groove. When the slider 53 slides in the groove, it can stop against the side wall of the groove, thereby playing a limiting role and preventing the slider 53 from disengaging from the groove.

[0058] More specifically, the knob 54 is fixedly connected to one end of the second threaded rod 52, allowing the operator to rotate the knob 54 to drive the second threaded rod 52 to rotate, thereby controlling the movement of the slider 53 and the deformation of the elastic element 51, ultimately adjusting the clamping force on the fixed part. Furthermore, the knob 54 has multiple grooves spaced along its circumference, increasing the friction when the operator turns the knob 54, making the adjustment more stable.

[0059] The following uses a semiconductor as the component to be fixed to illustrate the specific working process of the fixing device:

[0060] The semiconductor is placed on the bearing surface of the positioning seat 1 by the feeding mechanism, so that one end of the semiconductor abuts against the positioning member 11. Then, the drive motor 61 is turned on. The drive motor 61 drives the first threaded rod 611 to rotate around its own axis, thereby causing the sliding member 621 to slide relative to the positioning seat 1 in the first direction. Since the connecting rod 622 connects the sliding member 621 and the first clamping mechanism 2, the movement of the sliding member 621 can drive the first clamping mechanism 2 to move towards the positioning member 11 in the first direction. At the same time, when the sliding member 621 moves, the transmission rod 632 can drive the two sliding seats 631 to move towards each other, so that the second clamping mechanism 3 and the third clamping mechanism 4 can move towards each other in the second direction. When the first clamping mechanism 2 and the positioning member 11 abut against the opposite ends of the semiconductor in the first direction, the second clamping mechanism 3 and the third clamping mechanism 4 abut against the opposite ends of the semiconductor in the second direction, thereby realizing the clamping and fixing of the semiconductor in different directions and preventing the semiconductor from shifting or shaking during the detection process.

[0061] When the clamping force on the semiconductor needs to be increased, the operator can rotate the knob 54 to drive the second threaded rod 52 to rotate around its own axis. When the first threaded rod 611 rotates, it drives the two sliders 53 to move towards each other, causing the elastic element 51 to bulge towards the adjusting plate 22. The elastic element 51 then pushes against the adjusting plate 22 to increase the clamping force on the semiconductor. When the clamping force on the semiconductor needs to be decreased, the operator rotates the second threaded rod 52 in the opposite direction, causing the two sliders 53 to move away from each other. This causes the elastic element 51 to release its elastic force and gradually return to its original shape, thereby reducing the clamping force on the semiconductor. Through the above settings, precise adjustment of the clamping force on the semiconductor is achieved, making the operation more convenient and faster.

[0062] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A fixing device, characterized in that, It includes a positioning base (1) and a first clamping mechanism (2), a second clamping mechanism (3), a third clamping mechanism (4), and a driving mechanism (6) disposed on the positioning base (1), wherein: The positioning seat (1) is provided with a positioning element (11), and the positioning seat (1) is configured to support the element to be fixed. The first clamping mechanism (2) is disposed opposite to the positioning member (11); The second clamping mechanism (3) and the third clamping mechanism (4) are respectively disposed on both sides of the positioning member (11); The drive mechanism (6) is configured to drive the first clamping mechanism (2) to move relative to the positioning member (11) in a first direction, and simultaneously drive the second clamping mechanism (3) and the third clamping mechanism (4) to move relative to each other in a second direction, wherein the first direction is perpendicular to the second direction.

2. The fixing device according to claim 1, characterized in that, The fixing device further includes an elastic mechanism (5), which is disposed on the first clamping mechanism (2), and / or the second clamping mechanism (3), and / or the third clamping mechanism (4). The elastic mechanism (5) can adjust the clamping force of the first clamping mechanism (2) and / or the second clamping mechanism (3) and / or the third clamping mechanism (4) on the part to be fixed.

3. The fixing device according to claim 2, characterized in that, The first clamping mechanism (2) and / or the second clamping mechanism (3) and / or the third clamping mechanism (4) include a support plate (21) and an adjusting plate (22) movably connected to the support plate (21), and the elastic mechanism (5) is configured to provide an elastic resisting force to the adjusting plate (22).

4. The fixing device according to claim 3, characterized in that, The support plate (21) and the adjustment plate (22) are connected by an elastic pin (23).

5. The fixing device according to claim 3, characterized in that, The elastic mechanism (5) includes an elastic element (51), which is disposed between the support plate (21) and the adjusting plate (22).

6. The fixing device according to claim 5, characterized in that, The elastic mechanism (5) further includes a second threaded rod (52), two sliders (53), and a knob (54), wherein: The second threaded rod (52) is rotatably mounted on the support plate (21) and has two threaded segments (521) with opposite directions of rotation; The two sliders (53) are respectively threaded to the two threaded segments (521) and respectively connected to the two ends of the elastic element (51), and the two sliders (53) are slidably engaged with the support plate (21); The knob (54) is configured to drive the second threaded rod (52) to rotate relative to the support plate (21).

7. The fixing device according to any one of claims 1-6, characterized in that, The drive mechanism (6) includes a drive motor (61), a first transmission assembly (62), and two sets of second transmission assemblies (63), wherein: The output end of the drive motor (61) is connected to a first threaded rod (611), which extends along the first direction; The first transmission assembly (62) is connected to the first threaded rod (611) and to the first clamping mechanism (2); The two sets of the second transmission components (63) are connected to the first transmission component (62), and are respectively connected to the second clamping mechanism (3) and the third clamping mechanism (4).

8. The fixing device according to claim 7, characterized in that, The first transmission assembly (62) includes a sliding member (621) rotatably connected to the first threaded rod (611) and a connecting rod (622) connecting the sliding member (621) and the first clamping mechanism (2). The sliding member (621) is slidably engaged with the positioning seat (1).

9. The fixing device according to claim 8, characterized in that, The second transmission assembly (63) includes a sliding seat (631) and a transmission rod (632). The two ends of the transmission rod (632) are rotatably connected to the sliding member (621) and the sliding seat (631) respectively. The sliding seat (631) is connected to the corresponding second clamping mechanism (3) / the third clamping mechanism (4).

10. The fixing device according to claim 9, characterized in that, The positioning seat (1) is also provided with a slide rail (12) that slides in cooperation with the two sliding seats (631).