Material box conveying equipment for wafer polishing

Abstract

The utility model provides a material box transmission device for wafer polishing, and relates to the technical field of auxiliary equipment for semiconductor production, the material box transmission device comprises a main body and a transmission mechanism, the two sides of the upper part of the main body are provided with openings, and the openings are used for being in butt joint with a material box transmission line; a guide rail is arranged in the main body along the vertical direction; the bottom of the main body is provided with a material port for feeding and discharging the material box; the conveying mechanism comprises a lifting conveying section and a horizontal conveying section, and the lifting conveying section is arranged in the main body and connected with the guide rail; the automatic feeding device has the beneficial effects that the functions of feeding a material box loaded with a wafer and returning an empty material box to a material box conveying line can be realized, the automatic feeding device can be conveniently butted with an AGV (Automatic Guided Vehicle) for use, and the production efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of auxiliary equipment for semiconductor production, and in particular to a material box transport device for wafer polishing. Background Technology

[0002] Semiconductor wafer polishing, generally using chemical polishing, mechanical polishing, or chemimechanical polishing, is a crucial step in semiconductor wafer processing to remove the mechanical damage layer on the wafer surface and achieve a mirror finish.

[0003] In the semiconductor wafer polishing area, wafer cassettes are transported from the warehouse to the vicinity of the field equipment via overhead conveyor lines. However, the field equipment does not support EFEM (Equipment Front End Module) loading and can only be handled by AGV (Automated Guided Vehicle).

[0004] However, since AGVs cannot directly transport materials from the overhead conveyor line to the vehicle body, a large amount of manual labor is required for unloading operations, resulting in low production efficiency. Utility Model Content

[0005] The purpose of this invention is to provide a material box conveying device for wafer polishing, thereby solving the technical problem in the prior art where AGVs cannot directly transport materials from the overhead conveyor line to the vehicle body, requiring a large amount of manual assistance for material unloading operations, resulting in low production efficiency. The various technical effects of the preferred technical solutions provided by this invention are detailed below.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] This utility model provides a wafer polishing material box transport device, comprising:

[0008] The main body has openings on both sides of its upper part for connecting with the material box conveyor line; the interior of the main body is arranged with guide rails in the vertical direction; the bottom of the main body is provided with a material inlet for loading and unloading the material box.

[0009] The conveying mechanism includes a lifting conveying section and a horizontal conveying section. The lifting conveying section is disposed inside the main body and connected to the guide rail. The horizontal conveying section is located on one side of the lifting conveying section and extends out of the main body from the material inlet.

[0010] Preferably, the horizontal transmission segment includes:

[0011] The first conveying body includes a first base, a plurality of first conveying rollers arranged sequentially within the first base, and a first power device connected to the first conveying rollers.

[0012] The protective plates are disposed on both sides of the first base, located on the outside of the main body.

[0013] Preferably, the lifting and conveying section includes:

[0014] The second conveying body includes a second base, a plurality of second conveying rollers arranged sequentially within the second base, and a second power device electrically connected to the second conveying rollers.

[0015] The connecting frame includes a first connecting part and a second connecting part connected to the first connecting part. The first connecting part is fixedly connected to the second base, and the second connecting part can move up and down along the guide rail.

[0016] Preferably, the second base has the same structure as the first base, and the second conveying roller shaft has the same structure as the first conveying roller shaft.

[0017] Preferably, it also includes a control device, wherein the guide rail, the first power device, and the second power device are all electrically connected to the control device.

[0018] Preferably, the main body is further provided with a communication unit, which is electrically connected to the control device for docking with the AGV, and the AGV is electrically connected to the control device.

[0019] Preferably, the horizontal conveying section further includes an RFID tag, which is disposed on the protective plate and electrically connected to the control device.

[0020] Preferably, the horizontal conveying section further includes a grating and a through-beam photoelectric switch. The grating is disposed on the protective plate and installed close to the main body; the through-beam photoelectric switch is disposed on the first base, and both the grating and the through-beam photoelectric switch are electrically connected to the control device.

[0021] Preferably, the main body is provided with a warning light, a touch screen and multiple switch structures, and the warning light, the touch screen and the multiple switch structures are all electrically connected to the control device.

[0022] Preferably, the control device includes a PLC.

[0023] This utility model provides a wafer polishing cassette conveying device, comprising a main body and a conveying mechanism. Openings are provided on both upper sides of the main body, allowing it to connect with a cassette conveyor line for conveying cassettes from the conveyor line into the interior of the main body. The conveying mechanism includes a lifting conveying section and a horizontal conveying section. Guide rails are arranged vertically inside the main body, and the lifting conveying section is located inside the main body and connected to the guide rails for lifting and conveying the cassettes. A loading port for loading and unloading cassettes is provided at the bottom of the main body. The horizontal conveying section is located to one side of the lifting conveying section and extends from the loading port into the main body for horizontal conveying of the cassettes inside and outside the main body. This device achieves dual functionality: unloading cassettes containing wafers and returning empty cassettes to the cassette conveyor line, facilitating integration with AGVs and improving production efficiency. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the structure of an embodiment of the wafer polishing material box transport device of this utility model;

[0026] Figure 2 yes Figure 1 Structural diagram from another angle;

[0027] Figure 3 This is a schematic diagram of the internal structure of the wafer polishing material box transport device of this utility model;

[0028] Figure 4 This is a schematic diagram of the conveying mechanism in the wafer polishing material box conveying device of this utility model;

[0029] Figure 5 yes Figure 4 A schematic diagram of the structure during use;

[0030] Figure 6 This is a control principle diagram of the wafer polishing material box transmission device of this utility model.

[0031] In the diagram: 1. Main body; 10. Opening; 11. Guide rail; 12. Feed inlet; 100. Communication unit; 101. Warning light; 102. Touch screen; 103. Switch structure;

[0032] 2. Conveying mechanism; 21. Lifting and conveying section; 211. Second conveying body; 2111. Second base; 2112. Second conveying roller; 2113. Second power unit; 212. Connecting frame; 2121. First connecting part; 2122. Second connecting part; 22. Horizontal conveying section; 221. First conveying body; 2211. First base; 2212. First conveying roller; 2213. First power unit; 222. Guard plate; 223. RFID; 224. Optical grating; 225. Through-beam photoelectric switch;

[0033] 3. Material box;

[0034] 4. Control device. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be described in detail below. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other implementation methods obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0036] Figure 1 This is a structural schematic diagram of this embodiment. Figure 2 yes Figure 1 Another structural diagram, such as Figure 1 As shown, this embodiment provides a wafer polishing material box transport device, including a main body 1 and a transport mechanism 2.

[0037] The main body 1 has openings 10 on both sides of its upper part for docking with the material box conveyor line. The existing wafer boxes, i.e. the incoming material boxes 3, are transported from the warehouse to the field by an overhead conveyor line. During operation, the conveyor line transports the dispatched material boxes 3 through the openings 10 into the interior of the main body 1.

[0038] Figure 3 This is a schematic diagram of the internal structure of this embodiment, as shown below. Figure 3 As shown, in this embodiment, the interior of the main body 1 is arranged with guide rails 11 in the vertical direction, and the bottom of the main body 1 is provided with a material inlet 12 for loading and unloading the material box 3.

[0039] Specifically, Figure 4 This is a schematic diagram of the conveying mechanism in this embodiment. Figure 5 yes Figure 4 A structural diagram for use, such as Figure 4 and Figure 5As shown, the conveying mechanism 2 in this embodiment includes a lifting conveying section 21 and a horizontal conveying section 22. The lifting conveying section 21 is located inside the main body 1 and connected to the guide rail 11 for lifting and conveying the material box 3. The horizontal conveying section 22 is located on one side of the lifting conveying section 21 and extends out of the main body 1 from the material port 12 for horizontal conveying of the material box 3 inside and outside the main body 1.

[0040] During operation, the material box 3 is transported from the upper part of the main body 1 to the lower part of the main body 1 through the cooperation of the lifting conveyor section 21 and the guide rail 11, and then conveyed to the material outlet 12 by the horizontal conveyor section 22 for discharge.

[0041] Similarly, when the empty material box 3 is returned, it enters the body 1 through the material port 12 via the horizontal conveyor section 22, and is conveyed to the opening 10 through the cooperation of the lifting conveyor section 21 and the guide rail 11, where it is connected to the material box conveyor line for return.

[0042] By providing openings 10 on both sides of the upper part of the main body 1 and arranging baffles on the top of the main body 1, the dust-free state inside the main body 1 can be ensured as much as possible, avoiding contamination of the material box 3 and the wafer, while improving the service life of the components inside the main body 1.

[0043] As an optional implementation method, such as Figure 4 As shown, the horizontal conveying section 22 includes a first conveying body 221 and a guard plate 222. The first conveying body 221 includes a first base 2211, a plurality of first conveying rollers 2212 arranged sequentially within the first base 2211, and a first power unit 2213 connected to the first conveying rollers 2212. In this embodiment, the first power unit 2213 is a motor, and the first conveying rollers 2212 rotate under the drive of the first power unit 2213, thus driving the material box 3 to move during rotation.

[0044] The protective plate 222 is disposed on both sides of the first base 2211. The protective plate 222 is located on the outside of the main body 1 and serves to stop and protect the material box 3.

[0045] As an optional implementation method, such as Figure 4 As shown, the lifting and conveying section 21 includes a second conveying body 211 and a connecting frame 212. The second conveying body 211 includes a second base 2111, a plurality of second conveying rollers 2112 arranged sequentially within the second base 2111, and a second power unit 2113 electrically connected to the second conveying rollers 2112. In this embodiment, the second power unit 2113 is a motor, and the second conveying rollers 2112 rotate under the drive of the second power unit 2113, thus driving the material box 3 to move during rotation.

[0046] The connecting frame 212 includes a first connecting part 2121 and a second connecting part 2122 connected to the first connecting part 2121. The first connecting part 2121 is fixedly connected to the second base 2111, and the second connecting part 2122 can move up and down along the guide rail 11.

[0047] Optionally, a cable chain is provided inside the main body 1, and the second connecting part 2122 is connected to the guide rail 11 via the cable chain.

[0048] As an optional implementation, the second base 2111 has the same structure as the first base 2211, and the second conveying roller shaft 2112 has the same structure as the first conveying roller shaft 2212. This arrangement can make the transmission stability of the material box 3 between the horizontal conveying section 22 and the lifting conveying section 21 stronger, and avoid problems in the material box 3 during the transmission process.

[0049] As an optional implementation, it also includes a control device 4, and the guide rail 11, the first power device 2213, and the second power device 2113 are all electrically connected to the control device 4.

[0050] The control device in this embodiment includes a PLC, specifically a Mitsubishi FX5U-80MT PLC. Intelligent and automated transmission can be achieved through the control of the control device 4.

[0051] Specifically, the main body 1 is also equipped with a communication unit 100, which is electrically connected to the control device 4 for docking with the AGV. The AGV is also electrically connected to the control device 4. With this configuration, the communication unit 100, such as E84, can be used to dock with the AGV for automated material unloading.

[0052] As an optional implementation, the horizontal conveyor section 22 also includes an RFID 223. The RFID is set on the guard plate 222 and is electrically connected to the control device 4. By setting the RFID, the material box 3 number can be reported to the control system during the operation to make an entry request.

[0053] Specifically, the horizontal conveying section 22 also includes a grating 224 and a through-beam photoelectric switch 225. The grating 224 is disposed on the protective plate 222 and installed close to the main body 1; the through-beam photoelectric switch 225 is disposed on the first base 2211. Both the grating 224 and the through-beam photoelectric switch 225 are electrically connected to the control device 4.

[0054] Figure 6 This is the control principle diagram of this embodiment, as shown below. Figure 6 As shown, the main body 1 is equipped with a warning light 101, a touch screen 102 and multiple switch structures 103, all of which are electrically connected to the control device 4.

[0055] In this embodiment, the switch structure 103 is in the form of a button, including at least a start button, a stop button, a reset button, a manual / automatic knob, and an emergency stop button.

[0056] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. A wafer polishing material box transport device, characterized in that, include: The main body has openings on both sides of its upper part for connecting with the material box conveyor line; the interior of the main body is arranged with guide rails in the vertical direction; the bottom of the main body is provided with a material inlet for loading and unloading the material box. The conveying mechanism includes a lifting conveying section and a horizontal conveying section. The lifting conveying section is disposed inside the main body and connected to the guide rail. The horizontal conveying section is located on one side of the lifting conveying section and extends out of the main body from the material inlet.

2. The wafer polishing material box transport device according to claim 1, characterized in that: The horizontal transmission segment includes: The first conveying body includes a first base, a plurality of first conveying rollers arranged sequentially within the first base, and a first power device connected to the first conveying rollers. The protective plates are disposed on both sides of the first base, located on the outside of the main body.

3. The wafer polishing material box transport device according to claim 2, characterized in that: The lifting and conveying section includes: The second conveying body includes a second base, a plurality of second conveying rollers arranged sequentially within the second base, and a second power device electrically connected to the second conveying rollers. The connecting frame includes a first connecting part and a second connecting part connected to the first connecting part. The first connecting part is fixedly connected to the second base, and the second connecting part can move up and down along the guide rail.

4. The wafer polishing material box transport device according to claim 3, characterized in that: The second base has the same structure as the first base, and the second conveying roller shaft has the same structure as the first conveying roller shaft.

5. A wafer polishing material box transport device according to claim 3 or 4, characterized in that: It also includes a control device, and the guide rail, the first power device, and the second power device are all electrically connected to the control device.

6. The wafer polishing material box transport device according to claim 5, characterized in that: The main body is also provided with a communication unit, which is electrically connected to the control device for docking with the AGV, and the AGV is electrically connected to the control device.

7. The wafer polishing material box transport device according to claim 5, characterized in that: The horizontal conveyor section also includes an RFID tag, which is mounted on the protective plate and electrically connected to the control device.

8. The wafer polishing material box transport device according to claim 7, characterized in that: The horizontal conveying section also includes a grating and a through-beam photoelectric switch. The grating is disposed on the protective plate and installed close to the main body. The through-beam photoelectric switch is disposed on the first base. Both the grating and the through-beam photoelectric switch are electrically connected to the control device.

9. A wafer polishing material box transport device according to claim 5, characterized in that: The main body is equipped with a warning light, a touch screen, and multiple switch structures, all of which are electrically connected to the control device.

10. A wafer polishing material box transport device according to claim 5, characterized in that: The control device includes a PLC.

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