Ring ring tray jig

Abstract

The utility model discloses a Ring ring tray jig which comprises a supporting plate, a mounting plate, a guide assembly arranged on the supporting plate, a lifting driving piece arranged on the supporting plate and a tray assembly used for fixing a Ring ring, the tray assembly is detachably connected to the mounting plate, and the guide assembly is used for guiding the mounting plate to move in the vertical direction. The lifting driving piece is used for driving the mounting plate to ascend and descend, the tray assembly comprises a bottom plate, a connecting column and a vacuum top plate, the vacuum top plate is connected to the bottom plate through the connecting column, and the bottom plate is detachably connected with the mounting plate through a connecting piece. According to the Ring ring tray jig provided by the utility model, the Ring ring can be conveniently installed and fixed in the semiconductor production process, and the production quality and efficiency are improved.

Description

Technical Field

[0001] This utility model relates to the field of chip processing, specifically to a Ring tray fixture. Background Technology

[0002] With the continuous development of modern industry, the level of automation in semiconductor manufacturing is also gradually improving. In the semiconductor production process, rings carrying UV films and chips need to undergo processes such as UV film debonding and dicing to separate the chips into individual semiconductor finished units. Afterward, the rings need to undergo cleaning and drying before being reused. Currently, there is no fixture that can easily handle ring processing during semiconductor manufacturing; most processes rely on manual handling, which is inefficient and prone to instability due to human intervention. Utility Model Content

[0003] To overcome the shortcomings of the existing technology, this utility model provides a Ring tray fixture, which facilitates the installation and fixing of Rings during semiconductor manufacturing, thereby improving production quality and efficiency.

[0004] The technical solution adopted by this utility model to solve its technical problem is:

[0005] A ring tray fixture includes a support plate, a mounting plate, a guide assembly disposed on the support plate, a lifting drive component disposed on the support plate, and a tray assembly for fixing the ring. The tray assembly is detachably connected to the mounting plate. The guide assembly guides the mounting plate to move vertically, and the lifting drive component drives the mounting plate to move up and down. The tray assembly includes a base plate, a connecting column, and a vacuum top plate. The vacuum top plate is connected to the base plate via the connecting column, and the base plate is detachably connected to the mounting plate via the connecting component.

[0006] As a further improvement to the above technical solution, the connector includes an ejector ball head locking pin, and both the base plate and the mounting plate are provided with pin holes, with the ejector ball head locking pin disposed in the pin holes.

[0007] As a further improvement to the above technical solution, the support plate is provided with an upright plate, and a limiting plate is provided on the upright plate extending toward the pallet assembly. The limiting plate is located above the mounting plate, and a limiting space is formed between the limiting plate and the mounting plate. The bottom plate is located within the limiting space.

[0008] As a further improvement to the above technical solution, a handle is provided on the base plate.

[0009] As a further improvement to the above technical solution, the connecting posts include multiple posts, which are arranged at the same height and spaced apart.

[0010] As a further improvement to the above technical solution, the guide assembly includes a linear bearing fixedly mounted on the support plate and a top plate linear shaft disposed in the linear bearing, the top of the top plate linear shaft being fixedly connected to the mounting plate.

[0011] As a further improvement to the above technical solution, the lifting drive component includes a motor, a transmission mechanism, and a screw lifting mechanism. The screw lifting mechanism includes a lifting nut and a screw threadedly connected to the lifting nut. The top of the screw is fixedly connected to the mounting plate. The motor drives the lifting nut to rotate through the transmission mechanism.

[0012] As a further improvement to the above technical solution, a nut fixing seat is provided on the support plate, and the lifting nut is rotatably connected to the nut fixing seat through a bearing.

[0013] As a further improvement to the above technical solution, the transmission mechanism includes a driving pulley mounted on the motor spindle, a driven pulley mounted on the lifting nut, and a belt connecting the driving pulley and the driven pulley.

[0014] As a further improvement to the above technical solution, a support plate is provided on the support plate, a slotted photoelectric sensor is provided on the support plate, and a sensing sheet that works in conjunction with the slotted photoelectric sensor is provided at the bottom of the mounting plate.

[0015] The beneficial effects of this utility model are: the Ring is adsorbed and fixed by the vacuum top plate. Since the tray assembly is a whole and detachably connected to the mounting plate, the tray assembly can be installed on the mounting plate after the Ring is fixed. The mounting plate is lifted and lowered by the lifting drive component, which in turn lifts and lowers the tray assembly and the Ring on the tray assembly, so as to facilitate the processing of the chip on the Ring. Attached Figure Description

[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0017] Figure 1 This is an assembly diagram of a Ring tray fixture according to an embodiment of the present invention;

[0018] Figure 2 This is a structural exploded view of a Ring tray fixture according to an embodiment of this utility model;

[0019] Figure 3 This is a cross-sectional view of a Ring tray fixture according to an embodiment of this utility model;

[0020] Figure 4 This is a schematic diagram of the structure of the vacuum top plate in a Ring tray fixture according to an embodiment of the present invention.

[0021] Reference numerals: 1. Support plate; 2. Mounting plate; 21. Top plate; 22. Steel plate; 23. Mounting strip; 3. Ring; 4. Tray assembly; 41. Vacuum top plate; 411. Adsorption tank; 412. Negative pressure hole; 413. Air pipe connector; 42. Base plate; 43. Connecting column; 44. Handle; 45. Ejector ball head locking pin; 5. Guide assembly; 51. Linear bearing; 52. Top plate linear shaft; 6. Lifting drive component; 61. Motor; 62. Screw lifting mechanism; 621. Lifting nut; 622. Screw; 623. Bearing; 624. Nut fixing seat; 63. Driving pulley; 64. Driven pulley; 7. Vertical plate; 8. Limiting plate; 9. Support plate; 10. Slotted photoelectric sensor; 11. Induction plate. Detailed Implementation

[0022] The following will clearly and completely describe the concept, specific structure, and technical effects of this utility model in conjunction with embodiments and accompanying drawings, so as to fully understand the purpose, features, and effects of this utility model. Obviously, the described embodiments are only a part of the embodiments of this utility model, not all of them. Other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are all within the scope of protection of this utility model. Furthermore, all connections / connections involved in the patent do not simply refer to direct contact between components, but rather to the ability to form a better connection structure by adding or reducing connecting accessories according to specific implementation conditions. For example, fixed connections / fixed installations can use screw connections, bolt connections, pin connections, key connections, adhesive connections, mortise and tenon connections, welding, riveting, etc., as needed. For detachable connections, screw connections, bolt connections, threaded connections, snap-fit ​​connections, mortise and tenon connections, Velcro connections, etc., can be used as needed. The various technical features in this utility model can be combined interactively without contradicting each other.

[0023] Reference Figure 1 , Figure 2 This utility model provides a Ring tray fixture, including a support plate 1, a mounting plate 2, a guide assembly 5 disposed on the support plate 1, a lifting drive 6 disposed on the support plate 1, and a tray assembly 4 for fixing the Ring. The tray assembly 4 is detachably connected to the mounting plate 2. The guide assembly 5 is used to guide the mounting plate 2 to move in the vertical direction. The lifting drive 6 is used to drive the mounting plate 2 to rise and fall, thereby driving the Ring fixed on the tray assembly 4 to rise and fall, which facilitates the processing of chips on the Ring.

[0024] Specifically, the tray assembly 4 includes a base plate 42, connecting posts 43, and a vacuum top plate 41. The vacuum top plate 41 is connected to the base plate 42 by four connecting posts 43 of equal height to improve the structural stability of the tray assembly 4 and ensure that the vacuum top plate 41 remains parallel to the base plate 42. The base plate 42 is detachably connected to the mounting plate 2 via connectors, thereby facilitating the replacement of the tray assembly 4. In actual production, the ring has circular rings 3 and square rings. To accommodate the shape of the ring, the vacuum top plate 41 is also provided with both circular and square vacuum top plates 41, i.e., there are two different types of tray assemblies 4. Thus, the corresponding tray assembly 4 is selected according to the shape of the ring, and the tray assembly 4 is then installed on the mounting plate 2, thereby increasing the compatibility of the fixture.

[0025] For example, in this embodiment, the vacuum top plate 41 is a circular vacuum top plate 41. The upper surface of the circular vacuum top plate 41 is provided with an annular adsorption groove 411. The vacuum top plate 41 is also provided with a plurality of negative pressure holes 412, which are evenly distributed in the adsorption groove 411. The bottom end of the negative pressure hole 412 is connected to a gas pipe connector 413, which is connected to an external vacuum generator. This can generate negative pressure at the adsorption groove 411, thereby adsorbing and fixing the blue film on the Ring 3. When the Ring 3 needs to be removed, the vacuum at the adsorption groove 411 can be broken by the external vacuum generator.

[0026] Furthermore, the connector has multiple components to improve the strength of the mounting plate 2 and the base plate 42 after locking. The connector includes a push-out ball head locking pin 45. Both the base plate 42 and the mounting plate 2 are provided with pin holes. The push-out ball head locking pin 45 is disposed in the pin holes. The push-out ball head locking pin 45 can quickly lock and unlock the mounting plate 2 and the base plate 42, thereby improving installation efficiency.

[0027] In some embodiments, the mounting plate 2 includes a top plate 21, mounting strips 23 connected to both sides of the top plate 21, and a steel plate 22 connected to the top of the top plate 21. Pin holes are provided on the mounting strips 23, and the ejector ball head locking pin 45 is connected to the pin holes on the mounting strips 23.

[0028] Furthermore, the support plate 1 is provided with two opposing upright plates 7, and each of the two upright plates 7 extends toward the pallet assembly 4 with a limiting plate 8. The limiting plate 8 is located above the mounting plate 2, and a limiting space is formed between the limiting plate 8 and the mounting plate 2. The bottom plate 42 is located within the limiting space. When installing the pallet assembly 4, the bottom plate 42 is placed into the limiting space from the side, thereby achieving rapid positioning of the bottom plate 42 and further improving installation efficiency. In addition, it can also prevent the bottom plate 42 from jumping relative to the mounting plate 2 after installation, thereby improving structural stability.

[0029] In some embodiments, a handle 44 is provided on the base plate 42, through which the loading and unloading of the pallet assembly 4 can be stably operated.

[0030] In this embodiment, refer to Figure 2 The guide assembly 5 includes a linear bearing 51 fixedly installed on the support plate 1 and a top plate linear shaft 52 disposed in the linear bearing 51. The top of the top plate linear shaft 52 is fixedly connected to the mounting plate 2. There are four guide assemblies 5. The lifting and lowering of the mounting plate 2 is guided by the four guide assemblies 5, which improves the structural reliability of the fixture.

[0031] In this embodiment, refer to Figure 2 and Figure 3 The lifting drive component 6 includes a motor 61, a transmission mechanism, and a screw lifting mechanism 62. The screw lifting mechanism 62 includes a nut fixing seat 624, a lifting nut 621, and a screw 622 threadedly connected to the lifting nut 621. The nut fixing seat 624 is fixedly installed on the support plate 1. The lifting nut 621 is rotatably connected to the nut fixing seat 624 through a bearing 623, thereby enabling the lifting nut 621 to rotate stably. When the lifting nut 621 rotates, it drives the screw 622 to rise and fall. Since the top of the screw 622 is fixedly connected to the mounting plate 2, the motor 61 drives the lifting nut 621 to rotate through the transmission mechanism, thereby driving the mounting plate 2 to rise and fall.

[0032] Furthermore, the transmission mechanism includes a driving pulley 63 mounted on the main shaft of the motor 61, a driven pulley 64 mounted on the lifting nut 621, and a belt (not shown in the figure) connecting the driving pulley 63 and the driven pulley 64. This belt-driven transmission mechanism transmits the torque of the main shaft of the motor 61, providing high stability. Alternatively, the transmission mechanism can also employ a gear-type transmission mechanism, a chain-type transmission mechanism, or similar methods.

[0033] In this embodiment, refer to Figure 2The support plate 1 is provided with a support plate 9, and the support plate 9 is provided with a slotted photoelectric sensor 10. The bottom of the mounting plate 2 is provided with a sensing sheet 11 that works in conjunction with the slotted photoelectric sensor 10. The slotted photoelectric sensor 10 detects the distance of the lifting and lowering of the mounting plate 2, thereby precisely controlling the height of the Ring.

[0034] The above is a detailed description of the preferred embodiments of the present utility model. However, the present utility model is not limited to the described embodiments. Those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present utility model. All such equivalent modifications or substitutions are included within the scope defined by the claims of this application.

Claims

1. A Ring tray fixture, characterized in that: The device includes a support plate, a mounting plate, a guide assembly disposed on the support plate, a lifting drive component disposed on the support plate, and a tray assembly for fixing a ring. The tray assembly is detachably connected to the mounting plate. The guide assembly is used to guide the mounting plate to move vertically. The lifting drive component is used to drive the mounting plate to rise and fall. The tray assembly includes a base plate, a connecting column, and a vacuum top plate. The vacuum top plate is connected to the base plate through the connecting column. The base plate is detachably connected to the mounting plate through a connecting component.

2. The Ring Tray Fixture according to claim 1, characterized in that: The connector includes an ejector ball head locking pin, and both the base plate and the mounting plate are provided with pin holes, with the ejector ball head locking pin disposed in the pin holes.

3. A Ring tray fixture according to claim 2, characterized in that: The support plate is provided with an upright plate, and a limiting plate extends from the upright plate toward the pallet assembly. The limiting plate is located above the mounting plate, and a limiting space is formed between the limiting plate and the mounting plate. The bottom plate is located within the limiting space.

4. A Ring tray fixture according to claim 3, characterized in that: A handle is provided on the base plate.

5. A Ring tray fixture according to claim 1, characterized in that: The connecting columns include multiple columns, which are arranged at the same height and spaced apart.

6. A Ring tray fixture according to claim 1, characterized in that: The guide assembly includes a linear bearing fixedly mounted on the support plate and a top plate linear shaft disposed in the linear bearing, the top of which is fixedly connected to the mounting plate.

7. A Ring tray fixture according to claim 1, characterized in that: The lifting drive component includes a motor, a transmission mechanism, and a screw lifting mechanism. The screw lifting mechanism includes a lifting nut and a screw threadedly connected to the lifting nut. The top of the screw is fixedly connected to the mounting plate. The motor drives the lifting nut to rotate through the transmission mechanism.

8. A Ring tray fixture according to claim 7, characterized in that: The support plate is provided with a nut fixing seat, and the lifting nut is rotatably connected to the nut fixing seat through a bearing.

9. A Ring tray fixture according to claim 8, characterized in that: The transmission mechanism includes a driving pulley mounted on the motor spindle, a driven pulley mounted on the lifting nut, and a belt connecting the driving pulley and the driven pulley.

10. A Ring tray fixture according to claim 1, characterized in that: The support plate is provided with a support plate, the support plate is provided with a slotted photoelectric sensor, and the bottom of the mounting plate is provided with a sensing sheet that works in conjunction with the slotted photoelectric sensor.

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