Sheet body transfer device

Abstract

The utility model discloses a sheet body transferring device which comprises a main conveying line and at least one set of transferring mechanism, the transferring mechanism comprises at least one conveying mechanism, two sheet transferring mechanisms and a basket lifting mechanism, the basket lifting mechanism is configured to drive a basket to ascend and descend, the basket is provided with two material receiving cavities, each material receiving cavity is configured to store a column of sheet bodies, and the conveying mechanism is used for conveying the sheet bodies. The opening of the flower basket is in butt joint with the two sheet moving mechanisms, and each sheet moving mechanism corresponds to one material receiving cavity; the main conveying line is configured to convey a sheet body along a first direction; the conveying mechanism is in butt joint with the main conveying line and the two sheet moving mechanisms, and the conveying mechanism is configured to transfer sheet bodies between the main conveying line and the two sheet moving mechanisms; the sheet moving mechanism is in butt joint with the conveying mechanism and the flower basket on the flower basket lifting mechanism, and the sheet moving mechanism is configured to move sheet bodies between the conveying mechanism and the material receiving cavity of the corresponding flower basket. According to the sheet body transfer device, the two material receiving cavities of the flower basket can receive or take the sheets at the same time, and the sheet body transfer efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of silicon wafer production equipment technology, and in particular to a wafer transfer device. Background Technology

[0002] In the processing of wafers (such as silicon wafers and solar cells), baskets are usually used to store the wafers. Baskets can be divided into full-wafer baskets and half-wafer baskets. A full-wafer basket has one storage cavity, which is used to store a row of full wafers. A half-wafer basket has two storage cavities, which are used to store a row of half wafers respectively.

[0003] Currently, when using a half-flower basket to collect or remove half-flower pieces, because the half-flower basket has two storage cavities, it is necessary to first collect or remove the pieces from one of the storage cavities. After that storage cavity is filled or removed, the basket is moved laterally a preset distance by a basket moving device before the other storage cavity is filled or removed. This method has the disadvantage of low work efficiency. Utility Model Content

[0004] The purpose of this application is to provide a wafer transfer device to solve the problem of low working efficiency of existing wafer transfer devices when performing wafer receiving or picking operations on half wafers.

[0005] To achieve this objective, the following technical solution is adopted in this application:

[0006] This application discloses a sheet transfer device, which includes a main conveyor line and at least one transfer mechanism, wherein:

[0007] The transfer mechanism is located on the side of the main conveyor line. The transfer mechanism includes at least one conveying mechanism, two piece-shifting mechanisms and a basket lifting mechanism. The piece-shifting mechanisms are arranged parallel to the main conveyor line. The basket lifting mechanism carries a basket and is configured to drive the basket to lift. The basket has two receiving cavities, each of which is configured to store a row of pieces. The opening of the basket is connected to the two piece-shifting mechanisms, and each piece-shifting mechanism corresponds to one receiving cavity.

[0008] The main conveyor line is configured to convey the sheet along a first direction;

[0009] The conveying mechanism connects to the main conveyor line and two sheet-shifting mechanisms, and is configured to move sheets between the main conveyor line and the two sheet-shifting mechanisms;

[0010] The piece-shifting mechanism connects to the flower baskets on the conveying mechanism and the flower basket lifting mechanism. The piece-shifting mechanism is configured to transfer the pieces between the receiving chamber of the conveying mechanism and the corresponding flower basket.

[0011] The sheet transfer device proposed in this application has two sheet transfer mechanisms, each of which is connected to one receiving cavity of the basket. In the past, sheets were fed into or taken out of the corresponding receiving cavity. This allows for the simultaneous receiving or taking out of the two receiving cavities of the basket, thereby improving the sheet transfer efficiency.

[0012] Optionally, two reversing positions are provided along the first direction on the main conveyor line, and each reversing position is equipped with a conveying mechanism. Each conveying mechanism corresponds to a piece-shifting mechanism, and the two conveying mechanisms are configured to simultaneously move the piece between the main conveyor line and the two piece-shifting mechanisms.

[0013] By setting two reversing positions on the main conveyor line, each with a conveying mechanism, the two conveying mechanisms simultaneously transfer the wafers between the main conveyor line and the two wafer-shifting mechanisms, further improving the wafer transfer efficiency.

[0014] Optionally, at least one transfer mechanism is provided on both sides of the main conveyor line. The main conveyor line includes a first conveyor line and a second conveyor line arranged in parallel. The first conveyor line and the second conveyor line are configured to simultaneously convey the sheet along a first direction.

[0015] The transfer mechanisms on both sides of the main conveyor line correspond to the first conveyor line and the second conveyor line, respectively. While the transfer mechanism on one side transfers the sheet between the first conveyor line and the corresponding two sheet transfer mechanisms, the transfer mechanism on the other side transfers the sheet between the second conveyor line and the corresponding two sheet transfer mechanisms.

[0016] By setting the main conveyor line to include a first conveyor line and a second conveyor line, and setting transfer mechanisms on both sides of the main conveyor line, the transfer mechanism on one side transfers the sheet between the conveyor mechanism and the corresponding two sheet transfer mechanisms, while the conveyor mechanism on the other side transfers the sheet between the second conveyor line and the corresponding two sheet transfer mechanisms, thereby improving the sheet transfer efficiency.

[0017] Optionally, two transfer mechanisms are provided on both sides of the main conveyor line. The two transfer mechanisms on one side of the first conveyor line alternately connect with the first conveyor line to transfer the sheet body, and the two transfer mechanisms on one side of the second conveyor line alternately connect with the second conveyor line to transfer the sheet body.

[0018] By setting two transfer mechanisms on both sides of the main conveyor line, the two transfer mechanisms on the same side alternately connect with the first or second conveyor line to transfer the sheet, realizing the uninterrupted transfer of the sheet on both sides of the main conveyor line, meeting the requirements of fast-paced operation, and helping to improve the transfer efficiency of the sheet.

[0019] Optionally, the transfer mechanism also includes two layers of buffer lines, which are connected to the flower basket lifting mechanism. The two layers of buffer lines and the flower basket lifting mechanism work together to transfer full or empty flower baskets.

[0020] By setting up two layers of buffer lines, which are connected to the flower basket lifting mechanism, the automatic transfer of full and empty flower baskets is realized, improving the transfer efficiency of the sheet.

[0021] Optionally, the conveying mechanism includes a mounting frame and at least one conveying unit. The conveying direction of the conveying unit is along a second direction. The conveying unit is mounted on the mounting frame. The conveying unit includes a first conveying frame, a first conveyor belt, a first drive member, and a first adsorption assembly. The first conveyor belt is rotatably mounted on the first conveyor frame. The first drive member is mounted on the first conveyor frame. The first adsorption assembly is mounted on the first conveyor frame. The adsorption surface of the first adsorption assembly is higher than the conveying surface of the first conveyor belt. The first adsorption assembly is configured to non-contactly adsorb the sheet on the main conveyor line or the sheet transfer mechanism and adsorb the sheet on the conveying surface of the first conveyor belt. The first drive member is configured to drive the first conveyor belt to rotate so as to move the sheet on the conveying surface of the first conveyor belt along the second direction to the corresponding sheet transfer mechanism or the main conveyor line.

[0022] By setting up a conveying unit, the sheet can be moved between the sheet transfer mechanism and the main conveyor line. The conveying unit uses the first conveyor belt to adsorb the sheet and transport the sheet through the first conveyor belt, which reduces the probability of damage to the sheet during transportation, and has high transportation efficiency and high transportation accuracy.

[0023] Optionally, the sheet-shifting mechanism includes a base, a fixed conveyor frame, a movable conveyor frame, a second conveyor belt, a second drive member, and a third drive member. The fixed conveyor frame is fixed on the base, and the movable conveyor frame can be installed on the base along a first direction, approaching or moving away from the basket lifting mechanism. The fixed end of the third drive member is installed on the base, and the drive end of the third drive member is connected to the movable conveyor frame. The second conveyor belt is rotatably and telescopically installed on the fixed conveyor frame and the movable conveyor frame. The conveying direction of the second conveyor belt is along the first direction. The second drive member is configured to drive the second conveyor belt to rotate, and the second conveyor belt is configured to receive and convey the sheet.

[0024] The third drive unit is configured to drive the movable conveyor frame to move along the first direction toward the flower basket lifting mechanism, so as to drive the second conveyor belt to extend and send the pieces on the second conveyor belt into the flower basket of the flower basket lifting mechanism or to receive the pieces in the receiving cavity of the flower basket of the flower basket lifting mechanism.

[0025] By driving the movable conveyor frame to reciprocate along the first direction relative to the flower basket lifting mechanism, and cooperating with the second conveyor belt, the sheet is fed into the flower basket of the flower basket lifting mechanism, completing the sheet collection action of neatly loading the sheet into the flower basket, and also realizing the receiving of the sheet in the receiving cavity of the flower basket of the flower basket lifting mechanism, and conveying the received sheet to the conveying mechanism, completing the sheet removal action of taking the sheet out of the flower basket.

[0026] Optionally, a buffer mechanism is provided on the moving path of the second conveyor belt along the first direction. The buffer mechanism is configured to temporarily store the sheet conveyed on the second conveyor belt, and the buffer mechanism is also configured to release the temporarily stored sheet onto the second conveyor belt.

[0027] The cache mechanism includes a first lifting drive and a cache rack, wherein:

[0028] The first lifting drive is configured to drive the buffer rack to lift, and the buffer rack includes multiple memory card slots arranged along the height direction;

[0029] The first lifting drive unit controls the buffer rack to rise to a preset height each time, so that one of the empty chip slots is flush with the conveying surface of the second conveyor belt, so as to store the chips on the second conveyor belt in the corresponding chip slot.

[0030] The first lifting drive unit controls the buffer rack to descend a preset height each time, so that the bottommost piece temporarily stored in the buffer rack overlaps the conveyor surface of the second conveyor belt, thereby releasing the bottommost piece onto the second conveyor belt.

[0031] By setting a buffer mechanism on the moving path of the second conveyor belt, when a fault occurs in the sheet being transferred on the second conveyor belt, the sheet can be temporarily stored in time, and then released onto the second conveyor belt after the fault is cleared.

[0032] Optionally, a sensor is provided at the opening of the flower basket. The sensor is configured to detect whether the sheet on the second conveyor belt has been delivered to a preset position in the flower basket. If the sheet does not reach the preset position in the flower basket, it indicates a sheet receiving failure. The sensor is also configured to send a sensing signal to the control unit when it detects that the sheet on the second conveyor belt has not been delivered to the preset position in the flower basket. The control unit is configured to control the buffer mechanism to temporarily store the subsequent sheet on the second conveyor belt after receiving the sensing signal.

[0033] By setting a sensor at the opening of the flower basket, the automatic detection of whether the piece has entered the preset position in the flower basket is realized, thereby controlling the operation of the buffer mechanism.

[0034] Optionally, the chip shifting mechanism further includes a first straightening component and a second straightening component. The first straightening component is configured to perform initial straightening of the chip body in the front of the cache mechanism, and the second straightening component is configured to perform secondary straightening of the chip body before it is fed into the basket.

[0035] The first regularization component enables the initial regularization of the chip body in the front of the cache mechanism, and the second regularization component enables the secondary regularization of the chip body before it enters the basket, thereby ensuring the accuracy of the chip body transfer mechanism.

[0036] Optionally, an adsorption component is provided at one end of the second conveyor belt near the flower basket lifting mechanism. The adsorption surface of the adsorption component is lower than the conveying surface of the second conveyor belt. The adsorption component is configured to adsorb the sheet on the second conveyor belt in a non-contact manner and fix the sheet on the conveying surface of the second conveyor belt.

[0037] By installing an adsorption component at one end of the second conveyor belt near the flower basket lifting mechanism, the adsorption component allows the sheet to adhere to the second conveyor belt. When the second conveyor belt stops rotating after inserting the sheet, the sheet also stops immediately, preventing the sheet from slipping on the second conveyor belt, ensuring the neatness of the sheets inside the flower basket, and preventing the sheet from slipping and hitting the flower basket, thus avoiding damage. Attached Figure Description

[0038] Figure 1 This is a three-dimensional structural schematic diagram of the sheet transfer device provided in the embodiments of this application;

[0039] Figure 2 This is a top view of the main conveyor line and the wafer transfer mechanism of the wafer transfer device provided in the embodiments of this application;

[0040] Figure 3 This is a three-dimensional structural schematic diagram of the conveying mechanism of the sheet transfer device provided in the embodiments of this application;

[0041] Figure 4 This is a three-dimensional structural diagram of the sheet-transfer mechanism and the basket lifting mechanism of the sheet-transfer device provided in the embodiments of this application;

[0042] Figure 5 This is a three-dimensional structural schematic diagram of the wafer transfer mechanism of the wafer transfer device provided in the embodiments of this application;

[0043] Figure 6 This is a three-dimensional structural diagram of the cache mechanism of the chip transfer device provided in the embodiments of this application.

[0044] Figures 1 to 6 The following reference numerals are included:

[0045] Main conveyor line 10: reversing position 11, first conveyor line 12, second conveyor line 13;

[0046] Transfer mechanism 20: conveying mechanism 21, mounting frame 210, first conveying frame 211, first conveyor belt 212, first driving component 213, first adsorption assembly 214, piece shifting mechanism 22, base 220, fixed conveying frame 221, movable conveying frame 222, second conveyor belt 223, second driving component 224, third driving component 225, first alignment assembly 226, second alignment assembly 227, adsorption assembly 228, flower basket lifting mechanism 23, second lifting driving component 230, lifting seat 231, positioning mechanism 232, buffer line 24;

[0047] Flower basket 30: Material receiving chamber 31;

[0048] 40 pieces;

[0049] Cache mechanism 50: First lifting drive component 51, cache rack 52, memory chip slot 53;

[0050] Sensor 60. Detailed Implementation

[0051] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0052] In the processing of wafers (such as silicon wafers and solar cells), baskets are usually used to store the wafers. Baskets can be divided into full-wafer baskets and half-wafer baskets. A full-wafer basket has one storage cavity, which is used to store a row of full wafers. A half-wafer basket has two storage cavities, which are used to store a row of half wafers respectively.

[0053] Currently, when using a half-flower basket to collect or remove half-flower pieces, because the half-flower basket has two storage cavities, it is necessary to first collect or remove the pieces from one of the storage cavities. After that storage cavity is filled or removed, the basket is moved laterally a preset distance by a basket moving device before the other storage cavity is filled or removed. This method has the disadvantage of low work efficiency.

[0054] Therefore, this application provides a sheet transfer device; please refer to [link to relevant documentation]. Figure 1As shown, the sheet transfer device provided in this application embodiment includes a main conveyor line 10 and at least one set of transfer mechanisms 20. The transfer mechanism 20 is disposed on the side of the main conveyor line 10 and includes at least one conveying mechanism 21, two sheet transfer mechanisms 22, and a basket lifting mechanism 23. The sheet transfer mechanisms 22 are arranged parallel to the main conveyor line 10. The basket lifting mechanism 23 carries a basket 30 and is configured to drive the basket 30 to lift. The basket 30 has two receiving cavities 31, each receiving cavity 31 is configured to store a row of sheets 40. The opening of the basket 30 is connected to the two sheet transfer mechanisms 22, and each sheet transfer mechanism 22 corresponds to one receiving cavity 31. The main conveyor line 10 is configured to run along a first direction ( Figure 1 The conveyor 40 is transported in the X direction; the conveyor mechanism 21 connects to the main conveyor line 10 and two transfer mechanisms 22, and the conveyor mechanism 21 is configured to transfer the sheet 40 between the main conveyor line 10 and the two transfer mechanisms 22; the transfer mechanism 22 connects to the conveyor mechanism 21 and the basket 30 on the basket lifting mechanism 23, and the transfer mechanism 22 is configured to transfer the sheet 40 between the conveyor mechanism 21 and the receiving cavity 31 of the corresponding basket 30.

[0055] It should be noted that the sheet transfer device provided in this application embodiment is applicable to the following two application scenarios:

[0056] In the first scenario, the sheet 40 conveyed by the main conveyor line 10 is collected: In the initial state, the flower basket 30 carried on the flower basket lifting mechanism 23 is an empty flower basket. The conveying mechanism 21 picks up the sheet conveyed on the main conveyor line 10 and conveys the picked-up sheet 40 to the two sheet transfer mechanisms 22. The two sheet transfer mechanisms 22 receive the sheet 40 conveyed by the conveying mechanism 21 and send the received sheet 40 into the receiving cavity 31 of the corresponding flower basket 30.

[0057] In the second scenario, the flower basket 30 carried by the flower basket lifting mechanism 23 is picked up: In the initial state, the flower basket 30 carried by the flower basket lifting mechanism 23 is full. The two piece-moving mechanisms 22 respectively receive the pieces 40 in the receiving chamber 31 of the corresponding flower basket 30 and transport the received pieces 40 to the preset position. The conveying mechanism 21 picks up the pieces 40 at the preset position on the two piece-moving mechanisms 22 and transports the picked-up pieces 40 to the main conveying line 10. The main conveying line 10 receives the pieces 40 transported by the conveying mechanism 21 and transports the received pieces 40 to the next process.

[0058] As can be seen, the transfer mechanism 20 of the sheet transfer device proposed in this application sets up two sheet transfer mechanisms 22, each of which is connected to one receiving cavity 31 of the basket 30. In the past, sheets were sent into or taken out of the corresponding receiving cavity 31, thereby realizing the simultaneous receiving or taking out of the two receiving cavities 31 of the basket 30, which improves the transfer efficiency of the sheet 40.

[0059] In one implementation, two reversing positions 11 are provided on the main conveyor line 10 along the first direction. Each reversing position 11 is equipped with a conveying mechanism 21. Each conveying mechanism 21 corresponds to a piece-shifting mechanism 22. The two conveying mechanisms 21 are configured to simultaneously move the piece 40 between the main conveyor line 10 and the two piece-shifting mechanisms 22.

[0060] It can be seen that by setting two reversing positions 11 on the main conveyor line 10, and each reversing position 11 is equipped with a conveying mechanism 21, the two conveying mechanisms 21 simultaneously move the sheet 40 between the main conveyor line 10 and the two sheet-moving mechanisms 22, which further improves the transfer efficiency of the sheet 40.

[0061] Please see Figure 1 and Figure 2 As shown, in one embodiment, at least one transfer mechanism 20 is provided on both sides of the main conveyor line 10. The main conveyor line 10 includes a first conveyor line 12 and a second conveyor line 13 arranged in parallel. The first conveyor line 12 and the second conveyor line 13 are configured to simultaneously convey sheet 40 along a first direction. The transfer mechanisms 20 on both sides of the main conveyor line 10 correspond to the first conveyor line 12 and the second conveyor line 13, respectively. While the conveying mechanism 21 of one transfer mechanism 20 transfers sheet 40 between the first conveyor line 12 and the corresponding two sheet transfer mechanisms 22, the conveying mechanism 21 of the other transfer mechanism 20 transfers sheet 40 between the second conveyor line 13 and the corresponding two sheet transfer mechanisms 22.

[0062] As can be seen, by setting the main conveyor line 10 to include a first conveyor line 12 and a second conveyor line 13, and setting transfer mechanisms 20 on both sides of the main conveyor line 10, it is possible to transfer the sheet 40 between the conveying mechanism 21 of one side of the transfer mechanism 20 and the corresponding two sheet transfer mechanisms 22, while the conveying mechanism 21 of the transfer mechanism 20 on the other side transfers the sheet 40 between the second conveyor line 13 and the corresponding two sheet transfer mechanisms 22, thereby improving the transfer efficiency of the sheet 40.

[0063] In one embodiment, two transfer mechanisms 20 are provided on both sides of the main conveyor line 10. The two transfer mechanisms 21 located on one side of the first conveyor line 12 alternately connect with the first conveyor line 12 to transfer the sheet body 40, and the two transfer mechanisms 20 located on one side of the second conveyor line 13 alternately connect with the second conveyor line 13 to transfer the sheet body 40.

[0064] As can be seen, by setting two transfer mechanisms 20 on both sides of the main conveyor line 10, and having the two transfer mechanisms 20 on the same side alternately dock with the first conveyor line 12 or the second conveyor line 13 to transfer the sheet 40, the sheet 40 can be transferred continuously on both sides of the main conveyor line 10, which meets the requirements of fast-paced operation and is conducive to improving the transfer efficiency of the sheet 40.

[0065] Please see Figure 1 As shown, in one embodiment, the transfer mechanism 20 also includes two layers of buffer lines 24, which are connected to the flower basket lifting mechanism 23. The two layers of buffer lines 24 and the flower basket lifting mechanism 23 work together to transfer full or empty flower baskets 30.

[0066] Specifically, one of the two buffer lines 24 works in conjunction with the flower basket lifting mechanism 23 to transfer the full flower basket 30; the other buffer line 24 works in conjunction with the flower basket lifting mechanism 23 to transfer the empty flower basket 30.

[0067] It can be seen that by setting two layers of buffer lines 24 and connecting the two layers of buffer lines 24 with the flower basket lifting mechanism 23, the automatic flow of full and empty flower baskets 30 is realized, which improves the transfer efficiency of the sheet 40.

[0068] Please see Figure 1 and Figure 3 As shown, in one embodiment, the conveying mechanism 21 includes a mounting frame 210 and at least one conveying unit, the conveying direction of which is along a second direction ( Figure 1 (in the Y direction), the conveying unit is mounted on the mounting frame 210. The conveying unit includes a first conveying frame 211, a first conveyor belt 212, a first driving member 213, and a first adsorption assembly 214. The first conveyor belt 212 is rotatably mounted on the first conveyor frame 211. The first driving member 213 is mounted on the first conveyor frame 211. The first adsorption assembly 214 is mounted on the first conveyor frame 211. The adsorption surface of the first adsorption assembly 214 is higher than the conveying surface of the first conveyor belt 212. The first adsorption assembly 214 is configured to non-contactly adsorb the sheet 40 on the main conveyor line 10 or the sheet transfer mechanism 22, and adsorb the sheet 40 on the conveying surface of the first conveyor belt 212. The first driving member 213 is configured to drive the first conveyor belt 212 to rotate, so as to move the sheet 40 on the conveying surface of the first conveyor belt 212 along the second direction to the corresponding sheet transfer mechanism 22 or the main conveyor line 10.

[0069] Specifically, the first adsorption component 214 includes an adsorption block based on Bernoulli's principle, the first conveyor belt 212 includes two parallel and spaced conveyor belts, the adsorption block is installed on the side of the conveyor belt, and the adsorption surface of the adsorption block extends along the second direction.

[0070] Specifically, the first driving component 213 includes a motor, a driving wheel, and several driven wheels. The conveyor belt is mounted on the driving wheel and several driven wheels. The motor drives the driving wheel to rotate, thereby driving the conveyor belt to rotate.

[0071] As can be seen, by setting up a conveying unit, the sheet 40 is moved between the sheet transfer mechanism 22 and the main conveyor line 10. The conveying unit uses non-contact adsorption of the sheet onto the first conveyor belt 212 and conveys the sheet through the first conveyor belt 212, which reduces the probability of damage to the sheet during conveying, and has high conveying efficiency and high conveying accuracy.

[0072] Please see Figure 1 and Figure 5 As shown, in one embodiment, the piece-shifting mechanism 22 includes a base 220, a fixed conveyor frame 221, a movable conveyor frame 222, a second conveyor belt 223, a second drive member 224, and a third drive member 225. The fixed conveyor frame 221 is fixed on the base 220. The movable conveyor frame 222 is mounted on the base 220 in a first direction, moving closer to or further away from the basket lifting mechanism 23. The fixed end of the third drive member 225 is mounted on the base 220, and the drive end of the third drive member 225 is connected to the movable conveyor frame 222. The second conveyor belt 223 is rotatably and telescopically mounted on the fixed conveyor frame 221. On the conveying frame 221 and the movable conveying frame 222, the conveying direction of the second conveyor belt 223 is along the first direction. The second driving member 224 is configured to drive the second conveyor belt 223 to rotate. The second conveyor belt 223 is configured to receive and convey the sheet 40. The third driving member 225 is configured to drive the movable conveying frame 222 to move along the first direction close to the flower basket lifting mechanism 23, so as to drive the second conveyor belt 223 to extend and send the sheet 40 on the second conveyor belt 223 into the flower basket 30 of the flower basket lifting mechanism 23 or to receive the sheet in the receiving cavity 31 of the flower basket 30 of the flower basket lifting mechanism 23.

[0073] Specifically, the third drive component 225 is a cylinder, the second conveyor belt 223 includes two parallel and spaced conveyor belts, and the second drive component 224 includes a motor, a drive wheel and several driven wheels. The conveyor belt is fitted onto the drive belt and several driven wheels. The motor drives the drive wheel to rotate, thereby driving the conveyor belt to rotate.

[0074] As can be seen, by driving the movable conveyor frame 222 to move back and forth relative to the flower basket lifting mechanism 23 in the first direction, and cooperating with the second conveyor belt 223, the sheet 40 is sent into the flower basket 30 of the flower basket lifting mechanism 23, completing the sheet collection action of neatly loading the sheet 40 into the flower basket 30, and receiving the sheet 40 in the receiving cavity 31 of the flower basket 30 of the flower basket lifting mechanism 23, and conveying the received sheet 40 to the conveying mechanism 21, completing the sheet removal action of taking the sheet 40 out of the flower basket 30.

[0075] Please see Figure 1 , Figure 4 and Figure 6As shown, in one embodiment, a buffer mechanism 50 is provided on the moving path of the second conveyor belt 223 along the first direction. The buffer mechanism 50 is configured to temporarily store the sheet 40 conveyed on the second conveyor belt 223, and is also configured to release the temporarily stored sheet 40 onto the second conveyor belt 223. The buffer mechanism 50 includes a first lifting drive 51 and a buffer frame 52. The first lifting drive 51 is configured to drive the buffer frame 52 to lift. The buffer frame 52 includes a plurality of sheet storage slots 52 arranged along the height direction. 3; The first lifting drive unit 51 controls the buffer rack 52 to rise a preset height each time, so that one of the empty chip slots 53 is flush with the conveying surface of the second conveyor belt 223, so as to store the chip 40 on the second conveyor belt 223 in the corresponding chip slot 53; The first lifting drive unit 51 controls the buffer rack 52 to fall a preset height each time, so that the bottom chip 40 temporarily stored in the buffer rack 52 overlaps the conveying surface of the second conveyor belt 223, so as to release the bottom chip 40 onto the second conveyor belt 223.

[0076] Specifically, the first lifting drive component 51 adopts a vertically arranged linear module.

[0077] It can be seen that by setting a buffer mechanism 50 on the moving path of the second conveyor belt 223, when a fault occurs in the transfer of the sheet 40 from the second conveyor belt 223 to the basket 30, the sheet 40 on the second conveyor belt 223 can be temporarily stored in time, and the sheet 40 can be released onto the second conveyor belt 223 after the fault is eliminated.

[0078] In one embodiment, a sensor 60 is provided at the opening of the flower basket 30. The sensor 60 is configured to detect whether the sheet 40 on the second conveyor belt 223 has been fed into a preset position in the flower basket 30. The sensor 60 is also configured to send a sensing signal to the control unit when it detects that the sheet 40 on the second conveyor belt 223 has not been fed into the preset position in the flower basket 30. The control unit is configured to control the buffer mechanism 50 to temporarily store subsequent sheets 40 on the second conveyor belt 223 after receiving the sensing signal.

[0079] When the sensor 60 detects that the insert piece 40 on the second conveyor belt 223 has not been delivered to the preset position of the flower basket 30, it indicates a malfunction. At this time, the buffer mechanism 50 is activated to temporarily store the subsequent pieces 40 conveyed from the second conveyor belt 223. The abnormal pieces 40 that are not inserted in place are removed from the flower basket 30 by manual labor or robots. After that, the buffer mechanism 50 releases one or more pieces 40 onto the second conveyor belt 223 and performs normal piece 40 conveying and insertion operations.

[0080] Specifically, the sensing element 60 can be either a contact sensor or a non-contact sensor.

[0081] It can be seen that by setting a sensor 60 at the opening of the flower basket 30, the automatic detection of whether the piece 40 has entered the preset position in the flower basket 30 is realized, thereby controlling the operation of the buffer mechanism 50.

[0082] In one implementation, the wafer transfer mechanism 22 further includes a first straightening component 226 and a second straightening component 227. The first straightening component 226 is configured to perform initial straightening on the wafer body 40 in the front of the buffer mechanism 50, and the second straightening component 226 is configured to perform secondary straightening on the wafer body 40 before the wafer body 40 is fed into the basket 30.

[0083] Specifically, the first straightening component 226 includes two straightening belts arranged in parallel and spaced apart, which straighten the sheet 40 passing through the first straightening component 226; the second straightening component 227 includes two straightening strips arranged in parallel and spaced apart, which straighten the sheet 40 passing through the second straightening component 227.

[0084] As can be seen, the first straightening component 226 performs the initial straightening of the chip body 40 in front of the cache mechanism 50 to ensure that the chip body 40 enters the cache mechanism 50 smoothly; the second straightening component 227 performs the secondary straightening of the chip body 40 before it enters the basket 30 to ensure that the chip body 40 enters the basket 30 smoothly and avoid damage to the chip body 40.

[0085] In one embodiment, an adsorption component 228 is provided at one end of the second conveyor belt 223 near the flower basket lifting mechanism 23. The adsorption surface of the adsorption component 228 is lower than the conveying surface of the second conveyor belt 223. The adsorption component 228 is configured to adsorb the sheet 40 on the second conveyor belt 223 in a non-contact manner and fix the sheet 40 on the conveying surface of the second conveyor belt 223.

[0086] Specifically, the adsorption component 228 uses an adsorption block based on Bernoulli's principle.

[0087] As can be seen, by setting an adsorption component 228 on one end of the second conveyor belt 223 near the flower basket lifting mechanism 23, the adsorption component 228 allows the sheet 40 to be adsorbed onto the second conveyor belt 223. When the second conveyor belt 223 stops rotating after inserting the sheet, the sheet 40 can also stop immediately, preventing the sheet 40 from slipping on the second conveyor belt 223, ensuring the neatness of the sheet 40 inside the flower basket 30, and preventing the sheet 40 from slipping and hitting the flower basket, thus avoiding damage.

[0088] In one embodiment, the flower basket lifting mechanism 23 includes a second lifting drive 230, a lifting seat 231, and a positioning mechanism 232. The driving end of the second lifting drive 230 is connected to the lifting seat 231. The second lifting drive 230 is configured to drive the lifting seat 231 to rise or fall a preset height each time. The lifting seat 231 is configured to carry the flower basket 30. The positioning mechanism 232 is configured to fix the flower basket 30 on the lifting seat 231 or to release the flower basket 30 from the lifting seat 231. The second lifting drive 230 drives the lifting seat 231 to rise or fall a preset height each time, so that an empty slot in the flower basket 30 is flush with the conveying surface of the piece-shifting mechanism 22, so that the piece-shifting mechanism 22 inserts the piece 40 into the slot of the flower basket 30. Alternatively, the second lifting drive 230 drives the lifting seat 231 to fall a preset height each time, so that the bottom piece 40 in the flower basket 30 overlaps the conveying surface of the piece-shifting mechanism 22, so that the bottom piece 40 is removed from the flower basket 30.

[0089] Specifically, the second lifting drive component 230 adopts a vertically arranged linear module.

[0090] Specifically, the positioning mechanism 232 includes a cylinder and a pressing plate. The driving end of the cylinder is connected to the pressing plate. The cylinder is configured to drive the pressing plate to rise and fall. During positioning, the cylinder drives the pressing plate to fall, so that the pressing plate presses and fixes the basket 30 on the lifting seat 231.

[0091] As can be seen, by cooperating with the lifting seat 231 of the second lifting drive component 230, the lifting of the flower basket 30 on the lifting seat 231 is realized, and then cooperates with the piece-moving mechanism 22 to carry out piece collection and piece removal, providing a flower basket lifting mechanism 23 with simple structure, low cost and stable and reliable operation.

[0092] The sheet transfer device proposed in this application has the following advantages:

[0093] 1) It enables simultaneous receiving or picking of pieces in both receiving cavities of the flower basket, improving the transfer efficiency of the pieces;

[0094] 2) The main conveyor line includes a first conveyor line and a second conveyor line, which realizes that the conveyor mechanism of the transfer mechanism on both sides can transfer the sheet body between the corresponding two sheet transfer mechanisms at the same time, which further improves the transfer efficiency of the sheet body;

[0095] 3) It can automatically rotate between full and empty flower baskets;

[0096] 4) A buffer mechanism is provided on the moving path of the second conveyor belt, which realizes the temporary storage of the wafers on the second conveyor belt and the release of the temporarily stored wafers onto the second conveyor belt in the event of a wafer insertion failure.

[0097] 5) The slices are calibrated twice before being placed into the basket to ensure the accuracy of the slice transfer mechanism.

[0098] 6) An adsorption component is provided at one end of the second conveyor belt near the flower basket lifting mechanism, which fixes the position of the piece relative to the second conveyor belt when the piece is inserted into the second conveyor belt, ensuring the neatness of the pieces in the flower basket, and preventing the pieces from slipping and hitting the flower basket and causing damage.

[0099] The above embodiments merely illustrate the basic principles and characteristics of this application. This application is not limited to the above examples. Various changes and modifications can be made to this application without departing from the spirit and scope thereof, and all such changes and modifications fall within the scope of this application as claimed. The scope of protection of this application is defined by the appended claims and their equivalents.

Claims

1. A sheet transfer device, characterized in that, The sheet transfer device includes a main conveyor line and at least one transfer mechanism, wherein: The transfer mechanism is located on the side of the main conveyor line. The transfer mechanism includes at least one conveying mechanism, two piece-shifting mechanisms, and a basket lifting mechanism. The piece-shifting mechanisms are arranged parallel to the main conveyor line. The basket lifting mechanism carries a basket and is configured to lift the basket. The basket has two receiving cavities, each of which is configured to store a row of pieces. The opening of the basket is connected to the two piece-shifting mechanisms, and each piece-shifting mechanism corresponds to one receiving cavity. The main conveyor line is configured to convey the sheet along a first direction; The conveying mechanism interfaces with the main conveying line and the two sheet-shifting mechanisms, and the conveying mechanism is configured to move sheet bodies between the main conveying line and the two sheet-shifting mechanisms; The piece-shifting mechanism connects to the flower baskets on the conveying mechanism and the flower basket lifting mechanism, and the piece-shifting mechanism is configured to transfer the piece between the receiving cavity of the conveying mechanism and the corresponding flower basket.

2. The sheet transfer device according to claim 1, characterized in that, Two reversing positions are provided along the first direction on the main conveyor line. Each reversing position is equipped with a conveying mechanism. Each conveying mechanism corresponds to one sheet-shifting mechanism. The two conveying mechanisms are configured to simultaneously move the sheet between the main conveyor line and the two sheet-shifting mechanisms.

3. The sheet transfer device according to claim 2, characterized in that, At least one of the transfer mechanisms is provided on both sides of the main conveyor line. The main conveyor line includes a first conveyor line and a second conveyor line arranged in parallel. The first conveyor line and the second conveyor line are configured to simultaneously convey the sheet along a first direction. The transfer mechanisms on both sides of the main conveyor line correspond to the first conveyor line and the second conveyor line, respectively. While the conveying mechanism of the transfer mechanism on one side transfers the sheet between the first conveyor line and the corresponding two sheet transfer mechanisms, the conveying mechanism of the transfer mechanism on the other side transfers the sheet between the second conveyor line and the corresponding two sheet transfer mechanisms.

4. The sheet transfer device according to claim 3, characterized in that, Two transfer mechanisms are provided on both sides of the main conveyor line. The two transfer mechanisms on one side of the first conveyor line alternately connect with the first conveyor line to transfer the sheet, and the two transfer mechanisms on one side of the second conveyor line alternately connect with the second conveyor line to transfer the sheet.

5. The sheet transfer device according to claim 1, characterized in that, The transfer mechanism also includes two layers of buffer lines, which are connected to the flower basket lifting mechanism. The two layers of buffer lines and the flower basket lifting mechanism work together to transfer full or empty flower baskets.

6. The sheet transfer device according to claim 1, characterized in that, The conveying mechanism includes a mounting frame and at least one conveying unit. The conveying direction of the conveying unit is along a second direction. The conveying unit is mounted on the mounting frame. The conveying unit includes a first conveying frame, a first conveyor belt, a first driving member, and a first adsorption assembly. The first conveyor belt is rotatably mounted on the first conveyor frame. The first driving member is mounted on the first conveyor frame. The first adsorption assembly is mounted on the first conveyor frame. The adsorption surface of the first adsorption assembly is higher than the conveying surface of the first conveyor belt. The first adsorption assembly is configured to non-contactly adsorb the sheet on the main conveyor line or the sheet transfer mechanism and adsorb the sheet onto the conveying surface of the first conveyor belt. The first driving member is configured to drive the first conveyor belt to rotate so as to move the sheet on the conveying surface of the first conveyor belt along the second direction to the corresponding sheet transfer mechanism or the main conveyor line.

7. The sheet transfer device according to claim 1, characterized in that, The sheet-moving mechanism includes a base, a fixed conveyor frame, a movable conveyor frame, a second conveyor belt, a second drive member, and a third drive member. The fixed conveyor frame is fixed on the base. The movable conveyor frame is mounted on the base, which can be close to or away from the basket lifting mechanism along the first direction. The fixed end of the third drive member is mounted on the base, and the drive end of the third drive member is connected to the movable conveyor frame. The second conveyor belt is rotatably and telescopically mounted on the fixed conveyor frame and the movable conveyor frame. The conveying direction of the second conveyor belt is along the first direction. The second drive member is configured to drive the second conveyor belt to rotate. The second conveyor belt is configured to receive and convey the sheet. The third driving component is configured to drive the movable conveyor frame to move closer to the flower basket lifting mechanism along the first direction, so as to drive the second conveyor belt to extend and send the sheet on the second conveyor belt into the flower basket of the flower basket lifting mechanism or to receive the sheet in the receiving cavity of the flower basket of the flower basket lifting mechanism.

8. The sheet transfer device according to claim 7, characterized in that, A buffer mechanism is provided on the movement path of the second conveyor belt along the first direction. The buffer mechanism is configured to temporarily store the sheet conveyed on the second conveyor belt, and the buffer mechanism is also configured to release the temporarily stored sheet onto the second conveyor belt. The buffer mechanism includes a first lifting drive and a buffer rack, wherein: The first lifting drive is configured to drive the buffer rack to lift and lower, the buffer rack including a plurality of memory card slots arranged along the height direction; The first lifting drive unit controls the buffer rack to rise a preset height each time, so that one of the empty chip slots is flush with the conveying surface of the second conveyor belt, so as to store the chips on the second conveyor belt in the corresponding chip slot. The first lifting drive unit controls the buffer rack to descend a preset height each time, so that the bottommost piece temporarily stored in the buffer rack overlaps the conveying surface of the second conveyor belt, thereby releasing the bottommost piece onto the second conveyor belt.

9. The sheet transfer device according to claim 8, characterized in that, A sensor is provided at the opening of the flower basket. The sensor is configured to detect whether the sheet on the second conveyor belt has been fed into a preset position in the flower basket. The sensor is also configured to send a sensing signal to the control component when it detects that the sheet on the second conveyor belt has not been fed into the preset position in the flower basket. The control component is configured to control the buffer mechanism to temporarily store the subsequent sheet on the second conveyor belt after receiving the sensing signal.

10. The sheet transfer apparatus according to claim 8, characterized in that, The wafer transfer mechanism further includes a first straightening component and a second straightening component. The first straightening component is configured to perform initial straightening on the wafer in front of the buffer mechanism, and the second straightening component is configured to perform secondary straightening on the wafer before it is fed into the basket.

11. The sheet transfer device according to claim 7, characterized in that, An adsorption component is provided on one end of the second conveyor belt near the lifting mechanism of the flower basket. The adsorption surface of the adsorption component is lower than the conveying surface of the second conveyor belt. The adsorption component is configured to adsorb the sheet on the second conveyor belt in a non-contact manner and fix the sheet on the conveying surface of the second conveyor belt.

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