Coating device and coating equipment

Abstract

The utility model relates to the technical field of coating, and discloses a coating device and coating equipment, and the coating device mainly comprises a coating chamber and a clamping mechanism, the coating chamber is divided into a vacuum process cavity and a vacuum configuration cavity through a cavity door, and target materials are arranged in the process cavity and the configuration cavity; the clamping mechanism is arranged in the coating chamber and comprises a clamping jaw and a driving assembly connected with the clamping jaw, and the driving assembly is suitable for driving the clamping jaw to replace the target materials in the process cavity and the configuration cavity. According to the utility model, the process cavity and the configuration cavity are arranged in the coating chamber, when a target material required by coating in the process cavity needs to be replaced, the cavity door is opened, and the driving assembly of the clamping mechanism in the coating chamber drives the clamping jaw to replace the target material in the process cavity with the target material in the configuration cavity, so that coating of the specified target material can be realized, and the process cavity and the configuration cavity are both in a vacuum state; and therefore, vacuum breaking and vacuumizing treatment are not needed, and the working efficiency of replacing the target material in the film coating process is improved.

Description

Technical Field

[0001] This utility model relates to the field of coating technology, specifically to coating apparatus and coating equipment. Background Technology

[0002] The principle of RPD (Reactive Plasma Deposition) is to bombard the surface of a target with a plasma beam. In a vacuum environment, the sublimated target ions are activated in the plasma region to form an ionic state, which reacts with the introduced reactive gas to form a thin film deposited on the substrate surface.

[0003] Currently, RPD coating equipment typically removes the target material from the storage turntable in the target material chamber, and then transports the target material to the coating chamber by lifting it upwards through a target feeding mechanism. The targets are usually placed vertically stacked on top of the target feeding mechanism, which can only lift the targets one by one and cannot specify the type of target material.

[0004] Furthermore, once the target placement order is fixed, changing the target requires breaking the vacuum chamber, manually replacing the target in the coating chamber with a new one, and then re-vacuuming. However, evacuating the coating chamber is time-consuming, severely impacting operational efficiency. Utility Model Content

[0005] In view of this, the present invention provides a coating device and coating equipment to solve the problem that existing coating equipment requires vacuum breaking and re-vacuuming when changing the target material, resulting in low operating efficiency.

[0006] In a first aspect, this utility model provides a coating apparatus, comprising:

[0007] The coating chamber is divided into a vacuum process chamber and a configuration chamber by a door, and both the process chamber and the configuration chamber are equipped with target materials;

[0008] A clamping mechanism is provided in the coating chamber. The clamping mechanism includes a gripper and a drive assembly connected to the gripper. The drive assembly is adapted to drive the gripper to replace the target material in the process chamber and the configuration chamber.

[0009] Beneficial effects: This utility model sets up a process chamber and a configuration chamber in the coating chamber. When it is necessary to change the target material required for coating in the process chamber, the chamber door is opened, and the clamping mechanism in the coating chamber drives the gripper to replace the target material in the process chamber with the target material in the configuration chamber. This can achieve coating of the specified target material. Both the process chamber and the configuration chamber are in a vacuum state, so there is no need for vacuum breaking and vacuuming, thereby improving the efficiency of target material replacement during coating.

[0010] In one optional embodiment, at least one top target device is further included, the top target device being disposed at the bottom of the configuration cavity, the top of the top target device being correspondingly provided with a target material compartment, the target material compartment being adapted to place a target material, and the output end of the top target device being adapted to lift the target material or the target material compartment.

[0011] Beneficial effects: The target material bin is used to hold and protect the target material, and the target lifting device is used to lift the target material or the target material bin so that the grippers can grasp the target material, making it convenient to use.

[0012] In one optional embodiment, a transition chamber is further provided outside the configuration cavity. The transition chamber is connected to or closed to the configuration cavity through an inner door. The transition chamber is also provided with an outer door spaced apart from the inner door and a vacuuming device.

[0013] Beneficial effects: With the transition chamber under vacuum, the inner door communicating with the configuration chamber is opened, and the clamping mechanism moves the empty target chamber into the transition chamber. Then, the inner door is closed, the outer door is opened, and the required target is placed into the empty target chamber. Finally, the outer door is closed, and the transition chamber is evacuated using a vacuum pump. After evacuation, the inner door is opened, and the clamping mechanism moves the target chamber containing the required target to the corresponding top target device in the configuration chamber. Alternatively, the target can be directly placed into the transition chamber and moved to the corresponding top target device in the configuration chamber by the clamping mechanism. Setting up a transition chamber outside the configuration chamber allows for target configuration within the configuration chamber while ensuring the vacuum in the configuration chamber is not broken. The evacuation time for the transition chamber is relatively short.

[0014] In one alternative embodiment, the bottom of the transition chamber is further provided with a first transport mechanism, which is adapted to move the target material or the target material silo between the inner silo door and the outer silo door.

[0015] Beneficial effects: By setting the first transport mechanism at the bottom of the transition chamber, it is convenient to move the target material or target material warehouse from the inner door to the outer door, or from the outer door to the inner door, thus facilitating the configuration of the target material.

[0016] In one alternative embodiment, the configuration cavity is further provided with a second transport mechanism, one end of which extends to the inner compartment door and the other end extends to the top target device.

[0017] Beneficial effect: By setting a second transport mechanism in the configuration cavity, it is convenient to move the target material or target material container between the configuration cavity and the transition chamber.

[0018] In one alternative embodiment, a heating device is also provided around the top target device.

[0019] Beneficial effects: The heating device is used to remove moisture from the target material, ensuring that the target material and the preparation chamber are in a clean state.

[0020] In one optional embodiment, the gripper is provided with a clamping part for gripping the target material or the target material chamber, and the clamping part is provided with a flexible pad.

[0021] Beneficial effects: The flexible pad is used to cushion the contact between the clamping part and the target or target container, so as to protect the target or target container.

[0022] In one optional implementation, the driving component includes:

[0023] A telescopic assembly is disposed on the side of the configuration cavity away from the process cavity, and is adapted to extend and retract in the horizontal direction. The telescopic end of the telescopic assembly is adapted to switch positions in the process cavity and the configuration cavity.

[0024] A lifting assembly is located at one end of the telescopic assembly near the process cavity, and is adapted to move up and down in the vertical direction. The lower end of the lifting assembly is provided with the gripper.

[0025] Beneficial effects: The telescopic component can drive the lifting component and the gripper to move horizontally, and the lifting component can drive the gripper to move up and down so that the gripper can grasp the target material or target material container. The structure is simple and easy to manufacture and install.

[0026] In one optional embodiment, the system further includes a target feeding mechanism located at the bottom of the process chamber, with multiple targets stacked on top of the target feeding mechanism, the target feeding mechanism being adapted to lift the multiple targets.

[0027] Beneficial effect: The target delivery mechanism can deliver multiple targets one by one to the process cavity for use in the process cavity.

[0028] Secondly, this utility model also provides a coating device, including the above-mentioned coating apparatus.

[0029] Beneficial effects: Since the coating equipment includes a coating device, it has the same effect as the coating device, so it will not be elaborated here. Attached Figure Description

[0030] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0031] Figure 1 This is a schematic diagram of the structure of a coating device according to an embodiment of the present utility model;

[0032] Figure 2This is a schematic diagram of the configuration cavity of a coating device according to an embodiment of the present invention.

[0033] Explanation of reference numerals in the attached figures:

[0034] 1. Coating chamber; 101. Chamber door; 102. Process chamber; 103. Preparation chamber; 2. Target material; 3. Clamping mechanism; 301. Gripper; 302. Drive assembly; 3021. Telescopic assembly; 3022. Lifting assembly; 4. Top target device; 5. Target material bin; 6. Transition chamber; 7. Inner chamber door; 8. Outer chamber door; 9. Vacuum pumping device; 10. Nitrogen pipeline; 11. First transport mechanism; 12. Second transport mechanism; 13. Heating device; 14. Target delivery mechanism. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0036] The following is combined Figures 1 to 2 The following describes embodiments of the present invention.

[0037] According to embodiments of the present invention, on the one hand, such as Figure 1 As shown, a coating apparatus is provided, mainly comprising: a coating chamber 1 and a clamping mechanism 3. The coating chamber 1 is divided into a vacuum process chamber 102 and a placement chamber 103 by a chamber door 101. Target materials 2 are disposed in both the process chamber 102 and the placement chamber 103. The clamping mechanism 3 is disposed within the coating chamber 1 and includes a gripper 301 and a drive assembly 302 connected to the gripper 301. The drive assembly 302 is adapted to drive the gripper 301 to replace the target materials 2 in the process chamber 102 and the placement chamber 103.

[0038] Therefore, the coating apparatus provided in this embodiment of the present invention has a process chamber 102 and a configuration chamber 103 in the coating chamber 1. When it is necessary to replace the target material 2 required for coating in the process chamber 102, the chamber door 101 is opened, and the gripper 301 is driven by the drive component 302 of the clamping mechanism 3 in the coating chamber 1 to replace the target material 2 in the process chamber 102 with the target material 2 in the configuration chamber 103. The specified target material 2 can be coated. Both the process chamber 102 and the configuration chamber 103 are in a vacuum state, so there is no need for vacuum breaking and vacuuming, thereby improving the efficiency of the coating target material replacement operation.

[0039] Specifically, the coating process is performed in the process chamber 102, which is a vacuum environment. The configuration chamber 103 is also a vacuum environment. A door 101 is provided in the coating chamber 1, which can be opened and closed, to divide the coating chamber 1 into the vacuum process chamber 102 and the configuration chamber 103. When the door 101 is opened, the vacuum environment in the process chamber 102 is not disrupted, and the gripping mechanism 3 can drive the gripper 301 to move between the process chamber 102 and the configuration chamber 103.

[0040] In one embodiment, such as Figure 1 As shown, the coating apparatus also includes at least one top target device 4, which is located at the bottom of the configuration cavity 103. A target material chamber 5 is correspondingly located at the top of the top target device 4. The target material chamber 5 and the top of the top target device 4 are separately configured. The target material chamber 5 is suitable for placing the target material 2, and the output end of the top target device 4 is suitable for lifting the target material 2 or the target material chamber 5. The target material chamber 5 is used to place the target material 2 to protect and support it, while the top target device 4 is used to lift the target material 2 or the target material chamber 5 so that the gripper 301 can grasp the target material 2 for convenient use.

[0041] For example, the target material storage 5 can be a container with an open top; or, for example, the target material storage 5 has a pallet structure, in which the target material 2 is placed, mainly for supporting the target material 2.

[0042] It should be noted that the present invention does not limit the structure of the target-lifting device 4, as long as the target-lifting device 4 can lift the target material 2 from the target material chamber 5. For example, the target-lifting device 4 includes a driving component and a telescopic rod. The driving component can be a hydraulic cylinder, a pneumatic cylinder, etc. The telescopic rod serves as the output end of the target-lifting device 4 and is connected to the driving component. The driving component drives the telescopic rod to stretch upward to lift the target material 2.

[0043] It should be noted that the present invention does not limit the number of top target devices 4, and one, two or more can be selected as needed.

[0044] For example, such as Figure 1 As shown, the top target device 4 has five compartments, corresponding to five target material chambers 5. Four of the target material chambers 5 contain targets 2 of different or the same material, while the other target material chamber 5 is empty and used to receive the target 2 replaced by the gripper 301 from the process cavity 102. Alternatively, the empty target material chamber 5 can be omitted, and the gripper 301 can simply discard the replaced target 2 from the process cavity 102. Multiple empty target material chambers 5 can also be provided to hold multiple replaced targets 2.

[0045] In one embodiment, such as Figure 1 and Figure 2As shown, the coating apparatus also includes a transition chamber 6 located outside the configuration chamber 103. The transition chamber 6 is connected to or closed by an inner door 7, and is also equipped with an outer door 8 spaced apart from the inner door 7 and a vacuum device 9. The transition chamber 6, located outside the configuration chamber 103, allows for the configuration of the target material 2 within the configuration chamber 103 while ensuring that the vacuum in the configuration chamber 103 is not broken. The volume of the transition chamber 6 is smaller than that of the configuration chamber 103. Due to its smaller size, the vacuuming time for the transition chamber 6 is relatively short, and it has less impact on the gas pressure and atmosphere within the configuration chamber 103.

[0046] When configuring the target material 2, with the transition chamber 6 under vacuum, the inner door 7, which communicates with the configuration chamber 103, is opened. The clamping mechanism 3 moves the empty target material chamber 5 into the transition chamber 6. Then, the inner door 7 is closed, the outer door 8 is opened, and the required target material 2 is placed into the target material chamber 5. The outer door 8 is closed, and the transition chamber 6 is evacuated using the vacuum pumping device 9. After that, the inner door 7 is opened, and finally, the clamping mechanism 3 moves the target material chamber 5 of the required target material 2 to the upper end of the top target device 4 corresponding to the configuration chamber 103.

[0047] Alternatively, with the transition chamber 6 in an atmospheric state, open the outer chamber door 8 while keeping the inner chamber door 7 closed. Place the required target material 2 into the transition chamber 6, then close the outer chamber door 8. After evacuating the transition chamber 6 using the vacuum pumping device 9, open the inner chamber door 7. The clamping mechanism 3 will then move the target material 2 in the transition chamber 6 directly to the upper end of the top target device 4 corresponding to the configuration cavity 103.

[0048] Furthermore, in one embodiment, a nitrogen pipeline 10 is also provided on the transition chamber 6. In order to minimize air backflow caused by the internal pressure difference between the transition chamber 6 and the configuration chamber 103 and to avoid the influence of the transition chamber 6 on the configuration chamber 103, nitrogen is introduced into the transition chamber 6 after the inner chamber door 7 and the outer chamber door 8 are closed and the vacuum device 9 is closed, so as to quickly vent the air in the transition chamber 6, thereby preventing air from entering the configuration chamber 103 and causing interference when the inner chamber door 7 is opened again.

[0049] In addition, a vacuum pumping device 9 is also provided on the configuration cavity 103 to maintain the vacuum state of the configuration cavity 103.

[0050] Furthermore, in one embodiment, such as Figure 2 As shown, a first transport mechanism 11 is also provided at the bottom of the transition chamber 6. The first transport mechanism 11 is adapted to move the target material 2 or the target material container 5 between the inner door 7 and the outer door 8. By providing the first transport mechanism 11 at the bottom of the transition chamber 6, it is convenient to move the target material 2 or the target material container 5 from the inner door 7 to the outer door 8, or from the outer door 8 to the inner door 7, thus facilitating the placement of the target material 2.

[0051] It should be noted that the present invention does not limit the structure of the first transport mechanism 11. Any existing structure can be selected as needed. For example, the first transport mechanism 11 is a transport belt structure. The transport belt is moved by the forward and reverse rotation of the drive motor. The target material 2 or the target material bin 5 is placed on the transport belt so that the target material 2 or the target material bin 5 can move between the inner bin door 7 and the outer bin door 8.

[0052] In one embodiment, such as Figure 2 As shown, a second transport mechanism 12 is also provided inside the configuration cavity 103. One end of the second transport mechanism 12 extends to the inner door 7, and the other end extends to the top target device 4. By providing the second transport mechanism 12 inside the configuration cavity 103, it is convenient to move the target material 2 or the target material compartment 5 between the configuration cavity 103 and the transition chamber 6.

[0053] It should be noted that the present invention does not limit the structure of the second transport mechanism 12. Any existing structure can be selected as needed, such as roller conveyor structure, slide rail structure, belt conveyor mechanism, etc.

[0054] In one embodiment, the second transport mechanism 12 is provided with a hollow hole for the output end of the target-avoiding device 4 to move up and down, the upper end of the target material bin 5 is provided with a first opening for the target material 2 to enter and exit, the lower end of the target material bin 5 is provided with a second opening, and the output end of the target-avoiding device 4 is adapted to pass through the second opening and lift the target material 2 in the target material bin 5.

[0055] Furthermore, in one embodiment, the first transport mechanism 11 and the second transport mechanism 12 are a continuous transport mechanism. After the clamping mechanism 3 moves the target material 2 or the target material container 5 to the transport mechanism, the transport mechanism drives the target material 2 or the target material container 5 to move between the top target device 4 and the transition chamber 6.

[0056] In one embodiment, such as Figure 1 As shown, a heating device 13 is also provided around the top target device 4. The heating device 13 is used to remove moisture from the target material 2, ensuring that the target material 2 and the placement cavity 103 are in a clean state. The heating device 13 can be a conventional heating device such as a heating wire or an electromagnetic heater.

[0057] In one embodiment, the gripper 301 has a clamping portion for gripping the target 2 or the target chamber 5, and the clamping portion has a flexible pad. The flexible pad is used to buffer the contact between the clamping portion and the target 2 or the target chamber 5, so as to protect the target 2 or the target chamber 5.

[0058] Taking the cylindrical target material 2 as an example, the target material compartment 5 is also cylindrical, and the gripper 301 has two semi-circular clamping parts, with a flexible pad disposed on the inner side of the clamping parts. The flexible pad can be a conventional flexible pad such as a rubber pad, a foam pad, or a nylon pad.

[0059] In one embodiment, such as Figure 2 As shown, the drive assembly 302 mainly includes a telescopic assembly 3021 and a lifting assembly 3022. The telescopic assembly 3021 is located on the side of the configuration cavity 103 away from the process cavity 102, and is suitable for horizontal telescopic movement. The telescopic end of the telescopic assembly 3021 is adapted to switch positions between the process cavity 102 and the configuration cavity 103. The lifting assembly 3022 is located at the end of the telescopic assembly 3021 near the process cavity 102, and is suitable for vertical movement. The lower end of the lifting assembly 3022 is provided with a gripper 301. The telescopic assembly 3021 can drive the lifting assembly 3022 and the gripper 301 to move horizontally, and the lifting assembly 3022 can drive the gripper 301 to move vertically, so that the gripper 301 can grasp the target material 2 or the target material chamber 5. The structure is simple and convenient to manufacture and install.

[0060] Specifically, the up and down directions are as follows: Figure 2 As shown by arrow Z in the image, the horizontal direction is as follows: Figure 2 As indicated by arrow X. In this embodiment of the invention, the clamping mechanism 3 being located inside the coating chamber 1 means that the main moving part of the clamping mechanism 3 is located inside the coating chamber 1, while other parts can be optionally located outside the coating chamber 1. For example... Figure 2 As shown, the telescopic ends of the lifting assembly 3022 and the telescopic assembly 3021 are located inside the coating chamber 1, while the other parts of the telescopic assembly 3021 are located outside the coating chamber 1.

[0061] It should be noted that both the telescopic component 3021 and the lifting component 3022 can be selected from existing conventional structures as needed, and this embodiment of the utility model does not impose too many restrictions on this.

[0062] In one embodiment, such as Figure 1 As shown, the coating apparatus further includes a target feeding mechanism 14. The target feeding mechanism 14 is located at the bottom of the process cavity 102, and multiple targets 2 are stacked on top of the target feeding mechanism 14. The target feeding mechanism 14 is adapted to lift the multiple targets 2. The target feeding mechanism 14 can transport the multiple targets 2 one by one to the process cavity 102 for use by the process cavity 102.

[0063] The working principle of this utility model embodiment is as follows:

[0064] Target material 2:

[0065] The valve of the vacuum device 9 on the configuration chamber 103 remains open. The valve of the vacuum device 9 on the transition chamber 6 is opened to evacuate the transition chamber 6 to a vacuum state, then the valve is closed. The inner door 7 of the transition chamber 6 is then opened, while the outer door 8 remains closed. The telescopic assembly 3021 moves the gripper 301 and the lifting assembly 3022 above the empty target chamber 5. The lifting assembly 3022 moves the gripper 301 downwards and grabs the empty target chamber 5, moving it to a position close to the inner door 7. The target chamber 5 then enters the transition chamber 6 via the second transport mechanism 12 and the first transport mechanism 11.

[0066] Close the inner door 7, then open the outer door 8, and move the target material warehouse 5 to the outer door 8 via the first transport mechanism 11, and add the target material 2 that needs to be replaced to the target material warehouse 5.

[0067] Close the outer chamber door 8, open the valve of the vacuum device 9 on the transition chamber 6, and re-evacuate the transition chamber 6 to a vacuum state. Then open the inner chamber door 7 of the transition chamber 6, while keeping the outer chamber door 8 closed. Move the target material chamber 5 containing the target material 2 to the inner chamber door 7 via the first transport mechanism 11, and then send the target material chamber 5 containing the target material 2 into the configuration cavity 103 via the first transport mechanism 11 and the second transport mechanism 12. The telescopic component 3021, in conjunction with the lifting component 3022, drives the gripper 301 to grab the target material chamber 5 containing the target material 2 and move the target material chamber 5 to the upper end of the corresponding top target device 4. Turn on the heating device 13 to remove moisture from the target material 2.

[0068] Replace the target material 2:

[0069] Switch the power supply of the coating equipment to standby mode. Open the cavity door 101, and the target feeding mechanism 14 lifts the existing target material 2. The telescopic component 3021 drives the lifting component 3022 and the gripper 301 to move above the existing target material 2. The lifting component 3022 drives the gripper 301 to descend and grab the existing target material 2. Then, the telescopic component 3021 moves the existing target material 2 above the empty target material chamber 5. The lifting component 3022, together with the gripper 301, places the existing target material 2 into the empty target material chamber 5.

[0070] The target-lifting device 4, corresponding to the target material 2 to be replaced, lifts the target material 2. The telescopic component 3021 moves the gripper 301 and the lifting component 3022 above the target material chamber 5 of the target material 2 to be replaced. The lifting component 3022, in conjunction with the gripper 301, grabs the target material 2 to be replaced and raises it. The telescopic component 3021 moves the target material 2 to be replaced above the target feeding mechanism 14 of the process chamber 102. The lifting component 3022 and the gripper 301 place the target material 2 to be replaced on the target material seat of the target feeding mechanism 14, and close the chamber door 101. The power supply of the coating equipment is switched to the working state. At this time, the coating material is the replaced target material 2.

[0071] According to an embodiment of the present invention, another aspect provides a coating apparatus, including the coating device described above.

[0072] Since coating equipment includes coating devices and has the same effect as coating devices, it will not be elaborated on here.

[0073] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A coating apparatus, characterized in that, include: The coating chamber (1) is divided into a vacuum process chamber (102) and a configuration chamber (103) by a chamber door (101). Both the process chamber (102) and the configuration chamber (103) are equipped with target materials (2). A clamping mechanism (3) is provided in the coating chamber (1). The clamping mechanism (3) includes a gripper (301) and a drive assembly (302) connected to the gripper (301). The drive assembly (302) is adapted to drive the gripper (301) to replace the target material (2) in the process chamber (102) and the configuration chamber (103).

2. The coating apparatus according to claim 1, characterized in that, It also includes at least one top target device (4), which is located at the bottom of the configuration cavity (103). The top of the top target device (4) is provided with a target material chamber (5), which is suitable for placing the target material (2). The output end of the top target device (4) is suitable for lifting the target material (2) or the target material chamber (5).

3. The coating apparatus according to claim 2, characterized in that, It also includes a transition chamber (6) located outside the configuration cavity (103). The transition chamber (6) is connected to or closed to the configuration cavity (103) through an inner door (7). The transition chamber (6) is also provided with an outer door (8) spaced apart from the inner door (7) and a vacuum device (9).

4. The coating apparatus according to claim 3, characterized in that, The bottom of the transition chamber (6) is also provided with a first transport mechanism (11), which is adapted to move the target material (2) or the target material container (5) between the inner door (7) and the outer door (8).

5. The coating apparatus according to claim 3, characterized in that, The configuration cavity (103) is also provided with a second transport mechanism (12), one end of which extends to the inner compartment door (7), and the other end extends to the top target device (4).

6. The coating apparatus according to claim 2, characterized in that, Heating devices (13) are also provided around the top target device (4).

7. The coating apparatus according to claim 2, characterized in that, The gripper (301) is provided with a clamping part for clamping the target material (2) or the target material container (5), and the clamping part is provided with a flexible pad.

8. The coating apparatus according to any one of claims 1 to 7, characterized in that, The drive component (302) includes: A telescopic assembly (3021) is disposed on the side of the configuration cavity (103) away from the process cavity (102), and is adapted to extend and retract in the horizontal direction. The telescopic end of the telescopic assembly (3021) is adapted to switch positions in the process cavity (102) and the configuration cavity (103). A lifting assembly (3022) is located at one end of the telescopic assembly (3021) near the process cavity (102) and is adapted to move up and down in the vertical direction. The lower end of the lifting assembly (3022) is provided with the gripper (301).

9. The coating apparatus according to any one of claims 1 to 7, characterized in that, Also includes: The target feeding mechanism (14) is located at the bottom of the process cavity (102), and a plurality of the target materials (2) are stacked on top of the target feeding mechanism (14). The target feeding mechanism (14) is adapted to lift up the plurality of the target materials (2).

10. A coating apparatus, characterized in that, include: The coating apparatus according to any one of claims 1 to 9.

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