Baffle fixing device and physical vapor deposition jig system

Abstract

The utility model provides a separation blade fixing device and a physical vapor deposition jig system, and the separation blade fixing device comprises a bearing part used for bearing a separation blade; the limiting assembly is movably arranged on the edge of the bearing piece and used for fixing the blocking piece; and the elastic piece is arranged on the bearing piece, and one end of the elastic piece is connected with the limiting assembly. According to the separation blade fixing device provided by the utility model, the limiting assembly is movably arranged on the bearing piece and is used for fixing the separation blade, so that the separation blade is prevented from deviating in the reaction process and rubbing with the reaction chamber. And the limiting assembly is movably connected by adopting an elastic piece, so that the separation blade is not easy to crack when being influenced by thermal stress and thermal strain, and the pollution to the reaction chamber when the PVD system performs machine condition test and debugging is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor equipment especially relates to a baffle piece fixing device and physical vapor deposition fixture system. BACKGROUND

[0002] Physical vapor deposition (PVD) is a kind of technology under vacuum condition, by physical method, material source (solid or liquid) surface gasification into gaseous atom, molecule or ion, and through low pressure gas (or plasma), on the substrate surface deposition thin film with special function. After using PVD to carry out film forming treatment to wafer, the thin film on wafer surface has good uniformity and adhesion.

[0003] Before wafer carries out PVD film forming treatment, needs to use the control piece to carry out machine condition test to PVD system, in the process of machine condition test, due to the influence of thermal stress and thermal strain, can lead to wafer fragmentation or position offset, thereby can cause pollution to reaction chamber. UTILITY MODEL CONTENT

[0004] The utility model discloses a kind of baffle piece fixing device and physical vapor deposition fixture system, avoid the pollution to reaction chamber when PVD system carries out machine condition test and debugging, improve the reliability of physical vapor deposition.

[0005] To achieve the above object, first, the utility model provides a kind of baffle piece fixing device, including:

[0006] Supporting member, for carrying baffle piece;

[0007] Limiting component, movably set in the edge of the supporting member, for fixing the baffle piece;

[0008] Elastic member, set in the supporting member, one end of the elastic member is connected with the limiting component.

[0009] The baffle piece fixing device provided by the utility model has the beneficial effects that: by movably setting limiting component on supporting member, for fixing baffle piece, avoid the position offset of baffle piece in reaction process, and scratch with reaction chamber. And since limiting component is movably connected with elastic member, when baffle piece is affected by thermal stress and thermal strain, baffle piece is not easy to break, avoid the pollution to reaction chamber when PVD system carries out machine test and debugging.

[0010] In some embodiments, the limiting component includes a plurality of limiting members, the plurality of limiting members are arranged at intervals along the edge of the supporting member, and the limiting members are movable along the radial direction of the supporting member;

[0011] One end of each of the elastic members is connected to the corresponding limiting member.

[0012] In some embodiments, the bottom of the bearing member is provided with a plurality of sliding grooves along the radial direction thereof;

[0013] The limiting member is provided with a sliding portion which is slidably arranged in the corresponding sliding groove.

[0014] In some embodiments, the inner side wall of the sliding groove is provided with a limiting recess;

[0015] The sliding portion of the limiting member is provided with a protruding portion which is adapted to the limiting recess.

[0016] In some embodiments, the bearing member is in a disc shape, and the edge of the bearing member is provided with a plurality of limiting holes which are in communication with the sliding grooves and extend along the radial direction of the bearing member;

[0017] The limiting member is provided with a limiting portion which penetrates through the limiting hole and protrudes from the bearing surface of the bearing member, and the bearing surface is used for bearing the baffle.

[0018] In some embodiments, the baffle fixing device further comprises a connecting member and an abutting member;

[0019] The bottom of the bearing member is provided with a mounting groove which is coaxially arranged with the bearing member and in communication with the sliding groove;

[0020] The connecting member is arranged in the mounting groove;

[0021] One end of the elastic member is connected to the sliding portion, and the other end is connected to the connecting member;

[0022] One end of the abutting member is connected to the sliding portion;

[0023] When an acting force is applied to the abutting piece towards the edge of the carrier, the limiting piece can be driven to move towards the edge of the carrier. The beneficial effect is that the connecting piece is used to connect the elastic piece, the abutting piece is connected with the limiting piece, when an external acting force is applied to the abutting piece, the abutting piece is used to drive the limiting piece to move, so as to increase the limiting range of the limiting piece, thereby facilitating the placement of the stop sheet, when the stop sheet is placed on the carrier, the acting force applied to the abutting piece is removed, and the limiting piece is moved back by the elastic force of the elastic piece, thereby realizing the clamping and fixing of the stop sheet.

[0024] In some embodiments, the connecting piece is provided with an abutting hole in the axial direction, and the side wall of the connecting piece is provided with a through hole corresponding to the elastic piece, and the through hole is communicated with the abutting hole.

[0025] The elastic piece is a spring, and the abutting piece is arranged in the elastic piece, and the other end of the abutting piece passes through the through hole and is located in the abutting hole.

[0026] In some embodiments, the stop sheet fixing device further comprises a supporting piece.

[0027] The supporting piece has a supporting part, and the supporting part is used for inserting into the abutting hole to apply an acting force to the abutting piece towards the edge of the carrier. The beneficial effect is that the carrier is supported by the supporting piece, and due to the gravity of the carrier itself, the supporting part is inserted into the abutting hole to apply an acting force to the abutting piece towards the edge of the carrier, thereby driving the limiting piece to move.

[0028] In some embodiments, the outer side wall of the supporting part is inclined to form a circular truncated cone structure. The beneficial effect is that when the supporting part is inserted into the abutting hole, the acting force can be easily applied to the abutting piece by inclining the outer side wall of the supporting part.

[0029] In a second aspect, the utility model provides a physical vapor deposition jig system, including reaction chamber and the stop sheet fixing device.

[0030] The stop sheet fixing device is arranged in the reaction chamber.

[0031] The physical vapor deposition jig system has the beneficial effect that when the physical vapor deposition jig system is tested and debugged, the stop sheet fixing device is placed in the reaction chamber to fix the stop sheet, so that the stop sheet does not deviate from the position and scratch the reaction chamber during the reaction. And because the limiting assembly is movably connected by the elastic piece, when the stop sheet is affected by thermal stress and thermal strain, the stop sheet is not easy to break, so that the reaction chamber is not polluted when the physical vapor deposition jig system is tested and debugged, and the reliability of the physical vapor deposition is improved. BRIEF DESCRIPTION OF DRAWINGS

[0032] Figure 1 The top view of the baffle fixing device provided by the embodiment of the utility model;

[0033] Figure 2 The side view of the baffle fixing device provided by the embodiment of the utility model;

[0034] Figure 3 The bottom view of the baffle fixing device provided by the embodiment of the utility model;

[0035] Figure 4 The bottom view of the bearing provided by the embodiment of the utility model;

[0036] Figure 5 The Figure 4 The sectional view along A-A;

[0037] Figure 6 The top view of the limiting part provided by the embodiment of the utility model;

[0038] Figure 7 The front view of the connecting part provided by the embodiment of the utility model and the sectional view along B-B;

[0039] Figure 8 The front view of the supporting part provided by the embodiment of the utility model.

[0040] Reference signs:

[0041] Bearing 1, bearing surface 11, sliding groove 12, limiting recess 121, limiting hole 13, limiting assembly 2, limiting part 21, sliding part 211, convex part 212, limiting part 213, elastic part 3, connecting part 4, abutting hole 41, through hole 42, abutting part 5, supporting part 6, supporting part 61. Specific implementation

[0042] In order to make the purpose, technical scheme and advantages of the utility model more clear, the technical scheme in the embodiment of the utility model will be described clearly and completely below in combination with the drawings in the utility model. Based on the embodiment in the utility model, all other embodiments obtained by the person skilled in the art without creative labor belong to the protection scope of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be the usual meanings understood by the person skilled in the art in the field to which the utility model belongs. The similar words such as "include" used in this paper mean that the elements or objects before the word cover the elements or objects listed after the word and their equivalents, and other elements or objects are not excluded. The "connection" described in this paper can be direct connection or indirect connection, that is, connection through intermediate objects, unless otherwise specified.

[0043] Embodiments of the utility model provide a baffle fixing device for the clamping and fixing of a baffle when a PVD system is tested and debugged, and refer to Figures 1 to 3 As shown in the figure, the baffle fixing device comprises a carrier 1, a limiting assembly 2 and an elastic member 3, the top surface of the carrier 1 is a carrier surface 11, and the carrier surface 11 is used for carrying a baffle. The limiting assembly 2 is movably arranged at the edge of the carrier 1 and is used for fixing the baffle, and the elastic member 3 is arranged at the back surface of the carrier 1, one end of the elastic member 3 is connected with the limiting assembly 2, and the elastic member 3 is used for providing an elastic force for the limiting assembly 2.

[0044] In the embodiment, the carrier 1 is in a disc type structure, and the material of the carrier 1 is alumina ceramic. The limiting assembly 2 is movably arranged on the carrier 1 and is used for fixing the baffle, so that the baffle is prevented from deviating in position during the reaction process and from scratching the reaction chamber. Since the limiting assembly 2 is movably connected with the elastic member 3, the baffle is not prone to breaking when the baffle is affected by thermal stress and thermal strain, and the reaction chamber is prevented from being polluted when the PVD system is debugged and calibrated. Even if the baffle breaks, the broken baffle can be transferred out of the reaction chamber at one time by transferring the carrier 1, so that the possibility of shutdown of the PVD system is reduced, and the reliability of physical vapor deposition is improved.

[0045] As shown in the figure, Figures 1 to 3 In some embodiments, the limiting assembly 2 comprises a plurality of limiting members 21, the plurality of limiting members 21 are arranged along the edge of the carrier 1 in a spaced and annular manner, the limiting members 21 can move along the radial direction of the carrier 1, and one end of each of the plurality of elastic members 3 is connected with a corresponding limiting member 21.

[0046] In the embodiment, the number of the limiting members 21 is four, and the included angle formed by each adjacent two limiting members 21 and the center of the carrier 1 is the same. When the baffle needs to be installed on the carrier 1, the limiting members 21 are first moved towards the edge of the carrier 1 by an external force to increase the range defined by the limiting members 21, then the baffle is placed on the carrier surface 11 of the carrier 1, and then the external force is removed, so that the limiting members 21 are moved back under the pulling of the elastic member 3, thereby clamping and fixing the baffle.

[0047] As shown in the figure, Figures 3 to 6 In some embodiments, a plurality of sliding grooves 12 are formed in the bottom of the carrier 1 along the radial direction, the limiting members 21 have sliding portions 211, and the sliding portions 211 are slidably arranged in the corresponding sliding grooves 12.

[0048] In the embodiment, the sliding groove 12 is a groove type structure, the sliding part 211 is matched with the sliding groove 12, the sliding groove 12 and the sliding part 211 of the limiting part 21 are matched and used at the bottom of the bearing 1, which is used for limiting the sliding direction of the limiting part 21.

[0049] Further, referring to Figure 5 and Figure 6 , the inner side wall of the sliding groove 12 is provided with a limiting recess 121, the limiting recess 121 extends along the axial direction of the sliding groove 12, the sliding part 211 is provided with a protruding part 212 corresponding to the limiting recess 121, and the protruding part 212 is matched with the limiting recess 121.

[0050] In the embodiment, when the sliding part 211 is located in the sliding groove 12, the protruding part 212 is matched with the limiting recess 121, so as to ensure the stability of the sliding cooperation between the sliding part 211 and the sliding groove 12, thereby making the sliding part 211 slide smoothly and reliably.

[0051] In some embodiments, referring to Figure 2 , Figure 4 and Figure 6 , a plurality of limiting holes 13 are arranged at the edge of the bearing 1, the limiting holes 13 are communicated with the sliding groove 12 and extend along the radial direction of the bearing 1. The limiting part 21 is provided with a limiting part 213, the limiting part 213 passes through the limiting hole 13 and protrudes from the bearing surface 11 of the bearing 1, and the bearing surface 11 is used for bearing the baffle.

[0052] In the embodiment, the limiting hole 13 is arranged for limiting the moving distance of the limiting part 21, so as to avoid the limiting part 21 from being separated from the bearing 1 under force, or the limiting part 21 from damaging the baffle when the elastic part 3 drives the limiting part 21 to move back.

[0053] Referring to Figure 3 and Figure 7 , in some embodiments, the baffle fixing device further comprises a connecting part 4 and an abutting part 5, the bottom of the bearing 1 is provided with a mounting groove, the mounting groove is a cylindrical groove structure, and the mounting groove is coaxially arranged with the bearing 1, that is, located at the center of the bearing 1. The sliding groove 12 is communicated with the mounting groove, the connecting part 4 is arranged in the mounting groove, one end of the elastic part 3 is connected with the sliding part 211, the other end of the elastic part 3 is connected with the connecting part 4, one end of the abutting part 5 is connected with the sliding part 211, and the other end of the abutting part 5 is suspended. When an acting force towards the edge of the bearing 1 is applied to the other end of the abutting part 5, the abutting part 5 can drive the limiting part 21 to move towards the edge of the bearing 1.

[0054] In the embodiment, it can be understood that when the force applied to the other end of the abutting piece 5 by the outside is greater than the elastic force of the elastic piece 3, the abutting piece 5 can drive the limiting piece 21 to move towards the edge of the bearing piece 1, so as to increase the limiting range of the limiting piece 21, thereby facilitating the placement of the stop sheet. After the stop sheet is placed on the bearing piece 1, the force applied to the abutting piece 5 is removed, and the limiting pieces 21 are moved back under the action of the elastic force of the elastic piece 3, thereby achieving clamping and fixing of the stop sheet.

[0055] Referring to FIGS. 1 to 4, Figure 3 , Figure 7 and Figure 8 In some specific embodiments, the connecting piece 4 is provided with an abutting hole 41 along the axial direction, so that the connecting piece 4 has a hollow cylindrical structure. The side wall of the connecting piece 4 is provided with a through hole 42 corresponding to the elastic piece 3, the through hole 42 communicates with the abutting hole 41, and the number of the through holes 42 is the same as that of the elastic pieces 3. The elastic piece 3 is a spring, one end of the abutting piece 5 is connected with the sliding part 211 and the other end passes through the through hole 42 and is located in the abutting hole 41.

[0056] In addition, the stop sheet fixing device further comprises a supporting piece 6, and the supporting piece 6 has a supporting part 61 for inserting into the abutting hole 41 to apply a force to the abutting piece 5 towards the edge of the bearing piece 1.

[0057] In the embodiment, when it is needed to place a stop sheet on the bearing piece 1, the abutting hole 41 is aligned with the supporting part 61, and then the bearing piece 1 is placed on the supporting piece 6. At this time, due to the gravity of the bearing piece 1, the supporting part 61 is inserted into the abutting hole 41, and the supporting part 61 applies a force to the abutting piece 5 to push the limiting piece 21 to move towards the edge of the bearing piece 1. At this time, the stop sheet can be placed on the bearing surface 11 of the bearing piece 1, and then the bearing piece 1 is removed from the supporting piece 6. Each limiting piece 21 is moved back under the action of the elastic piece 3, thereby achieving clamping and fixing of the stop sheet.

[0058] Further, the outer side wall of the supporting part 61 is inclined to form a circular truncated cone structure.

[0059] In the embodiment, by inclining the outer side wall of the supporting part 61, the force applied to the abutting piece 5 when the supporting part 61 is inserted into the abutting hole 41 is facilitated.

[0060] It can be understood that when the support part 61 is inserted into the abutting hole 41, the support part 61 can simultaneously exert a force on each abutting piece 5 to ensure that each limiting piece 21 can move synchronously, and when the carrier 1 is removed from the support 6, each limiting piece 21 can simultaneously move back to avoid the shift of the blocking piece during clamping.

[0061] In another embodiment of the utility model provides a kind of physical vapor deposition jig system, including reaction chamber and the shutter fixing device of the described.The reaction chamber is used to deposit film on the surface of wafer.When physical vapor deposition jig system is tested and debugged, the shutter fixing device is arranged in the reaction chamber, for fixing shutter.

[0062] In this embodiment, when physical vapor deposition jig system is tested and debugged, shutter fixing device is placed in the reaction chamber to fix shutter, avoid the position of shutter from deviating during reaction, and from scratching with the inner wall of the reaction chamber.And since the limiting component is movably connected by elastic member, shutter will not easily break when shutter is affected by thermal stress and thermal strain, avoid physical vapor deposition jig system from polluting reaction chamber when tested and debugged, improve the reliability of physical vapor deposition.

[0063] The above is only a specific implementation of the embodiments of the present application, but the protection scope of the embodiments of the present application is not limited to this, any change or replacement within the technical scope disclosed in the embodiments of the present application should be covered in the protection scope of the embodiments of the present application. Therefore, the protection scope of the embodiments of the present application should be subject to the protection scope of the claims.

Claims

1. A shutter fixing device, characterized by, The application relates to a baffle fixing device. The baffle fixing device comprises a carrier for carrying a baffle, a limiting assembly movably arranged at the edge of the carrier for fixing the baffle, and an elastic member arranged at the carrier, one end of the elastic member being connected with the limiting assembly. The limiting assembly comprises a plurality of limiting members, the limiting members being arranged at intervals along the edge of the carrier and being movable along the radial direction of the carrier. One end of the elastic member is connected with the corresponding limiting member. The bottom of the carrier is provided with a plurality of sliding grooves along the radial direction thereof. The limiting member is provided with a sliding part which is slidably arranged in the corresponding sliding groove.

2. The damper fixing device according to claim 1, characterized in that The inner side wall of the sliding groove is provided with a limiting recess. The sliding part is provided with a convex part corresponding to the limiting recess, the convex part being matched with the limiting recess.

3. The damper retaining device of claim 2, wherein The carrier is in a discoid structure, the edge of the carrier being provided with a plurality of limiting holes at intervals, the limiting holes being communicated with the sliding grooves and extending along the radial direction of the carrier. The limiting member is provided with a limiting part, the limiting part penetrating through the limiting hole and protruding from the carrier surface for carrying the baffle.

4. The damper fixing device according to claim 2 or 3, characterized in that The baffle fixing device further comprises a connecting member and an abutting member. The bottom of the carrier is provided with a mounting groove, the mounting groove being coaxially arranged with the carrier and being communicated with the sliding groove.

5. The shroud securing device of claim 2, wherein, The connecting member is arranged in the mounting groove. One end of the elastic member is connected with the sliding part, and the other end is connected with the connecting member. One end of the abutting member is connected with the sliding part. When an acting force is applied to the abutting member towards the edge of the carrier, the limiting member can be driven to move towards the edge of the carrier. The connecting member is provided with an abutting hole along the axial direction thereof, the side wall of the connecting member being provided with a through hole corresponding to the elastic member, the through hole being communicated with the abutting hole. The elastic member is a spring, the abutting member penetrating through the elastic member and the other end penetrating through the through hole and being located in the abutting hole.

6. The shroud securing arrangement of claim 5, wherein, The baffle fixing device further comprises a supporting member. The supporting member is provided with a supporting part for being inserted into the abutting hole to apply the acting force to the abutting member towards the edge of the carrier.

7. The damper retaining device of claim 6, wherein The outer side wall of the supporting part is arranged in an inclined manner to form a circular truncated cone structure. The baffle fixing device is arranged in the reaction chamber.

8. The damper retaining device of claim 7, wherein The baffle fixing device is arranged in the reaction chamber.

9. A physical vapor deposition tool system, characterized by ​ ​

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