Vertical probe card

Abstract

The utility model provides a vertical probe card, which comprises a base plate, a probe card head is arranged at the upper end of the base plate, a probe main body is arranged at the inner side of the probe card head, threaded holes are arranged at the four corners of the upper end of the probe card head, a cover plate is arranged at the upper end of the probe card head through the threaded holes, and the probe card head is arranged on the cover plate. The cover plate and the probe clamping head are installed, the bolt columns A located at the four corners of the upper end of the cover plate are connected with the threaded holes, the magnetic attraction tool is used for assisting in dismounting of the cover plate, the working principle of the magnetic attraction tool is that a powerful magnet and the probe attract each other, and under the assistance of the magnetic attraction tool, the probe can be taken together to be separated; when the cover plate is detached, the probe does not interfere with a gold plating point on a circuit board below, so that the probe can be safely and effectively separated from the cover plate when the cover plate is detached, and bending, breakage or other damages caused by contact between the probe and the gold plating point are avoided.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the vertical probe card related technical field, specifically vertical probe card. BACKGROUND

[0002] The vertical probe card is a kind of equipment for semiconductor testing, mainly used to contact the test point of chip in vertical direction, it is usually composed of multiple probes, these probes can accurately contact the electrical connection point on chip surface to carry out electrical test and signal measurement, the design of vertical probe card enables it to realize efficient test in high-density integrated circuit, and it is widely used in chip research and production process to ensure the performance and quality of chip.

[0003] The existing probe card is used as control circuit when detecting semiconductor chip, is applied to corresponding detection equipment, probe, upper and lower guide plate and metal piece are combined into probe head first, probe head is combined with PCB substrate to form probe card, probe head has a cover plate, the cover plate has the need of disassembly, since probe is very small, it is not clear, probe is damaged when disassembling cover plate. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a kind of vertical probe card to solve the problem that the existing probe card is used as control circuit when detecting semiconductor chip in the above background art, is applied to corresponding detection equipment, probe, upper and lower guide plate and metal piece are combined into probe head first, probe head is combined with PCB substrate to form probe card, probe head has a cover plate, the cover plate has the need of disassembly, since probe is very small, it is not clear, probe is damaged when disassembling cover plate.

[0005] To achieve the above object, the utility model provides the following technical scheme: a kind of vertical probe card, including chassis, probe head is installed at the upper end position of the chassis, probe main body is arranged at the inner side position of the probe head, screw hole is arranged at the upper end four corners position of the probe head, the cover plate is installed at the upper end position by screw hole of the probe head, the cover plate is installed with the probe head, bolt column A in the upper end four corners position of the cover plate is connected with screw hole, two L-shaped clamping columns are fixed at the upper end left side position of the cover plate, magnetic attraction tool shell is arranged at the upper end position of the cover plate, through hole is arranged at the upper end four corners position of the magnetic attraction tool shell, top plate is installed at the upper end position of the magnetic attraction tool shell, the top plate is installed with the magnetic attraction tool shell by bolt column B in the upper end position, clamping groove is arranged at the lower end position of the magnetic attraction tool shell.

[0006] Preferably, the probe head is installed with the chassis by multiple bolt columns in the upper end position.

[0007] Preferably, the outer end surface of the cover plate is provided with a plurality of arc-shaped grooves corresponding to the plurality of bolt columns on the upper end of the probe card head.

[0008] Preferably, the bolt column A is rotated into the inner position of the threaded hole to mount the cover plate on the upper end of the probe card head.

[0009] Preferably, the outer end surface of the magnetic tool shell is provided with a plurality of arc-shaped grooves, and the magnetic tool shell is mounted on the upper end of the cover plate, so that the arc-shaped grooves on the upper end of the magnetic tool shell are fitted with the arc-shaped grooves of the cover plate.

[0010] Preferably, the upper end of the magnetic tool shell is provided with a through hole which can be used as a spare hole.

[0011] Preferably, the top plate is mounted on the magnetic tool shell through a plurality of bolt columns B, and the magnet in the inner position of the magnetic tool shell can be removed after the top plate is disassembled.

[0012] Preferably, the L-shaped clamping column is completely clamped in the inner position of the clamping groove, so that the magnetic tool shell is aligned with the corners of the cover plate.

[0013] Compared with the prior art, the vertical probe card has the following beneficial effects:

[0014] 1. The device uses a magnetic tool to assist in disassembling the cover plate. The working principle of the magnetic tool is to use a strong magnet to attract the probe. Under the assistance of the magnetic tool, the needle will be separated together and will not interfere with the gold-plated points on the circuit board below, so that the probe can be safely and effectively separated from the cover plate during disassembly, thereby avoiding bending, breaking or other damage caused by contact between the probe and the gold-plated points.

[0015] 2. The magnetic tool shell is placed on the upper end of the cover plate, and the worker must hold the cover plate tightly before picking it up. If the cover plate is not held firmly, the probe will fall and be damaged. The device is fixed with an L-shaped clamping column on the upper end of the cover plate, and a clamping groove is provided on the lower end of the magnetic tool shell. When the L-shaped clamping column is clamped in the inner position of the clamping groove, the magnetic tool shell and the cover plate are in a coincident state. Therefore, when the operator holds the cover plate and picks up the cover plate and the magnetic tool shell, even if the hand is dropped, since the L-shaped clamping column is clamped in the inner position of the clamping groove, the cover plate will not fall off, and it will still be tightly fitted with the magnetic tool shell. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a vertical probe card structure schematic diagram of the utility model.

[0017] Figure 2 It is a vertical probe card split structure schematic diagram of the utility model.

[0018] Figure 3 It is a vertical probe card magnetic attraction tool shell bottom structure schematic diagram of the utility model.

[0019] Figure 4 It is a vertical probe card magnetic attraction tool shell section structure schematic diagram of the utility model.

[0020] In the drawing: 1, base plate; 2, cover plate; 3, probe card head; 4, magnetic attraction tool shell; 5, top plate; 6, through round hole; 7, L type clamping column; 8, bolt column A; 9, screw hole; 10, probe main body; 11, bolt column B; 12, clamping groove. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0022] In the description of the utility model, it should be explained that the directions or position relations indicated by the terms "upper", "lower", "inner", "outer", "front end", "rear end", "two ends", "one end", "the other end" and the like are the directions or position relations shown in the drawings, which are only for the convenience of describing the utility model and simplifying the description, and cannot be understood as limiting or implying that the indicated devices or elements must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the utility model. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0023] In the description of the utility model, it should be explained that, unless otherwise explicitly specified and limited, the terms "mounting", "provided with", "connection" and the like should be understood broadly, for example, "connection" can be fixed connection, can also be detachable connection, or integral connection; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances

[0024] The utility model provides as Figures 1-4The vertical probe card shown includes a chassis 1, a probe card head 3 is installed at the upper end position of the chassis 1, a probe main body 10 is arranged at the inner side position of the probe card head 3, threaded holes 9 are arranged at the upper end four corner positions of the probe card head 3, a cover plate 2 is installed at the upper end position of the probe card head 3 through the threaded holes 9, the cover plate 2 is installed with the probe card head 3, the bolt column A8 at the upper end four corner positions of the cover plate 2 is connected with the threaded hole 9, two L-shaped clamping columns 7 are fixed at the upper end of the cover plate 2 at the left side position, a magnetic tool shell 4 is arranged at the upper end position of the cover plate 2, a through hole 6 is arranged at the upper end of the magnetic tool shell 4 at the four corner positions, a top plate 5 is installed at the upper end position of the magnetic tool shell 4, the top plate 5 is installed with the magnetic tool shell 4 through the bolt column B11 at the upper end position, and a clamping groove 12 is arranged at the lower end position of the magnetic tool shell 4.

[0025] Before using the vertical probe card, the operator needs to check the state of the test equipment and the probe card, ensure that all components are working properly, ensure that the probe surface is free of dirt or oxide to ensure good electrical contact, align the vertical probe card with the semiconductor chip to be tested, ensure that the probe can accurately contact the test points on the chip, fix the probe card on the test equipment through mechanical devices or clamps, ensure that it will not move during the test process, apply appropriate pressure through the control system of the test equipment to make the probe contact with the test points on the chip surface, the test equipment sends test signals to the chip through the probe card and receives signals returned from the chip, the test equipment records the data received by the probe and analyzes whether the chip meets the design specifications.

[0026] As shown in Figure 1 and Figure 2 , the probe card head 3 is installed with the chassis 1 through a plurality of bolt columns at the upper end position, a plurality of arc-shaped grooves are arranged at the outer side end surface position of the cover plate 2, the plurality of arc-shaped grooves correspond to the plurality of bolt columns at the upper end position of the probe card head 3, the bolt column A8 is rotated into the inner position of the threaded hole 9 to install the cover plate 2 at the upper end position of the probe card head 3, a plurality of arc-shaped grooves are arranged at the outer side end surface position of the magnetic tool shell 4, the magnetic tool shell 4 is installed at the upper end position of the cover plate 2, so that the arc-shaped grooves at the upper end position of the magnetic tool shell 4 are fitted with the arc-shaped grooves of the cover plate 2.

[0027] A magnetic tool is used to assist in the disassembly of the cover plate 2, the working principle of the magnetic tool is to use a strong magnet to attract the probe, under the assistance of the magnetic tool, the needle will be separated together, without interfering with the gold-plated points on the circuit board below, so that the probe can be safely and effectively separated with the cover plate 2 when disassembling the cover plate 2.

[0028] As shown in Figure 2 and Figure 3As shown, the upper end of the magnetic tool shell 4 is provided with a through-hole 6, which can be used as a spare hole. The top plate 5 is installed on the magnetic tool shell 4 through a plurality of bolt columns B11. After the top plate 5 is removed, the magnets inside the magnetic tool shell 4 can be taken out. The L-shaped clamping column 7 is completely clamped in the inner position of the clamping groove 12, so that the magnetic tool shell 4 is aligned with the edges and corners of the cover plate 2.

[0029] The L-shaped clamping column 7 is fixed at the upper end of the cover plate 2, and the clamping groove 12 is arranged at the lower end of the magnetic tool shell 4. When the L-shaped clamping column 7 is clamped in the inner position of the clamping groove 12, the magnetic tool shell 4 is in a coincident state with the edges and grooves of the cover plate 2. When the operator holds the cover plate 2 and lifts the cover plate 2 and the magnetic tool shell 4, even if the hand is dropped, since the L-shaped clamping column 7 is clamped in the inner position of the clamping groove 12, the cover plate 2 will not fall off.

[0030] Finally, it should be noted that: the above only for the preferred embodiments of the present application, and not for limiting the present application, although the foregoing detailed description of the present application, for those skilled in the art, it can still be modified, or part of the technical features of the equivalent replacement, within the spirit and principles of the present application, any modification, equivalent replacement, improvement, etc., should be included in the scope of the present application.

Claims

1. A vertical probe card, characterized by, The utility model provides a probe head fixing device, including chassis (1), the upper end position of chassis (1) is installed with probe head (3), the inside position of probe head (3) is provided with probe main part (10), the upper end four corners position of probe head (3) is provided with threaded hole (9), the upper end position of probe head (3) is installed with cover plate (2) through threaded hole (9), cover plate (2) is installed with probe head (3), the bolt column A (8) of the upper end four corners position of cover plate (2) is connected with threaded hole (9), the upper end of cover plate (2) is fixed with two L type clamping columns (7) in left side position, the upper end position of cover plate (2) is provided with magnetic attraction tool shell (4), the upper end of magnetic attraction tool shell (4) is provided with through circular hole (6) in four corners position, the upper end position of magnetic attraction tool shell (4) is installed with top plate (5), top plate (5) is installed with magnetic attraction tool shell (4) through bolt column B (11) of upper end position, the lower end position of magnetic attraction tool shell (4) is provided with clamping groove (12).

2. The vertical probe card of claim 1, wherein: The probe head (3) is installed with the chassis (1) through a plurality of bolt columns of the upper end position.

3. The vertical probe card of claim 2, wherein: The outer side end surface position of the cover plate (2) is provided with a plurality of arc grooves corresponding to a plurality of bolt columns of the upper end position of the probe head (3).

4. The vertical probe card of claim 3, wherein: The bolt column A (8) is rotated into the inner position of the threaded hole (9), and the cover plate (2) is installed at the upper end position of the probe head (3).

5. The vertical probe card of claim 3, wherein: The outer side end surface position of the magnetic attraction tool shell (4) is provided with a plurality of arc grooves, and the magnetic attraction tool shell (4) is installed at the upper end position of the cover plate (2), so that the arc grooves at the upper end position of the magnetic attraction tool shell (4) are fitted with the arc grooves of the cover plate (2).

6. The vertical probe card of claim 1, wherein: The through circular hole (6) is provided at the upper end four corners position of the magnetic attraction tool shell (4), and the through circular hole (6) can be used as a spare hole.

7. The vertical probe card of claim 1, wherein: The top plate (5) is installed with the magnetic attraction tool shell (4) through a plurality of bolt columns B (11), and after the top plate (5) is disassembled, the magnet at the inner position of the magnetic attraction tool shell (4) can be taken out.

8. The vertical probe card of claim 1, wherein: The L type clamping column (7) is completely clamped at the inner position of the clamping groove (12), so that the magnetic attraction tool shell (4) is aligned with the edge corners of the cover plate (2).

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