Faraday cage fixing device

Abstract

The utility model relates to the field of semiconductor production and manufacturing, in particular to a Faraday cage fixing device which comprises an annular fixing piece and a fixing bolt. The outer side of the Faraday cage is sleeved with the annular fixing piece. The inner ring of the annular fixing piece comprises a step extension part; the step surface of the step extension part is attached to the step surface of the bottom step of the Faraday cage, so that the Faraday cage is pressed and fixed; the outer ring of the annular fixing piece comprises a fixing through hole; the fixing through holes are used for fixing the annular fixing piece on a mounting surface through the fixing bolts; the annular fixing piece comprises a plurality of arc-shaped fixing units. According to the utility model, the contact area between the fixing device and the Faraday cage is increased, so that the stress of the sealing ring below the Faraday cage is more uniform, the sealing performance of the cavity after the Faraday cage is installed is improved, and the leakage rate is reduced; and meanwhile, the annular fixing piece is divided into a plurality of arc-shaped fixing units, so that installation is facilitated, and the installation efficiency of the Faraday cage is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing, and in particular to a fixing device for a Faraday cage. Background Technology

[0002] During the periodic maintenance of semiconductor etching equipment, it is necessary to secure the bottom of the Faraday cage installed on the outside of the quartz tube of the etching equipment. The Faraday cage not only generates a high-frequency electromagnetic field and provides electromagnetic shielding during the etching process, but also serves to fix the quartz tube inside.

[0003] Existing technology for securing the Faraday cage involves using screws and small baffles to fix the bottom step of the Faraday cage. (See reference...) Figure 1-1 , Figure 1-1 The figure shows a top cross-sectional view of the Faraday cage after it has been fixed in the prior art. The Faraday cage is secured by four screws and corresponding small baffles. However, in the prior art, because the screws are independent of each other, it is easy for the screws to have different tightening degrees. This uneven tightening leads to uneven stress on the sealing ring located below the Faraday cage, resulting in varying degrees of contact between the sealing ring and the Faraday cage. (See reference...) Figure 1-2 , Figure 1-2 for Figure 1-1 The cross-sectional diagram at the dotted line shows the uneven contact between the bottom step of the Faraday cage and the sealing ring caused by screws with different tightness. It can be seen that in the prior art, after the Faraday cage is installed, it is very easy for the seal at the connection between the quartz tube fixed by the Faraday cage and the mounting surface to be not tight, resulting in an excessively high leakage rate in the cavity formed by the Faraday cage, the quartz tube and the corresponding equipment on the mounting surface.

[0004] Therefore, how to improve the sealing performance between the quartz tube and the mounting surface after the Faraday cage is installed, and avoid cavity leakage caused by uneven force on the sealing ring, has become a problem that needs to be solved by those skilled in the art. Utility Model Content

[0005] The purpose of this invention is to provide a fixing device for a Faraday cage to solve the problem of high leakage rate of the cavity after the Faraday cage is installed in the prior art.

[0006] To solve the above-mentioned technical problems, this utility model provides a fixing device for a Faraday cage, including an annular fixing member and fixing bolts; the annular fixing member is fitted onto the outside of the Faraday cage;

[0007] The inner ring of the annular fastener includes a stepped extension; the stepped surface of the stepped extension fits against the stepped surface of the bottom step of the Faraday cage, pressing and fixing the Faraday cage.

[0008] The outer ring of the ring-shaped fixing member comprises fixing through holes; the fixing through holes are used for fixing the ring-shaped fixing member on a mounting surface through the fixing bolts;

[0009] The ring-shaped fixing member comprises a plurality of arc-shaped fixing units.

[0010] Optionally, in the fixing device of the Faraday cage, the arcs of all the arc-shaped fixing units are the same.

[0011] Optionally, in the fixing device of the Faraday cage, the number of the fixing through holes on each arc-shaped fixing unit is the same.

[0012] Optionally, in the fixing device of the Faraday cage, the fixing through holes are equally spaced on the ring-shaped fixing member.

[0013] Optionally, in the fixing device of the Faraday cage, the arc-shaped fixing units are semicircular fixing units.

[0014] The ring-shaped fixing member comprises two semicircular fixing units.

[0015] Optionally, in the fixing device of the Faraday cage, each semicircular fixing unit comprises four fixing through holes.

[0016] and / or,

[0017] The distance from the fixing through holes to the Faraday cage ranges from 0.8 cm to 1.3 cm, inclusive.

[0018] Optionally, in the fixing device of the Faraday cage, the fixing bolts are inner hexagonal bolts.

[0019] Optionally, in the fixing device of the Faraday cage, the ring-shaped fixing member is an aluminum ring fixing member.

[0020] Optionally, in the fixing device of the Faraday cage, a plurality of buffer blocks are further included.

[0021] The buffer blocks are arranged between adjacent arc-shaped fixing units.

[0022] Optionally, in the fixing device of the Faraday cage, the buffer blocks are polytetrafluoroethylene buffer blocks.

[0023] The Faraday cage fixing device provided by this utility model includes an annular fixing member and fixing bolts; the annular fixing member is fitted onto the outer side of the Faraday cage; the inner ring of the annular fixing member includes a stepped extension; the stepped surface of the stepped extension is in contact with the stepped surface of the bottom step of the Faraday cage, pressing and fixing the Faraday cage; the outer ring of the annular fixing member includes a fixing through hole; the fixing through hole is used to fix the annular fixing member to the mounting surface through the fixing bolts; the annular fixing member includes multiple arc-shaped fixing units. This invention improves the fixing device into a ring-shaped fixing component. The stepped extension contacts and presses against the bottom step of the Faraday cage, thus fixing the Faraday cage. This significantly increases the contact area between the fixing device and the Faraday cage, making the sealing ring located below the Faraday cage more evenly stressed. This prevents the bottom step of the Faraday cage from warping due to excessive local pressure, improving the sealing performance between the quartz tube and the mounting surface after the Faraday cage is installed, and reducing leakage. Furthermore, the ring-shaped fixing component is divided into multiple arc-shaped fixing units, facilitating installation and improving the installation efficiency of the Faraday cage. Attached Figure Description

[0024] To more clearly illustrate the technical solutions of the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1-1 This is a top cross-sectional view of a conventional method for fixing a Faraday cage.

[0026] Figure 1-2 This is a partial cross-sectional view of a prior art method for fixing a Faraday cage;

[0027] Figure 2 A schematic diagram of a specific embodiment of the fixing device for the Faraday cage provided by this utility model;

[0028] Figure 3 A partial structural diagram of a specific embodiment of the fixing device for the Faraday cage provided by this utility model after it is connected and fixed to the Faraday cage;

[0029] Figure 4 A schematic diagram of the installation process of a specific embodiment of the fixing device for the Faraday cage provided by this utility model;

[0030] Figure 5 A schematic diagram of another specific embodiment of the fixing device for the Faraday cage provided by this utility model.

[0031] 10-ring fixed, 11-arc fixed unit, 12-fixed through hole, 01-Faraday shield, 01a-bottom step, 02-seal ring, 20-fixing bolt, 30-buffer block. DETAILED DESCRIPTION

[0032] In order to make the person skilled in the art better understand the utility model scheme, the utility model is further described in detail below in combination with the drawings and specific embodiments. Obviously, the described embodiments are only part of the embodiments of the utility model, not all. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without creative labor belong to the scope of protection of the utility model.

[0033] The core of the utility model is to provide a kind of fixing device of Faraday shield 01, and the structure diagram of one specific embodiment as shown in Figure 2 And Figure 3 It is called embodiment one, including annular fixing piece 10 and fixing bolt 20;The annular fixing piece 10 is sleeved on the outside of Faraday shield 01;

[0034] The inner circle of the annular fixing piece 10 includes step extension;The step face of the step extension is attached to the step face of the bottom step 01a of the Faraday shield 01, to press and fix the Faraday shield 01;

[0035] The outer circle of the annular fixing piece 10 includes fixed through hole 12;The fixed through hole 12 is used to fix the annular fixing piece 10 on the mounting surface by the fixing bolt 20;

[0036] The annular fixing piece 10 includes a plurality of arc fixed units 11.

[0037] The bottom step 01a of the Faraday shield 01 refers to the stepped structure of the base position of the Faraday shield 01, please refer to Figure 3 , Figure 3 The partial schematic diagram of the fixing device of Faraday shield 01 provided by the utility model after installation is shown in the figure. In addition, the utility model "the step face of the step extension is attached to the step face of the bottom step 01a of the Faraday shield 01" explains that the step face of the step extension is opposite to the step face of the bottom step 01a of the Faraday shield 01, so that the two step faces can be attached, and Figure 3 It is understood that the step face of the bottom step 01a of the Faraday shield 01 is upward, and the step face of the step extension is downward in the figure, which is boxed with dotted line.

[0038] Specifically, the arc of all arc-shaped fixing units 11 is the same. In the preferred embodiment, all arc-shaped fixing units 11 are set to the same arc, which facilitates the unified production of the arc-shaped fixing units 11, replacement during installation, and further facilitates the installation of the Faraday cage 01.

[0039] Further, the number of fixing through holes 12 on each arc-shaped fixing unit 11 is the same. Setting the number of fixing through holes 12 on each arc-shaped fixing unit 11 to be the same can further improve the consistency of the pressure exerted by each arc-shaped fixing unit 11 on the Faraday cage 01, thereby improving the uniformity of the pressure exerted by the annular fixing member 10 on the Faraday cage 01 as a whole.

[0040] Further, the fixing through holes 12 are equally spaced on the annular fixing member 10. Registering the fixing through holes 12 on the annular fixing member 10 at equal intervals, i.e., equally spacing the fixing bolts 20 on the annular fixing member 10, can further improve the stability of the pressure exerted by the annular fixing member 10 on the Faraday cage 01.

[0041] Specifically, the arc-shaped fixing unit 11 is a semicircular fixing unit.

[0042] The annular fixing member 10 includes two semicircular fixing units.

[0043] In the specific embodiment, the annular fixing member 10 is directly split into two semicircular fixing units, which retains the advantage of easy installation of the fixing device of the Faraday cage 01 while minimizing the number of arc-shaped fixing units 11 in the annular fixing member 10, improving the installation speed of the Faraday cage 01, and simplifying the installation steps.

[0044] As a specific example, each semicircular fixing unit includes four fixing through holes 12. Of course, the annular fixing member 10 includes two semicircular fixing units, and therefore, the annular fixing member 10 includes a total of eight fixing through holes 12, which is the optimal number of fixing through holes 12 obtained after a large number of theoretical calculations and actual tests. Fixing the semicircular fixing unit at four points can avoid the lifting of the sealing ring 02 at the bottom of the Faraday cage 01. Of course, a single semicircular fixing unit can also include two, three, or five fixing through holes 12, which can be adjusted according to actual conditions, and the present application is not limited in this regard.

[0045] In addition, the distance from the fixed through hole 12 to the Faraday shield 01 is in the range of 0.8-1.3 cm, including the end point values, such as any of 0.80 cm, 1.00 cm or 1.30 cm. If the fixed through hole 12 is too close to the Faraday shield 01, it is difficult to use a hexagonal wrench to tighten the fixing bolt 20, and the bolt is prone to slipping. For reference Figure 4 In the preferred embodiment, the distance from the fixed through hole 12 to the Faraday shield 01 is lengthened, so that the wrench used to tighten the fixing bolt 20 can be forced in the forward direction, and the angle of force can be easily adjusted, avoiding the problems of bolt slipping and breaking caused by improper force on the fixing bolt 20, and reducing the difficulty of installation.

[0046] As a preferred embodiment, the fixing bolt 20 is an internal hexagonal bolt. The fixing bolt 20 is limited to the internal hexagonal bolt, which can be tightened using a hexagonal wrench. The hexagonal wrench requires much less operating space than other types of wrenches, and can better complete the tightening of the internal hexagonal bolt in a smaller space, which is conducive to the miniaturization of the Faraday shield 01.

[0047] As another preferred embodiment, the annular fixing member 10 is an aluminum ring fixing member. Using an aluminum ring as a fixing member can reduce the cost and processing difficulty of the device while ensuring sufficient mechanical strength. Of course, different annular fixing members 10 can be used according to actual conditions, and the present application is not limited in this regard.

[0048] The fixing device of the Faraday cage 01 is improved to the annular fixing part 10, and the step extension part is contacted with the bottom step 01a of the Faraday cage 01 and is pressed and fixed, so that the fixing of the Faraday cage 01 is realized, thereby greatly increasing the contact area of the fixing device and the Faraday cage 01, making the stress of the sealing ring 02 located below the Faraday cage 01 more uniform, avoiding the Faraday cage 01 bottom step 01a from being raised due to local large pressure, improving the connection sealing property of the quartz tube fixed after the Faraday cage 01 is installed and the installation surface, and reducing the leakage rate; meanwhile, the annular fixing part 10 is split into a plurality of arc-shaped fixing units 11, so that the installation is facilitated, and the installation efficiency of the Faraday cage 01 is improved.

[0049] On the basis of the first specific embodiment, the fixing device of the Faraday cage 01 is further improved to obtain the second specific embodiment, and the corresponding structural diagram is as shown in Figure 5 The annular fixing part 10 is sleeved on the outer side of the Faraday cage 01;

[0050] The inner circle of the annular fixing part 10 includes a step extension part; the step surface of the step extension part is matched with the step surface of the bottom step 01a of the Faraday cage 01, and the Faraday cage 01 is pressed and fixed;

[0051] The outer circle of the annular fixing part 10 includes a fixing through hole 12; the fixing through hole 12 is used for fixing the annular fixing part 10 on the installation surface through the fixing bolt 20;

[0052] The annular fixing part 10 includes a plurality of arc-shaped fixing units 11.

[0053] Further including a plurality of buffer blocks 30;

[0054] The buffer block 30 is arranged between adjacent arc-shaped fixing units 11.

[0055] The difference between the present specific embodiment and the above specific embodiment is that the buffer block 30 is additionally arranged in the fixing device of the Faraday cage 01 in the present specific embodiment, and the rest of the structure is the same as the above specific embodiment, which will not be described here.

[0056] In the specific embodiment, the buffer block 30 is additionally arranged between the adjacent arc-shaped fixing units 11. After the buffer block 30 is additionally arranged, the arc-shaped fixing units 11 will not directly collide with each other, but only contact the buffer block 30, thereby reducing the wear of the arc-shaped fixing units 11 and increasing the service life of the fixing device of the Faraday cage 01.

[0057] Further, the buffer block 30 is a polytetrafluoroethylene buffer block 30. The polytetrafluoroethylene buffer block 30 has good elasticity and plasticity, and has low production cost. Of course, other types of buffer blocks 30 can also be selected according to actual conditions, and the utility model is not limited herein.

[0058] The embodiments in the specification are described in a progressive manner, and each embodiment focuses on the difference from other embodiments. The same or similar parts of each embodiment can be referred to each other. For the device disclosed in the embodiments, since it corresponds to the method disclosed in the embodiments, the description is relatively simple, and the related parts can be referred to the method part.

[0059] It should be noted that, in the specification, the relationship terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between the entities or operations. Moreover, the terms "include", "contain" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or device. Without more limitations, the element defined by the statement "including a" does not exclude the presence of another identical element in the process, method, article or device including the element.

[0060] The fixing device of the Faraday cage provided by the utility model is described in detail above. The principle and implementation mode of the utility model are described by applying specific examples in this paper. The description of the above embodiments is only used to help understand the method of the utility model and its core idea. It should be pointed out that, for ordinary skilled persons in the technical field, without departing from the principle of the utility model, the utility model can be improved and modified in several ways, and these improvements and modifications also fall within the protection scope of the claims of the utility model.

Claims

1. A Faraday cage fixing device, characterized by, The ring-shaped fixing member and the fixing bolt are included; the ring-shaped fixing member is sleeved on the outside of the Faraday cage; The inner ring of the ring-shaped fixing member includes a stepped extension; the stepped surface of the stepped extension is in contact with the stepped surface of the bottom step of the Faraday cage, thereby pressing and fixing the Faraday cage; The outer ring of the ring-shaped fixing member includes a fixing through hole; the fixing through hole is used for fixing the ring-shaped fixing member on the mounting surface through the fixing bolt; The ring-shaped fixing member includes a plurality of arc-shaped fixing units.

2. The Faraday cage fixation device of claim 1, wherein, The radii of all the arc-shaped fixing units are the same.

3. The Faraday cage fixation device of claim 1, wherein, The number of the fixing through holes on each arc-shaped fixing unit is the same.

4. The Faraday cage fixation device of claim 1, wherein, The fixing through holes are equally spaced on the ring-shaped fixing member.

5. The Faraday cage fixture of claim 1, wherein, The arc-shaped fixing unit is a semicircular fixing unit; The ring-shaped fixing member includes two semicircular fixing units.

6. The Faraday cage fixation device of claim 5, wherein, Each semicircular fixing unit includes four fixing through holes; And / or, The distance from the fixing through hole to the Faraday cage is in the range of 0.8 cm to 1.3 cm, including the end values.

7. The Faraday cage fixture of claim 1, wherein, The fixing bolt is an internal hexagonal bolt.

8. The Faraday cage fixture of claim 1, wherein, The ring-shaped fixing member is an aluminum ring fixing member.

9. A Faraday cage fixation device as claimed in any one of claims 1 to 8, characterized in that A plurality of buffer blocks are further included; The buffer blocks are arranged between adjacent arc-shaped fixing units.

10. The Faraday cage fixture of claim 9, wherein, The buffer block is a polytetrafluoroethylene buffer block.

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