Low-damage magnetron sputtering transmission device

Abstract

The utility model discloses a low-damage magnetron sputtering transmission device, which relates to the technical field of transmission devices and comprises a bottom cavity seat, a first motor is fixedly mounted at the top of the bottom cavity seat, a driving roller is arranged on one side of the first motor and connected with the output end of the first motor, and an adjusting component is arranged on one side of the bottom cavity seat and connected with the output end of the first motor. A plurality of limiting assemblies are arranged on the top face of the bottom cavity base. The adjusting assembly comprises two limiting blocks slidably connected to an inner cavity of the limiting groove, movable supporting blocks are arranged at the tops of the two limiting blocks, and the transmission roller is rotationally connected between the two movable supporting blocks. Each limiting assembly comprises a supporting block fixedly connected to the top of the bottom cavity base, the top of each supporting block is fixedly connected with a connecting block, and an empty groove is formed in one side of each connecting block, so that the limiting effect on transmission workpieces is achieved through the multiple limiting assemblies, deviation of objects during transportation can be avoided, product damage can be reduced, and the working efficiency of the transmission device is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to transmission device technical field, concretely is a kind of low damage magnetron sputtering transmission device. BACKGROUND

[0002] Magnetron sputtering is introduced by introducing magnetic field on the target cathode surface, utilizes the constraint of charged particles by magnetic field to improve plasma density, to increase sputtering rate, magnetron sputtering technology is widely used in the surface treatment of various materials, including transparent conductive glass, curved glass etc., conveying belt is used in magnetron sputtering production line.In magnetron sputtering production line, conveying belt is mainly used to convey the workpiece to be processed from one work station to another work station, to ensure that workpiece can continuously and stably move in production process.

[0003] Through the retrieval, patent announcement No.CN204111858U discloses a kind of magnetron sputtering equipment conveying system, it includes transmission shaft, transmission shaft is equipped with chain type conveying belt, with the transmission tray of slot, and by the first buckle of transmission tray side wall is fixed on chain type conveying belt, sample tray is arranged in transmission tray, the utility model structure is simple, stable in operation, and operability is strong;

[0004] It is known that the above-mentioned patent has the following deficiencies: in the use process of the above-mentioned magnetron sputtering conveying system, the conveying device in the system, i.e., the conveying belt, is one of the important components, in the working process of the magnetron sputtering system, the sample is placed in the sample tray, and then the tray is placed on the conveying belt, and the conveying belt is used to convey the workpiece to the working area of the magnetron sputtering equipment, and the workpiece completes the plating at this point, and then the conveying belt is used to send out the processed sample; however, due to the simple structure and function of the conveying belt, it lacks a limiting mechanism for conveying articles, which can easily cause the articles to deviate and affect the conveying efficiency of the articles, thereby reducing the practicability of the conveying device.

[0005] In view of the above problems, a low-damage magnetron sputtering transmission device is proposed. UTILITY MODEL CONTENTS

[0006] The utility model aims at providing a kind of low damage magnetron sputtering transmission device, work is carried out using the device, to solve the problem of the practicability of the conveying device in the magnetron sputtering transmission system in the background art, the conveying belt structure is simple, it lacks a limiting mechanism for conveying articles, which can easily cause the articles to deviate and affect the conveying efficiency of the articles.

[0007] In order to achieve the above object, the utility model provides the following technical scheme: A low damage magnetic control sputtering transmission device, including bottom cavity seat, first motor is fixedly installed at the top of bottom cavity seat, and the side of first motor is provided with driving roller, and the output end of first motor is connected with driving roller, the side of bottom cavity seat is provided with adjusting assembly, the top surface of bottom cavity seat is provided with limit component, and limit component is provided with multiple sets, the top surface of bottom cavity seat is provided with limit groove, and the limit groove is provided with two groups, the top of two groups of limit block is provided with mobile support block, and the transmission roller is rotatably connected between two groups of mobile support block, the inside of bottom cavity seat is fixedly connected with fixed block, and the side of fixed block is fixedly connected with second motor, the top of support block is fixedly connected with connecting block, the side of connecting block is provided with empty slot, and the inside of empty slot is fixedly installed with hydraulic cylinder.

[0008] Preferably, the adjusting assembly further comprises a long rod fixedly connected to the side of the fixed block, and the long rod is provided with two groups, and the two groups of limit blocks are respectively slidably connected to the outer periphery of the two groups of long rods.

[0009] Preferably, a long plate is fixedly connected between the two groups of limit blocks, the long plate is slidably connected to the inside of the bottom cavity seat, a first lead screw is rotatably connected to the inside of the bottom cavity seat, and a limit rod is fixedly connected to the inside of the bottom cavity seat.

[0010] Preferably, the first lead screw is connected to the output end of the second motor, the long plate is threadedly connected between the first lead screw, and the long plate is slidably connected to the outer periphery of the limit rod.

[0011] Preferably, the limit component further comprises a sliding connection plate slidably connected to the side of the empty slot, and the sliding connection plate is connected to the output end of the hydraulic cylinder.

[0012] Preferably, a rubber plate is provided on the side of the sliding connection plate, and the rubber plate is provided on the upper end of the transmission belt.

[0013] Preferably, a spring telescopic rod is provided between the rubber plate and the connecting block, and the spring telescopic rod is provided with multiple groups.

[0014] Compared with the prior art, the utility model has the beneficial effects as follows:

[0015] 1、The low-damage magnetron sputtering transmission device provided by the application, when conveying the workpiece to be plated, the transmission belt is used for conveying, in order to prevent the workpiece from deviating during transportation, the user can first adjust the distance between the two groups of rubber plates arranged on opposite sides according to the size of the conveyed workpiece, and simultaneously start the multiple hydraulic cylinders, which are in elongation or contraction movement, so that the sliding connecting plates and the rubber plates are driven to perform elongation or contraction movement, thereby reducing or increasing the distance between the two groups of rubber plates on opposite sides, and the operator can adjust the distance between the two groups of rubber plates on opposite sides to be slightly larger than the width of the transported workpiece, so that the rubber plates block the two sides of the conveyed workpiece, preventing the workpiece from falling out of the transmission belt and protecting the transported workpiece, and during the movement and adjustment of the rubber plates, the multiple spring telescopic rods move in extension and contraction with the extension and contraction of the rubber plates, which is beneficial to improving the stability of the movement of the rubber plates and prolonging the service life of the rubber plates, and the user can place the workpiece on the top surface of the transmission belt, and then starts the first motor in working mode, so that the first motor drives the driving roller to rotate, the transmission belt is driven between the driving roller and the transmission roller, and the workpiece is conveyed, the multiple limiting assemblies limit the transmission of the workpiece, prevent the workpiece from deviating during transportation, reduce product damage, and improve the working efficiency of the transmission device.

[0016] 2、After long-term use, the tension of the transmission belt is reduced, the transmission belt is loose or deviated, and the use effect is affected, the operator can adjust the tightness of the transmission belt later, the second motor is started at this time, the first screw rod is driven by the second motor to rotate in the forward direction or the reverse direction, the first screw rod drives the long plate to move horizontally left or right along the first screw rod, and then the two groups of limiting blocks move horizontally along the two groups of long rods, and then the two groups of moving support blocks drive the transmission roller to move horizontally left or right above the bottom cavity seat, so that the distance between the driving roller and the transmission roller is adjusted, thereby assisting the adjustment of the tightness of the transmission belt on the device, making the transmission belt applicable to more situations and meeting the needs of more customers, the tightness of the belt is improved, the function of adjusting the tension of the transmission belt when the transmission belt is loose is realized, and the use effect of the transmission device is improved. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is a whole structure schematic view of the utility model;

[0018] Figure 2 It is a bottom cavity seat, limiting assembly and adjusting assembly structure view of the utility model;

[0019] Figure 3 This is a structural diagram of the driving component in the adjustment assembly of this utility model;

[0020] Figure 4 This is a structural diagram of the limiting component of this utility model;

[0021] Figure 5 This is a structural diagram of the limit drive component of this utility model.

[0022] In the diagram: 1. Bottom cavity seat; 11. Limiting groove; 12. Transmission conveyor belt; 13. Drive roller; 14. First motor; 2. Limiting assembly; 21. Support block; 22. Connecting block; 23. Rubber plate; 24. Spring telescopic rod; 25. Hydraulic cylinder; 26. Sliding connecting plate; 27. Empty groove; 3. Adjusting assembly; 31. Transmission roller; 32. Moving support block; 33. Limiting block; 331. Long plate; 34. Fixed block; 36. Long rod; 37. Second motor; 38. First lead screw; 39. Limiting rod. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] To further understand the content of this utility model, a detailed description of this utility model will be provided in conjunction with the accompanying drawings.

[0025] Combination Figures 1-5 A low-damage magnetron sputtering transmission device includes a base 1, a first motor 14 fixedly mounted on the top of the base 1, a drive roller 13 disposed on one side of the first motor 14 and connected to the output end of the first motor 14, an adjustment component 3 disposed on one side of the base 1, a limit component 2 disposed on the top surface of the base 1, and multiple sets of limit components 2 are disposed; a limit groove 11 disposed on the top surface of the base 1, and two sets of limit grooves 11 are disposed; a transmission roller 31 is disposed above the base 1, and a transmission conveyor belt 12 is sleeved between the transmission roller 31 and the drive roller 13; adjustment Component 3 includes a limiting block 33 that is slidably connected to the inner cavity of the limiting groove 11. There are two sets of limiting blocks 33. The top of the two sets of limiting blocks 33 is provided with a movable support block 32. The transmission roller 31 is rotatably connected between the two sets of movable support blocks 32. A fixing block 34 is fixedly connected inside the bottom cavity seat 1, and a second motor 37 is fixedly connected to one side of the fixing block 34. The limiting component 2 includes a support block 21 fixedly connected to the top of the bottom cavity seat 1. A connecting block 22 is fixedly connected to the top of the support block 21. A slot 27 is provided on one side of the connecting block 22, and a hydraulic cylinder 25 is fixedly installed inside the slot 27.

[0026] The present invention will be further described below with reference to the embodiments.

[0027] Example 1:

[0028] Combination Figure 1 and Figures 4-5 The limiting component 2 also includes a sliding connecting plate 26 that is slidably connected to one side of the empty groove 27, and the sliding connecting plate 26 is connected to the output end of the hydraulic cylinder 25. A rubber plate 23 is provided on one side of the sliding connecting plate 26. The rubber plate 23 is located on the upper end of the transmission conveyor belt 12. A spring telescopic rod 24 is provided between the rubber plate 23 and the connecting block 22, and multiple sets of spring telescopic rods 24 are provided.

[0029] Example 2:

[0030] Combination Figures 1-3 The adjustment component 3 also includes a long rod 36 fixedly connected to one side of the fixed block 34, and the long rod 36 is provided in two sets. The two sets of limiting blocks 33 are slidably connected to the outer periphery of the two sets of long rods 36 respectively. A long plate 331 is fixedly connected between the two sets of limiting blocks 33. The long plate 331 is slidably connected to the inside of the bottom cavity seat 1. A first lead screw 38 is rotatably connected to the inner cavity of the bottom cavity seat 1. A limiting rod 39 is fixedly connected inside the bottom cavity seat 1. The first lead screw 38 is connected to the output end of the second motor 37. The long plate 331 and the first lead screw 38 are connected by a thread. The long plate 331 is slidably connected to the outer periphery of the limiting rod 39.

[0031] In summary, the low-damage magnetron sputtering transmission device proposed in this application is an important component of the magnetron sputtering system. During operation, the workpiece is placed on the conveyor belt and transported to the working area of ​​the magnetron sputtering equipment, where it undergoes coating. To prevent workpiece displacement during transport, the user can adjust the spacing between the two sets of rubber plates 23 on opposite sides based on the workpiece size. Simultaneously, the operator activates multiple hydraulic cylinders 25, which extend or retract, driving the sliding connecting plate 26 and the rubber plates 23 to extend or retract, thereby increasing or decreasing the spacing between the two sets of rubber plates 23. The operator can then adjust the spacing between the two sets of rubber plates 23. Slightly larger than the width of the transported workpiece, this operation allows the rubber plate 23 to block the sides of the transported workpiece, preventing it from slipping off the transmission conveyor belt 12 and protecting the transported item. During the adjustment of the rubber plate 23, multiple sets of spring telescopic rods 24 will extend and retract with the extension and retraction of the rubber plate 23, which helps to improve the stability of the movement of the rubber plate 23 and extend its service life. Subsequently, the user can place the workpiece on the top surface of the transmission conveyor belt 12 and turn on the working mode of the first motor 14. The first motor 14 drives the active roller 13 to rotate. Since the transmission roller 31 is rotatably connected between the two sets of moving support blocks 32, the transmission conveyor belt 12 will transmit between the active roller 13 and the transmission roller 31, thereby conveying the workpiece. This setting achieves the limiting effect of the transmission workpiece through multiple sets of limiting components 2, which can prevent the object from deviating during transportation, reduce product damage, and improve the working efficiency of the transmission device.

[0032] After prolonged use, the conveyor belt tension may decrease, leading to loosening or misalignment, affecting performance. Operators can adjust the tension of the transmission conveyor belt 12 later. At this time, the second motor 37 is activated, driving the first lead screw 38 to rotate forward or in the opposite direction. The first lead screw 38 drives the long plate 331 to move horizontally left or right along the lead screw 38. This causes the two sets of limit blocks 33 to move horizontally along the two sets of long rods 36, and consequently, the two sets of moving support blocks 32 drive the transmission roller 31 in the bottom cavity. The upper part of the seat 1 can move horizontally to the left or right, thereby adjusting the distance between the drive roller 13 and the transmission roller 31. This helps to adjust the tension of the transmission conveyor belt 12 on the device, making the transmission conveyor belt 12 suitable for more situations and meeting the needs of more customers. This setting allows users to easily adjust the tension of the transmission conveyor belt 12 through the adjustment component 3, improving the belt tension and enabling tension adjustment when the transmission conveyor belt 12 becomes loose, thus improving the performance of the transmission device.

[0033] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0034] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A low-damage magnetron sputtering transmission device, comprising a base (1), wherein a first motor (14) is fixedly mounted on the top of the base (1), and a drive roller (13) is provided on one side of the first motor (14), and the drive roller (13) is connected to the output end of the first motor (14), characterized in that: An adjustment assembly (3) is provided on one side of the bottom cavity seat (1). A limit assembly (2) is provided on the top surface of the bottom cavity seat (1), and multiple sets of the limit assembly (2) are provided. A limit groove (11) is provided on the top surface of the bottom cavity seat (1), and two sets of the limit groove (11) are provided. A transmission roller (31) is provided above the bottom cavity seat (1), and a transmission conveyor belt (12) is sleeved between the transmission roller (31) and the drive roller (13). The adjustment assembly (3) includes a limit block (33) slidably connected to the inner cavity of the limit groove (11), and two sets of the limit block (33) are provided. The limiting block (33) is provided with a movable support block (32) on its top. The transmission roller (31) is rotatably connected between the two sets of movable support blocks (32). The bottom cavity seat (1) is fixedly connected with a fixing block (34), and a second motor (37) is fixedly connected to one side of the fixing block (34). The limiting component (2) includes a support block (21) fixedly connected to the top of the bottom cavity seat (1), and a connecting block (22) is fixedly connected to the top of the support block (21). A slot (27) is provided on one side of the connecting block (22), and a hydraulic cylinder (25) is fixedly installed inside the slot (27).

2. The low-damage magnetron sputtering transmission device according to claim 1, characterized in that: The adjustment component (3) further includes a long rod (36) fixedly connected to one side of the fixed block (34), and the long rod (36) is provided with two sets, and the two sets of limiting blocks (33) are respectively slidably connected to the outer periphery of the two sets of long rods (36).

3. The low-damage magnetron sputtering transmission device according to claim 2, characterized in that: A long plate (331) is fixedly connected between the two sets of limiting blocks (33). The long plate (331) is slidably connected to the inside of the bottom cavity seat (1). A first lead screw (38) is rotatably connected to the inside of the bottom cavity seat (1). A limiting rod (39) is fixedly connected inside the bottom cavity seat (1).

4. The low-damage magnetron sputtering transmission device according to claim 3, characterized in that: The first lead screw (38) is connected to the output end of the second motor (37), the long plate (331) is threadedly connected to the first lead screw (38), and the long plate (331) is slidably connected to the outer periphery of the limiting rod (39).

5. The low-damage magnetron sputtering transmission device according to claim 4, characterized in that: The limiting component (2) further includes a sliding connecting plate (26) slidably connected to one side of the empty slot (27), and the sliding connecting plate (26) is connected to the output end of the hydraulic cylinder (25).

6. The low-damage magnetron sputtering transmission device according to claim 5, characterized in that: A rubber plate (23) is provided on one side of the sliding connecting plate (26), and the rubber plate (23) is located on the upper end of the transmission conveyor belt (12).

7. The low-damage magnetron sputtering transmission device according to claim 6, characterized in that: A spring telescopic rod (24) is provided between the rubber plate (23) and the connecting block (22), and multiple sets of the spring telescopic rod (24) are provided.

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