Measuring equipment with heating structure

Abstract

The utility model discloses measuring equipment with a heating structure, which is used for measuring a chip strip and comprises a fixed driving mechanism and a visual inspection mechanism, the fixed driving mechanism drives the chip strip to move along the Y-axis direction, the visual inspection mechanism is arranged above the fixed driving mechanism and moves along the X-axis direction, and the measuring equipment further comprises a heating temperature control platform. The heating temperature control platform comprises a heating plate and a supporting column, the heating plate is used for placing a chip strip, the supporting column is fixed at the lower end of the heating plate and connected with the fixed driving mechanism to move in the Y-axis direction, a heat insulation assembly is arranged between the heating plate and the fixed driving mechanism, and a hole for the supporting column to penetrate through is formed in the heat insulation assembly. According to the utility model, the temperature of the chip strip is controlled through the heating temperature control platform, and heat insulation is carried out through the heat insulation assembly, so that the size of the chip strip can be measured at a fixed temperature without influencing the precision of the fixed driving mechanism, thereby obtaining more accurate data.

Description

Technical Field

[0001] This utility model relates to the field of dimensional measurement technology, and in particular to a measuring device with a heating structure. Background Technology

[0002] In the back-end processes of chip manufacturing, chip strips need to be heat-sealed. The size of the chip strips will affect the subsequent sealing process. However, the size of the chip strips will expand during the heating process, so it is necessary to measure the expansion size.

[0003] Currently, most dimensional measurement devices are designed for measuring the dimensions of objects at room temperature. Even when a heated object is placed on a measuring platform with a heat shield, the temperature gradually decreases, affecting the measured dimensions. Therefore, a device is needed that can heat an object while maintaining its temperature, using a high-precision servo drive and visual positioning to perform high-precision dimensional measurements of the heated object. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of existing technologies by proposing a measuring device with a heating structure, which can measure the size of objects at different temperatures while maintaining the object's temperature.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A measuring device with a heating structure is used to measure chip strips. The chip strips have positioning holes on their surface. The measuring device includes a fixed driving mechanism and a vision inspection mechanism. The fixed driving mechanism drives the chip strips to move along the Y-axis. The vision inspection mechanism is positioned above the fixed driving mechanism and moves along the X-axis. The device also includes a heating temperature control platform. The heating temperature control platform includes a heating plate for placing the chip strips and a support column. The heating plate is horizontally arranged, and its horizontal projected area is larger than the horizontal projected area of ​​the chip strips. The support column is fixed to the lower end of the heating plate and is connected to the fixed driving mechanism, moving along the Y-axis. A heat insulation component is provided between the heating plate and the fixed driving mechanism, and the heat insulation component has holes for the support column to pass through.

[0007] Preferably, the visual inspection mechanism includes a camera, a lens, and a light source, with the lens mounted at the lower end of the camera and arranged toward the heating and temperature control platform.

[0008] Preferably, the visual inspection mechanism further includes a height adjustment component, which drives the camera, lens, and light source to move up and down in a vertical direction.

[0009] Preferably, the heating plate is equipped with a temperature sensor.

[0010] Preferably, the heat insulation component is composed of multiple plate-like structures, and the hole is two strip-shaped openings, the length direction of which extends along the Y-axis.

[0011] Preferably, the heating temperature control platform assembly further includes a heat insulation plate fixed to the upper end of the support column and a second drive connection plate fixed to the lower end of the support column. The second drive connection plate is connected to the fixed drive mechanism, and the heating plate is disposed on the upper end of the heat insulation plate.

[0012] Measurement process:

[0013] When the length direction of the chip strip is parallel to the X-axis, the lens is controlled to move along the length direction. After passing the positioning holes at the two extreme positions in the length direction of the chip strip, the length of the chip strip can be measured. The fixed drive mechanism is controlled to move along the Y-axis. After the lens is aligned with the positioning holes at the two extreme positions in the width direction of the chip strip, the width of the chip strip can be measured.

[0014] When the length direction of the chip strip intersects the X-axis, the control lens and the chip strip move together to complete the positioning measurement of each positioning hole on the surface of the chip strip. The distance moved by the vision inspection mechanism and the fixed drive mechanism is recorded. Based on the obtained data, the length and width of the chip strip can be calculated (the length of the inclined side can be calculated based on the two right-angled sides).

[0015] During the above measurement process, the lens is positioned relative to the positioning hole at the extreme position (located on the same vertical axis), and the relevant coordinate data is recorded to complete the measurement. Compared with the prior art, the advantages of this invention are:

[0016] The temperature of the chip strip is controlled by a heating temperature control platform. The chip strip is moved under the lens of the vision inspection mechanism for positioning and measurement by a fixed drive mechanism. Heat insulation is provided by a heat insulation component, so that the chip strip can be measured at a fixed temperature without affecting the accuracy of the fixed drive mechanism, thus obtaining more accurate data. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0018] Figure 2 This is a schematic diagram of the fixed drive mechanism of this utility model.

[0019] Figure 3 This is a schematic diagram of the visual inspection mechanism of this utility model.

[0020] Figure 4 This is a schematic diagram of the heating temperature control platform component of this utility model.

[0021] Figure 5 This is a schematic diagram of the heat insulation component of this utility model.

[0022] Figure 6 This is a schematic diagram of the chip strip of this utility model.

[0023] In the diagram: 1. Chip strip; 2. Fixed drive mechanism; 201. Mounting base plate; 202. Support base; 203. Y-axis drive assembly; 204. X-axis drive assembly; 205. Moving handle; 3. Vision inspection mechanism; 301. Drive connection plate one; 302. Height adjustment assembly; 303. Camera mounting plate; 304. Camera; 305. Lens; 306. Light source; 307. Light source mounting plate; 4. Heating and temperature control platform; 401. Drive connection plate two; 402. Heat insulation gasket; 403. Support column; 404. Heat insulation plate; 405. Plate heater; 406. Heating plate; 407. Temperature sensor; 5. Heat insulation assembly; 501. Heat insulation plate mounting block; 502. Upper heat insulation plate; 503. Front heat insulation plate; 504. Right heat insulation plate; 505. Left heat insulation plate; 506. Rear heat insulation. Detailed Implementation

[0024] To make the above-mentioned objectives, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0025] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly attached to the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0026] See attached document Figure 1 A measuring device with a heating structure for measuring chip strips 1 includes a fixed driving mechanism 2, a vision inspection mechanism 3, a heating temperature control platform 4, and a heat insulation component 5. The vision inspection mechanism 3 is installed above the fixed driving mechanism 2 to move in the X direction, and the heating temperature control platform 4 is installed below the fixed driving mechanism 2 to move in the Y direction.

[0027] See attached document Figure 2The fixed drive mechanism 2 includes a mounting base 201, a support base 202, a Y-axis drive assembly 203, an X-axis drive assembly 204, and a movable handle 205. The support base 202 and the Y-axis drive assembly 203 are mounted on the mounting base 201, and the X-axis drive assembly 204 is mounted on the support base 202.

[0028] The chip strip 1 has positioning holes around its perimeter. The positions of the chip strip 1 and the vision inspection mechanism 3 are moved by the Y-axis drive component 203 and the X-axis drive component 204 to position the positioning holes on the chip strip 1, thereby obtaining the length and width dimensions of the chip strip 1.

[0029] See attached document Figure 3 The visual inspection mechanism 3 includes a drive connection plate 301, a height adjustment component 302, a camera mounting plate 303, a camera 304, a lens 305, a light source 306, and a light source mounting plate 307. The height adjustment component 302 is mounted on the drive connection plate 301, the camera mounting plate 303 is mounted on the height adjustment component 302, the camera 304 and the light source mounting plate 307 are mounted on the camera mounting plate 303, and the light source 306 is mounted on the light source mounting plate 307.

[0030] The height adjustment component 302 adjusts the height of the camera 304, lens 305 and light source 306 in the vertical direction, thereby adjusting the image distance between the camera 304 and the chip strip 1.

[0031] See attached document Figure 4 The heating temperature control platform component 4 includes a drive connection plate 401, a heat insulation gasket 402, a support column 403, a heat insulation plate 404, a plate heater 405, a heating plate 406, and a temperature sensor 407.

[0032] The heat insulation gasket 402 and the support column 403 are installed on the drive connection plate 401, the heat insulation plate 404 is installed on the support column 403, the plate heater 405 is fixed on the heat insulation plate 404 through the heating plate 406, and the temperature sensor 407 is installed on the heating plate 406.

[0033] The plate heater 405 generates heat and transfers it to the heating plate 406 to heat the chip strip 1. The temperature sensor 407 detects the temperature of the heating plate 406 in real time and adjusts the power of the plate heater 405 in real time to control the temperature of the chip strip 1 and make the obtained data more accurate. The heat insulation gasket 402 and the heat insulation plate 404 are used to isolate the heat generated by the plate heater 405 from being transferred to the drive connection plate 401, so as to avoid the temperature affecting the accuracy of the Y-axis drive assembly 203.

[0034] See attached document Figure 5The heat insulation component 5 includes a heat insulation plate mounting block 501, an upper heat insulation plate 502, a front heat insulation plate 503, a right heat insulation plate 504, a left heat insulation plate 505, and a rear heat insulation plate 506. The upper heat insulation plate 502, the front heat insulation plate 503, the right heat insulation plate 504, the left heat insulation plate 505, and the rear heat insulation plate 506 are all mounted on the heat insulation plate mounting block 501 to further isolate the heat from the heating temperature control platform component 4 from affecting the accuracy of the Y-axis drive component 203.

[0035] In use, the temperature of the chip strip 1 is controlled by the heating temperature control platform 4, and the chip strip 1 is moved to the underside of the lens 305 of the vision inspection mechanism 3 by the fixed drive mechanism 2 for positioning and measurement. The chip strip 1 is insulated by the heat insulation component 5, so that the chip strip 1 can be measured at a fixed temperature without affecting the accuracy of the fixed drive mechanism 2, thereby obtaining more accurate data.

[0036] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A measuring device with a heating structure for measuring a chip strip (1), wherein the chip strip (1) has positioning holes on its surface, the measuring device includes a fixed driving mechanism (2) and a vision inspection mechanism (3), wherein the fixed driving mechanism (2) drives the chip strip (1) to move along the Y-axis, and the vision inspection mechanism (3) is disposed above the fixed driving mechanism (2) and moves along the X-axis, characterized in that: It also includes a heating temperature control platform (4), which includes a heating plate (406) for placing chip strips (1) and a support column (403). The heating plate (406) is arranged horizontally, and the horizontal projection area of ​​the heating plate (406) is larger than the horizontal projection area of ​​the chip strips (1). The support column (403) is fixed to the lower end of the heating plate (406). The support column (403) is connected to the fixed drive mechanism (2) and moves along the Y-axis. A heat insulation component (5) is provided between the heating plate (406) and the fixed drive mechanism (2). The heat insulation component (5) has holes through which the support column (403) passes.

2. The measuring device with a heating structure according to claim 1, characterized in that, The visual inspection mechanism (3) includes a camera (304), a lens (305) and a light source (306). The lens (305) is mounted on the lower end of the camera (304) and is arranged in the direction of the heating temperature control platform (4).

3. A measuring device with a heating structure according to claim 2, characterized in that, The visual inspection mechanism (3) also includes a height adjustment component (302), which drives the camera (304), lens (305) and light source (306) to move up and down in the vertical direction.

4. A measuring device with a heating structure according to claim 1, characterized in that, The heating plate (406) is equipped with a temperature sensor (407).

5. A measuring device with a heating structure according to claim 1, characterized in that, The heat insulation component (5) is composed of multiple plate-like structures, and the holes are two strip-shaped openings, the length of which extends along the Y-axis.

6. A measuring device with a heating structure according to claim 4, characterized in that, The heating temperature control platform (4) also includes a heat insulation plate (404) fixed to the upper end of the support column (403) and a second drive connection plate (401) fixed to the lower end of the support column (403). The second drive connection plate (401) is connected to the fixed drive mechanism (2), and the heating plate (406) is disposed on the upper end of the heat insulation plate (404).

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