Cleaning device for auxiliary chamber of single crystal furnace

Abstract

The utility model discloses a cleaning device for an auxiliary chamber of a single crystal furnace, which comprises a base provided with universal wheels and a handrail, the surface of the base is provided with an automatic telescopic rod, the telescopic end of the automatic telescopic rod is sequentially provided with a placing box, a motor and a rotating disc, the motor is positioned in the placing box, and the rotating disc is positioned in the placing box. The output end of the motor penetrates through the center of the rotating disc, and a plurality of cleaning assemblies making contact with the inner wall of the auxiliary chamber are evenly arranged on the periphery of the rotating disc. The auxiliary cleaning chamber is high in automation level, and the cleaning efficiency is greatly improved. The cleaning assembly is suitable for various auxiliary chamber inner diameters of different specifications, and the utilization rate of the cleaning device is increased.

Description

TECHNICAL FIELD

[0001] The utility model relates to single crystal furnace cleaning technical field, concretely relates to a kind of cleaning device for single crystal furnace auxiliary chamber. BACKGROUND

[0002] Single crystal furnace is a kind of in inert gas (nitrogen, helium is mainly) environment, with graphite heater to melt polycrystalline silicon etc. Polycrystalline material, using the straight drawing method to grow the equipment of dislocation-free single crystal;Single crystal furnace auxiliary chamber is the equipment for extracting single crystal silicon.In the production of single crystal silicon by straight drawing method, when single crystal is drawn, it needs to be cleaned after being completed again.

[0003] The conventional cleaning operation is: manually wrap dust fiber paper on the head of long stick, and soak the dust-free fiber paper with anhydrous alcohol, and then immerse the end of the dust-free fiber paper wrapped with dust-free fiber paper into the auxiliary furnace chamber, and wipe it slowly along the wall of the auxiliary chamber from top to bottom. The labor intensity of personnel is large, which causes great waste of labor cost, and the automation level of cleaning auxiliary chamber is low, which reduces the cleaning efficiency.

[0004] Therefore, the present application provides a cleaning device for single crystal furnace auxiliary chamber to solve the above technical problems. UTILITY MODEL CONTENT

[0005] The utility model aims at providing a kind of cleaning device for single crystal furnace auxiliary chamber, cleaning brush is always contacted with the inner wall of different specifications auxiliary chamber, set up automatic telescopic rod and motor to make cleaning brush rotate and clean auxiliary chamber from top to bottom, solve the problems existing in prior art.

[0006] To solve the above technical problems, the utility model adopts the following scheme:

[0007] A kind of cleaning device for single crystal furnace auxiliary chamber, including the base with universal wheel and handrail, the surface of the base is equipped with automatic telescopic rod, the telescopic end of the automatic telescopic rod is equipped with placing box, motor and rotating disc in sequence, the motor is located in the inside of placing box, the output end of the motor is through the center of rotating disc, the outer periphery of the rotating disc is uniformly equipped with multiple cleaning components contacted with auxiliary chamber inner wall.

[0008] Further preferably, the cleaning component includes a sleeve rod, the end of the sleeve rod is horizontally embedded in the side of the rotating disc, the end of the sleeve rod away from the rotating disc is provided with an assembly groove, the assembly groove is provided with a connecting rod, the end of the connecting rod away from the sleeve rod is provided with an arc plate and a cleaning brush in sequence.

[0009] Further preferably, the connecting rod is provided with a limiting block in the inside of the assembly groove, and the limiting block is connected with the assembly groove through a spring.

[0010] Further preferably, the assembly groove is stepped.

[0011] More preferably, movable rods are movably connected to both sides of the sleeve rod, and the ends of the movable rods away from the sleeve rod are connected to the arc-shaped plate.

[0012] More preferably, the sleeve rod has movable grooves on both sides, and a fixed rod for assembling a slider is provided in the movable groove. The slider is located on the outer circumferential surface of the fixed rod, and the slider is connected to the end of the moving rod away from the arc plate.

[0013] More preferably, the slider and the arc plate are provided with a fixed half ring, and the two ends of the moving rod are respectively provided with mounting rings, and the mounting rings are connected to the fixed half ring.

[0014] More preferably, the bottom of the automatic telescopic rod is provided with multiple support rods.

[0015] More preferably, it also includes a controller located above the base, the controller being electrically connected to both the automatic telescopic rod and the motor.

[0016] The beneficial effects of this utility model are:

[0017] This invention features an automatic telescopic rod, a motor, and a cleaning assembly. The telescopic rod drives the motor and cleaning assembly to rise and fall, cleaning oxides during the process. Simultaneously, the motor's output drives a rotating disk, which in turn rotates the arc-shaped plate, allowing the cleaning brush to perform its cleaning function. The cleaning chamber boasts a high level of automation, significantly improving cleaning efficiency. In the cleaning assembly, the connecting rod, fixed to the arc-shaped plate, compresses a spring within the mounting groove of the sleeve rod, ensuring that the arc-shaped plate and cleaning brush remain in constant contact with the inner wall of the secondary chamber. This allows the cleaning assembly to accommodate various secondary chamber diameters, increasing the utilization rate of the cleaning device. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of this utility model;

[0019] Figure 2 This is a partially enlarged structural diagram of the cleaning component of this utility model;

[0020] Figure 3 This is a top view of the cleaning component of this utility model;

[0021] Figure 4 This utility model Figure 3 A magnified view of the structure within circle A;

[0022] Figure 5 This is a schematic diagram of the assembly structure of the mounting ring and the fixing half-ring of this utility model.

[0023] Reference: 1 - base, 10 - universal wheel, 11 - handrail, 12 - support rod, 13 - controller, 2 - automatic telescopic rod, 20 - telescopic end, 3 - placing box, 30 - motor, 300 - output end, 4 - rotating disc, 5 - sleeve rod, 50 - assembly groove, 51 - movable groove, 510 - fixed rod, 512 - sliding block, 6 - connecting rod, 60 - limiting block, 61 - spring, 7 - arc plate, 70 - cleaning brush, 71 - fixed half ring, 72 - mounting ring, 8 - moving rod. DETAILED DESCRIPTION

[0024] The utility model will be described in further detail below in combination with the embodiments and drawings, but the implementation of the utility model is not limited to this.

[0025] In the description of the utility model, it needs to be explained that the orientation or position relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inner", "outer", "front", "rear", "top", "bottom" and the like is based on the orientation or position relationship shown in the drawings, or the orientation or position relationship that the utility model product is usually placed in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, a particular orientation and operation, therefore, it cannot be understood as a limitation on the utility model.

[0026] In the description of the utility model, it also needs to be explained that, unless otherwise explicitly specified and limited, the terms "set", "open", "install", "connect", "connect" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or indirectly connected through an intermediate medium, it can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0027] Example 1

[0028] The embodiment 1 of the utility model is a kind of cleaning device for single crystal furnace auxiliary chamber, including the base 1 with universal wheel 10 and handrail 11, the surface of the base 1 is equipped with automatic telescopic rod 2, the telescopic end 20 of the automatic telescopic rod 2 is sequentially equipped with placing box 3, motor 30 and rotating disc 4, the motor 30 is located inside placing box 3, the output end 300 of the motor 30 penetrates the center of rotating disc 4, the outer periphery of the rotating disc 4 is uniformly equipped with multiple cleaning assemblies that contact with the inner wall of auxiliary chamber.

[0029] Reference Figures 1 to 4The application mainly drives the rotating disc 4 to rotate by connecting the motor 30 at the top of the telescopic end 20 of the automatic telescopic rod 2, so that the cleaning assembly connected with the outer periphery of the rotating disc 4 rotates to clean the inner wall of the sub-chamber. During the rotating and cleaning process of the cleaning assembly, the automatic telescopic rod 2 automatically moves up or down to scrape the inner wall of the sub-chamber, so that the cleaning height of the cleaning assembly changes, and the oxide on the inner wall of the entire sub-chamber is easily and quickly cleaned, and the oxide adhered to the inner wall of the sub-chamber is completely cleaned.

[0030] Before cleaning, the dust-free fiber paper with anhydrous alcohol can be wound in the cleaning assembly for subsequent cleaning, so as to enhance the effect of adsorbing the oxide on the inner wall of the sub-chamber, and after the alcohol volatilizes, there is no residue and no pollution to the sub-chamber.

[0031] A plurality of universal wheels 10 are arranged at the bottom of the base 1, so that the entire cleaning device can be conveniently transferred to the position of the sub-chamber to be cleaned, and the universal wheels 10 can be used to lock the position after the position is determined; the handrails 11 are arranged at the side ends of the base 1 to provide conditions for the transfer of the cleaning device, so that the cleaning device can be transferred to the lower side of the sub-chamber to be cleaned.

[0032] In some preferred embodiments, the cleaning assembly comprises a sleeve rod 5, the end of the sleeve rod 5 is horizontally embedded in the side of the rotating disc 4, the end of the sleeve rod 5 away from the rotating disc 4 is provided with an assembly groove 50, the assembly groove 50 is provided with a connecting rod 6, and the end of the connecting rod 6 away from the sleeve rod 5 is sequentially provided with an arc-shaped plate 7 and a cleaning brush 70.

[0033] Specifically, referring to Figure 2 and Figure 3 , the cleaning assembly mainly comprises the sleeve rod 5, the connecting rod 6, the arc-shaped plate 7 and the cleaning brush 70, the sleeve rod 5 is mainly arranged in the inside of the rotating disc 4 in a fixed manner, so as to improve the stability of the sleeve rod 5 during rotation, and reduce the area of the rotating disc 4, the position relationship between the arc-shaped plate 7 and the center of the rotating disc 4 is changed by the movement of the connecting rod 6 in the sleeve, so that the cleaning assembly is suitable for different specifications of the inner diameter of the sub-chamber, and the use rate of the cleaning device is improved.

[0034] Meanwhile, the arc-shaped outer convex surface of the arc-shaped plate 7 is in contact with the wall of the sub-chamber through the cleaning brush 70, so as to expand the cleaning range each time and improve the cleaning efficiency of the oxide. The number of the cleaning assembly is arranged according to the actual situation, which is not described here.

[0035] In some preferred embodiments, the connecting rod 6 is provided with a limiting block 60 in the inside of the assembly groove 50, and the limiting block 60 is provided with a spring 61 connected with the assembly groove 50. The assembly groove 50 is in a stepped shape.

[0036] Specifically, the connecting rod 6 is connected in the assembly groove 50 by the spring 61, and the spring 61 is in an extended state before entering the sub-chamber, so that the arc-shaped plate 7 is in contact with the inner wall of the sub-chamber through the cleaning brush 70, the connecting rod 6 moves to the center of the rotating disc 4 in the assembly groove 50, so as to compress the spring 61, and at the same time, under the condition that the arc-shaped plate 7 is in contact with the inner wall of the sub-chamber, the spring 61 generates a counteracting elastic force, so that the arc-shaped plate 7 is in close contact with the inner wall of the sub-chamber, and the cleaning brush 70 improves the cleaning efficiency of oxides in the rotating process.

[0037] The step-shaped structure is mainly used for limiting the installation of the connecting rod 6 in the assembly groove 50, so as to prevent disconnection in the cleaning process; at the same time, the size of the slot hole of the assembly groove 50 adjacent to the arc-shaped plate 7 is smaller than that of the limiting block 60, so as to limit.

[0038] In some preferred embodiments, the two sides of the sleeve rod 5 are movably connected with the moving rod 8, and the end of the moving rod 8 away from the sleeve rod 5 is connected with the arc-shaped plate 7. The two sides of the sleeve rod 5 are provided with movable grooves 51, the movable grooves 51 are provided with fixed rods 510 with assembly sliding blocks 512, the sliding blocks 512 are located on the outer circumferential surface of the fixed rods 510, and the sliding blocks 512 are connected with the end of the moving rod 8 away from the arc-shaped plate 7.

[0039] Specifically, the arc-shaped plate 7 is connected with the sleeve rod 5 through the moving rod 8 provided on both sides of the center of the inner arc surface of the arc-shaped plate 7, when the arc-shaped plate 7 is connected with the sleeve rod 5 through the arc-shaped connecting rod 6, the moving rod 8 moves in the fixed rod 510 in the movable groove 51, so that the distance between the moving rod 8 and the sleeve rod 5 changes with the distance between the arc-shaped plate 7 and the sleeve rod 5, the moving rod 8 provides auxiliary support for the arc-shaped plate 7, further ensures that the arc-shaped plate 7 does not deviate in the rotating process, and increases the connection stability between the arc-shaped plate 7 and the sleeve rod 5.

[0040] The movement of the moving rod 8 is mainly realized through the sliding of the sliding block 512 on the fixed plate.

[0041] In some preferred embodiments, the sliding block 512 and the arc-shaped plate 7 are provided with a fixed half ring 71, and the two ends of the moving rod 8 are respectively provided with mounting rings 72, and the mounting rings 72 are connected with the fixed half ring 71.

[0042] Specifically, referring to Figure 5 , the mounting rings 72 provided at the two ends of the moving rod 8 are respectively connected with the fixed half rings 71 provided in the sliding blocks 512 and the arc-shaped plate 7, mainly by penetrating the mounting ring 72 with the fixed half ring 71 and then fixing the fixed half ring 71 with the sleeve rod 5 or the arc-shaped plate 7, and adopting this connection mode is conducive to adjusting the connection angle of the two ends of the moving rod 8 with the extension and contraction of the connecting rod 6 in the moving process, so that the moving rod 8 plays a better auxiliary supporting role.

[0043] Embodiment 2

[0044] The embodiment 2 is implemented on the basis of the embodiment 1, and the bottom of the automatic telescopic rod 2 is provided with a plurality of supporting rods 12. The supporting rods 12 are mainly arranged for stabilizing the automatic telescopic rod 2 during the cleaning work, and the automatic telescopic rod 2 is stably supported above the base 1, so that the phenomenon of falling is prevented.

[0045] Embodiment 3

[0046] The embodiment 3 is implemented on the basis of the embodiment 1, and further comprises a controller 13 located above the base 1, and the controller 13 is electrically connected with the automatic telescopic rod 2 and the motor 30 respectively. The controller 13 is arranged to be connected with an external power supply, so that the automatic telescopic rod 2 or the motor 30 is controlled to be turned on or turned off according to the actual cleaning work, and the two are matched to clean the sub-chamber of the single crystal furnace, without manually holding the long rod to clean up and down, and the automatic cleaning of the oxide is adopted, so that the automatic cleaning level of the sub-chamber is high, and the cleaning efficiency is greatly improved.

[0047] The working principle of the utility model is as follows: when in use, the worker holds the handrail 11, pushes the cleaning assembly, and moves the cleaning assembly to below the bottom end of the sub-chamber through the universal wheel 10 below the base 1, connects the controller 13 with the external power supply, starts the automatic telescopic rod 2, makes the arc-shaped plate 7 contact with the inner wall at the port of the sub-chamber, at this time, the connecting rod 6 moves to the center of the rotating disc 4 in the assembly groove 50, so as to compress the spring 61, and the arc-shaped plate 7 always contacts with the inner wall of the sub-chamber with the cleaning brush 70 or the dust-free fiber paper of anhydrous alcohol attached, the automatic telescopic rod 2 and the motor 30 are started, the motor 30 drives the arc-shaped plate connected with the sleeve rod 5 through the outer periphery of the rotating disc 4 to rotate during the upward movement of the automatic telescopic rod 2, and the oxide on the inner wall of the sub-chamber is cleaned while rotating; when moving to the top of the sub-chamber, the automatic telescopic rod 2 is controlled to move downward, and the motor 30 still keeps the rotating disc 4 rotating to clean the oxide. The utility model is provided with the automatic telescopic rod 2, the motor 30 and the cleaning assembly, the automatic telescopic rod 2 drives the motor 30 and the cleaning assembly to ascend and descend, and the oxide is cleaned during the ascending and descending; at the same time, the output end 300 of the motor 30 drives the rotating disc 4 to rotate, so that the arc-shaped plate 7 rotates and the cleaning brush 70 plays a cleaning role, the automatic cleaning level of the sub-chamber is high, and the cleaning efficiency is greatly improved. The connecting rod 6 fixedly connected with the arc-shaped plate 7 in the cleaning assembly is compressed in the assembly groove 50 of the sleeve rod 5, so that the arc-shaped plate 7 always contacts with the inner wall of the sub-chamber with the cleaning brush 70, the cleaning assembly is suitable for the inner diameters of various different specifications of sub-chambers, and the use rate of the cleaning device is improved.

[0048] The above merely describes preferred embodiments of the present application, and is not intended to limit the present application in any form. Any simple modification, equivalent replacement, improvement, etc. made to the above embodiments, in accordance with the technical essence of the present application, and within the spirit and principles of the present application, shall still fall within the protection scope of the technical scheme of the present application.

Claims

1. A cleaning device for a single crystal furnace auxiliary chamber, characterized in that, The base (1) includes casters (10) and handrails (11). The surface of the base (1) is provided with an automatic telescopic rod (2). The telescopic end (20) of the automatic telescopic rod (2) is provided with a placement box (3), a motor (30) and a rotating disk (4) in sequence. The motor (30) is located inside the placement box (3). The output end (300) of the motor (30) passes through the center of the rotating disk (4). The outer periphery of the rotating disk (4) is provided with a plurality of cleaning components that contact the inner wall of the secondary chamber. The cleaning assembly includes a sleeve (5), the end of which is horizontally embedded in the side of the rotating disk (4). The end of the sleeve (5) away from the rotating disk (4) is provided with an assembly groove (50). A connecting rod (6) is provided in the assembly groove (50). An arc plate (7) and a cleaning brush (70) are provided in sequence at the end of the connecting rod (6) away from the sleeve (5). The connecting rod (6) is provided with a limiting block (60) inside the assembly groove (50), and the limiting block (60) is provided with a spring (61) and connected to the assembly groove (50).

2. The cleaning device for the auxiliary chamber of a single crystal furnace according to claim 1, characterized in that, The assembly groove (50) is stepped.

3. The cleaning device for the auxiliary chamber of a single crystal furnace according to claim 1, characterized in that, The two sides of the sleeve (5) are movably connected to the movable rod (8), and the end of the movable rod (8) away from the sleeve (5) is connected to the arc plate (7).

4. A cleaning device for a single crystal furnace auxiliary chamber according to claim 3, characterized in that, The sleeve rod (5) has movable grooves (51) on both sides. The movable grooves (51) are equipped with fixed rods (510) for mounting sliders (512). The sliders (512) are located on the outer circumferential surface of the fixed rods (510). The sliders (512) are connected to the end of the moving rod (8) away from the arc plate (7).

5. A cleaning device for a single crystal furnace auxiliary chamber according to claim 4, characterized in that, The slider (512) and the arc plate (7) are provided with a fixed half ring (71), and the two ends of the moving rod (8) are respectively provided with mounting rings (72), and the mounting rings (72) are connected to the fixed half rings (71).

6. A cleaning device for a single crystal furnace auxiliary chamber according to claim 4, characterized in that, The bottom of the automatic telescopic pole (2) is provided with multiple support poles (12).

7. A cleaning device for a single crystal furnace auxiliary chamber according to claim 4, characterized in that, It also includes a controller (13) located above the base (1), which is electrically connected to the automatic telescopic rod (2) and the motor (30).

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