Laser coupling system

Abstract

The utility model discloses a laser coupling system which comprises a coupling platform deck and a clamping device, the bottom of the coupling platform deck is connected with a first lifting sliding table and a first rotating sliding table, a product limiting part is arranged on the coupling platform deck, and the length direction of the product limiting part points to a first direction; the clamping device and the product limiting part are adjacently arranged in the first direction, the clamping device is suitable for clamping the optical fiber collimator, and the clamping device is connected with a multi-degree-of-freedom collimation displacement table. The first lifting sliding table and the first rotating sliding table can drive the coupling carrying table to move in different degrees of freedom so as to drive a tube shell of a laser installed on a product limiting part to move, and the multi-degree-of-freedom collimation displacement table drives the clamping device to move in different degrees of freedom so as to drive the optical fiber collimator to move. Therefore, multidirectional synchronous coupling can be realized, and the coupling precision and efficiency are improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor device processing technology, and in particular to a laser coupling system. Background Technology

[0002] SOA lasers, also known as semiconductor optical amplifiers (SOAs), require coupling processing during manufacturing. Most coupling systems adjust the position of the laser chip at a single location within the laser housing, while the collimator outside the housing remains stationary. This significantly limits the design and fabrication of the coupling fixture and the displacement space throughout the coupling process, resulting in difficulties in fixture fabrication, low coupling efficiency, and low coupling power. Utility Model Content

[0003] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a laser coupling system capable of multi-directional synchronous coupling, thereby improving the accuracy and efficiency of coupling.

[0004] This utility model embodiment provides a laser coupling system, including:

[0005] A coupling platform is provided with a first lifting slide and a first rotating slide connected to its bottom. A product limiting part is provided on the coupling platform, and the length direction of the product limiting part points to a first direction.

[0006] A clamp is arranged adjacent to the product limiting part in the first direction. The clamp is adapted to clamp the fiber collimator and is connected to a collimation displacement stage with multiple degrees of freedom.

[0007] According to some embodiments of the present invention, the collimation displacement stage includes a three-dimensional displacement stage, a yaw displacement stage, and a rotational displacement stage. The yaw displacement stage is mounted on the three-dimensional displacement stage, the rotational displacement stage is connected to the yaw displacement stage, and the rotation axis of the rotational displacement stage points to the first direction.

[0008] According to some embodiments of the present invention, a connecting plate is connected between the rotary displacement stage and the yaw displacement stage. The connecting plate has a first connecting part and a second connecting part that are perpendicular to each other. The first connecting part is installed on the yaw displacement stage, and the rotary displacement stage is connected to the second connecting part.

[0009] According to some embodiments of the present invention, the clamp includes an extension and a clamping part, the first end of the extension is connected to the rotary displacement stage, and the clamping part is disposed at the second end of the extension.

[0010] According to some embodiments of the present invention, the coupling platform includes a heat dissipation base, a power supply circuit board, a pressure plate fixing seat, and a pin pressure plate. The product limiting part is disposed on the heat dissipation base. The power supply circuit board is mounted on the heat dissipation base and located adjacent to the product limiting part. The pressure plate fixing seat is mounted on the heat dissipation base. The pin pressure plate is connected to the pressure plate fixing seat and located adjacent to the product limiting part. A clamping gap is formed between the pin pressure plate and the power supply circuit board.

[0011] According to some embodiments of the present invention, the product limiting part is a limiting groove provided on the heat dissipation base, and the limiting groove penetrates the side edge of the heat dissipation base in the first direction.

[0012] According to some embodiments of the present invention, the foot pressure plate is provided with a gap adjustment component, which is used to adjust the width of the clamping gap.

[0013] According to some embodiments of the present invention, the laser coupling system further includes a chip gripper, which is disposed above the product limiting part, and the chip gripper is connected to a gripper displacement stage with multiple degrees of freedom.

[0014] According to some embodiments of the present invention, the gripper displacement stage includes a three-dimensional adjustment frame, an axial oscillation slide, and a radial oscillation slide. The axial oscillation slide and the radial oscillation slide are both mounted on the three-dimensional adjustment frame and are connected to each other. The chip gripper is connected to one of the axial oscillation slide and the radial oscillation slide.

[0015] According to some embodiments of the present invention, an imaging component is further provided above the coupling stage, and the field of view of the imaging component covers the product limiting part.

[0016] The embodiments of this utility model have at least the following beneficial effects:

[0017] The first lifting slide and the first rotating slide can drive the coupling stage to move in different degrees of freedom, thereby driving the tube shell of the laser installed in the product limiting part to move. The multi-degree-of-freedom collimation displacement stage drives the clamp to move in different degrees of freedom, thereby driving the fiber collimator to move. In this way, multi-directional synchronous coupling can be achieved, improving the accuracy and efficiency of coupling.

[0018] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0019] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0020] Figure 1 This is one of the structural schematic diagrams of the laser coupling system according to an embodiment of the present invention;

[0021] Figure 2 This is a second schematic diagram of the laser coupling system according to an embodiment of the present invention;

[0022] Figure 3 This is the third schematic diagram of the laser coupling system according to an embodiment of the present invention.

[0023] Figure label:

[0024] The system includes a coupling stage 100, a product limiting part 101, a heat dissipation base 110, a power supply circuit board 120, a pressure plate fixing seat 130, a pin pressure plate 140, a gap adjusting part 141, a first lifting slide 210, a first rotating slide 220, a clamp 300, an extension part 310, a clamping part 320, a collimation displacement stage 400, a three-dimensional displacement stage 410, a swing displacement stage 420, a rotating displacement stage 430, a connecting plate 440, a first connecting part 441, a second connecting part 442, a chip gripper 500, a gripper displacement stage 510, a three-dimensional adjustment frame 511, an axial swing slide 512, a radial swing slide 513, and an imaging component 600. Detailed Implementation

[0025] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0026] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0027] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. If "first," "second," etc., are used in the description, they are only for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the sequential relationship of the indicated technical features.

[0028] In the description of this utility model, unless otherwise explicitly defined, the terms "setting", "installation", "connection", etc. should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in combination with the specific content of the technical solution.

[0029] In related technologies, both automatic and manual coupling systems mostly employ active alignment technology. This involves changing the relative coupling position, recording the position information and the output optical power of the optical system at that position in real time, and analyzing this information to guide the adjustment mechanism in finding the optimal coupling position. The actual movement trajectory of the coupling element determines whether the optimal coupling position can be found effectively in the shortest time. However, most coupling systems perform coupling within a single position inside the laser tube housing, while the collimator outside the housing cannot move. This significantly restricts the design and fabrication of the coupling fixture and the displacement space throughout the coupling process, leading to difficulties in fixture fabrication, low coupling efficiency, and low coupling power—problems that urgently need to be addressed.

[0030] Please refer to Figure 1 and Figure 2This embodiment discloses a laser coupling system, including a coupling platform 100 and a holder 300. The bottom of the coupling platform 100 is connected to a first lifting slide 210 and a first rotating slide 220, wherein the first lifting slide 210 and the first rotating slide 220 are connected to each other. For example, the first lifting slide 210 is mounted on the first rotating slide 220 and is connected to the coupling platform 100; or, for example, the first rotating slide 220 is mounted on the first lifting slide 210 and is connected to the coupling platform 100. In this way, the coupling platform 100 can move in the longitudinal direction and rotate circumferentially in the horizontal plane. The coupling stage 100 is provided with a product limiting part 101. For example, the laser coupling system of this embodiment is suitable for chip coupling of lasers, especially SOA (Semiconductor Optical Amplifier) ​​lasers. The laser has a cuboid-shaped housing. To position and limit the housing, the product limiting part 101 has a shape and size adapted to the housing; that is, the product limiting part 101 has a length direction and a width direction, wherein the length direction of the product limiting part 101 points to the first direction. Figure 1 The left and right directions are indicated in the middle. The clamp 300 and the product limiting part 101 are arranged adjacent to each other in the first direction. The clamp 300 is suitable for clamping the fiber collimator. The clamp 300 is connected to a collimation displacement stage 400 with multiple degrees of freedom. The collimation displacement stage 400 can drive the clamp 300 to move in different degrees of freedom, thereby improving the degree of freedom of movement during coupling.

[0031] In this embodiment, the first lifting slide 210 and the first rotating slide 220 can drive the coupling stage 100 to move in different degrees of freedom, thereby driving the laser housing installed in the product limiting part 101 to move. The multi-degree-of-freedom collimation displacement stage 400 drives the clamp 300 to move in different degrees of freedom, thereby driving the fiber collimator to move. In this way, multi-directional synchronous coupling can be achieved, improving the accuracy and efficiency of coupling.

[0032] Please continue to refer to Figure 1 and Figure 2The collimation stage 400 includes a three-dimensional stage 410, a yaw stage 420, and a rotational stage 430. The yaw stage 420 is mounted on the three-dimensional stage 410, and the rotational stage 430 is connected to the yaw stage 420, with its rotation axis pointing in a first direction. For example, the three-dimensional stage 410 can move in three dimensions, such as X, Y, and Z degrees of freedom, or forward / backward, left / right, and up / down directions. The three-dimensional stage 410, in conjunction with the yaw stage 420 and the rotational stage 430, enables the gripper 300 to move in more than three dimensions, thereby improving coupling efficiency.

[0033] Please refer to Figure 1 A connecting plate 440 connects the rotary displacement stage 430 and the yaw displacement stage 420. The connecting plate 440 has a first connecting part 441 and a second connecting part 442 that are perpendicular to each other. The first connecting part 441 is mounted on the yaw displacement stage 420, and the rotary displacement stage 430 is connected to the second connecting part 442. The perpendicularity of the first connecting part 441 and the second connecting part 442 allows for a change in the assembly direction, so that the rotation axis of the rotary displacement stage 430 points to a first direction. This enables the holder 300 to rotate around the rotation axis under the drive of the rotary displacement stage 430, thereby achieving alignment of the polarization-maintaining fiber on the asymmetric plane at any rotation angle.

[0034] Please refer to Figure 1 and Figure 2 The clamp 300 includes an extension portion 310 and a clamping portion 320. The first end of the extension portion 310 is connected to the rotary displacement stage 430, and the clamping portion 320 is disposed at the second end of the extension portion 310. The clamping structure of the clamping portion 320 is adapted to an optical fiber collimator. For example, the optical fiber collimator has a cylindrical shape, and the clamping portion 320 is configured as a through-hole structure so that the optical fiber collimator can be fitted into the through-hole structure and face the product limiting portion 101 of the coupling stage 100. The extension portion 310 can connect and extend the clamping portion 320 and the rotary displacement stage 430, bringing the clamping portion 320 closer to the product limiting portion 101 of the coupling stage 100.

[0035] Please continue to refer to Figure 1 and Figure 2The coupling platform 100 includes a heat dissipation base 110, a power supply circuit board 120, a pressure plate fixing seat 130, and a pin clamping plate 140. A product limiting part 101 is disposed on the heat dissipation base 110. The power supply circuit board 120 is mounted on the heat dissipation base 110 and located adjacent to the product limiting part 101. The pressure plate fixing seat 130 is mounted on the heat dissipation base 110. The pin clamping plate 140 is connected to the pressure plate fixing seat 130 and located adjacent to the product limiting part 101, forming a clamping gap between the pin clamping plate 140 and the power supply circuit board 120. During coupling, the laser housing is mounted on the product limiting part 101, and the pins on both sides of the housing contact the contacts on the power supply circuit board 120. The pin clamping plate 140 applies pressure to the pins to ensure good contact between the pins and the contacts on the power supply circuit board 120. The power supply circuit board 120 supplies power to the laser during coupling, which generates considerable heat, requiring the heat dissipation base 110 to improve heat dissipation efficiency.

[0036] The product limiting part 101 is a limiting groove provided on the heat sink base 110, which penetrates the side edge of the heat sink base 110 in a first direction. The limiting groove can adapt to the height difference between the surface of the laser tube and the pins, so as to facilitate the positioning and limiting of the tube. The surface of the power supply circuit board 120 is higher than the bottom of the limiting groove, so that the contacts on the surface of the power supply circuit board 120 can contact the pins of the laser, thereby forming a power supply path. The limiting groove penetrates the side edge of the heat sink base 110 in the first direction, which can expose the side of the laser tube, so as to facilitate the monitoring of coupling efficiency by the fiber collimator during coupling.

[0037] Please refer to Figure 1 or Figure 2 The pin clamping plate 140 is provided with a gap adjustment component 141, which is used to adjust the width of the clamping gap. For example, the gap adjustment component 141 is an adjustment stud, the end of which abuts against the power supply circuit board 120, thereby adjusting the width of the clamping gap and preventing excessive pressure applied by the pin clamping plate 140.

[0038] Please refer to Figure 3 The laser coupling system also includes a chip gripper 500, which is positioned above the product limiting part 101. The chip gripper 500 is connected to a multi-degree-of-freedom gripper displacement stage 510. The gripper displacement stage 510 can drive the chip gripper 500 to move with different degrees of freedom, thereby adjusting the coupling position of the chip and improving coupling efficiency.

[0039] Please continue to refer to Figure 3The gripper displacement stage 510 includes a three-dimensional adjustment frame 511, an axial yaw slide 512, and a radial yaw slide 513. Both the axial yaw slide 512 and the radial yaw slide 513 are mounted on the three-dimensional adjustment frame 511 and are interconnected. The chip gripper 500 is connected to one of the axial yaw slide 512 and the radial yaw slide 513. It can move in three dimensions, such as X, Y, and Z degrees of freedom, or forward / backward, left / right, and up / down directions. The three-dimensional adjustment frame 511, in conjunction with the axial yaw slide 512 and the radial yaw slide 513, enables the gripper 300 to move in more than three dimensions, thereby improving coupling efficiency.

[0040] Please continue to refer to Figure 3 An imaging component 600 is also provided above the coupling stage 100. The field of view of the imaging component 600 covers the product limiting part 101. The imaging component 600 can be a CCD microscope observation component, which can capture images of the chip operation process observed on the microscope and transmit the captured images to a computer. The microscopic images are compared and analyzed, thereby automatically measuring the position and angle of the chip, assisting in the position control of the chip, facilitating precise control of the chip, and improving the coupling effect.

[0041] The laser coupling system in this embodiment has a simple structure, is easy to operate, and has high applicability. The standardized chip gripper 500 is suitable for coupling various chips of different specifications. The multi-dimensional gripper displacement stage 510 can provide precise adjustment for chip coupling, and together with the multi-dimensional collimation displacement stage 400 and the holder 300, optimal coupling efficiency is achieved.

[0042] Please refer to the above as well. Figures 1 to 3 In use, the laser housing is installed on the product limiting part 101, and the pins on both sides of the housing are pressed by the pin pressure plate 140 to ensure good contact between the pins on both sides of the housing and the contacts on the power supply circuit board 120, so that the power supply circuit board 120 can supply power to the laser. The chip gripper 500 holds the chip to be coupled, and controls the chip to perform precise displacement movements with the cooperation of the three-dimensional adjustment frame 511, the axial tilting slide 512 and the radial tilting slide 513, thereby achieving coupling of the chip's light emission position.

[0043] After the chip is positioned to the designated location, the fiber collimator is mounted on the holder 300, and its position is precisely adjusted using the collimation displacement stage 400. The yaw displacement stage 420 allows for precise angle adjustment of the fiber collimator in both horizontal and vertical directions, while the rotation displacement stage 430 allows the fiber collimator to rotate around its axis, achieving alignment of the asymmetric polarization-maintaining fiber at any rotation angle. The coordinated operation of the collimation displacement stage 400, the first lifting slide 210, and the first rotating slide 220 ultimately achieves multi-directional and high-efficiency coupling of the laser.

[0044] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A laser coupling system, characterized in that, include: The coupling platform (100) has a first lifting slide (210) and a first rotating slide (220) connected to its bottom. The coupling platform (100) is provided with a product limiting part (101), and the length direction of the product limiting part (101) points to a first direction. A clamp (300) is arranged adjacent to the product limiting part (101) in the first direction. The clamp (300) is adapted to clamp the fiber collimator. The clamp (300) is connected to a collimation displacement stage (400) with multiple degrees of freedom.

2. The laser coupling system according to claim 1, characterized in that, The collimation stage (400) includes a three-dimensional stage (410), a yaw stage (420), and a rotary stage (430). The yaw stage (420) is mounted on the three-dimensional stage (410), and the rotary stage (430) is connected to the yaw stage (420). The rotation axis of the rotary stage (430) points in the first direction.

3. The laser coupling system according to claim 2, characterized in that, A connecting plate (440) is connected between the rotary displacement stage (430) and the yaw displacement stage (420). The connecting plate (440) has a first connecting part (441) and a second connecting part (442) that are perpendicular to each other. The first connecting part (441) is installed on the yaw displacement stage (420), and the rotary displacement stage (430) is connected to the second connecting part (442).

4. The laser coupling system according to claim 2 or 3, characterized in that, The clamp (300) includes an extension (310) and a clamping part (320). The first end of the extension (310) is connected to the rotary displacement stage (430), and the clamping part (320) is disposed at the second end of the extension (310).

5. The laser coupling system according to claim 1, characterized in that, The coupling platform (100) includes a heat dissipation base (110), a power supply circuit board (120), a pressure plate fixing seat (130), and a pin pressure plate (140). The product limiting part (101) is disposed on the heat dissipation base (110). The power supply circuit board (120) is mounted on the heat dissipation base (110) and located on the adjacent side of the product limiting part (101). The pressure plate fixing seat (130) is mounted on the heat dissipation base (110). The pin pressure plate (140) is connected to the pressure plate fixing seat (130) and located on the adjacent side of the product limiting part (101). A clamping gap is formed between the pin pressure plate (140) and the power supply circuit board (120).

6. The laser coupling system according to claim 5, characterized in that, The product limiting part (101) is a limiting groove provided on the heat dissipation base (110), and the limiting groove penetrates the side edge of the heat dissipation base (110) in the first direction.

7. The laser coupling system according to claim 5 or 6, characterized in that, The pin clamping plate (140) is provided with a gap adjustment component (141), which is used to adjust the width of the clamping gap.

8. The laser coupling system according to any one of claims 1 to 3, 5 or 6, characterized in that, The laser coupling system also includes a chip gripper (500), which is disposed above the product limiting part (101) and is connected to a multi-degree-of-freedom gripper displacement stage (510).

9. The laser coupling system according to claim 8, characterized in that, The gripper displacement stage (510) includes a three-dimensional adjustment frame (511), an axial yaw slide (512), and a radial yaw slide (513). The axial yaw slide (512) and the radial yaw slide (513) are both mounted on the three-dimensional adjustment frame (511). The axial yaw slide (512) and the radial yaw slide (513) are connected to each other. The chip gripper (500) is connected to one of the axial yaw slide (512) and the radial yaw slide (513).

10. The laser coupling system according to any one of claims 1 to 3, 5, 6 or 9, characterized in that, An imaging component (600) is also provided above the coupling stage (100), and the field of view of the imaging component (600) covers the product limiting part (101).

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