Semiconductor processing part cleaning and drying device
By designing a cleaning and drying device for semiconductor processing components, and utilizing structures such as rotating components and rollers to move and adjust the position of the cleaning cabinet, the problem of reduced work efficiency caused by fixed position in the existing technology is solved, and the flexibility and work efficiency of the device are improved.
Patent Information
- Application Number
- CN202422714849.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-07
- Publication Date
- 2025-10-31
- Estimated Expiration
- 2034-11-07
AI Technical Summary
Existing semiconductor processing cleaning cabinets typically use fixed cabinets for drying, which cannot be easily adjusted or moved, resulting in reduced work efficiency in emergency situations.
A semiconductor processing component cleaning and drying device was designed, comprising a rotating assembly, a placement assembly, a connecting plate, a rotating column, and rollers. This device enables the movement and position adjustment of the cleaning cabinet. The rotating assembly controls the rotation, the placement assembly places the workpiece, the connecting plate connects to the rotating column, and the rollers move, ensuring that the device can be quickly repositioned in emergency situations.
It improves the flexibility and efficiency of the cleaning cabinet, enabling it to be quickly repositioned in emergencies, avoiding a decrease in working speed and ensuring the smooth progress of drying operations.
Smart Images
Figure CN223500008U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor processing technology, and in particular to a cleaning and drying device for semiconductor processing components. Background Technology
[0002] Semiconductor processing cleaning and drying equipment is used in the semiconductor processing process to clean and dry semiconductor wafers, chips, etc. Its purpose is to remove impurities and contaminants from the surface of semiconductor materials, while ensuring that the dried semiconductor products meet the requirements of subsequent processing steps.
[0003] Current cleaning cabinets typically use fixed cabinets for drying, which cannot be easily repositioned and cannot be moved to meet user needs during use. This may reduce work efficiency and speed in emergency situations, and make it difficult to make effective adjustments in case of unexpected situations.
[0004] Therefore, considering the problems that cleaning cabinets typically use fixed cabinets for drying, cannot be easily repositioned, and cannot be moved with the user as needed during use, which may reduce work efficiency and affect work speed in emergency situations, a movable cleaning cabinet can be designed. By setting up a movable structure, the forward direction of the cleaning cabinet can be controlled at any time, making it convenient to use, ensuring work efficiency in emergency situations, avoiding affecting work speed, and allowing for effective adjustments in the event of unexpected road conditions. Utility Model Content
[0005] In order to overcome the problems that existing cleaning cabinets typically use fixed cabinets for drying, cannot be easily repositioned, and cannot be moved with the user as needed during use, which may reduce work efficiency and affect work speed in emergency situations, and cannot be effectively adjusted in case of emergencies.
[0006] The technical solution of this utility model is as follows: a semiconductor processing component cleaning and drying device, comprising a cleaning cabinet body, a rotating assembly, a placement assembly, connecting pieces, a rotating column, a U-shaped connecting block, rollers, a fixed shaft, a pusher assembly, a control assembly, and a sealing assembly. The rotating assembly is arranged on the bottom surface of the cleaning cabinet body, and the placement assembly is arranged on the top surface of the rotating assembly. Several connecting pieces are equidistantly arranged on the bottom surface of the cleaning cabinet body, a rotating column is arranged on the bottom surface of the connecting pieces, and a U-shaped connecting block is arranged on the bottom surface of the rotating column. A pusher assembly is arranged on one side of the cleaning cabinet body, a control assembly is arranged on one side of the cleaning cabinet body, and a sealing assembly is arranged on one side of the cleaning cabinet body.
[0007] Preferably, the workpiece to be dried is placed in the main body of the cleaning cabinet for drying. The rotation of the rotating structure is controlled by a rotating component. The workpiece to be dried is placed in the placement component and rotated to help the workpiece be heated and dried better. The rotating column is connected by a connecting piece. The rotating column controls the omnidirectional rotation of the moving structure. The roller is connected by a U-shaped connecting block. The roller drives the entire device to move. The roller is fixed in the middle of the U-shaped connecting block by a fixed shaft. The entire device is pushed to a suitable position by a pushing component. The operation of the main body of the cleaning cabinet is controlled by a control component. The entire heating space is sealed by a sealing component for better drying.
[0008] Preferably, the rotating assembly includes a mounting slot, a motor, a rotating rod, a rotating gear, and a control gear. The mounting slot is provided at the bottom of the interior of the cleaning cabinet body. The motor is installed on the bottom surface of the mounting slot. A rotating rod is installed inside the mounting slot opposite to the motor. A rotating gear is installed at one end of the rotating rod, and a control gear is installed on one side of the rotating gear.
[0009] Preferably, the placement component includes a rotating shaft, a disc, and a limiting ring. One end of the control gear is provided with a rotating shaft, and several sets of discs are equidistantly arranged on the surface of the rotating shaft. A limiting ring is provided on the top surface of the outer ring of the disc.
[0010] Preferably, a roller is provided in the middle of the U-shaped connecting block, and a fixed shaft is provided inside the roller.
[0011] Preferably, the pusher assembly includes a fixing plate, a connecting rod, and a handle. The fixing plate is provided on one side of the main body of the cleaning cabinet, the connecting rods are provided at both ends of the surface of the fixing plate, and the handle is provided at the top of the connecting rod.
[0012] Preferably, the control assembly includes a temperature control tube, a rotary adjustment tube, a control box, a work display slot, and control buttons. The temperature control tube is located on one side of the main body of the cleaning cabinet. The rotary adjustment tube is connected to the bottom of the temperature control tube. The control box is connected to the bottom of the temperature control tube. The control box is located on the surface of the temperature control tube. The work display slot is located below the control box. Control buttons are located on one side of the work display slot.
[0013] Preferably, the closing component includes a door panel, a fixed angle iron, a sealed rock panel, and a fixing button. A door panel is provided on one side of the main body of the cleaning cabinet, a fixed angle iron is provided on one side of the door panel, a sealed rock panel is provided on the inner side of the door panel, and a fixing button is provided on one side of the main body of the cleaning cabinet opposite to the fixed angle iron.
[0014] The beneficial effects of this utility model are:
[0015] Compared to traditional cleaning cabinets that typically use fixed cabinets for drying, which cannot be easily repositioned and cannot be moved to meet user needs during use, potentially reducing work efficiency and speed in emergencies and making effective adjustments in case of unexpected situations, this cleaning cabinet features a movable structure that allows for easy control of its direction of movement. This ensures work efficiency in emergencies, avoids impacting work speed, and allows for effective adjustments in case of unexpected road conditions. Attached Figure Description
[0016] Figure 1 The diagram shown is a first perspective structural schematic of the semiconductor processing component cleaning and drying device of this utility model.
[0017] Figure 2 The diagram shown is a second three-dimensional structural schematic of the semiconductor processing component cleaning and drying device of this utility model.
[0018] Figure 3 The diagram shown is a side perspective three-dimensional structural schematic of the semiconductor processing component cleaning and drying device of this utility model.
[0019] Figure 4 The diagram shown is a partial three-dimensional structural schematic of the semiconductor processing component cleaning and drying device of this utility model.
[0020] Explanation of reference numerals in the attached drawings: 1. Cleaning cabinet body; 201. Mounting groove; 202. Motor; 203. Rotating rod; 204. Rotating gear; 205. Control gear; 301. Rotating shaft; 302. Disc; 303. Limiting ring; 401. Connecting piece; 402. Rotating column; 403. U-shaped connecting block; 404. Roller; 405. Fixed shaft; 501. Fixed piece; 502. Connecting rod; 503. Handrail; 601. Temperature control tube; 602. Rotation adjustment tube; 603. Control box; 604. Work display slot; 605. Control button; 701. Door panel; 702. Fixed angle iron; 703. Sealed rock panel; 704. Fixed button. Detailed Implementation
[0021] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0022] Please see Figure 1This utility model provides an embodiment of a semiconductor processing component cleaning and drying device, including a cleaning cabinet body 1, a rotating assembly, a placement assembly, connecting pieces 401, rotating columns 402, U-shaped connecting blocks 403, rollers 404, a fixed shaft 405, a pusher assembly, a control assembly, and a sealing assembly. The rotating assembly is provided on the bottom surface of the cleaning cabinet body 1, and the placement assembly is provided on the top surface of the rotating assembly. A plurality of connecting pieces 401 are equidistantly arranged on the bottom surface of the cleaning cabinet body 1. The rotating columns 402 are provided on the bottom surface of the connecting pieces 401, and the U-shaped connecting blocks 403 are provided on the bottom surface of the rotating columns 402. The pusher assembly is provided on one side of the cleaning cabinet body 1, the control assembly is provided on one side of the cleaning cabinet body 1, and the sealing assembly is provided on one side of the cleaning cabinet body 1.
[0023] Please see Figures 2-4 In this embodiment, the rotating assembly includes a mounting slot 201, a motor 202, a rotating rod 203, a rotating gear 204, and a control gear 205. The mounting slot 201 is located at the bottom of the main body 1 of the cleaning cabinet. The motor 202 is mounted on the bottom surface of the mounting slot 201. A rotating rod 203 is positioned inside the mounting slot 201 opposite to the motor 202. A rotating gear 204 is mounted at one end of the rotating rod 203, and a control gear 205 is mounted on one side of the rotating gear 204. In use, the rotating structure is mounted and placed through the mounting slot 201. The motor 202 generates electricity to drive the rotating rod 203 to rotate. The rotating rod 203 is connected to the rotating gear 204, which in turn holds the rotating structure in place. The control gear 205 rotates, which drives the placement structure to rotate, making the drying more thorough. The placement assembly includes a rotating shaft 301, a disc 302, and a limiting ring 303. The rotating shaft 301 is provided at one end of the control gear 205. Several sets of discs 302 are equidistantly arranged on the surface of the rotating shaft 301. The limiting ring 303 is provided on the top surface of the outer ring of the disc 302. In use, the rotating shaft 301 rotates, which drives the disc 302 to rotate. The semiconductor component to be dried is placed on the disc 302. The limiting ring 303 limits the workpiece to prevent it from falling during drying. A roller 404 is provided in the middle of the U-shaped connecting block 403. A fixed shaft 405 is provided inside the roller 404.
[0024] The push assembly includes a fixing plate 501, a connecting rod 502, and a support rod 503. The fixing plate 501 is located on one side of the main body 1 of the cleaning cabinet. Connecting rods 502 are located at both ends of the fixing plate 501, and a support rod 503 is located at the top of the connecting rods 502. In use, the fixing plate 501 fixes the connecting rods 502 to one side of the main body 1 of the cleaning cabinet. The support rod 503 is installed via the connecting rods 502, and the support rod 503 is used to push the entire cleaning cabinet forward. The control assembly includes a temperature control... The cleaning cabinet body 1 includes a temperature control tube 601, a rotary adjustment tube 602, a control box 603, a work display slot 604, and a control button 605. A temperature control tube 601 is located on one side of the main body 1. The bottom of the temperature control tube 601 is connected to the rotary adjustment tube 602, and the bottom of the temperature control tube 601 is connected to the control box 603. The control box 603 is located on the surface of the temperature control tube 601. Below the control box 603 is a work display slot 604, and a control button 605 is located on one side of the work display slot 604. During use, the temperature control tube 601 controls the drying heating structure, the rotary adjustment tube 602 controls the rotation structure, the control box 603 displays working information, the work display slot 604 controls the overall device's on / off and pause functions, and the control button 605 sets the drying command. The closing assembly includes a door panel 701, a fixed angle iron 702, a sealed rock plate 703, and a fixed button 704. A door panel 701 is located on one side of the main body 1 of the cleaning cabinet. A fixed angle iron 702 is provided on one side of the cabinet, and a sealed rock plate 703 is provided on the inner side of the door panel 701. A fixing button 704 is provided on one side of the main body of the cleaning cabinet 1 opposite to the fixed angle iron 702. In use, the door panel 701 is used to seal the entire main body of the cleaning cabinet 1 to prevent ozone leakage and accidents. The fixed angle iron 702 is used to close the door panel 701. The sealed rock plate 703 is used to insulate and heat the inside of the cabinet to assist in the temperature rise for drying. The fixing button 704 is used to tighten and close the door panel 701.
[0025] During operation, firstly, a rotating structure is installed in the mounting slot 201. The motor 202 generates electricity to drive the rotating rod 203 to rotate. The rotating rod 203 is connected to the rotating gear 204. The rotating gear 204 clamps the control gear 205 to rotate. The rotation of the control gear 205 drives the placement structure to rotate, making the drying more thorough. The rotating shaft 301 rotates, driving the disc 302 to rotate. The semiconductor component to be dried is placed in the disc 302. The limiting ring 303 limits the workpiece to prevent it from falling during drying.
[0026] Then, the connecting rod 502 is fixed to one side of the main body 1 of the cleaning cabinet by the fixing plate 501, the support rod 503 is installed by the connecting rod 502, the entire cleaning cabinet is moved by the support rod 503, the drying heating structure is controlled by the temperature control tube 601, the rotation structure is controlled by the rotation adjustment tube 602, the working information is displayed by the control box 603, the overall device is controlled to switch on and off and pause by the working display slot 604, the drying command is set by the control button 605, the main body 1 of the cleaning cabinet is sealed by the door panel 701 to prevent ozone leakage and accidents, the door panel 701 is closed by the fixing angle iron 702, the interior of the cabinet is insulated and heated by the sealing rock plate 703 to assist the temperature rise for drying, and the door panel 701 is tightened and closed by the fixing button 704.
[0027] Through the above steps, the workpieces to be dried are placed in the main body 1 of the cleaning cabinet for drying. The rotating component controls the rotation of the rotating structure. The placement component places the workpieces to be dried and rotates to help the workpieces be heated and dried better. The rotating column 402 is installed and connected through the connecting piece 401. The rotating column 402 controls the universal rotation of the moving structure. The roller 404 is installed and connected through the U-shaped connecting block 403. The roller 404 drives the entire device to move. The fixed shaft 405 fixes the roller 404 to the middle of the U-shaped connecting block 403. The pushing component pushes the entire device to a suitable position. The control component controls the operation of the main body 1 of the cleaning cabinet. The sealing component seals the entire heating space for better drying.
[0028] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention.
Claims
1. A semiconductor processing component cleaning and drying apparatus, comprising a cleaning cabinet body (1); characterized in that: It also includes a rotating component, a placement component, a connecting piece (401), a rotating column (402), a U-shaped connecting block (403), a roller (404), a fixed shaft (405), a pusher component, a control component, and a sealing component. The rotating component is provided on the bottom surface of the cleaning cabinet body (1), and the placement component is provided on the top surface of the rotating component. Several connecting pieces (401) are equidistantly arranged on the bottom surface of the cleaning cabinet body (1). The rotating column (402) is provided on the bottom surface of the connecting piece (401), and the U-shaped connecting block (403) is provided on the bottom surface of the rotating column (402). The pusher component is provided on one side of the cleaning cabinet body (1), the control component is provided on one side of the cleaning cabinet body (1), and the sealing component is provided on one side of the cleaning cabinet body (1).
2. The semiconductor processing component cleaning and drying apparatus according to claim 1, characterized in that: The rotating assembly includes a mounting slot (201), a motor (202), a rotating rod (203), a rotating gear (204), and a control gear (205). The bottom of the cleaning cabinet body (1) is provided with a mounting slot (201). A motor (202) is provided on the bottom surface of the mounting slot (201). A rotating rod (203) is provided inside the mounting slot (201) opposite to the motor (202). A rotating gear (204) is provided at one end of the rotating rod (203). A control gear (205) is provided on one side of the rotating gear (204).
3. The semiconductor processing component cleaning and drying apparatus according to claim 2, characterized in that: The placement component includes a rotating shaft (301), a disc (302) and a limiting ring (303). One end of the control gear (205) is provided with a rotating shaft (301). Several sets of discs (302) are equidistantly arranged on the surface of the rotating shaft (301). A limiting ring (303) is provided on the top surface of the outer ring of the disc (302).
4. The semiconductor processing component cleaning and drying apparatus according to claim 3, characterized in that: A roller (404) is provided in the middle of the U-shaped connecting block (403), and a fixed shaft (405) is provided inside the roller (404).
5. The semiconductor processing component cleaning and drying apparatus according to claim 4, characterized in that: The pusher assembly includes a fixing plate (501), a connecting rod (502) and a support rod (503). The fixing plate (501) is provided on one side of the main body (1) of the cleaning cabinet. The connecting rod (502) is provided at both ends of the surface of the fixing plate (501), and the support rod (503) is provided at the top of the connecting rod (502).
6. The semiconductor processing component cleaning and drying apparatus according to claim 4, characterized in that: The control components include a temperature control tube (601), a rotary adjustment tube (602), a control box (603), a work display slot (604), and a control button (605). The temperature control tube (601) is provided on one side of the main body (1) of the cleaning cabinet. The rotary adjustment tube (602) is connected to the bottom of the temperature control tube (601). The control box (603) is connected to the bottom of the temperature control tube (601). The control box (603) is provided on the surface of the temperature control tube (601). The work display slot (604) is provided below the control box (603). The control button (605) is provided on one side of the work display slot (604).
7. The semiconductor processing component cleaning and drying apparatus according to claim 6, characterized in that: The closing component includes a door panel (701), a fixed angle iron (702), a sealed rock panel (703), and a fixing button (704). A door panel (701) is provided on one side of the main body (1) of the cleaning cabinet. A fixed angle iron (702) is provided on one side of the door panel (701). A sealed rock panel (703) is provided on the inner side of the door panel (701). A fixing button (704) is provided on one side of the main body (1) of the cleaning cabinet opposite to the fixed angle iron (702).