Protective clamp for preventing silicon wafer from being bent

Abstract

The utility model relates to the field of clamps, in particular to a protective clamp for preventing a silicon wafer from being bent, which comprises a base plate and a round silicon wafer placed at the upper end of the base plate. The lower end of the chassis is fixedly connected with a bottom plate, and the bottom plate is provided with a clamping assembly used for clamping a circular silicon wafer. According to the utility model, the circular silicon wafer is placed at the upper end of the chassis, then the clamping assembly is started to extrude, clamp and fix the side wall of the circular silicon wafer, and then the second electric cylinder is started to enable the limiting block to move downwards, so that the limiting block limits the clamping assembly; the clamping assembly can clamp the side wall of the round silicon wafer more stably, the supporting assembly is detachably installed on the clamping assembly, the clamping assembly is detachably installed on the bottom plate, the clamping assembly and the supporting assembly can be replaced conveniently, the U-shaped block is moved through other moving mechanisms, and the device can be moved conveniently.

Description

Technical Field

[0001] This utility model belongs to the field of clamps, specifically relating to a protective clamp to prevent silicon wafer bending. Background Technology

[0002] With the advancement of semiconductor technology and the continuous miniaturization of product sizes, the manufacturing precision requirements for silicon wafer processing are becoming increasingly stringent. Due to their brittleness and thinness, silicon wafers are prone to damage such as bending and scratches during handling, clamping, and processing, which leads to reduced yield and increased production costs.

[0003] Currently, many traditional clamps use single or a few clamping components to fix silicon wafers, which makes it difficult to evenly support the entire silicon wafer. This can easily lead to deformation or bending of the silicon wafer during processing. Some clamping materials are too hard or have too sharp edges, which can easily scratch or damage the silicon wafer, affecting its subsequent processing and performance. Existing silicon wafer protective clamps are difficult to improve the protection of silicon wafers during use and are difficult to prevent bending of silicon wafers during movement. Further improvements are needed.

[0004] Therefore, a protective clamp for preventing silicon wafer bending is proposed, which can improve the protection of silicon wafers and prevent them from bending during movement. Utility Model Content

[0005] In order to overcome the problem that existing silicon wafer protective clamps are difficult to improve the protection of silicon wafers during use and are difficult to prevent silicon wafers from bending during movement, a protective clamp for preventing silicon wafer bending is proposed.

[0006] The technical solution of this utility model is as follows: a protective clamp for preventing silicon wafer bending, comprising a chassis and a circular silicon wafer placed on the upper part of the chassis; a base plate is fixedly connected to the lower end of the chassis, and a clamping assembly for clamping the circular silicon wafer is provided on the base plate; a support assembly is provided at the lower end of the clamping assembly; limiting components for limiting the clamping assembly are provided at the four corner edges of the lower end of the chassis; a U-shaped block is fixedly connected to the lower end of the chassis; a first groove is formed through the center of the upper end of the chassis; a second groove is formed through the center of the upper end of the base plate; and a lifting mechanism for lifting the circular silicon wafer is provided at the lower end of the base plate.

[0007] The limiting assembly includes a second electric cylinder and a limiting block; the second electric cylinder is fixedly connected to the four corner edges of the lower end of the chassis, the upper end of the output shaft of the second electric cylinder passes through the chassis and is fixedly connected to the limiting block, and the end of the limiting block near the center of the chassis is arc-shaped.

[0008] Preferably, in use, a circular silicon wafer is placed on the upper end of the chassis, and then the clamping assembly is activated to squeeze and clamp the side wall of the circular silicon wafer. Then, the second electric cylinder is activated to move the limiting block downward, so that the limiting block limits the clamping assembly, which can make the clamping assembly clamp the side wall of the circular silicon wafer more stably. The support assembly is detachably installed on the clamping assembly, and the clamping assembly is detachably installed on the base plate, which facilitates the replacement of the clamping assembly and the support assembly. The U-shaped block is moved by other moving mechanisms, which can facilitate the movement of the device. This solves the problem that the existing silicon wafer protective clamps are difficult to improve the protection of silicon wafers and difficult to prevent the silicon wafer from bending during the movement process.

[0009] Preferably, the central axes of the first and second tanks are collinear, and the outer diameter of the first tank is larger than the outer diameter of the second tank.

[0010] Preferably, the clamping assembly includes a mounting groove, a mounting plate, a first electric cylinder, a clamping block, a push block, a rubber block, and bolts; two mounting grooves are opened through the upper end of the base plate, and mounting plates are slidably provided on the inner wall of the mounting grooves. The first electric cylinder is fixedly connected to one end of the two mounting plates that are close to each other. The clamping block is fixedly connected to the output shaft of the first electric cylinder. The push block is fixedly connected to one end of the clamping block that is close to the circular silicon wafer. The rubber block is fixedly connected to one end of the push block that is close to the circular silicon wafer. Bolts are threaded on both sides of the base plate. The bolts pass through the mounting plates and are threaded into the wall layer of the base plate. The end of the limiting block that is close to the central axis of the chassis is in contact with the end of the push block that is close to the mounting plate.

[0011] Preferably, the lower end of the push block is attached to the upper end of the chassis, the lower end of the rubber block is attached to the upper end of the chassis, and the height of the rubber block is twice the height of the push block.

[0012] Preferably, the support assembly includes a support block, a first screw hole, a first threaded post, and a first base block; the support block is provided below the base plate, the first screw hole is provided through the center of the upper end of the support block, the first threaded post is threadedly installed on the inner wall of the first screw hole, the lower end of the first threaded post is fixed to the first base block, and the upper end of the first threaded post passes through the first screw hole and is threadedly installed in the wall layer of the mounting plate.

[0013] Preferably, the support assembly also includes a second screw hole, a second threaded post, a second base block, and a warning cylinder; the upper end of the first base block has two second screw holes that are symmetrical about the first screw hole; the inner wall of the second screw hole is threaded with a second threaded post; the lower end of the second threaded post is fixed to the second base block; and the upper side wall of the second base block is threaded with a warning cylinder.

[0014] Preferably, the lifting mechanism includes a third electric cylinder and a lifting plate; the lower end of the base plate is fixedly connected to the third electric cylinder, the upper end of the output shaft of the third electric cylinder is fixedly connected to the lifting plate, and the side wall of the lifting plate is in contact with the inner wall of the second tank.

[0015] The beneficial effects of this utility model are as follows: By placing a circular silicon wafer on the upper end of the chassis, and then opening the clamping assembly to squeeze and clamp the side wall of the circular silicon wafer, and then opening the second electric cylinder to move the limiting block downward, the limiting block limits the clamping assembly, which can make the clamping assembly clamp the side wall of the circular silicon wafer more stably. The support assembly is detachably installed on the clamping assembly, and the clamping assembly is detachably installed on the base plate, which facilitates the replacement of the clamping assembly and the support assembly. Using other moving mechanisms to move the U-shaped block can facilitate the movement of the device. This solves the problem that the existing silicon wafer protective clamps are difficult to improve the protection of silicon wafers during use and are difficult to prevent the silicon wafer from bending during movement. Attached Figure Description

[0016] Figure 1 The diagram shown is a three-dimensional structural schematic of a protective clamp for preventing silicon wafer bending according to this utility model.

[0017] Figure 2 The diagram shows a three-dimensional structural schematic of the clamping assembly of a protective clamp for preventing silicon wafer bending according to this utility model.

[0018] Figure 3 The diagram shown is a first three-dimensional disassembled structural schematic of the support component of a protective clamp for preventing silicon wafer bending according to this utility model.

[0019] Figure 4 The diagram shown is a second three-dimensional disassembled structural schematic of the support component of a protective clamp for preventing silicon wafer bending according to this utility model.

[0020] Figure 5 The diagram shows a three-dimensional structural schematic of the third electric cylinder of a protective clamp for preventing silicon wafer bending according to this utility model.

[0021] Figure 6 The diagram shows a three-dimensional structural schematic of the lifting plate of a protective clamp for preventing silicon wafer bending according to this utility model.

[0022] Figure 7 The diagram shows a three-dimensional structural schematic of the limiting component of a protective clamp for preventing silicon wafer bending according to this utility model.

[0023] The labels in the attached diagram are as follows: 1. Chassis; 2. Base plate; 3. Clamping assembly; 301. Mounting groove; 302. Mounting plate; 303. First electric cylinder; 304. Clamping block; 305. Push block; 306. Rubber block; 307. Bolt; 4. Support assembly; 401. Support block; 402. First screw hole; 403. First threaded post; 404. First bottom block; 405. Second screw hole; 406. Second threaded post; 407. Second bottom block; 408. Warning cylinder; 5. Limiting assembly; 501. Second electric cylinder; 502. Limiting block; 6. U-shaped block; 7. Circular silicon wafer; 8. First groove; 9. Second groove; 901. Third electric cylinder; 902. Lifting plate. Detailed Implementation

[0024] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0025] Example 1: Please refer to Figures 1-7 A protective clamp for preventing silicon wafer bending includes a base plate 1 and a circular silicon wafer 7 placed on top of the base plate 1. A base plate 2 is fixedly connected to the lower end of the base plate 1. A clamping assembly 3 for clamping the circular silicon wafer 7 is provided on the base plate 2. A support assembly 4 is provided at the lower end of the clamping assembly 3. Limiting components 5 for limiting the clamping assembly 3 are provided at the four corners of the lower end of the base plate 1. A U-shaped block 6 is fixedly connected to the lower end of the base plate 1. A first groove 8 is formed through the center of the upper end of the base plate 1. A second groove 9 is formed through the center of the upper end of the base plate 2. A lifting mechanism for raising and lowering the circular silicon wafer 7 is provided at the lower end of the base plate 2.

[0026] The limiting component 5 includes a second electric cylinder 501 and a limiting block 502; the second electric cylinder 501 is fixedly connected to the four corner edges of the lower end of the chassis 1, the upper end of the output shaft of the second electric cylinder 501 passes through the chassis 1 and is fixedly connected to the limiting block 502, and the end of the limiting block 502 near the center of the chassis 1 is arc-shaped.

[0027] In use, the circular silicon wafer 7 is placed on the upper end of the chassis 1. Then, the clamping assembly 3 is activated to squeeze and clamp the side wall of the circular silicon wafer 7. Then, the second electric cylinder 501 is activated to move the limiting block 502 downward, so that the limiting block 502 limits the clamping assembly 3. This allows the clamping assembly 3 to clamp the side wall of the circular silicon wafer 7 more stably. The support assembly 4 is detachably installed on the clamping assembly 3. The clamping assembly 3 is detachably installed on the base plate 2, which facilitates the replacement of the clamping assembly 3 and the support assembly 4. The U-shaped block 6 is moved using other moving mechanisms, which facilitates the movement of the device.

[0028] Please see Figure 1 and Figure 4In this embodiment, the central axes of the first groove 8 and the second groove 9 are collinear, and the outer diameter of the first groove 8 is larger than the outer diameter of the second groove 9. By setting the first groove 8 and the second groove 9, the circular silicon wafer 7 can be easily raised and lowered.

[0029] Please see Figure 1 and Figure 2 In this embodiment, the clamping assembly 3 includes a mounting groove 301, a mounting plate 302, a first electric cylinder 303, a clamping block 304, a push block 305, a rubber block 306, and bolts 307. Two mounting grooves 301 are formed through the upper end of the base plate 2. The mounting plate 302 is slidably mounted on the inner wall of the mounting groove 301. The first electric cylinder 303 is fixedly connected to one end of the two mounting plates 302 that are close to each other. A clamping block 304 is fixedly connected to the output shaft of the first electric cylinder 303. A push block 305 is fixedly connected to one end of the clamping block 304 near the circular silicon wafer 7. A rubber block 306 is fixedly connected to one end of the push block 305 near the circular silicon wafer 7. The base plate 2... Bolts 307 are threaded on both sides. The bolts 307 pass through the mounting plate 302 and are threaded into the wall layer of the base plate 2. The end of the limiting block 502 near the central axis of the chassis 1 is in contact with the end of the push block 305 near the mounting plate 302. In use, the mounting plate 302 is placed on the inner wall of the mounting groove 301, and then the mounting plate 302 is fixed to the base plate 2 using bolts 307. Then, the two opposing first electric cylinders 303 are activated to bring the two clamping blocks 304 closer to each other, and the two rubber blocks 306 are brought closer to each other to squeeze the side wall of the circular silicon wafer 7, so that the circular silicon wafer 7 can be quickly and stably clamped and fixed.

[0030] Please see Figure 2 In this embodiment, the lower end of the push block 305 is attached to the upper end of the chassis 1, and the lower end of the rubber block 306 is attached to the upper end of the chassis 1. The height of the rubber block 306 is twice the height of the push block 305. By setting the rubber block 306, the sidewall of the circular silicon wafer 7 can be squeezed and clamped better, which can improve the protection of the circular silicon wafer 7.

[0031] Please see Figure 5 and Figure 6 In this embodiment, the lifting mechanism includes a third electric cylinder 901 and a lifting plate 902; the lower end of the base plate 2 is fixedly connected to the third electric cylinder 901, and the upper end of the output shaft of the third electric cylinder 901 is fixedly connected to the lifting plate 902. The side wall of the lifting plate 902 is in contact with the inner wall of the second groove 9. When it is necessary to lift the circular silicon wafer 7 placed on the upper end of the base plate 1 upward, the third electric cylinder 901 is activated to move the lifting plate 902 upward, which can lift the circular silicon wafer 7 placed on the upper end of the base plate 1 upward.

[0032] Example 2: Please refer to Figure 3 and Figure 4Based on Embodiment 1, this application provides a technical solution: the support component 4 includes a support block 401, a first screw hole 402, a first threaded post 403, and a first base block 404; the support block 401 is provided below the base plate 2, the first screw hole 402 is provided through the center of the upper end of the support block 401, the first threaded post 403 is threadedly installed on the inner wall of the first screw hole 402, the lower end of the first threaded post 403 is fixedly connected to the first base block 404, and the upper end of the first threaded post 403 passes through the first screw hole 402 and is threadedly installed in the wall layer of the mounting plate 302. In use, by passing the first threaded post 403 through the first screw hole 402 and threading it in the wall layer of the mounting plate 302, the support block 401 can be quickly installed below the base plate 2, which facilitates the support of the base plate 2.

[0033] Please see Figure 3 and Figure 4 In this embodiment, the support component 4 further includes a second screw hole 405, a second threaded post 406, a second base block 407, and a warning cylinder 408. The upper end of the first base block 404 has two second screw holes 405 that are symmetrical about the first screw hole 402. The inner wall of the second screw hole 405 is threaded with the second threaded post 406. The lower end of the second threaded post 406 is fixed to the second base block 407. The upper side wall of the second base block 407 is threaded with the warning cylinder 408. By threading the second threaded post 406 onto the inner wall of the second screw hole 405 and threading the warning cylinder 408 onto the upper side wall of the second threaded post 406, a warning can be given to the surrounding area.

[0034] Working principle: In use, the first threaded post 403 is passed through the first threaded hole 402 and threaded into the wall of the mounting plate 302. The support block 401 is quickly installed under the base plate 2 to facilitate support of the base plate 2. The second threaded post 406 is threaded into the inner wall of the second threaded hole 405. The warning cylinder 408 is threaded into the upper side wall of the second threaded post 406 to provide a warning to the surrounding area.

[0035] Next, the circular silicon wafer 7 is placed on the upper end of the chassis 1, the mounting plate 302 is placed on the inner wall of the mounting groove 301, and the mounting plate 302 is fixed to the base plate 2 using bolts 307. Then, the two opposing first electric cylinders 303 are activated to bring the two clamping blocks 304 closer together, and the two rubber blocks 306 are brought closer together to squeeze the side wall of the circular silicon wafer 7, thereby quickly and stably clamping and fixing the circular silicon wafer 7.

[0036] Then, the second electric cylinder 501 is activated to move the limiting block 502 downward, so that the end of the limiting block 502 near the central axis of the chassis 1 is in contact with the end of the push block 305 near the mounting plate 302. This can limit the push block 305 and make the clamping assembly 3 clamp the side wall of the circular silicon wafer 7 more stably.

[0037] The support component 4 is detachably mounted on the clamping component 3, and the clamping component 3 is detachably mounted on the base plate 2, which facilitates the replacement of the clamping component 3 and the support component 4. The U-shaped block 6 can be moved by other moving mechanisms, which makes it easy to move the device.

[0038] When it is necessary to lift the circular silicon wafer 7 placed on the upper part of the chassis 1 upwards, the third electric cylinder 901 is activated to move the lifting plate 902 upwards, which can lift the circular silicon wafer 7 placed on the upper part of the chassis 1 upwards.

[0039] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention.

Claims

1. A protective clamp for preventing silicon wafer bending, comprising a base (1) and a circular silicon wafer (7) placed on the upper end of the base (1); characterized in that: A base plate (2) is fixedly connected to the lower end of the chassis (1). A clamping assembly (3) for clamping a circular silicon wafer (7) is provided on the base plate (2). A support assembly (4) is provided at the lower end of the clamping assembly (3). A limiting assembly (5) for limiting the clamping assembly (3) is provided at the four corner edges of the lower end of the chassis (1). A U-shaped block (6) is fixedly connected to the lower end of the chassis (1). A first groove (8) is opened through the center of the upper end of the chassis (1). A second groove (9) is opened through the center of the upper end of the base plate (2). A lifting mechanism for lifting the circular silicon wafer (7) is provided at the lower end of the base plate (2). The limiting component (5) includes a second electric cylinder (501) and a limiting block (502); the second electric cylinder (501) is fixed at the four corner edges of the lower end of the chassis (1), the upper end of the output shaft of the second electric cylinder (501) passes through the chassis (1) and is fixed to the limiting block (502), and the end of the limiting block (502) near the center of the chassis (1) is arc-shaped.

2. The protective clamp for preventing silicon wafer bending according to claim 1, characterized in that: The central axes of the first groove (8) and the second groove (9) are collinear, and the outer diameter of the first groove (8) is greater than the outer diameter of the second groove (9).

3. The protective clamp for preventing silicon wafer bending according to claim 1, characterized in that: The clamping assembly (3) includes a mounting groove (301), a mounting plate (302), a first electric cylinder (303), a clamping block (304), a push block (305), a rubber block (306), and a bolt (307); two mounting grooves (301) are opened through the upper end of the base plate (2), and the mounting plate (302) is slidably provided on the inner wall of the mounting groove (301). The first electric cylinder (303) is fixedly connected to one end of the two mounting plates (302) that are close to each other, and a clamp is fixedly connected to the output shaft of the first electric cylinder (303). The holding block (304) is fixed to one end of the holding block (304) near the circular silicon wafer (7) and a push block (305) is fixed to one end of the push block (305) near the circular silicon wafer (7). Bolts (307) are threaded on both sides of the base plate (2). The bolts (307) pass through the mounting plate (302) and are threaded into the wall layer of the base plate (2). The end of the limiting block (502) near the central axis of the chassis (1) is in contact with the end of the push block (305) near the mounting plate (302).

4. The protective clamp for preventing silicon wafer bending according to claim 3, characterized in that: The lower end of the push block (305) is attached to the upper end of the chassis (1), and the lower end of the rubber block (306) is attached to the upper end of the chassis (1). The height of the rubber block (306) is twice the height of the push block (305).

5. The protective clamp for preventing silicon wafer bending according to claim 1, characterized in that: The support assembly (4) includes a support block (401), a first screw hole (402), a first threaded post (403), and a first base block (404). The support block (401) is provided below the base plate (2). The first screw hole (402) is provided through the center of the upper end of the support block (401). The first threaded post (403) is threaded on the inner wall of the first screw hole (402). The first base block (404) is fixed to the lower end of the first threaded post (403). The upper end of the first threaded post (403) passes through the first screw hole (402) and is threaded into the wall of the mounting plate (302).

6. A protective clamp for preventing silicon wafer bending according to claim 5, characterized in that: The support assembly (4) also includes a second screw hole (405), a second threaded post (406), a second base block (407), and a warning cylinder (408); the upper end of the first base block (404) has two second screw holes (405) through it, the two second screw holes (405) are symmetrical about the first screw hole (402), the inner wall of the second screw hole (405) is threaded with the second threaded post (406), the lower end of the second threaded post (406) is fixed to the second base block (407), and the upper side wall of the second base block (407) is threaded with the warning cylinder (408).

7. The protective clamp for preventing silicon wafer bending according to claim 1, characterized in that: The lifting mechanism includes a third electric cylinder (901) and a lifting plate (902); the lower end of the base plate (2) is fixedly connected to the third electric cylinder (901), the upper end of the output shaft of the third electric cylinder (901) is fixedly connected to the lifting plate (902), and the side wall of the lifting plate (902) and the inner wall of the second tank (9) are attached.

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