Vacuum coating equipment
By dividing the coating chamber of the vacuum coating equipment into independent compartments and setting observation windows on the side of each compartment, the problems of difficult observation and inconvenient hoisting of existing equipment are solved, and efficient production operation is achieved.
Patent Information
- Application Number
- CN202423242383.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-27
- Publication Date
- 2025-11-14
- Estimated Expiration
- 2034-12-27
AI Technical Summary
In existing roll-to-roll vacuum coating equipment, multiple systems are concentrated in the same cavity, which makes observation difficult and hoisting inconvenient, thus affecting production efficiency.
The coating chamber is divided into multiple independent compartments, each with its own function. Observation windows are provided on the side of each compartment to facilitate observation and hoisting of the material rolls.
It improves the applicability and production efficiency of coating equipment, avoids mutual interference through independent chamber design, facilitates observation and hoisting, and enhances the ease of operation.
Smart Images
Figure CN223548086U_ABST
Abstract
Description
Technical Field
[0001] This utility model is a vacuum coating equipment, belonging to the field of vacuum coating technology. Background Technology
[0002] Vacuum coating equipment is used to coat films under high vacuum conditions and is widely applied in various fields. Among these, roll-to-roll vacuum coating is widely used for flexible substrates such as plastic films and metal foils because it can continuously coat substrates, greatly improving production efficiency. Roll-to-roll vacuum coating equipment mainly consists of an unwinding system, a sputtering / main chamber, a cooling system, a rewinding system, and a vacuum system.
[0003] To ensure vacuum stability, existing roll-to-roll vacuum coating equipment typically integrates the aforementioned systems within a single chamber. This concentration of multiple sputtering and coating chambers in one unit makes it difficult to observe components such as the central rollers, and the internal workings are hard to see through conventional viewing windows. Furthermore, with a single chamber, feeding and unloading of the rolls can only be done from either end or from the inside, significantly complicating hoisting operations. Summary of the Invention
[0004] The purpose of this invention is to provide a vacuum coating equipment with a simple structure. By setting the coating chamber into multiple separate chambers, each chamber can perform an independent function, and each separate chamber can operate independently without interfering with the others. This can improve the applicability of the coating equipment and increase production efficiency.
[0005] To achieve the above objectives, this utility model provides a vacuum coating equipment, including a left partition chamber and a right partition chamber that are independently arranged, and the left partition chamber and the right partition chamber are connected by a connecting chamber;
[0006] A take-up and untake-up cavities are provided at the top of both the left and right partition chambers, and take-up and untake-up rollers are provided inside the take-up and untake-up cavities respectively;
[0007] An openable hoisting port for hoisting material rolls is provided at the top of the winding and unwinding cavity.
[0008] Furthermore, the left partition chamber of this invention is divided by a partition to form an upper left partition chamber and a lower left partition chamber; the right partition chamber is divided by a partition to form an upper right partition chamber and a lower right partition chamber.
[0009] Inside the left partition chamber, one end of the partition is fixed to the inner wall of the left partition chamber, and the other end is left with a guide channel for the membrane to pass through.
[0010] Inside the right partition chamber, one end of the partition is fixed to the inner wall of the right partition chamber, and the other end has a guide channel for the membrane to pass through between it and the inner wall of the right partition chamber.
[0011] Furthermore, this utility model provides observation windows on the sides of the upper left partition chamber, lower left partition chamber, upper right partition chamber, and lower right partition chamber. By providing observation windows, staff can easily observe the working conditions in each chamber from various angles.
[0012] Furthermore, this invention includes a guide roller inside the connecting chamber, which is used to conduct the thin film through.
[0013] Furthermore, this invention includes guide rollers at each channel, which are used to guide the thin film through.
[0014] Furthermore, this invention provides process rollers inside the upper left partition chamber, lower left partition chamber, upper right partition chamber, and lower right partition chamber for use in processes such as coating, magnetron sputtering, and vapor deposition.
[0015] Furthermore, this invention sets the upper left partition chamber as a magnetic control chamber and the lower left partition chamber as a vapor deposition chamber, and sets multiple guide rollers between the upper left partition chamber and the lower left partition chamber to ensure the tension stability during the film conveying process.
[0016] Furthermore, this invention sets the upper right partition chamber as a vapor deposition chamber and the lower right partition chamber as a magnetocontrol chamber, and sets multiple guide rollers between the upper right partition chamber and the lower right partition chamber to ensure the tension stability during the film conveying process.
[0017] Compared with existing technologies, this invention sets up the coating chamber into multiple separate chambers, each performing a corresponding function. By dividing the functional areas of each separate chamber, independent operation of each chamber is achieved, avoiding interference between them. This allows for flexible configuration of the process in multiple separate chambers, greatly improving the applicability of the coating equipment. Furthermore, by providing observation windows on the sides of each separate chamber, this invention facilitates observation of the working conditions within each chamber from various angles. The separate chamber arrangement also allows for the placement of both the winding and unwinding cavities at the top, facilitating the hoisting of the material rolls and significantly improving production efficiency. Attached Figure Description
[0018] Figure 1 This is a schematic diagram of the structure of this utility model;
[0019] Figure 2 This is an embodiment of the specific arrangement of the cavities during use of the utility model.
[0020] In the diagram: 1. Left partition chamber, 1.1. Upper left partition chamber, 1.2. Lower left partition chamber, 2. Right partition chamber, 2.1. Upper right partition chamber, 2.2. Lower right partition chamber, 3. Connecting chamber, 3.1. Guide roller, 4. Take-up and undo chamber, 5. Take-up and undo roller, 6. Lifting port, 7. Partition, 8. Observation window, 9. Guide channel. Detailed Implementation
[0021] The present invention will be further described below with reference to the accompanying drawings.
[0022] like Figure 1 As shown, a vacuum coating apparatus includes a left partition chamber 1 and a right partition chamber 2 that are independently arranged. Conventional coating rollers are installed in both the left partition chamber 1 and the right partition chamber 2 to realize coating and conveying operations during the coating process. The structure is not detailed here. The left partition chamber 1 and the right partition chamber 2 are connected by a connecting chamber 3, which facilitates the efficient conveying of the film from the left partition chamber 1 to the right partition chamber 2, or from the right partition chamber 2 to the left partition chamber 1. A guide roller 3.1 is installed inside the connecting chamber 3 to conduct the film through.
[0023] A take-up and unwinding cavity 4 is provided at the top of both the left partition chamber 1 and the right partition chamber 2. Take-up and unwinding rollers 5 are respectively installed inside the take-up and unwinding cavity 4. The take-up and unwinding rollers 5 drive the material roll to work. An openable lifting port 6 for lifting the material roll is provided at the top of the take-up and unwinding cavity 4. During the coating operation, the two take-up and unwinding cavities 4 are used in turn. One take-up and unwinding cavity 4 is used to place the material roll. After the material roll is coated, it can be taken out through the other take-up and unwinding cavity 4. When taking up and unwinding the material roll, the lifting port 6 can be quickly opened and closed by means of a quick-release pressure handle, so as to quickly lift the material roll, which is convenient and efficient.
[0024] The left partition chamber 1 is divided by a partition 7 to form an upper left partition chamber 1.1 and a lower left partition chamber 1.2; the right partition chamber 2 is divided by a partition 7 to form an upper right partition chamber 2.1 and a lower right partition chamber 2.2.
[0025] Inside the left partition chamber 1, one end of the partition 7 is fixed to the inner wall of the left partition chamber 1, and the other end has a guide channel 9 between it and the inner wall of the left partition chamber 1 for the film to pass through; inside the right partition chamber 2, one end of the partition 7 is fixed to the inner wall of the right partition chamber 2, and the other end has a guide channel 9 between it and the inner wall of the right partition chamber 2 for the film to pass through. A guide roller 3.1 is provided at each of the guide channels 9, and the guide roller 3.1 is used to conduct the film through.
[0026] Observation windows 8 are provided on the sides of the upper left partition chamber 1.1, the lower left partition chamber 1.2, the upper right partition chamber 2.1, and the lower right partition chamber 2.2. By providing observation windows 8, staff can easily observe the working conditions in each partition chamber from various angles.
[0027] Process rollers are installed inside the upper left partition chamber 1.1, the lower left partition chamber 1.2, the upper right partition chamber 2.1, and the lower right partition chamber 2.2 for use in processes such as coating, magnetron sputtering, and vapor deposition.
[0028] like Figure 2 As shown, in a preferred embodiment, when using this utility model, the upper left partition chamber 1.1 can be set as a magnetocontrol chamber. Specifically, necessary structures such as target materials are set around the process roller to realize the magnetocontrol process. Setting other structures necessary for the magnetocontrol process is a conventional technical means in this field and will not be described in detail here. The lower left partition chamber 1.2 can be set as a vapor deposition chamber. Specifically, corresponding structures such as evaporation crucibles for vapor deposition are set below the process roller. Setting vapor deposition-related functional structures is a conventional technical means in this field and will not be explained in detail here. Multiple guide rollers 3.1 are set between the upper left partition chamber 1.1 and the lower left partition chamber 1.2 to ensure tension stability during the guiding process.
[0029] The upper right partition chamber 2.1 is set as a vapor deposition chamber, and the lower right partition chamber 2.2 is set as a magnetron chamber. Multiple guide rollers 3.1 are set between the upper right partition chamber 2.1 and the lower right partition chamber 2.2 to ensure stable tension during the conveying process.
[0030] This invention divides the coating chamber into multiple separate chambers, each performing a specific function. By dividing the chambers into independent functional areas, each chamber operates independently, avoiding interference between them. This allows for flexible configuration of the process flow across multiple chambers, significantly improving the applicability of the coating equipment. Furthermore, observation windows are provided on the sides of each chamber, facilitating observation of the working conditions from various angles. The separate chamber layout also allows for the placement of both the winding and unwinding cavities at the top, facilitating the hoisting of the rolls and greatly improving production efficiency.
[0031] The above embodiments are not limited to the specific application functions of each independent compartment. Within the scope of implementation, the functions of each compartment can be freely set according to the work needs and complete the corresponding process, which greatly expands the application range of the vacuum coating equipment.
Claims
1. A vacuum coating equipment, characterized in that, It includes a left partition chamber (1) and a right partition chamber (2) that are independently set up, and the left partition chamber (1) and the right partition chamber (2) are connected by a connecting chamber (3); A take-up and untake-up cavity (4) is provided at the top of both the left partition chamber (1) and the right partition chamber (2), and a take-up and untake-up roller (5) is provided inside the take-up and untake-up cavity (4); An openable hoisting port (6) for hoisting material rolls is provided at the top of the winding and unwinding cavity (4).
2. The vacuum coating equipment according to claim 1, characterized in that, The left partition chamber (1) is divided by a partition (7) to form an upper left partition chamber (1.1) and a lower left partition chamber (1.2); the right partition chamber (2) is divided by a partition (7) to form an upper right partition chamber (2.1) and a lower right partition chamber (2.2). Inside the left partition chamber (1), one end of the partition (7) is fixed to the inner wall of the left partition chamber (1), and the other end is left with a guide channel (9) for the membrane to pass through between it and the inner wall of the left partition chamber (1). Inside the right partition chamber (2), one end of the partition (7) is fixed to the inner wall of the right partition chamber (2), and the other end is left with a guide channel (9) for the membrane to pass through.
3. The vacuum coating equipment according to claim 2, characterized in that, Observation windows (8) are provided on the sides of the upper left partition chamber (1.1), lower left partition chamber (1.2), upper right partition chamber (2.1) and lower right partition chamber (2.2).
4. The vacuum coating equipment according to claim 2, characterized in that, A guide roller (3.1) is provided inside the connecting chamber (3) for conducting the thin film through.
5. The vacuum coating equipment according to claim 2, characterized in that, Guide rollers (3.1) are provided at each channel, and these guide rollers (3.1) are used to conduct the film through.
6. The vacuum coating equipment according to claim 4, characterized in that, Process rollers are installed inside the upper left partition chamber (1.1), the lower left partition chamber (1.2), the upper right partition chamber (2.1), and the lower right partition chamber (2.2).
7. The vacuum coating equipment according to claim 4, characterized in that, The upper left partition chamber (1.1) is set as a magnetocontrol chamber, the lower left partition chamber (1.2) is set as a vapor deposition chamber, and multiple guide rollers (3.1) are set between the upper left partition chamber (1.1) and the lower left partition chamber (1.2).
8. The vacuum coating equipment according to claim 4, characterized in that, The upper right partition chamber (2.1) is set as a vapor deposition chamber, the lower right partition chamber (2.2) is set as a magnetron chamber, and multiple guide rollers (3.1) are set between the upper right partition chamber (2.1) and the lower right partition chamber (2.2).