Solar silicon wafer vacuum coating carrier plate

Abstract

The utility model discloses a solar silicon wafer vacuum coating support plate, which relates to the technical field of solar silicon wafer coating processing and comprises a support plate body. The cavities are integrally formed in the surface of the carrier plate body, the cavities are communicated with the upper end and the lower end of the carrier plate body, the multiple cavities are evenly distributed in the surface of the carrier plate body in a matrix arrangement mode, a movable groove is formed in the surface of the carrier plate body, and the movable groove is located at one end of the inner cavity; the mounting plates are in clamping connection with the rotating rods through the connecting seats, so that the rotating rods can be driven to rotate by rotating the driving plates, the mounting plates are lifted up from the interiors of the cavities, solar silicon wafers can be conveniently taken out from the interiors of the mounting plates, the rotating rods can lift up a row of mounting plates in the transverse direction at a time, and the mounting plates are convenient to take out. Therefore, efficiency is improved, and taking is convenient.

Description

TECHNICAL FIELD

[0001] The utility model relates to solar energy silicon wafer coating processing technical field, concretely to a kind of solar energy silicon wafer vacuum coating carrier plate. BACKGROUND

[0002] Solar energy silicon wafer vacuum coating carrier plate is a key component in solar cell production equipment, mainly used to carry silicon wafer in vacuum coating process, to ensure that silicon wafer can stably and uniformly receive coating material in coating process, so as to improve the photoelectric conversion efficiency and performance of solar cell, in vacuum coating process, solar energy silicon wafer vacuum coating carrier plate is placed in the chamber of vacuum coating equipment, silicon wafer is placed in the positioning groove or silicon wafer placing groove of carrier plate, then coating material is deposited on the surface of silicon wafer by heating, evaporation, sputtering and other physical or chemical methods. After coating is completed, the carrier plate is taken out, and the silicon wafer is taken down for subsequent processing.

[0003] Since solar energy silicon wafer is usually clamped in the positioning groove on the surface of the carrier plate, the silicon wafer is usually tightly fitted inside the positioning groove, when it is necessary to take the silicon wafer, the silicon wafer needs to be pried out from the positioning groove with fingers, since the carrier plate usually carries multiple silicon wafers, the action of buckling the silicon wafer needs to be repeated constantly, which easily leads to finger abrasion and reduces efficiency; therefore, the present application provides a solar energy silicon wafer vacuum coating carrier plate to solve the problems raised in the above background. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a kind of solar energy silicon wafer vacuum coating carrier plate to solve the problems raised in the above background that silicon wafer is usually tightly fitted inside the positioning groove, when it is necessary to take the silicon wafer, the silicon wafer needs to be pried out from the positioning groove with fingers, since the carrier plate usually carries multiple silicon wafers, the action of buckling the silicon wafer needs to be repeated constantly, which easily leads to finger abrasion and reduces efficiency.

[0005] To achieve the above object, the utility model provides the following technical scheme: a kind of solar energy silicon wafer vacuum coating carrier plate, including carrier plate body;

[0006] Further comprising:

[0007] cavity is integrally formed on the surface of carrier plate body, cavity communicates with the upper and lower ends of carrier plate body, and cavity is provided with a plurality of matrix arrangement and uniform distribution on the surface of carrier plate body, the surface of carrier plate body is provided with movable groove, movable groove is located at one end of inner cavity, and movable groove is communicated with the inside of cavity, mounting plate is placed in the inside of cavity, the edge of the inside bottom of mounting plate is provided with supporting sheet, the front end of mounting plate is provided with connecting seat, and connecting seat is clamped in the inside of movable groove.

[0008] Preferably, the inside of the carrier plate body is provided with a rotating groove, and the rotating groove is communicated with the movable groove, one side of the carrier plate body is provided with a dial, the inside of the dial is provided with a rotating rod, and the rotating rod is movably clamped in the inside of the rotating groove, the surface of the connecting seat is provided with a circular hole, and the connecting seat is clamped on the outside of the rotating rod through the circular hole.

[0009] Preferably, the inside of the mounting plate is provided with a limiting bump, and the limiting bump is located above the supporting sheet.

[0010] Preferably, the inside of the mounting plate is provided with a limiting bump, and the limiting bump is located above the supporting sheet.

[0011] Preferably, the upper end surface of the carrier plate body is provided with a sliding groove, the upper end of the carrier plate body is provided with a limiting plate, the bottom of the limiting plate is provided with a sliding block, the sliding block is slidably clamped in the inside of the sliding groove, and the limiting plate slides on the upper end of the carrier plate body through the clamping of the sliding block and the sliding groove.

[0012] Compared with the prior art, the utility model has the advantages that:

[0013] 1. By setting the mounting plate in the cavity on the surface of the carrier plate body, the solar silicon wafer is clamped in the inside of the mounting plate, the upper end of the mounting plate is provided with a connecting seat, the connecting seat is clamped in the movable groove at the front end of the cavity, the rotating rod is inserted from one side of the carrier plate body, the rotating rod extends from the rotating groove to the movable groove, and the mounting plate is clamped and connected with the rotating rod through the connecting seat, so that the rotating rod can be rotated by rotating the dial, the mounting plate is lifted from the inside of the cavity, the solar silicon wafer can be conveniently taken out from the inside of the mounting plate, and the rotating rod can lift a row of mounting plates in the transverse direction at one time, thereby improving the efficiency and facilitating taking.

[0014] 2. By setting the limiting plate on the surface of the carrier plate body, the limiting plate slides on the surface of the carrier plate body through the clamping of the sliding block and the sliding groove, the connecting seat can be clamped by the limiting plate, after the mounting plate enters the inside of the cavity, the limiting plate is slid to above the movable groove, the connecting seat and the mounting plate are limited, and the mounting plate cannot be lifted. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is the whole structure schematic diagram of the utility model;

[0016] Figure 2 It is the mounting plate structure schematic diagram of the utility model;

[0017] Figure 3 It is the connecting seat and rotating rod connection plan view of the utility model;

[0018] Figure 4 It is the inside cavity main view of the utility model;

[0019] In the figure: 1, the carrier plate body; 2, cavity; 3, mounting plate; 4, rotating rod; 5, dial; 6, connecting seat; 7, round hole; 8, rotating groove; 9, movable slot; 10, limiting frame; 11, limiting block; 12, support piece; 13, limiting plate; 14, sliding block; 15, sliding slot. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments.

[0021] The utility model provides a kind of solar silicon wafer vacuum coating carrier plate, and the device includes carrier plate body 1.The utility model mainly solves the problem that due to the carrier plate usually carries multiple silicon wafers, the action of repeatedly buckling silicon wafer is needed, which is easy to cause finger abrasion and reduce efficiency.

[0022] For the device provided by the utility model, please refer to Figures 1-4 , and specific introduction is made below.

[0023] Cavity 2 is integrally formed on the surface of carrier plate body 1, and the cavity 2 is connected to the upper and lower ends of the carrier plate body 1. The cavity 2 is provided with a plurality of matrix arrangement and is evenly distributed on the surface of the carrier plate body 1. The surface of the carrier plate body 1 is provided with a movable slot 9, which is located at one end of the inner cavity. The movable slot 9 is in communication with the inside of the cavity 2. The inside of the cavity 2 is provided with a mounting plate 3. The solar silicon wafer is clamped in the inside of the mounting plate 3. The edge of the inside bottom of the mounting plate 3 is provided with a support piece 12. The support piece 12 has a small size, which can reduce the contact with the surface of the solar silicon wafer. The inside of the mounting plate 3 is provided with a limiting block 11, which is located above the support piece 12. The silicon wafer is clamped between the support piece 12 and the limiting block 11, and the silicon wafer is limited. The front end of the mounting plate 3 is provided with a connecting seat 6, which is clamped in the inside of the movable slot 9. The inside of the carrier plate body 1 is provided with a rotating groove 8, which is in communication with the movable slot 9. One side of the carrier plate body 1 is provided with a dial 5. The inside of the dial 5 is provided with a rotating rod 4. The rotating rod 4 is rotated by manually rotating the dial 5. The rotating rod 4 is clamped in the inside of the rotating groove 8. The surface of the connecting seat 6 is provided with a round hole 7. The connecting seat 6 is clamped outside the rotating rod 4 through the round hole 7. The rotating rod 4 and the round hole 7 are tightly clamped and will not slip. The inner wall of the cavity 2 is symmetrically provided with a limiting frame 10. The mounting plate 3 is attached to the upper end of the limiting frame 10. The limiting frame 10 supports the mounting plate 3.

[0024] Further illustrate, the upper end surface of the carrier plate body 1 is provided with a sliding groove 15, the upper end of the carrier plate body 1 is provided with a limiting plate 13, the bottom of the limiting plate 13 is provided with a sliding block 14, the sliding block 14 is slidingly engaged in the inside of the sliding groove 15, the limiting plate 13 is slidingly engaged with the sliding groove 15 on the upper end of the carrier plate body 1 through the sliding block 14, the connecting seat 6 can be engaged by the limiting plate 13, after the mounting plate 3 enters the inside of the cavity 2, the limiting plate 13 is slid to the upper side of the movable slot 9, the connecting seat 6 and the mounting plate 3 can be limited, so that the mounting plate 3 cannot be lifted up.

[0025] It will be apparent to those skilled in the art that the present application is not limited to the details of the above-exemplified embodiments but can be implemented in other concrete forms without departing from the spirit or essential characteristics of the present application. Thus, the embodiments should be considered in all respects as illustrative and not restrictive, the scope of the present application being indicated by the appended claims rather than by the above description, and it is intended to be encompassing of all changes and modifications which fall within the meaning and scope of equivalents of the claims. Any reference signs in the claims should not be construed as limiting the claims concerned.

Claims

1. A solar silicon wafer vacuum coating carrier plate, comprising a carrier plate body (1); characterized in that Further comprising: a cavity (2) integrally formed on the surface of the carrier plate body (1), the cavity (2) communicating the upper and lower ends of the carrier plate body (1), and the cavity (2) being provided with a plurality of matrix arrangement uniform distribution on the surface of the carrier plate body (1), the surface of the carrier plate body (1) being provided with a movable slot (9) at one end of the cavity, and the movable slot (9) communicating with the inside of the cavity (2), the inside of the cavity (2) being placed with a mounting plate (3), the inside bottom edge of the mounting plate (3) being provided with a support piece (12), the front end of the mounting plate (3) being provided with a connecting seat (6), and the connecting seat (6) being engaged in the inside of the movable slot (9); the inside of the carrier plate body (1) being provided with a rotating slot (8), and the rotating slot (8) communicating with the movable slot (9), one side of the carrier plate body (1) being provided with a dial (5), the inside of the dial (5) being provided with a rotating rod (4), and the rotating rod (4) being movably engaged in the inside of the rotating slot (8), the surface of the connecting seat (6) being provided with a round hole (7), and the connecting seat (6) being engaged outside the rotating rod (4) through the round hole (7).

2. The vacuum coating carrier plate for solar silicon wafers according to claim 1, wherein: The inside of the mounting plate (3) is provided with a limiting block (11), and the limiting block (11) is located above the support piece (12).

3. The vacuum coating carrier plate for solar silicon wafers of claim 1, wherein: The inner wall of the cavity (2) is symmetrically provided with a limiting frame (10), and the mounting plate (3) is attached to the upper end of the limiting frame (10).

4. The solar silicon wafer vacuum coating carrier plate according to claim 1, wherein: The upper end surface of the carrier plate body (1) is provided with a sliding groove (15), the upper end of the carrier plate body (1) is provided with a limiting plate (13), the bottom of the limiting plate (13) is provided with a sliding block (14), the sliding block (14) is slidably engaged in the inside of the sliding groove (15), and the limiting plate (13) slides on the upper end of the carrier plate body (1) through the sliding block (14) and the sliding groove (15).

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