Graphite boat supporting rod with enhanced structure

Abstract

The utility model relates to the field of machinery, in particular to a graphite boat supporting rod technology. The graphite boat supporting rod with the enhanced structure comprises a graphite boat supporting rod body, and a hollow through hole is formed in the graphite boat supporting rod body and serves as an airflow channel. The upper part of the graphite boat supporting rod is provided with an external thread and is called as a threaded end; an arc-shaped groove with an arc-shaped angle of 120-240 degrees is vertically formed in the outer side of the threaded end; a thread is arranged in the arc-shaped groove to form a half-edge-shaped screw hole; the depth of the half-edge-shaped screw hole is 1 / 2-3 / 4 of the length of the thread end; a cross-shaped rib plate is arranged on the inner wall of the airflow channel of the graphite boat supporting rod; the upper end of the cross-shaped rib plate is flush with the upper end of the airflow channel, and the length of the cross-shaped rib plate is 1 / 2-4 / 5 of the length of the airflow channel. The structure of the graphite boat supporting rod is enhanced through the cross-shaped rib plate.

Description

Technical Field

[0001] This utility model relates to the field of machinery, specifically to a graphite boat support rod technology. Background Technology

[0002] A graphite boat is a container made of high-purity graphite, possessing high-temperature resistance and chemical stability. The main purpose of high-purity graphite boats is to contain and carry substances in high-temperature environments, particularly in high-temperature reactions, metal smelting, semiconductor manufacturing, and chemical experiments. Its high purity and high-temperature resistance make it an important tool in these applications.

[0003] A graphite boat is formed by connecting a graphite disc and a graphite support rod by threads. The graphite disc is used to carry a graphite box, and the graphite support rod supports the weight of the graphite disc, the graphite box, and the workpiece being processed.

[0004] This type of graphite boat has a simple structure and is easy to manufacture. However, the graphite disc is connected to the graphite support rod via threads, which makes it prone to rotation during use, leading to an unstable connection and affecting its operation. Furthermore, the weight of the graphite disc, graphite box, and the workpiece is concentrated on the graphite support rod. If the support rod's strength is insufficient, the graphite boat will malfunction. Utility Model Content

[0005] The purpose of this invention is to provide a structurally reinforced graphite boat support rod to solve at least one of the above-mentioned technical problems.

[0006] The technical problem solved by this utility model can be achieved by the following technical solution:

[0007] The structurally reinforced graphite boat support rod includes a graphite boat support rod with a hollow through hole inside as an airflow channel;

[0008] The upper part of the graphite boat support rod is provided with external threads, and the upper part of the graphite boat support rod is called the threaded end;

[0009] An arc-shaped groove with an arc angle of 120 to 240 degrees is vertically provided on the outer side of the threaded end;

[0010] The arc-shaped groove is provided with threads to form a half-sided threaded hole;

[0011] The depth of the semi-circular screw hole is 1 / 2 to 3 / 4 of the length of the thread end;

[0012] The airflow channel of the graphite boat support rod is equipped with long, cross-shaped ribs;

[0013] The four outer edges of the cross-shaped ribs are all fixed to the inner wall of the airflow channel;

[0014] The upper end of the cross-shaped rib is flush with the upper end of the airflow channel, and the length of the cross-shaped rib is 1 / 2 to 4 / 5 of the length of the airflow channel.

[0015] In the above design, a portion of the threaded hole is vertically set on the outer side of the threaded end of the graphite boat support rod, and the remaining portion of the threaded hole is vertically set on the inner side of the internal thread of the graphite disk that mates with the graphite boat support rod. When the graphite boat support rod and the graphite disk are tightened, the portion of the threaded hole on the outer side of the threaded end of the graphite boat support rod and the portion of the threaded hole on the inner side of the internal thread of the graphite disk merge into a complete threaded hole. A graphite bolt is screwed into the threaded hole, securing the graphite boat support rod and the graphite disk. This design prevents the graphite boat support rod and the graphite disk from loosening, strengthens the connection structure between the graphite boat support rod and the graphite disk, and thus improves the support strength of the graphite boat support rod. The cross-shaped ribs set on the inner wall of the airflow channel of the graphite boat support rod also improve the structural strength of the graphite boat support rod.

[0016] Furthermore, a groove is provided at the top of the graphite boat support rod, and an airflow channel is provided at the bottom of the groove;

[0017] The bottom end of the graphite boat support rod is connected to a conical air pipe interface. The conical angle of the air pipe interface is 30 to 40 degrees. An air guide hole is provided inside the air pipe interface, and the air guide hole is connected to the airflow channel.

[0018] On the lower outer wall of the graphite boat support rod, there is also an oblique hole connected to the airflow channel as a vent. The opening of the vent on the inner wall of the airflow channel is lower than the lower end of the cross-shaped rib. The angle between the axis of the vent and the axis of the airflow channel is 44.5 to 45.5 degrees.

[0019] In the above design, a conical air pipe interface is connected to the bottom end of the graphite boat support rod. This interface allows for the connection of a protective gas, which is pressurized and introduced into the graphite boat through an airflow channel inside the support rod, thus protecting the workpiece inside. The airflow channel of the support rod also includes an oblique hole connecting to the outer wall of the support rod. This oblique hole allows the pressurized protective gas to escape when the outlet at the top of the support rod is blocked by the workpiece, preventing the pressure of the protective gas from pushing against the graphite boat and affecting the workpiece processing.

[0020] Furthermore, an annular protrusion is provided at the lower part of the threaded end;

[0021] It also includes a graphite sleeve, which is fitted onto the graphite boat support rod;

[0022] The top of the graphite sleeve is provided with a groove for fitting the protrusion. The protrusion is embedded in the groove, and the top of the graphite sleeve is flush with the upper surface of the protrusion.

[0023] The bottom end of the graphite sleeve is flush with the bottom end of the graphite boat support rod;

[0024] The inner wall of the graphite sleeve is also provided with an annular groove, and the opening of the vent hole on the outer wall of the graphite boat support rod faces the annular groove.

[0025] The bottom of the annular groove is provided with a horizontal straight hole that connects to the outer wall of the graphite sleeve.

[0026] In the above design, by fitting a sleeve onto the graphite boat support rod, the beneficial effect is to enhance the support strength of the graphite boat support rod; the sleeve has an annular groove on its inner wall, and the beneficial effect of the annular groove is that it connects to the vent hole, allowing the pressure of the protective gas to be discharged out of the airflow channel, preventing the pressure of the protective gas from rising and affecting the movement of the workpiece on the graphite boat.

[0027] Furthermore, the graphite boat support rod and the graphite sleeve are made of graphite material with the same coefficient of thermal expansion.

[0028] In the above design, the graphite boat support rod and the graphite sleeve are made of graphite material with the same coefficient of expansion. The advantage of this is that during the heating process, the graphite sleeve can be prevented from breaking due to different expansion systems.

[0029] This invention features a portion of threaded holes vertically arranged on the outer side of the external thread of a graphite boat support rod, and another portion of threaded holes arranged on the inner side of the internal thread of a graphite disc that matches the graphite boat support rod. When the graphite boat support rod and the graphite disc are tightened, the portion of threaded holes on the graphite boat support rod and the portion of threaded holes on the graphite disc merge into a complete threaded hole. A graphite bolt is screwed into the threaded hole to lock the graphite disc and the graphite boat support rod in place. This solves the problem of preventing loosening after the threaded connection between the graphite disc and the graphite boat support rod is tightened, thus strengthening the connection structure between the graphite boat support rod and the graphite disc and making the connection between the graphite boat support rod and the graphite disc more secure.

[0030] Its beneficial effect also lies in the fact that cross-shaped ribs are set in the airflow channel of the graphite boat support rod, which enhances the support strength of the graphite boat support rod.

[0031] Its beneficial effect also lies in the fact that a sleeve is provided on the outer sleeve of the graphite boat support rod, which enhances the support strength of the graphite boat support rod through the graphite boat support rod and the sleeve. Attached Figure Description

[0032] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Wherein:

[0033] Figure 1 This is a front sectional view of the present invention;

[0034] Figure 2 This is an enlarged schematic diagram of the front cross-section of region A of this utility model;

[0035] Figure 3 This is an enlarged schematic diagram of the front cross-section of region B of this utility model.

[0036] Figure 4 This is a top view of the present invention;

[0037] Figure 5 This is a schematic diagram of the CC cross-section of this utility model;

[0038] Figure 6 This is a front cross-sectional view of the present invention after the graphite sleeve has been fitted.

[0039] Symbol explanation:

[0040] 1. Graphite boat support rod; 2. Protrusion; 3. Air pipe interface; 4. Airflow channel; 5. Air guide hole; 6. Screw hole; 7. Vent hole; 8. Cross-shaped rib; 9. Graphite sleeve; 10. Annular groove. Detailed Implementation

[0041] To make the above-mentioned objectives, features and advantages of this utility model more readily understood, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0042] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0043] Secondly, this utility model is described in detail with reference to the schematic diagrams. When describing the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not according to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, actual manufacturing should include the three-dimensional spatial dimensions of length, width, and depth.

[0044] Furthermore, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in an embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single embodiment or an embodiment selectively excluded from other embodiments.

[0045] Reference Figure 1 , Figure 2 , Figure 4 , Figure 5 As shown, the structurally reinforced graphite boat support rod includes a graphite boat support rod 1, and the interior of the graphite boat support rod 1 is provided with a hollow through hole as an airflow channel 4.

[0046] The upper part of the graphite boat support rod 1 is provided with external threads, and the upper part of the graphite boat support rod 1 is called the threaded end;

[0047] An arc-shaped groove with an arc angle of 120 to 240 degrees is vertically provided on the outer side of the threaded end;

[0048] The arc-shaped groove is provided with threads to form a semi-circular threaded hole 6;

[0049] The depth of the semi-circular screw hole 6 is 1 / 2 to 3 / 4 of the length of the thread end;

[0050] The airflow channel 4 of the graphite boat support rod 1 is provided with a long strip-shaped cross-shaped rib 8;

[0051] The four outer edges of the cross-shaped rib plate 8 are all fixed to the inner wall of the airflow channel 4;

[0052] The upper end of the cross-shaped rib 8 is flush with the upper end of the airflow channel 4, and the length of the cross-shaped rib 8 is 1 / 2 to 4 / 5 of the length of the airflow channel 4.

[0053] In this embodiment, a portion of the screw hole 6 is vertically arranged on the outer side of the threaded end of the graphite boat support rod 1, and the remaining portion of the screw hole 6 is vertically arranged on the inner side of the internal thread of the graphite disk that mates with the graphite boat support rod 1. When the graphite boat support rod 1 and the graphite disk are tightened, the portion of the screw hole 6 on the outer side of the threaded end of the graphite boat support rod 1 and the portion of the screw hole 6 on the inner side of the internal thread of the graphite disk merge into a complete screw hole 6. A graphite bolt is screwed into the screw hole 6, securing the graphite boat support rod 1 and the graphite disk. This has the beneficial effect of preventing the graphite boat support rod 1 and the graphite disk from loosening, strengthening the connection structure between the graphite boat support rod 1 and the graphite disk, and thus improving the support strength of the graphite boat support rod 1. A cross-shaped rib plate 8 is provided on the inner wall of the airflow channel 4 of the graphite boat support rod 1, which also has the beneficial effect of improving the structural strength of the graphite boat support rod 1.

[0054] Reference Figure 1 , Figure 3As shown, a groove is provided at the top of the graphite boat support rod 1, and an airflow channel 4 is provided at the bottom of the groove;

[0055] The bottom end of the graphite boat support rod 1 is connected to a conical air pipe interface 3. The conical angle of the air pipe interface 3 is 30 to 40 degrees. An air guide hole 5 is provided inside the air pipe interface 3, and the air guide hole 5 is connected to the airflow channel 4.

[0056] On the lower outer side wall of the graphite boat support rod 1, there is also an oblique hole connected to the airflow channel 4 as a vent hole 7. The opening of the vent hole 7 on the inner wall of the airflow channel 4 is lower than the lower end of the cross-shaped rib plate 8, and the angle between the axis of the vent hole 7 and the axis of the airflow channel 4 is 44.5 to 45.5 degrees.

[0057] In this embodiment, a conical air pipe interface 3 is connected to the bottom end of the graphite boat support rod 1. The function of the air pipe interface 3 is to connect a protective gas. This protective gas is pressurized and is introduced into the graphite boat through the airflow channel 4 inside the graphite boat support rod 1 to protect the workpiece being processed inside. The airflow channel 4 of the graphite boat support rod 1 also has an oblique hole connecting to the outer wall of the graphite boat support rod 1. The function of the oblique hole is to allow the pressurized protective gas to escape through the vent hole 7 when the air outlet at the top of the graphite boat support rod 1 is blocked by the workpiece, preventing the pressure of the protective gas from pushing against the graphite boat and affecting the processing of the workpiece.

[0058] Reference Figure 6 As shown, an annular protrusion 2 is provided at the lower part of the threaded end;

[0059] It also includes a graphite sleeve 9, which is fitted onto the graphite boat support rod 1;

[0060] The top of the graphite sleeve 9 is provided with a groove for fitting the protrusion 2. The protrusion 2 is embedded in the groove, and the top of the graphite sleeve 9 and the upper surface of the protrusion 2 are flush.

[0061] The bottom end of the graphite sleeve 9 is flush with the bottom end of the graphite boat support rod 1;

[0062] The inner wall of the graphite sleeve 9 is also provided with an annular groove 10, and the opening of the vent hole 7 on the outer wall of the graphite boat support rod 1 faces the annular groove 10.

[0063] The bottom of the annular groove 10 is provided with a horizontal straight hole that connects to the outer wall of the graphite sleeve 9.

[0064] In this embodiment, by sleeved on the graphite boat support rod 1, the beneficial effect is to enhance the support strength of the graphite boat support rod 1; the inner wall of the sleeve is provided with an annular groove 10, the beneficial effect of the annular groove 10 is that the pressure of the protective gas is discharged out of the airflow channel 4 through the vent hole 7, and the pressure of the protective gas is prevented from rising and affecting the position movement of the workpiece on the graphite boat.

[0065] Furthermore, the graphite boat support rod 1 and the graphite sleeve 9 are made of graphite material with the same coefficient of expansion.

[0066] In this embodiment, the graphite boat support rod 1 and the graphite sleeve 9 are made of graphite material with the same coefficient of expansion. The advantage of this is that during the heating process, the graphite sleeve 9 can be prevented from breaking due to different expansion systems.

[0067] Furthermore, in order to provide a concise description of exemplary embodiments, not all features of actual embodiments may be described, i.e., those features that are not relevant to the currently considered best mode for carrying out the present invention, or those features that are not relevant to implementing the present invention.

[0068] It should be understood that numerous specific implementation decisions can be made during the development of any practical implementation, such as in any engineering or design project. Such development efforts may be complex and time-consuming, but for those of ordinary skill in the art who benefit from this disclosure, the development effort will be a routine task in design, manufacturing, and production without requiring extensive experimentation.

[0069] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A structurally reinforced graphite boat support rod, comprising a graphite boat support rod, characterized in that: The graphite boat support rod has hollow through holes inside as airflow channels; The upper part of the graphite boat support rod is provided with external threads, and the upper part of the graphite boat support rod is called the threaded end; An arc-shaped groove with an arc angle of 120 to 240 degrees is vertically provided on the outer side of the threaded end; The arc-shaped groove is provided with threads to form a half-sided threaded hole; The depth of the semi-circular screw hole is 1 / 2 to 3 / 4 of the length of the thread end; The airflow channel of the graphite boat support rod is equipped with long, cross-shaped ribs; The four outer edges of the cross-shaped ribs are all fixed to the inner wall of the airflow channel; The upper end of the cross-shaped rib is flush with the upper end of the airflow channel, and the length of the cross-shaped rib is 1 / 2 to 4 / 5 of the length of the airflow channel.

2. The structurally reinforced graphite boat support rod according to claim 1, characterized in that, The top of the graphite boat support rod is provided with a groove, and the bottom of the groove is provided with an airflow channel; The bottom end of the graphite boat support rod is connected to a conical air pipe interface. The conical angle of the air pipe interface is 30 to 40 degrees. An air guide hole is provided inside the air pipe interface, and the air guide hole is connected to the airflow channel. On the lower outer wall of the graphite boat support rod, there is also an oblique hole connected to the airflow channel as a vent. The opening of the vent on the inner wall of the airflow channel is lower than the lower end of the cross-shaped rib. The angle between the axis of the vent and the axis of the airflow channel is 44.5 to 45.5 degrees.

3. The structurally reinforced graphite boat support rod according to claim 1, characterized in that, A ring-shaped protrusion is provided at the lower part of the threaded end; It also includes a graphite sleeve, which is fitted onto the graphite boat support rod; The top of the graphite sleeve is provided with a groove for fitting the protrusion. The protrusion is embedded in the groove, and the top of the graphite sleeve is flush with the upper surface of the protrusion. The bottom end of the graphite sleeve is flush with the bottom end of the graphite boat support rod; The inner wall of the graphite sleeve is also provided with an annular groove, and the opening of the vent hole on the outer wall of the graphite boat support rod faces the annular groove. The bottom of the annular groove is provided with a horizontal straight hole that connects to the outer wall of the graphite sleeve.

4. The structurally reinforced graphite boat support rod according to claim 3, characterized in that, The graphite boat support rod and the graphite sleeve are made of graphite material with the same coefficient of expansion.

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