Silicon carbide ceramic detection equipment for semiconductor equipment
By introducing a filter screen and a draining device into the silicon carbide ceramic density and specific gravity tester, the problem of contamination during the removal of silicon carbide ceramics was solved, efficient draining operation was achieved, and the practicality of the equipment was improved.
Patent Information
- Application Number
- CN202422637130.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-30
- Publication Date
- 2025-10-31
- Estimated Expiration
- 2034-10-30
AI Technical Summary
Existing silicon carbide ceramic density and specific gravity testers can cause water residue on the silicon carbide ceramics to pollute the surrounding environment when they are removed, and the removal process is limited by size and shape, which reduces the practicality of the equipment.
A testing device was designed, comprising a water storage tank, a weighing plate, and a holding mechanism. The holding mechanism includes a filter screen box for holding silicon carbide ceramics, and a drain box and a drain rod are installed on the water storage tank to achieve the suspended drainage operation of the silicon carbide ceramics.
This effectively avoids liquid contamination of the surrounding environment from silicon carbide ceramics, improves the practicality and drainage effect of the equipment, and simplifies the removal process of silicon carbide ceramics.
Smart Images
Figure CN223500734U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of silicon carbide ceramic testing technology, specifically relating to a silicon carbide ceramic testing device for semiconductor equipment. Background Technology
[0002] Semiconductor equipment uses silicon carbide ceramic components, and after the silicon carbide ceramics are produced, their density and specific gravity need to be tested. In this process, a ceramic density and specific gravity tester is used.
[0003] The ceramic density and specific gravity tester consists of the tester body, weighing plate, and water storage tank. After weighing the silicon carbide ceramic, it is placed in the water storage tank. At this time, the weight of the silicon carbide ceramic in water is measured. Then, the instrument automatically calculates the density and specific gravity of the sample according to Archimedes' principle and displays the results on the screen. However, the existing water storage tank does not have a device for draining the silicon carbide ceramic. As a result, when the silicon carbide ceramic is taken out, the water remaining on the silicon carbide ceramic will fall onto the instrument and the operating table, polluting the surrounding environment. In addition, due to the size and shape limitations, the silicon carbide ceramic is generally removed by hand, which greatly reduces the practicality of the equipment. Utility Model Content
[0004] The purpose of this invention is to provide a silicon carbide ceramic testing device for semiconductor equipment, in order to solve the problems mentioned in the background art.
[0005] To achieve the above objectives, the present invention provides the following technical solution: a silicon carbide ceramic testing device for semiconductor equipment, comprising: a testing instrument body having a water storage tank and a weighing plate sequentially arranged on the top; the top of the water storage tank having a holding mechanism extending below the liquid surface; the holding mechanism including a support ring and a filter screen box installed at the bottom of the support ring; the support ring abutting against the edge of the top of the water storage tank; and the filter screen box forming a storage area for storing silicon carbide ceramics.
[0006] Preferably, a drain box for draining water is provided on one side of the tester body, and the filter box can be placed in the drain box.
[0007] Preferably, the drain box is further provided with a plurality of drain rods that provide suspended support for the drain box, and both ends of each drain rod are welded to the inner wall of the drain box.
[0008] Preferably, one side of the top of the drain box is provided with a connector that can be detachably connected to the tester body. The connector includes a mounting base and a plug rod that is longitudinally installed at the bottom of the mounting base. The mounting base is welded to the side wall of the drain box, and the top of the tester body is provided with a plug hole to accommodate the plug rod.
[0009] Preferably, the bottom of the drain box on the side away from the tester body is also provided with a support rod for support, the bottom of the drain box is provided with a receiving groove, the receiving groove is provided with a rotating shaft, and one end of the support rod is rotatably mounted on the rotating shaft.
[0010] Preferably, the inner wall of the receiving groove opposite to the rotating shaft is further provided with a protrusion for limiting the position, and the end of the support rod opposite to the rotating shaft is engaged with the protrusion.
[0011] Compared with the prior art, this utility model has the following advantages:
[0012] (1) This utility model adds a holding mechanism in a water storage tank. The filter screen box in the holding mechanism immerses the silicon carbide ceramic in the liquid. After removing the filter screen box, the silicon carbide ceramic can be directly removed from the liquid, avoiding direct contact between the silicon carbide ceramic and facilitating the equipment to unload the silicon carbide ceramic immersed in the liquid.
[0013] (2) The present invention provides a drain box, which facilitates the draining of the filter screen and silicon carbide ceramic, thus avoiding the pollution of the surrounding environment by the liquid on the silicon carbide ceramic.
[0014] (3) By adding a drain rod, the filter screen box can be suspended in the drain box, avoiding the filter screen box being in a liquid environment at all times, thus improving the drainage effect of the equipment. Attached Figure Description
[0015] Figure 1 This is the first front view of the present invention;
[0016] Figure 2 This is a second front view of the present invention;
[0017] Figure 3 This is a top view of the tester body and the drain box of this utility model;
[0018] Figure 4 This is a partial cross-sectional view of the drain box, filter screen box, and testing instrument body of this utility model;
[0019] In the diagram: 1. Tester body; 2. Drain box; 3. Mounting base; 4. Holding mechanism; 5. Support ring; 6. Filter screen box; 7. Protrusion; 8. Water storage tank; 9. Weighing plate; 10. Support rod; 11. Insertion hole; 12. Insertion rod; 13. Drain rod; 14. Rotating shaft; 15. Receiving groove. Detailed Implementation
[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0021] refer to Figure 1-3 As shown, the present invention provides a silicon carbide ceramic testing device for semiconductor equipment, comprising: a testing instrument body 1 having a water storage tank 8 and a weighing plate 9 arranged sequentially on the top; a holding mechanism 4 extending to the bottom of the liquid surface is provided on the top of the water storage tank 8; the holding mechanism 4 includes a support ring 5 and a filter screen box 6 installed at the bottom of the support ring 5; the support ring 5 abuts against the edge of the top of the water storage tank 8; and a storage area for storing silicon carbide ceramic is formed in the filter screen box 6.
[0022] The above describes the use of the water storage tank 8, weighing plate 9, holding mechanism 4, and testing instrument body 1 provided by this utility model. The testing instrument body 1 is existing technology and is a ceramic density and specific gravity tester. This utility model does not involve the core components of the equipment, so they will not be described in detail. The filter screen box 6 is placed in the water storage tank 8, and then the silicon carbide ceramic is placed in the filter screen box 6. At this time, the silicon carbide ceramic is in the liquid of the water storage tank 8. After the testing instrument body 1 weighs the ceramic, the filter screen box 6 can be directly removed from the water storage tank 8 through the support ring 5, which makes it easy to remove the silicon carbide ceramic from the liquid.
[0023] In this utility model, combined with Figure 1-4 As shown, the tester body 1 of this embodiment is also provided with a drain box 2 for draining water on one side, and the filter box 6 can be placed in the drain box 2.
[0024] As described above, by using the drain box 2 provided by this utility model, the liquid remaining in the filter box 6 is collected through the drain box 2, so as to avoid liquid pollution of the surrounding environment.
[0025] Furthermore, in order to improve the drainage effect of drain box 2, refer to Figure 3-4 As shown, the drain box 2 is also equipped with multiple drain rods 13 that provide suspended support for the drain box 2. Both ends of each drain rod 13 are welded to the inner wall of the drain box 2. The multiple drain rods 13 allow the filter screen box 6 to be suspended in the drain box 2, preventing the filter screen box 6 from always being submerged in the liquid in the drain box 2.
[0026] Furthermore, to facilitate the connection between the drain box 2 and the testing instrument body 1, refer to... Figure 4As shown, a connector that can be detachably connected to the tester body 1 is also provided on one side of the top of the drain box 2. The connector includes a mounting base 3 and a plug rod 12 that is longitudinally installed at the bottom of the mounting base 3. The mounting base 3 is welded to the side wall of the drain box 2. The top of the tester body 1 has a plug hole 11 for accommodating the plug rod 12. The plug rod 12 is installed on the drain box 2 through the mounting base 3. When the plug rod 12 is inserted into the plug hole 11, the drain box 2 can be detachably installed on one side of the water storage tank 8, making it convenient for the filter screen box 6 to be placed in the drain box 2.
[0027] Furthermore, in order to improve the stability of the drain box 2, refer to Figure 1-2 and Figure 4 As shown, the bottom of the drain box 2, facing away from the tester body 1, is also provided with a support rod 10 for support. The bottom of the drain box 2 has a receiving groove 15, in which a rotating shaft 14 is provided. One end of the support rod 10 is rotatably mounted on the rotating shaft 14. After the drain box 2 is installed on the tester body 1, the support rod 10 is pulled out from the receiving groove 15, so that the support rod 10 stands on the ground. At this time, the support rod 10 provides effective support at the bottom of one end of the drain box 2.
[0028] Furthermore, to facilitate the storage of the support rod 10 in the receiving groove 15, refer to Figure 4 As shown, a protrusion 7 for limiting the position is provided on the inner wall of the receiving groove 15 at the end opposite to the rotating shaft 14, and the end of the support rod 10 opposite to the rotating shaft 14 is engaged with the protrusion 7. When the support rod 10 enters the receiving groove 15 through the rotating shaft 14, the protrusion 7 restricts the support rod 10 in the receiving groove 15, thereby improving the stability of the support rod 10 in the receiving groove 15.
[0029] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A silicon carbide ceramic testing device for semiconductor equipment, characterized in that, include: The tester body (1) is provided with a water storage tank (8) and a weighing plate (9) on the top. The top of the water storage tank (8) is provided with a holding mechanism (4) extending to the bottom of the liquid surface. The holding mechanism (4) includes a support ring (5) and a filter screen box (6) installed at the bottom of the support ring (5). The support ring (5) abuts against the edge of the top of the water storage tank (8). The filter screen box (6) forms a storage area for storing silicon carbide ceramics.
2. The silicon carbide ceramic testing device for semiconductor equipment according to claim 1, characterized in that: The tester body (1) is also provided with a drain box (2) for draining water on one side, and the filter box (6) can be placed in the drain box (2).
3. The silicon carbide ceramic testing device for semiconductor equipment according to claim 2, characterized in that: The drain box (2) is also provided with a plurality of drain rods (13) that provide suspended support for the drain box (2), and both ends of each drain rod (13) are welded to the inner wall of the drain box (2).
4. The silicon carbide ceramic testing device for semiconductor equipment according to claim 2, characterized in that: The top side of the drain box (2) is also provided with a connector that can be detachably connected to the tester body (1). The connector includes a mounting base (3) and a plug rod (12) that is longitudinally installed at the bottom of the mounting base (3). The mounting base (3) is welded to the side wall of the drain box (2). The top of the tester body (1) is provided with a plug hole (11) for accommodating the plug rod (12).
5. The silicon carbide ceramic testing device for semiconductor equipment according to claim 2, characterized in that: The bottom of the drain box (2) on the side away from the tester body (1) is also provided with a support rod (10) for support. The bottom of the drain box (2) is provided with a receiving groove (15), and a rotating shaft (14) is provided in the receiving groove (15). One end of the support rod (10) is rotatably mounted on the rotating shaft (14).
6. The silicon carbide ceramic testing device for semiconductor equipment according to claim 5, characterized in that: The inner wall of the receiving groove (15) facing away from the rotating shaft (14) is also provided with a protrusion (7) for limiting the position, and the end of the support rod (10) facing away from the rotating shaft (14) is engaged with the protrusion (7).