Novel air valve for vacuum cryopump and cryopump

Abstract

The air valve comprises a valve body, an adjusting mechanism, an adjusting rod and an air outlet channel, the adjusting mechanism is fixedly installed on one side of the valve body, a spring is arranged on the adjusting rod in a sleeved mode, the adjusting rod vertically moves under the action of the spring, the adjusting mechanism comprises a rotary knob and a plurality of vent holes, and the air outlet channel is communicated with the rotary knob. According to the utility model, the gas valve is arranged, so that the gas flowing-out speed can be increased, and the environment can quickly reach a vacuum state; and through vacuum end assembly and use of the fixing clamp, high sealing performance of the joint is ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to low temperature pump technical field especially a kind of gas valve and low temperature pump for new vacuum low temperature pump. BACKGROUND

[0002] Low temperature pump is a kind of vacuum pump that captures gas molecules onto a low temperature plate cooled to ultra-low temperature by condensation or adsorption. This pump can obtain the maximum pumping speed, the lowest limit pressure and clean vacuum, and is widely used in semiconductor and integrated circuit research and production, molecular beam research and other aspects. Vacuum environment not only can reduce the interference of gas molecules to the processing process, improve the quality and consistency of product, but also can effectively prevent the occurrence of oxidation, corrosion and other adverse reactions. However, the traditional vacuum pump has certain limitations in achieving and maintaining high vacuum degree, especially in extreme conditions. The pumping speed of the traditional vacuum pump is low, and it is difficult to quickly remove the gas molecules in the working space. The traditional vacuum pump is prone to leakage at the connection, especially in high temperature or high pressure environment, the sealing element may be aged or failed, resulting in the decrease of vacuum degree. SUMMARY

[0003] To solve the above problems, the utility model provides a kind of gas valve for new vacuum low temperature pump, including valve body, adjusting mechanism, adjusting rod and outlet passage, the adjusting mechanism is fixedly installed at valve body one side, spring is set on the adjusting rod, and it is vertically moved under the action of spring, the adjusting mechanism includes knob and multiple air holes, and the knob controls the on-off of first pipeline.

[0004] The utility model also provides a kind of low temperature pump, including the gas valve for new vacuum low temperature pump described in the above scheme.

[0005] On the basis of the above scheme, the vacuum low temperature pump further includes an outer shell, a cylinder shell, a cold screen, a cold umbrella, a refrigeration device and a temperature joint, the outer shell is provided as a hollow structure with one end open, the cold screen is fixedly arranged inside the outer shell, the cold umbrella is arranged in the cold screen, the cylinder shell is fixedly arranged on one side of the outer shell and is connected through, and the refrigeration device is used to create a low temperature environment for the cold screen and the cold umbrella.

[0006] On the basis of the above scheme, the temperature joint is used to connect a temperature sensor, and is connected with the cylinder shell through vacuum end assembly.

[0007] On the basis of the above scheme, the gas valve is connected with the cylinder shell through a fixing clamp.

[0008] On the basis of the above scheme, the fixing clamp is a KF25C type clamp, including two semicircular clamping rings, which are fixed together by bolts or buckles.

[0009] Compared with the prior art, the beneficial effects of the utility model are that: through the setting of the air valve, the cooperation of the adjusting mechanism can control the in and out of the gas, and release the excessive pressure when the pressure is too high, preventing the equipment from being damaged; through the setting of the temperature joint, the temperature sensor is conveniently connected, and the temperature change condition is monitored in real time; through the use of the vacuum end assembly and the KF25C type clamp, the high sealing property of the connection is ensured, gas leakage is avoided, and the stability of the vacuum environment is improved. BRIEF DESCRIPTION OF DRAWINGS

[0010] Figure 1 It is the complete structure schematic diagram of the utility model;

[0011] Figure 2 It is the air valve and the section structure schematic diagram of the utility model;

[0012] Figure 3 It is the air valve adjusting mechanism section view of the utility model; DETAILED DESCRIPTION

[0013] The utility model is further described below in combination with the drawings:

[0014] In the utility model, unless another explicit provision and limitation, the terms "mount", "connect", "link", "fix" and the like terms should be broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrated;It can be directly connected, or indirectly connected through the intermediate medium, it can be the communication of two elements or the interaction relationship of two elements.For ordinary skilled in the art, the specific meaning of the above-mentioned terms in the utility model can be understood according to the specific circumstances.

[0015] In the description of the utility model, it should be understood that the orientation or position relationship indicated by the terms "left", "right", "front", "back", "top", "bottom" and the like is based on the orientation or position relationship shown in the drawing, only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, therefore, it cannot be understood as a limitation on the utility model.

[0016] As Figure 2 As shown in the utility model provides a kind of air valve for novel vacuum cryopump, the air valve 6 including valve body, adjusting mechanism 61, adjusting rod 62 and outlet passage 64, the adjusting mechanism is fixedly installed in valve body side, spring 63 is set on adjusting rod, and it is vertically moved under the action of spring.

[0017] As Figure 3As shown, the adjusting mechanism includes a knob 612 and a plurality of air holes 611. The gas valve can achieve a high vacuum environment, and the implementation is as follows: when the cryogenic pump is turned on, the cavity starts to inhale, when the gas is exhausted, the channel between the adjusting rod and the cylinder shell is opened, the internal gas passes through the gas outlet channel 64, and is discharged through the valve body channel 66, the internal gas pressure is reduced, the adjusting rod is driven by the spring to block the channel, and a vacuum environment is formed; the gas valve further comprises an adjusting mechanism 61, the mechanism has two pipelines connected to the valve body, wherein the first pipeline 613 is connected to the inside of the cold screen through the valve body, and a plurality of air holes are arranged on the adjusting mechanism; a high vacuum environment is formed in the cold screen by adjusting the knob, and the pressure in the control system is controlled. When the pressure in the system is too high, the gas valve can be automatically opened to release the excess pressure and prevent the equipment from being damaged; when the pressure in the system is too low, the gas valve can be closed to prevent external air from entering the system and affecting the vacuum degree.

[0018] Preferably, the valve body channel is not only one, which increases the speed of gas outflow.

[0019] As Figure 1 As shown, the utility model also provides a cryogenic pump, including outer casing 1, cold screen 2, cold umbrella 3, cylinder shell 4, refrigerating plant 5, gas valve 6 and temperature joint 8, the outer casing is arranged to the hollow structure of one end opening, the cold screen is fixedly arranged in the inside of outer casing, the cold umbrella is arranged in the cold screen, the cylinder shell is fixedly arranged at one side of outer casing and is connected through, the refrigerating plant is used to make low temperature environment for cold screen and cold umbrella, the gas valve is connected with cylinder shell through fixed clamp 7.

[0020] Preferably, in order to monitor the change of temperature in real time, the utility model is provided with temperature joint 8 for connecting temperature sensor, which is assembled with the cylinder shell through the vacuum end.

[0021] The cryogenic pump provided by the utility model can effectively generate a vacuum environment in an application environment, especially in the semiconductor manufacturing industry, which can provide a good vacuum environment and ensure the processing precision of semiconductor manufacturing. Specifically, the outer casing is designed in the form of one end opening, which not only facilitates the docking with a system or a container that needs to maintain a vacuum state, but also facilitates the maintenance and disassembly operation of the equipment. Preferably, a connecting flange can be used, and the other end of the outer casing is closed to ensure the sealing effect. The cold screen and the cold umbrella structure are cooled by the refrigerating device to form a low temperature environment. The cold umbrella is provided with adsorbents, which can effectively capture and solidify gas molecules in the environment when the temperature drops to a certain level, thereby generating a vacuum environment. In this way, the cryogenic pump of the utility model not only effectively removes air and other potential interfering substances in the working space, but also maintains a highly pure vacuum environment for a long time, providing conditions for precision manufacturing.

[0022] Preferably, a gap is arranged between the outer shell and the cold shield, and the height of the cold shield is less than the height of the outer shell.

[0023] Preferably, the cold umbrella comprises a plurality of cold umbrella pieces, the cold umbrella pieces are fixed and spliced by two mirror arranged circular ring pieces to form a complete circular ring shape, and the diameters of the cold umbrella pieces gradually increase from inside to outside.

[0024] Preferably, the gas valve is connected with the cylinder shell through a fixing clamp 7.

[0025] Preferably, the fixing clamp is a KF25C clamp, comprising two semicircular clamping rings which are fixed together through bolts or buckles.

[0026] Preferably, the components in the utility model are assembled and used by vacuum end assembly to provide a high vacuum environment.

[0027] The basic principle and main features of the utility model are shown and described above, and it is obvious for those skilled in the art that the utility model is not limited to the details of the above exemplary embodiments, so the embodiments should be regarded as exemplary and non-restrictive, the scope of the utility model is defined by the appended claims instead of the above description, and all changes falling within the meaning and scope of the equivalent elements of the claims should be included in the utility model.

[0028] In addition, it should be understood that, although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description manner of the specification is only for the sake of clarity, those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be properly combined to form other embodiments which can be understood by those skilled in the art.

Claims

1. A new type of gas valve for vacuum cryogenic pumps, characterized in that, Including valve body, adjusting mechanism (61), adjusting rod (62) and air outlet passage (64), the adjusting mechanism (61) is fixedly installed on one side of the valve body, the adjusting rod (62) is provided with spring (63), under the action of spring (63), vertically moves, the adjusting mechanism includes knob (612) and multiple air holes (611), the knob controls the on-off of first pipeline (613).

2. A cryopump, characterized by, The gas valve (6) for the new type of vacuum low temperature pump comprises a valve body, an adjusting mechanism (61), an adjusting rod (62) and an air outlet passage (64).

3. A cryopump as defined in claim 2, wherein Further comprising an outer shell (1), a cylinder shell (4), a cold screen (2), a cold umbrella (3), a refrigeration device (5) and a temperature joint (8), the outer shell (1) is provided as a hollow structure with one end open, the cold screen (2) is fixedly arranged inside the outer shell (1), the cold umbrella (3) is arranged in the cold screen (2), the cylinder shell (4) is fixedly arranged on one side of the outer shell (1) and is connected through, the refrigeration device (5) is used to manufacture low temperature environment for the cold screen (2) and the cold umbrella (3).

4. A cryopump as defined in claim 2, wherein The gas valve (6) is connected with the cylinder shell (4) through a fixing clamp (7).

5. A cryopump as defined in claim 3, wherein The temperature joint (8) is used for connecting a temperature sensor and is connected with the cylinder shell (4) through a vacuum end assembly.

6. A cryopump as defined in claim 4, wherein The fixing clamp (7) is a KF25C type clamp, comprising two semicircular clamping rings, which are fixed together by bolts or buckles.

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